• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.109-110
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• 2006

In bio applications, high temperature coefficient of resistance (TCR) at $30^{\circ}C{\sim}40^{\circ}C$ is especially important for a temperature sensor. In this work, single phase-vanadium dioxide ($VO_2$) thin films for temperature sensor were fabricated by reactive DC magnetron sputtering and post-annealing method. VOx thin films deposited by reactive sputtering in a controlled $Ar/O_2$ atmosphere can be transformed into single phase-$VO_2$ films by post-annealing in $N_2$ atmosphere. The grown $VO_2$ thin films have a moderate resistance at room temperature and very high TCR at room temperature and transition temperature, respectively 2.88%/K and 15.8%/K. A detailed structural characterization is performed by SEM, XRD and RBS. SEM morphology image indicates that grains of fabricated $VO_2$films are homogeneous and ball-like in shape. A fact that the films contain only single phase-$VO_2$ is obtained by XRD and RBS analysis. After deposition, the sensors were fabricated by micromachining technology. Silicon nitride membrane and black nickel were used for a thermal isolation structure and absorption layer. In the vicinity of room temperature, the TCR of sensors was enough high to apply for bio sensors.

• Journal of the Korean Society for Heat Treatment
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• v.8 no.1
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• pp.32-43
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• 1995

Ti-6Al-4V alloy are widely used in chemical and aircraft industries for their good corrosion resistance and high strength to weight ratio. Surface alloying of Ti alloy by $CO_2$ laser is able to produce few hundred micrometers thick TiN surface-alloyed layer with high hardness on the substrate very simplely by injecting reaction gas($N_2$) into a laser-generated melt pool and adjust the hardness to the specific requirements of the individual application by changing of laser processing parameters. This research has been investigated the effect of such parameters on TiN surface-alloying of Ti-6Al-4V alloy by $CO_2$ laser. The maximum hardness of TiN surface-alloyed zone waw obtained by injecting 100% $N_2$ gas and it was decreased as the amount of $N_2$ gas in Ar and $N_2$ gas mixture was decreased. As scanning speed was increased, the hardness and depth of TiN surface-alloyed zone was decreased at constant laser power. The surface hardness after double scanning laser treatment is higher than that of single scanning. At constant laser power, the surface roughness is increased after the surface alloying if laser scanning speed is decreased.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.169-169
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• 2012

현재 디스플레이 시장은 LCD (Liquid Crystal Display), PDP (Plasma Display Panel) 등과 같이 평판 디스플레이가 주류를 이루고 있으며 현재에는 기존의 디스플레이와는 달리 잘 휘어지고 높은 투과성을 가지는 플렉시블 디스플레이에 대한 연구가 활발히 진행 중이다. 하지만 이러한 플렉시블 디스플레이에 사용되는 플라스틱 기판의 경우 용제에 대한 화학적 저항성 및 기계적인 안정성이 취약한 점과 대기중의 수분이나 산소가 플라스틱 기판을 통하여 소자내로 침투하게 되어 금속전극을 산화시키거나 기포 또는 흑점 등과 같은 비 발광 영역이 확산되어 소자의 수명을 단축시키는 치명적인 단점을 가진다. 이에 본 실험에서는 고밀도 플라즈마 형성이 가능하고 저온공정이 가능한 FTS (Facing Target Sputtering) 장비를 이용하여 Polyethylene terephthalate (PET) 기판위에 낮은 수분 투과율 또는 산소 투과율을 갖는 양질의 무기 산화막을 적층하기 위해 저 투습도 및 기계적인 경도 향상을 위한 비 반응성 박막으로 $Al_20_3$층을 Ar분위기에서 증착하였고 그 위에 박막의 stress 감소, 유연성 향상을 위한 반응성 박막으로 Al을 Ar과 $O_2$를 비율별로 증착하여 비교 실험하였다. 이와 같이 제작된 무기산화막들을 Uv- spectrophotometer를 이용하여 광학적 특성을 조사한 결과 가시광 영역에서 모두 80% 이상의 높은 투과율을 나타내었으며, 그 외 XRD (X-ray Diffraction)를 사용하여 결정성을 확인, SEM (Scanning Electron Microscope), AFM (Atomic Force Microscope)을 이용하여 박막의 구조와 표면향상 및 표면조도를 측정한 결과 모든 박막에서 밀집도가 좋으며 거칠기가 작은 것으로 확인되었다. 마지막으로 수분 투과율(WVTR)을 알아보기 위해 Mocon (Permatran W3/31)장비를 이용하여 측정한 결과 $1.0{\sim}3.0{\times}10^{-3}g/m{\cdot}day$의 낮은 수분 투과율을 볼 수 있었다. 이러한 측정 결과로 볼 때 향후 FTS 장비를 이용하여 양질의 플라즈마를 형성하여 알루미늄 무기산화막을 이용한 고밀도 다층막을 형성하면 더욱 낮은 수분투과율을 갖는 가스차단막을 제작할 수 있을 것으로 보여지며 반도체 소자 및 디바이스의 Pachaging으로도 사용가능 할 것이라 사료된다. 본 연구는 한국산업기술진흥원에서 지원하는 2011년도 지역산업기술개발사업의 연구수행으로 인한 결과물임을 밝힙니다.

• The Bulletin of The Korean Astronomical Society
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• v.36 no.2
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• pp.115.1-115.1
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• 2011

We analyzed the line profiles of the planetary nebula (PN) NGC 7009 secured with the Keck I HIES and BOES's spectral data. The 5 positions were taken over the nebular image, 4 points on the bright rim plus 1 point at the central position. The covered spectral wavelength range was $3250{\AA}-8725{\AA}$ in these observations. We decomposed the lines of HI, HeI, HeII, CII, NIII, [ClIII], [NII], [OII], [OIII], [SII], [SIII], [ClIII], and [ArIII] using the IRAF and StarLink/Dipso. After correcting the Earth's movement and the PN's radial velocities, -48.6 & -48.9 km/s, respectively, for the Keck & BOES, we produced the line profiles in a velocity scale. The zero velocity at each line profile clearly indicates which part of the components is approaching or receding, giving a general information of the kinematical structure. Almost all of the low-to-medium excitation lines, such as [NII], [SII], [O III], and [ArIII], secured at the central position and four positions along the major & minor axes, showed 3 components, double peak + a wide wing component, suggesting the fast outflow structures are present. The overall geometry is a prolate shell which also has a fainter outer shell in the halo zone, but there appears to be some peculiar sub-structures inside the main shell. The high excitation He I, HeII, NIII lines which might be formed close to the inner boundary of the shell show unusual features, completely different from the other lines. The HeII and these high excitation lines may be indicative of a relative recent fast outflow from the central star and the permitted lines such as NIII might be affected by the innermost structure. We discuss a possible presence of a jet-like fast outflow structure in an out-flow axis different from the main axis of the spheroid shell.

• Korean Journal of Materials Research
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• v.9 no.11
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• pp.1055-1061
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• 1999

Indium Tin Oxide (ITO) films were fabricated by vacuum deposition technique and their microwave shielding properties were investigated for the application to the transparent shield material. The vacuum coating was conducted in a RF co-sputtering machine. The film composition and structure associated with the sputtering conditions (argon and oxygen pressure. substrate temperature. RF input power) were investigated for the attainment of high electrical conductivity and good transparency. The electrical conductivity of IT0 films fabricated under the optimum deposition conditions (substrate temperature : $300^{\circ}C$. Ar flow rate : 20 sccm, Oxygen flow rate : 10 sccm, In/Sn input power : 50/30 W) showed 5.6$\times10^4$mho/m. The optical transparency is also considerably good. The microwave shielding properties including the dominant shielding mechanism are investigated from the electrical conductivity, thickness and skin depth of the ITO films. The total shielding effectiveness is then estimated to be 26 dB, which provides a suggestion that the IT0 films can be effectively used as the transparent shield material.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.3
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• pp.168-174
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• 2016

A conductive oxide-based sapphire glass indium tin oxide/metal electrode and the optical coating, through patterning process was studied in excellent optical properties and integrated touch panel has a high strength. Indium tin oxide conductive oxides of the sapphire glass to 0.3 A at DC magnetron sputtering method of 10 min, gas flow Ar 10 Sccm Ar, $O_2$ 1.0 Sccm the formation conditions of the thin film after annealing at $550^{\circ}C$ for 30min was achieved through a 86% transmittance. In addition, the coating 130 nm hollow silica sol-gel was to improve the optical transmittance of the indium tin oxide to 91%. For the measurement by the modeling hollow silica sol by Macleod simulation and calculated the average values of silica part to the presence or absence in analogy to actual. Refractive index value and the actual value of the material on the simulation the transmittance difference is it does not completely match the air region similar to the actual value (transmission) could be confirmed that the measurement is set to a value of between 5 nm and 10 nm.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.22 no.4
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• pp.183-194
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• 2021

In this study, the conversion factor for 2020 is estimated based on an outpatient and inpatient conversion factor separation model developed from SGR and AR by using actual medical expense data. In addition, a policy plan is proposed to calculate the values of single and multiple conversion factors for each type of medical expense, and to effectively use the conversion factor separation model as one of the means to establish a medical delivery system. The major results are as follows. First, at r=0.1, the rate of adjustment in the hospital single conversion index in 2020 was 2.0%, and the outpatient and hospitalization conversion rates for hospitals were 2.2% and 2.3%, respectively. In addition, a combination of outpatient and inpatient conversion factors can be used for the adjustment. Second, as a measure to establish a medical delivery system, instead of adjusting the addition rate, a method of interlocking the addition rate and the conversion factor is proposed. Third, it is necessary to develop a model that enables target management of volumes, in addition to the outpatient conversion factor, the inpatient conversion factor, and the adjustment coefficient.

• Journal of the Korean Society for Marine Environment & Energy
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• v.11 no.1
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• pp.42-45
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• 2008

It has been reported that FRP (fiber reinforced plastic) can be recycled by separating into layers instead of crushing into powder. F-fiber obtained from roving layer separated from FRP, has bigger tensile strength than the bundle of glass fibers of which FRP was made (more than 90%). SEM image of F-fiber shows the presence of some resin. Under the proposition of usage of F-fiber in the concrete material, tensile strength is examined after soaking in a basic solution (NaOH+KOH). The reaction mechanism of strength loss may be considered as an attack of hydroxide ion ($OH^-$) on a chemical bond of Si-O-Si of glass fiber. The simulation graph of the strength loss data implies certain reaction mechanism. While in the early stage kinetically controlled reaction results in a fast drop of tensile strength, after 30 days dispersion rate of hydroxide ion plays a major role in strength loss. This result is similar to the one for the AR glass. An extrapolation of the graph would make an assumption about the lift time of F-fiber possible.

• Journal of the Microelectronics and Packaging Society
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• v.15 no.3
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• pp.47-52
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• 2008

This investigation was performed in order to study the properties of deposition and layers by Silicon Dioxide, SiO2, as dielectric onto Via and Trench which have high Aspect Ratio (AR). Thus, in order to confirm these properties, three types of CVD, which were PECVD, PETEOS, and ALD, were selected. On the experiment each of the property sections was estimated that step overage of PECVD: <30%, PETEOS: 45%, ALD: 75% and the RSM of PECVD: 27.8 nm, PETEOS: 2.1 nm, ALD: <2.0 nm. As a result of this experiment for the property of electric film, ALD was valuated to be the most favorable outcome. However, ALD was valuated to have the least quality for the deposition rate. ALD deposition rate, $10\;\AA/min$ by $1\;\AA$/1cycle, was prominently lower than PETEOS, which had the deposition rate of $5000\;\AA$/min. Since electric film requires at least $1000\;\AA$ thicknesses, ALD was not suitable for the deposition rate. which is the most important component in a practical use. Therefore, in this particular study, PETEOS was evaluated to be the most suitable recipe.

• Journal of Hydrogen and New Energy
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• v.28 no.6
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• pp.601-609
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• 2017

Hydrogen is a clean, endlessly produced energy and it is easy to store and transfer. So, hydrogen is regarded as next generation energy. Among various ways for hydrogen production, the way to produce hydrogen by water electrolysis can effectively respond to fossil fuel's depletion or climate change. As interest in hydrogen has increased, related research has been actively conducted in many countries. In this study, we analyzed the performance characteristics and safety of water electrolysis system. In this study, we analyzed the performance characteristics and safety of water electrolysis system. The items for safety performance evaluation of the water electrolysis system were derived through analysis of international regulations, codes, and standards on hydrogen. Also, a prototype of the overall safety performance evaluation station was designed and developed. The demonstration test was performed with a prototype $10Nm^3/h$ class water electrolysis system that operated stably under various pressure conditions while measuring the stack and system efficiency. At 0.7MPa, the efficiency of the alkaline water electrolysis stack and the system that used in this study was 76.3% and 49.8% respectively. Through the GC analysis in produced $H_2$, the $N_2$ (5,157ppm) and $O_2$ (1,646 ppm) among Ar, $O_2$, $N_2$, CO and $CO_2$ confirmed as main impurities. It can be possible that the result of this study can apply to establish the safety standards for the hydrogen production system by water electrolysis.