• Title/Summary/Keyword: $SiN_{x}$

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Fabrication and Electrical Properties of SCT thin Film with Substitution Contents of Ca (Ca 치환량에 따른 SCT 박막의 제조 및 전기적 특성)

  • Kim, Jin-Sa;Lee, Joon-Ung
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.49 no.10
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    • pp.559-563
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    • 2000
  • The $(Sr_{1-x}Ca_x)TiO_3(SCT)$ thin films are deposited on Pt-coated(Pt/TiN/$SiO_2$/Si) using RF sputtering method with substitutional contents of Ca. The maximum grain of thin films is obtained by substitution of Ca at 15[mol%]. Also the composition of SCT thin films were closed to stoichiometry(1.081∼1.117 in A/B/ ratio). The dielectric constant was increased with increasing the substitutional contents of Ca, while it was decreased if the substitutional contents of Ca exceeded over 15[mol%]. The dielectric constant changes almost linearly in temperature ranges of -80∼+90[^${\circ}C$]. The temperature properties of the dielectric loss have a stable value within 0.02 independent of the substitutional contents of Ca. All SCT thin films used in this study show the phenomena of dielectric relaxation with the increase of frequency, and the relaxation frequency is observed above 2000[kHz]. The current-voltage characteristics of SCT15 thin films showed the increasing leakage current as the measuring temperature increase.

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Deposition and Properties of Pt/ST/Pt Thin Film Structure (Pt/ST/Pt 소자 구조의 박막증착 및 특성)

  • Kim, Jin-Sa;Cho, Choon-Nam;Oh, Yong-Cheul;Shin, Cheol-Gi;Song, Min-Jong;So, Byeong-Mun;Choi, Woon-Shick;Kim, Chung-Hyeok
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.472-473
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    • 2007
  • The $(Sr_{1-x}Ca_x)TiO_3$(ST) thin films are deposited on Pt-coated electrode(Pt/TiN/$SiO_2$/Si) using RF sputtering method with substitutional contents of Ca. The maximum grain of thin films is obtained by substitution of Ca at 15[mol%]. Also, the composition of ST thin films were closed to stoichiometry(1.081~1.117 in A/B ratio). The dielectric constant changes almost linearly in temperature ranges of -80~+90[$^{\circ}C$]. The current-voltage characteristics of ST15 thin films showed the increasing leakage current as the measuring temperature increases.

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The effect of annealing conditions on ultra shallow $ p^+-n$ junctions formed by low energy ion implantation (저에너지 이온 주입 방법으로 형성된 박막$ p^+-n$ 접합의 열처리 조건에 따른 특성)

  • 김재영;이충근;홍신남
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.41 no.5
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    • pp.37-42
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    • 2004
  • Shallow $p^{+}$-n junctions were formed by preamorphization, low-energy ion implantation and dual-step annealing processes. Germanium ions were implanted into silicon substrates for preamorphization. The dopant implantation was performed into the preamorphized and non-preamorphized substrates using B $F_2$2 ions. Rapid thermal anneal (RTA) and furnace anneal (FA) were employed for dopant activation and damage removal. Samples were annealed by one of the following four methods; RTA(75$0^{\circ}C$/10s)+Ft FA+RTA(75$0^{\circ}C$/10s), RTA(100$0^{\circ}C$/10s)+FA, FA+The Ge Preamorphized sample exhibited a shallower junction depth than the non-preamorphized sample. When the employed RTA temperature was 100$0^{\circ}C$, FA+RTA annealing sequence exhibited better junction characteristics than RTA+FA thermal cycle from the viewpoint of junction depth, sheet resistance, $R_{s}$$.$ $x_{j}$, and leakage current.t.

A New Algorithm for the Longest Common Non-superstring (최장공통비상위 문자열을 찾는 새로운 알고리즘)

  • Choi, Si-Won;Lee, Dok-Young;Kim, Dong-Kyue;Na, Joong-Chae;Sim, Jeong-Seop
    • Journal of KIISE:Computing Practices and Letters
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    • v.15 no.1
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    • pp.67-71
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    • 2009
  • Recently, the string non-inclusion related problems have been studied vigorously. Given a set of strings F over a constant size alphabet, consider a string x such that x does not include any string in F as a substring. We call x a Common Non-SuperString(CNSS for short) of F. Among the CNSS's of F, the longest one with finite length is called the Longest Common Non-SuperString(LCNSS for short) of F. In this paper, we first propose a new graph model using prefixes of F. Next, we suggest an O(N)-time algorithm for finding the LCNSS of F, where N is the sum of the lengths of all the strings in F.

Structural and Electrical Properties of [(Co1-xCux)0.2(Ni0.3Mn0.7)0.8]3O4 Spinel Thin Films for Infrared Sensor Application (적외선 센서용 [(Co1-xCux)0.2(Ni0.3Mn0.7)0.8]3O4 스피넬 박막의 구조 및 전기적 특성)

  • Lee, Kui Woong;Jeon, Chang Jun;Jeong, Young Hun;Yun, Ji Sun;Cho, Jeong Ho;Paik, Jong Hoo;Yoon, Jong-Won
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.27 no.12
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    • pp.825-830
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    • 2014
  • $[(Co_{1-x}Cu_x)_{0.2}(Ni_{0.3}Mn_{0.7})_{0.8}]_3O_4$ ($0{\leq}x{\leq}1$) thin films prepared by metal organic decomposition process were fabricated on SiN/Si substrate for infrared sensor application. Their structural and electrical properties were investigated with variation of Cu dopant. The $[(Co_{1-x}Cu_x)_{0.2}(Ni_{0.3}Mn_{0.7})_{0.8}]_3O_4$ (CCNMO) film annealed at $500^{\circ}C$ exhibited a dense microstructure and a homogeneous crystal structure with a cubic spinel phase. Their crystallinity was further enhanced with increasing doped Cu amount. The 120 nm-thick CCNMO (x=0.6) thin film had a low resistivity of $53{\Omega}{\cdot}cm$ at room temperature while the Co-free film (x=1) showed a significantly decreased resistivity of $5.9{\Omega}{\cdot}cm$. Furthermore, the negative temperature coefficient of resistance (NTCR) characteristics were lower than $-2%/^{\circ}C$ for all the specimens with $x{\geq}0.6$. These results imply that the CCNMO ($x{\geq}0.6$) thin films are a good candidate material for infrared sensor application.

A study on the Optical and electrical characteristics of Tri-silicon using wet texture (습식텍스쳐를 이용한 삼결정 실리콘 광학적.전기적 특성 연구)

  • Han, Kyu-Min;Yoo, Jin-Su;Yoo, Kwon-Jong;Lee, Hi-Deok;Choi, Sung-Jin;Kwon, Jun-Young;Kim, Ki-Ho;Yi, Jun-Sin
    • 한국신재생에너지학회:학술대회논문집
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    • 2009.06a
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    • pp.180-182
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    • 2009
  • Two different wet etching solutions, NaOH 40% and Acid, were used for etching in tri-crystalline Silicon(Tri-Si) solar cell fabrication. The wafers etched in NaOH40% solution showed higher reflectance compared to the wafers etched in Acid solution after $SiN_x$ deposition. In light current-voltage results, the cells etched in Acid solution exhibited higher short circuit current and open circuit voltage than those of the cells etched in NaOH 40% solution. We have obtained 16.70% conversion efficiency in large area($156cm^2$) Tri-Si solar cells etched in Acid solution.

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Preparation of Ferroelectric $YMnO_3$ Thin Films by Metal-Organic Decomposition Process and their Characterization (Metal-Organic Decomposition법에 의한 강유전성 $YMnO_3$ 박막의 제조 및 특성)

  • 김제헌;강승구;김응수;김유택;심광보
    • Journal of the Korean Ceramic Society
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    • v.37 no.7
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    • pp.665-672
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    • 2000
  • The ferroelectric YMnO3 thin films were prepared by MOD(metal-organic decomposition) method with Y- and Mn-acetylacetonate as starting materials. Thin films were grown on various substrates by spin-coating technique. The crystalline phases of the thin films were identified by X-ray diffractometer as a function of heat-treatment temperature, pH of coating solution and substrate. In addition, the effect of Mn/Y molar ratio(0.8~1.2) on the formation of hexagonal-YMnO3 phase was investigated. In forming highly c-axisoriented hexagonal-YMnO3 single phase, the Pt coated Si substrate was more effective than the bare Si substrate, and the optimum heat-treatment condition was at 82$0^{\circ}C$ for 30 min. Higher Mn/Y molar ratio within 0.8~1.2 and pH of YMnO3 precursor solution within 0.5~2.5 favored formation of ferroelectric hexagonal phase rather than orthorhombic phase. Leakage current density of the hexagonal-YMnO3 thin film formed on Pt(111)/TiO2/SiO2/Si substrate was low enough as 0.4~4.0$\times$10-8(A/$\textrm{cm}^2$) at 5 V and its remanent polarization(Pr), calculated from the P-E hysteresis loop, was 3 nC/$\textrm{cm}^2$.

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The Effect of Electrical and Optical Characteristics on ZnO Thin Film with Si Dopant (Si 첨가물이 ZnO의 전기적, 광학적 특성에 미치는 영향)

  • Kim, Jun-Sik;Jang, Gun-Eik
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.6
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    • pp.480-485
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    • 2011
  • ZnO is an n-type semiconductor with a wide band gap near 3.37 eV. It was known that ZnO films with a resistivity of the order of $10^{-4}\;{\Omega}cm$ is not easy to obtain. 1, 3, and 5wt% Si element were added into ZnO in ordre to improve the electrical and optical characteristics. The Si-doped ZnO (SZO) was grown on a glass substrate by radio frequency (RF) magnetron sputtering at the temperature range from 100 to $500^{\circ}C$. X-ray diffraction (XRD) patterns of SZO film showed preferable crystal orientation of (002) plane. It was confirmed that the lowest resistivity of the SZO films was $2.44{\times}10^{-3}{\Omega}cm$ and SZO films were significantly influenced by the working temperature. The average transmittance of the films was over 80% in the visible ranges.

Effect of Composition of γ-Al2O3/SiO2 Mixed Support on Fischer-Tropsch Synthesis with Iron Catalyst (철 기반 촉매의 Fischer-Tropsch 합성에서 γ-Al2O3/SiO2 혼합 지지체 조성의 영향)

  • Min, Seon Ki;No, Seong-Rae;You, Seong-sik
    • Korean Chemical Engineering Research
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    • v.55 no.3
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    • pp.436-442
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    • 2017
  • Fischer-Tropsch synthesis is the technology of converting a syngas (CO+$H_2$) derived from such as coal, natural gas and biomass into a hydrocarbon using a catalyst. The catalyst used in the Fischer-Tropsch synthesis consists of active metal, promoter and support. The types of these components and composition affect the reaction activity and product selectivity. In this study, we manufactured an iron catalyst using ${\gamma}-Al_2O_3/SiO_2$ mixed support (100/0 wt%, 75/25 wt%, 50/50 wt%, 25/75 wt%, 0/100 wt%) by an impregnation method to investigate how the composition of ${\gamma}-Al_2O_3/SiO_2$ mixed support effects on the reaction activity and product selectivity. The physical properties of catalyst were analyzed by $N_2$ physical adsorption and X-Ray diffraction method. The Fischer-Tropsch synthesis was conducted at $300^{\circ}C$, 20bar in a fixed bed reactor for 60h. According to the results of the $N_2$ physical adsorption analysis, the BET surface area decreases as the composition of ${\gamma}-Al_2O_3$ decreases, and the pore volume and pore average diameter increase as the composition of ${\gamma}-Al_2O_3$ decreases except for the composition of ${\gamma}-Al_2O_3/SiO_2$ of 50/50 wt%. By the results of the X-Ray diffraction analysis, the particle size of ${\alpha}-Fe_2O_3$ decreases as the composition of ${\gamma}-Al_2O_3$ decreases. As a result of the Fischer-Tropsch synthesis, the CO conversion decreases as the composition of ${\gamma}-Al_2O_3$ decreases, and the selectivity of C1-C4 decreases until the composition of ${\gamma}-Al_2O_3$ was 25 wt%. In contrast, the selectivity of C5+ increases until the composition of ${\gamma}-Al_2O_3$ is 25 wt%.

Microtube Light-Emitting Diode Arrays with Metal Cores

  • Tchoe, Youngbin;Lee, Chul-Ho;Park, Junbeom;Baek, Hyeonjun;Chung, Kunook;Jo, Janghyun;Kim, Miyoung;Yi, Gyu-Chul
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.287.1-287.1
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    • 2016
  • Three-dimensional (3-D) semiconductor nanoarchitectures, including nano- and micro- rods, pyramids, and disks, are emerging as one of the most promising elements for future optoelectronic devices. Since these 3-D semiconductor nanoarchitectures have many interesting unconventional properties, including the use of large light-emitting surface area and semipolar/nonpolar nano- or micro-facets, numerous studies reported on novel device applications of these 3-D nanoarchitectures. In particular, 3-D nanoarchitecture devices can have noticeably different current spreading characteristics compared with conventional thin film devices, due to their elaborate 3-D geometry. Utilizing this feature in a highly controlled manner, color-tunable light-emitting diodes (LEDs) were demonstrated by controlling the spatial distribution of current density over the multifaceted GaN LEDs. Meanwhile, for the fabrication of high brightness, single color emitting LEDs or laser diodes, uniform and high density of electrical current must be injected into the entire active layers of the nanoarchitecture devices. Here, we report on a new device structure to inject uniform and high density of electrical current through the 3-D semiconductor nanoarchitecture LEDs using metal core inside microtube LEDs. In this work, we report the fabrications and characteristics of metal-cored coaxial $GaN/In_xGa_{1-x}N$ microtube LEDs. For the fabrication of metal-cored microtube LEDs, $GaN/In_xGa_{1-x}N/ZnO$ coaxial microtube LED arrays grown on an n-GaN/c-Al2O3 substrate were lifted-off from the substrate by wet chemical etching of sacrificial ZnO microtubes and $SiO_2$ layer. The chemically lifted-off layer of LEDs were then stamped upside down on another supporting substrates. Subsequently, Ti/Au and indium tin oxide were deposited on the inner shells of microtubes, forming n-type electrodes of the metal-cored LEDs. The device characteristics were investigated measuring electroluminescence and current-voltage characteristic curves and analyzed by computational modeling of current spreading characteristics.

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