• Title/Summary/Keyword: $SO_2$ measurement

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150 nm Pitch Measurement using Metrological AFM (길이 소급성을 갖는 AFM을 이용한 150nm 피치 측정)

  • ;I. Misumi;S. Gonda;T. Kurosawa
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.264-267
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    • 2003
  • Pitch measurements of 150 nm pitch one-dimensional grating standards were carried out using an contact mode atomic force microscopy(C-AFM) with a high resolution three-axis laser interferometer. It was called as 'Nano-metrological AFM' In Nano-metrological AFM, Three laser interferometers were aligned well to the end of AFM tip. Laser sources of the three-axis laser interferometer in the nano-metrological AFM were calibrated with an I$_2$-stablilzed He-Ne laser at a wavelength of 633 nm. So, the Abbe error was minimized and the result of the pitch measurement using the nano-metrological AFM has a traceability to the length standard directly. The uncertainty in the pitch measurement was estimated in accordance with the Guide to the Expression of Uncertainty in Measurement(GUM). The Primary source of uncertainty in the pitch-measurements was derived from repeatability of pitch-measurement, and its value was approx 0.186 nm. Expanded uncertainty(k=2) of less than 5.23 nm was obtained. It is suggested that the metrological AFM is a useful tool for the nano-metrological standard calibration.

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A Study on the Elasticity Measurement of Fabric Using Loadcell (로드셀을 이용한 직물의 신축성 측정에 관한 연구)

  • Joo Ki-See
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.8 no.7
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    • pp.1532-1536
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    • 2004
  • So far, the quantified elasticity data of textile fabrics has not been present because the measurement method depends on the knowledge of measurement operators. In this paper, the special manufactured measurement equipment using road cell is presented to measure the elasticity coefficient of textile fabrics in real time. The measurement method is based on the voltage differency among textile fabrics. The textiles with strong elasticity are high voltage produced from road cell. The others are low. The presented method can be applied to visualize the textile, sew the cloth, control quality of textile fabrics. Also, these measurement datum are used to B2B electronic trading system.

Note on the beginnings of sinusoidal testing methods

  • Tanner, R.I.
    • Korea-Australia Rheology Journal
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    • v.14 no.2
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    • pp.87-90
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    • 2002
  • The measurement of the storage and loss moduli (G' and G" respectively) of materials as functions of frequency is now commonplace and is of wide utility. Yet il is not easy to trace the history of such measurements. and so this article discusses the genesis of this important experimental technique. We find that the technique grew out of a parallel technique for dielectric measurements (ca. 1900) and was developed in the mid-1930s by Philippoff and others. Important breakthroughs due to digital circuitry have occurred only in the last 20 years or so.r so.

Study of the error chsracteristics in a mirror loss measurement system using an exqonential decay metod (지수감쇠 기법을 이용한 반사경 손실측정 시스템의 오차특성 연구)

  • 조민식
    • Korean Journal of Optics and Photonics
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    • v.12 no.2
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    • pp.77-82
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    • 2001
  • Error characteristics of a mirror loss measurement system using an exponential decay method were studied, with the two samples having about 200-ppm-loss and 30-ppm-loss, respectively. In order to minimize the decay signal deviation from an exponential curve due to cavity length fluctuation, a data average method was tried. The data average method significantly improved the exponential curve fitting error of the decay signal, so that for a 6 decay signal data average the loss measurement error was reduced by about 2.4 times for the 200-ppm-loss mirror and 1.3 times for the 30-ppm-loss mirror compared with a single shot measurement. Day-to-day mirror loss repeatability error for the two samples was investigated. The repeatability error was measured to be about 5% for the 200-ppm-loss mirror and about 26.4% for the 30-ppm-loss mirror. Low decay signal average effect and high repeatability error in the low loss mirror measurement were explained with non-uniform spatial loss distribution of the sample and contamination from the environment, in addition to the error sources of the mirror loss measurement system itself. The influence of cavity length fluctuation and cavity length measurement error on the mirror loss measurement system performance was theoretically calculated. It confirmed that the requirement for the cavity length parameters was not so strict in the mirror loss measurement system of several ppm resolution. ution.

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Study on the Deintercalation of $H_2SO_4$--Intercalated Graphite Fiber ($H_2SO_4$-Intercalated Graphite Fiber의 Deintercalation에 관한 연구)

  • 김인기;최상흘;고영신
    • Journal of the Korean Ceramic Society
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    • v.30 no.10
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    • pp.797-802
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    • 1993
  • Graphite fiber intercalated compound was deintercalated at $25^{\circ}C$, 65% of humidity and its deintercalated compound was discussed, based on the X-ray diffraction analysis, electrical resistivity measurement, and UV/VIS spectrometer measurements. During deintercalation, the structure was changed in orderlongrightarrowdisorderlongrightarroworder, and resistivity was decreased in the disorder state of the structure, which reflectance minimum of the UV/VIS spectrum ranged from 660 to 750nm (1.88~1.65eV).

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Distributions of Gas-phase(O$_3$, NOx, $H_2O$$_2$, SO$_2$) Pollutants in Upper Layer of West Sea Coast and Seoul by Aircraft Measurement (항공기로 측정한 서해안 및 수도권 상공의 가스상 물질(O$_3$, NOx, $H_2O$$_2$, SO$_2$) 분포)

  • 김영미;한진석;공부주;홍유덕;이상욱;이미혜
    • Proceedings of the Korea Air Pollution Research Association Conference
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    • 2003.11a
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    • pp.289-290
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    • 2003
  • O$_3$, $H_2O$$_2$, NOx, SO$_2$ 가 1996년부터 시작된 장거리이동 대기오염물질 조사 연구 사업 중 하나로써 항공기로 관측되었다. 2002년도부터는 대기 내 산화제로써 중요한 역할을 하는 과산화수소가 같이 측정되었다. 항공관측은 조사 연구 사업의 집중 관측 기간 동안인 2002년 3월, 4월, 2003년 4월, 2002년 12월에 이루어졌으며, 서해안(124$^{\circ}$ 10‘E)으로부터 한반도 내륙(127$^{\circ}$00'E)으로 다가가면서 대기오염물질 농도분포를 파악하기 위한 경로를 정하여 측정되었다. 또한 2003년 5월 28일, 6월에는 수도권 상공만을 집중적으로 관측하였다. (중략)

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The Vibration measurement which occurs from the Elevator Cage of the Building (건축물(建築物) Elevator Cage의 진동(振動) 측정(測定))

  • Jeon, Euy-Sik;Cho, Byoung-Hoo
    • Journal of The Korean Digital Architecture Interior Association
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    • v.4 no.2
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    • pp.52-59
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    • 2004
  • The interest about noise and vibration which occurs in buildings is increasing by a living level elevation recently. Particularly, the vibration which occurs from the elevator cage of the building is possibility of damage to the users of the building continuously. So, the purpose of this study is to suggest of measuring results to the vibration that occurs from the elevator cage and propose the countermeasure of it.

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A Study on Measurement for Earth Resistance of Steel Structure (철탑접지저항 측정에 관한 연구)

  • 박석탁;김시영
    • 전기의세계
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    • v.22 no.6
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    • pp.33-51
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    • 1973
  • To lower the earth resistance shall be one of the most effective method for the prevention of lightening damage on power transmission line. In this report, in order to investigate various characteristic necessary to lowering the earth resistance, the following experiments have been made at 154KV U1San-PoHang T/L, 154KV YoSu-SoonChun T/L and so on. 1. Measurement of Earth specific resistance, 2. Efficiency of Earthing of concrete foundation for steel structure., 3. Efficiency of Earthing with counter poise., 4. Compound impulse test with foundation of steel structure and counter poise. With the above investigate a guidance have been prepared for the effective work-performance of steel structure.

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Measurement Technology of Chamber Impedance for RF Matching (RF 정합 특성 개선을 위한 챔버의 임피던스 측정법)

  • 설용태;이의용;박성진
    • Journal of the Semiconductor & Display Technology
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    • v.2 no.4
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    • pp.13-17
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    • 2003
  • An adaptor is designed for chamber impedance measurement of plasma process. Copper rod, fixed board and compensation circuit are the major components of the adaptor. An adaptor can be to measure chamber impedance on time unless stopping a process and Data to measure can do the database. We can use it to a criteria data for a failure diagnosis. So developed adaptor could be used for diagnosis the plasma process chamber in semiconductor industry.

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