• Title/Summary/Keyword: $SiN_{x}$

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Dry Etching Characteristics of Zinc Oxide Thin Films in Cl2-Based Plasma

  • Woo, Jong-Chang;Ha, Tae-Kyung;Li, Chen;Kim, Seung-Han;Park, Jung-Soo;Heo, Kyung-Mu;Kim, Chang-Il
    • Transactions on Electrical and Electronic Materials
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    • v.12 no.2
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    • pp.60-63
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    • 2011
  • We investigated the etching characteristics of zinc oxide (ZnO) and the effect of additive gases in a $Cl_2$-based inductively coupled plasma. The inert gases were argon, nitrogen, and helium. The maximum etch rates were 44.3, 39.9, and 37.9 nm/min for $Cl_2$(75%)/Ar(25%), $Cl_2$(50%)/$N_2$(50%), and $Cl_2$(75%)/He(25%) gas mixtures, 600 W radiofrequency power, 150 W bias power, and 2 Pa process pressure. We obtained the maximum etch rate by a combination of chemical reaction and physical bombardment. A volatile compound of Zn-Cl. achieved the chemical reaction on the surface of the ZnO thin films. The physical etching was performed by inert gas ion bombardment that broke the Zn-O bonds. The highly oriented (002) peak was determined on samples, and the (013) peak of $Zn_2SiO_4$ was observed in the ZnO thin film sample based on x-ray diffraction spectroscopy patterns. In addition, the sample of $Cl_2$/He chemistry showed a high full-width at half-maximum value. The root-mean-square roughness of ZnO thin films decreased to 1.33 nm from 5.88 nm at $Cl_2$(50%)/$N_2$(50%) plasma chemistry.

Comparison of the noise map using Nord2000 according to the criteria for railway vehicle classification (Nord2000의 철도차량 분류기준에 따른 소음지도 결과 비교)

  • Lim, Hyeong-Jun;Park, Jae-Sik;Ham, Jung-Hoon;Park, Sang-Kyu
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2011.04a
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    • pp.618-626
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    • 2011
  • Recent development of related technologies and efficient utilization of the entire country for the purpose of railway construction, and plans are being accelerated. the railway noise has been improved by increasing the high speed railway station, and accelerating the existing trains. Nord2000 which is an overseas noise prediction equation could not be applied directly to the domestic railway vehicles. So the specific vehicles in the Nordic countries which is a similar specification to domestic trains should be selected. Nord2000's accuracy was compared to Schall03, CRN's. Prediction of Ground impedance and Roughness class were carried out at different. In this paper, the result of selected vehicles for Nord2000 was as follows. S-1aX2 was for express trains, N-$^*2c$-3b was for Mugunghwa, S-Pass/wood was for Saemaul, N-4a was for freight trains, N-3a was for subway, the calculation time for Nord2000 took longer than others, in addition, Ground absorption was indispensable to calculate a noise map for Nord2000. As a result, CRN's prediction noise levels at Wonju-si was closest to the measurements. However, the predicted noise levels of Nord2000 was the most accurate.

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Response of Rice Yield to Nitrogen Application Rate under Variable Soil Conditions

  • Ahn Nguyen Tuan;Shin Jin Chul;Lee Byun-Woo
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.50 no.4
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    • pp.247-255
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    • 2005
  • ice yield and plant growth response to nitrogen (N) fertilizer may vary within a field, probably due to spatially variable soil conditions. An experiment designed for studying the response of rice yield to different rates of N in combination with variable soil conditions was carried out at a field where spatial variation in soil properties, plant growth, and yield across the field was documented from our previous studies for two years. The field with area of 6,600 m2 was divided into six strips running east-west so that variable soil conditions could be included in each strip. Each strip was subjected to different N application level (six levels from 0 to 165kg/ha), and schematically divided into 12 grids $(10m \times10m\;for\;each\;grid)$ for sampling and measurement of plant growth and rice grain yield. Most of plant growth parameters and rice yield showed high variations even at the same N fertilizer level due to the spatially variable soil condition. However, the maximum plant growth and yield response to N fertilizer rate that was analyzed using boundary line analysis followed the Mitcherlich equation (negative exponential function), approaching a maximum value with increasing N fertilizer rate. Assuming the obtainable maximum rice yield is constrained by a limiting soil property, the following model to predict rice grain yield was obtained: $Y=10765{1-0.4704^*EXP(-0.0117^*FN)}^*MIN(I-{clay},\;I_{om},\;I_{cec},\;I_{TN},\; I_{Si})$ where FN is N fertilizer rate (kg/ha), I is index for subscripted soil properties, and MIN is an operator for selecting the minimum value. The observed and predicted yield was well fitted to 1:1 line (Y=X) with determination coefficient of 0.564. As this result was obtained in a very limited condition and did not explain the yield variability so high, this result may not be applied to practical N management. However, this approach has potential for quantifying the grain yield response to N fertilizer rate under variable soil conditions and formulating the site-specific N prescription for the management of spatial yield variability in a field if sufficient data set is acquired for boundary line analysis.

Mineral Nutrition of the Field-Grown Rice Plant -[I] Recovery of Fertilizer Nitrogen, Phosphorus and Potassium in Relation to Nutrient Uptake, Grain and Dry Matter Yield- (포장재배(圃場栽培) 수도(水稻)의 무기영양(無機營養) -[I] 삼요소이용률(三要素利用率)과 양분흡수량(養分吸收量), 수량(收量) 및 건물생산량(乾物生産量)과(乾物生産量)의 관계(關係)-)

  • Park, Hoon
    • Applied Biological Chemistry
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    • v.16 no.2
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    • pp.99-111
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    • 1973
  • Percentage recovery or fertilizer nitrogen, phosphorus and potassium by rice plant(Oriza sativa L.) were investigated at 8, 10, 12, 14 kg/10a of N, 6 kg of $P_2O_5$ and 8 kg of $K_2O$ application level in 1967 (51 places) and 1968 (32 places). Two types of nutrient contribution for the yield, that is, P type in which phosphorus firstly increases silicate uptake and secondly silicate increases nitrogen uptake, and K type in which potassium firstly increases P uptake and secondly P increases nitrogen uptake were postulated according to the following results from the correlation analyses (linear) between percentage recovery of fertilizer nutrient and grain or dry matter yields and nutrient uptake. 1. Percentage frequency of minus or zero recovery occurrence was 4% in nitrogen, 48% in phosphorus and 38% in potassium. The frequency distribution of percentage recovery appeared as a normal distribution curve with maximum at 30 to 40 recovery class in nitrogen, but appeared as a show distribution with maximum at below zero class in phosphorus and potassium. 2. Percentage recovery (including only above zero) was 33 in N (above 10kg/10a), 27 in P, 40 in K in 1967 and 40 in N, 20 in P, 46 in Kin 1968. Mean percentage recovery of two years including zero for zero or below zero was 33 in N, 13 in P and 27 in K. 3. Standard deviation of percentage recovery was greater than percentage recovery in P and K and annual variation of CV (coefficient of variation) was greatest in P. 4. The frequency of significant correlation between percentage recovery and grain or dry matter yield was highest in N and lowest in P. Percentage recovery of nitrogen at 10 kg level has significant correlation only with percentage recovery of P in 1967 and only with that of potassium in 1968. 5. The correlation between percentage recovery and dry matter yield of all treatments showed only significant in P in 1967, and only significant in K in 1968, Negative correlation coefficients between percentage recovery and grain or dry matter yield of no or minus fertilizer plots were shown only in K in 1967 and only in P in 1968 indicating that phosphorus fertilizer gave a distinct positive role in 1967 but somewhat' negative role in 1968 while potassium fertilizer worked positively in 1968 but somewhat negatively in 1967. 6. The correlation between percentage recovery of nutrient and grain yield showed similar tendency as with dry matter yield but lower coefficients. Thus the role of nutrients was more precisely expressed through dry matter yield. 7. Percentage recovery of N very frequently had significant correlation with nitrogen uptake of nitrogen applied plot, and significant negative correlation with nitrogen uptake of minus nitrogen plot, and less frequently had significant correlation with P, K and Si uptake of nitrogen applied plot. 8. Percentage recovery of P had significant correlation with Si uptake of all treatments and with N uptake of all treatments except minus phosphorus plot in 1967 indicating that phosphorus application firstly increases Si uptake and secondly silicate increases nitrogen uptake. Percentage recovery of P also frequently had significant correlation with P or K uptake of nitrogen applied plot. 9. Percentage recovery of K had significant correlation with P uptake of all treatments, N uptake of all treatments except minus phosphorus plot, and significant negative correlation with K uptake of minus K plot and with Si uptake of no fertilizer plot or the highest N applied plot in 1968, and negative correlation coefficient with P uptake of no fertilizer or minus nutrient plot in 1967. Percentage recovery of K had higher correlation coefficients with dry matter yield or grain yield than with K uptake. The above facts suggest that K application firstly increases P uptake and secondly phosphorus increases nitrogen uptake for dry matter yied. 10. Percentage recovery of N had significant higher correlation coefficient with grain yield or dry matter yield of minus K plot than with those of minus phosphorus plot, and had higher with those of fertilizer plot than with those of minus K plot. Similar tendency was observed between N uptake and percentage recovery of N among the above treatments. Percentage recovery of K had negative correlation coefficient with grain or-dry matter yield of no fertilizer plot or minus nutrient plot. These facts reveal that phosphorus increases nitrogen uptake and when phosphorus or nitrogen is insufficient potassium competatively inhibits nitrogen uptake. 11. Percentage recovery of N, Pand K had significant negative correlation with relative dry matter yield of minus phosphorus plot (yield of minus plot x 100/yield of complete plot; in 1967 and with relative grain yield of minus K plot in 1968. These results suggest that phosphorus affects tillering or vegetative phase more while potassium affects grain formation or Reproductive phase more, and that clearly show the annual difference of P and K fertilizer effect according to the weather. 12. The correlation between percentage recovery of fertilizer and the relative yield of minus nutrient plat or that of no fertilizer plot to that of minus nutrient plot indicated that nitrogen is the most effective factor for the production even in the minus P or K plot. 13. From the above facts it could be concluded that about 40 to 50 percen of paddy fields do rot require P or K fertilizer and even in the case of need the application amount should be greatly different according to field and weather of the year, especially in phosphorus.

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Development of Packaging Technology for CdTe Multi-Energy X-ray Image Sensor (CdTe 멀티에너지 엑스선 영상센서 패키징 기술 개발)

  • Kwon, Youngman;Kim, Youngjo;Ryu, Cheolwoo;Son, Hyunhwa;Kim, Byoungwook;Kim, YoungJu;Choi, ByoungJung;Lee, YoungChoon
    • Journal of the Korean Society of Radiology
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    • v.8 no.7
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    • pp.371-376
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    • 2014
  • The process of flip-chip bump bonding, Au wire bonding and encapsulation were sucessfully developed and modularized. The CdTe sensor and ROIC were optimally jointed together at $150^{\circ}C$ and $270^{\circ}C$ respectively under24.5 N for 30s. To make SnAg bump on ROIC easy to be bonded, the higher bonding temperature was established than CdTe sensor's. In addition, the bonding pressure was lowered minimally because CdTe Sensor is easier to break than Si Sensor. CdTe multi-energy sensor module observed were no electrical failures in the joints using developed flip chip bump bonding and Au wire bonding process. As a result of measurement, shearing force was $2.45kgf/mm^2$ and, it is enough bonding force against threshold force, $2kgf/mm^2s$.

Effect of $SiN_x$ passivation film by PECVD on mono crystalline silicon (플라즈마 화학 기상 증착법을 이용하여 단결정 실리콘 상에 증착된 실리콘나이트라이드 패시베이션 박막의 효과)

  • Gong, Dae-Yeong;Ko, Ji-Soo;Jung, Sung-Wook;Choi, Byoung-Deog;Yi, Jun-Sin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.446-446
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    • 2009
  • 표면 패시베이션 기술로 이용되는 수소화된 실리콘 질화막은 제조원가의 절감을 위한 실리콘 기판재료의 두께 감소에 따른 특성상의 문제점을 해결하기 위해 중요한 영향을 미치는 요소이다. 실리콘 질화막은 강한 기계적 강도, 우수한 유전적 특성, 수문에 의한 부식과 유동적 이온에 대한 우수한 저항력 때문에, 반도체 소자 산업에서 널리 사용되고 있다. 수소화된 실리콘 질화막은 반사방지 특성과 함께 표면 패시베이션의 질을 향상시킬 수 있다. 굴절률 1.9 ~ 2.3 범위에서 쉽게 변화 가능한 수소화된 실리콘 질화막은 굴절률 1.4 ~ 1.5 사이의 열적 산화막 보다 효과적인 반사방지막이다. 수소화된 실리콘 질화막을 사용한 태양전지에서는 효율을 높이기 위해서 기판 표면에서의 케리어 재결합이 억제되어져야한다. 또한, 수소화된 실리콘 질화막은 최적화된 두께와 굴절률을 가져야한다. 본 연구에서는 고효율 태양전지에 적용하기 위해 반송자 수명이 향상된 수소화된 실리콘 질화막을 플라즈마 화학 기상 증착법을 이용하여 증착하였다. 박막은 $250^{\circ}C\;{\sim}\;450^{\circ}C$에서 증착되었으며 증착된 박막은 1.94 to 2.05 굴절률 값을 가지고 있다. 반송자 수명을 증가시키기 위해 $650^{\circ}C\;{\sim}\;950^{\circ}C$에서 어닐링 하였고 반송자 수명을 측정하여 패시베이션 특성을 분석하였다. 수소화된 실리콘 질화막은 $850^{\circ}C$의 어닐링 온도와 굴절률 2.0 조건에서 가장 좋은 반송자 수명을 나타냈다.

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Micro-structure and NTCR Characteristics of Copper Manganite Thin Films Fabricated by MOD Process (MOD법으로 제조된 Copper Manganite 박막의 구조 및 NTCR 특성)

  • Lee, Kui Woong;Jeon, Chang Jun;Jeong, Young Hun;Yun, Ji Sun;Nam, Joong Hee;Cho, Jeong Ho;Paik, Jong Hoo;Yoon, Jong-Won
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.27 no.7
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    • pp.452-457
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    • 2014
  • Copper manganite thin films were fabricated on $SiN_x/Si$ substrate by metal organic decomposition (MOD) process. They were burned-out at $400^{\circ}C$ and annealed at various temperatures ($400{\sim}800^{\circ}C$) for 1h in ambient atmosphere. Their micro-structure and negative temperature coefficient of resistance (NTCR) characteristics were analyzed for micro-bolometer application. The copper manganite film with a cubic spinel structure was well developed at $500^{\circ}C$ which confirmed by XRD and HRTEM analysis. It showed a low resistivity ($47.5{\Omega}{\cdot}cm$) at room temperature and high NTCR characteristics of $-4.12%/^{\circ}C$ and $-2.15%/^{\circ}C$ at room temperature and $85^{\circ}C$, implying a good thin film for micro-bolometer application. Furthermore, its crystallinity was enhanced with increasing temperature to $600^{\circ}C$. However, the appearance of secondary phase at temperatures higher than $600^{\circ}C$ lead to deteriorate the NTCR characteristics.

Sol-gel Derived Nano-glass for Silicon Solar Cell Metallization (솔-젤법에 의해 제조된 실리콘 태양전지 전극형성용 나노 글래스)

  • Kang, Seong Gu;Lee, Chang Wan;Chung, Yoon Jang;Kim, Chang-Gyoun;Kim, Seongtak;Kim, Donghwan;Lee, Young Kuk
    • Current Photovoltaic Research
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    • v.2 no.4
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    • pp.173-176
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    • 2014
  • We have investigated the seed layer formation of front side contact using the inkjet printing process. Conductive silver ink was printed on textured Si wafers with 80 nm thick $SiN_x$ anti reflection coating (ARC) layers and thickened by light induced plating (LIP). The inkjet printable sliver inks were specifically formulated for inkjet printing on these substrates. Also, a novel method to prepare nano-sized glass frits by the sol-gel process with particle sizes around 5 nm is presented. Furthermore, dispersion stability of the formulated ink was measured using a Turbiscan. By implementing these glass frits, it was found that a continuous and uniform seed layer with a line width of $40{\mu}m$ could be formed by a inkjet printing process. We also investigated the contact resistance between the front contact and emitter using the transfer length model (TLM). On an emitter with the sheet resistance of $60{\Omega}/sq$, a specific contact resistance (${\rho}_c$) below $10m{\Omega}{\cdot}cm^2$ could be achieved at a peak firing temperature around $700^{\circ}C$. In addition, the correlation between the contact resistance and interface microstructures were studied using scanning electron microscopy (SEM). We found that the added glass particles act as a very effective fire through agent, and Ag crystallites are formed along the interface glass layer.

Characteristics of Pt/C-based Catalysts for HI Decomposition in SI process (SI 공정에서 HI 분해를 위한 백금담지 활성탄 촉매의 특성)

  • Kim, J.M.;Kim, Y.H.;Kang, K.S.;Kim, C.H.;Park, C.S.;Bae, K.K.
    • Journal of Hydrogen and New Energy
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    • v.19 no.3
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    • pp.199-208
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    • 2008
  • HI decomposition was conducted using Pt/C-based catalysts with a fixed-bed reactor in the range of 573 K to 773 K. To examine the change of the characteristic properties of the catalysts, $N_2$ adsorption analyser, a X-ray diffractometer(XRD), and a scanning electron microscopy(SEM) were used before and after the HI decomposition reaction. the effect of Pt loading on HI decomposition was investigated by $CO_2$-TPD. HI conversion of all catalysts increased as decomposition temperature increased. The XRD analysis showed that the sizes of platinum particle became larger and agglomerated into a lump during the reaction. From $CO_2$-TPD, it can be concluded that the cause for the increase in catalytic activity may be attributed to the basic sites of catalyst surface. The results of both b desorption and gasification reaction showed the restriction on the use of Pt/C-based catalyst.

Effect of Oxidation-reduction Pretreatment for the Hydrogenation of Caster Oil over Ni/SiO2 Catalyst (산화-환원 전처리에 따른 Ni/SiO2 촉매의 캐스터오일 수소화)

  • Choi, Yi Sun;Kim, Soo Young;Koh, Hyoung Lim
    • Applied Chemistry for Engineering
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    • v.28 no.3
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    • pp.326-331
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    • 2017
  • Castor oil can be used as a useful raw material for chemical industries such as intermediates of surfactants through hydrogenation reaction. In this study, effects of the preparation method and pretreatment condition on the nickel catalyst for the hydrogenation of castor oil were investigated. The nickel catalyst was supported on the silica carrier by the precipitation method with different Ni contents, solution pH values, and precipitants. Repeated pretreatments of oxidation and reduction cycles were then carried out. The activity of the nickel catalyst was measured by comparing the iodine value of the castor oil. The dispersion of nickel on the catalyst was analyzed by X-ray diffraction (XRD), $N_2$ adsorption-desorption, and transmission electron microscopy (TEM). The activity of nickel catalyst was also compared by CO oxidation experiments. The redispersion of nickel occurred on the silica by repeated oxidation and reduction cycles, and this effect contributed to promoting the castor oil hydrogenation activity.