• E2M - 전기 전자와 첨단 소재
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• 제8권3호
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• pp.278-284
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• 1995

Thin fihn SnO$_{2}$ Gas Sensor was fabricated by electron-beam evaporation system and the target made by general firing method for the purpose of detecting gas components in air, especially methane gas. SnO$_{2}$ thin film was prepared on the polished alumina substrate which Pt interdigital electrode was precoated. The effects of annealing temperature and substrate temperature on the structural properties of SnO$_{2}$ thin film on glass were investigated using the X-ray diffraction. The good crystalline structure is formed when substrate temperature is 150[.deg. C] and annealing condition is 550[.deg. C], 1[hour]. And the sensing properties at various thickness of the SnO$_{2}$ thin film and the effects of PdCI$_{2}$ addition were also investigated. The good result is showed when the thickness is below 1000[.angs.] and the quantity of PdCI$_{2}$ addition is 4[wt%]. The thickness of SnO$_{2}$ thin film was measured by .alpha.-step and Elliopsometer.

• 전자공학회논문지T
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• 제36T권1호
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• pp.19-24
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• 1999

In\sub 2\O\sub 3\ 계 산화물 반도체형 후막센서의 ppb 범위의 오존에 대한 감지특성을 살펴보았다. In\sub 2\O\sub 감지막은 오존에 감도가 상당히 높았지만 안정된 신호를 얻을 수 없었다. In\sub 2\O\sub에 3wt.% 의 Fe\sub 2\O\sub 3\를 첨가한 경우에는, 순수한 In\sub 2\O\sub 와 비교할 때 응답 시간과 감도에 있어서 감지 특성의 향상이 관찰되었지만, 센서 신호가 시간에 따라 계속 증가되는 경향은 크게 개선되지 않았다. 그러나 In\sub 2\O\sub:Fe\sub 2\O\sub 3\ 혼합 분말의 열처리는 감도가 감소하기는 하였지만 센서의 오존 응답 및 회복 특성을 증진시켰다. 특히 1300℃ 정도의 고온에서 혼합 분말을 열처리 하여 제조한 감지막은 감도의 감소는 있었지만 550℃ 의 측정 온도에서 빠른 응답 및 회복 특성과 센서 신호가 최대값으로 빠르게 수렴함을 확인할 수 있었다. 또한 이들 센서는 오존에 대해 센서 신호의 선형적인 농도 의존성을 나타내었으며, 반복 실험을 행할 때 센서 신호의 재현성을 보여주었다. 따라서 본 연구에서 제조한 후 막 가스센서를 사용하여 ppb 범위의 오존 농도를 신뢰성있게 측정할 수 있음을 확인할 수 있었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.942-945
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• 2003

Nerve gas sensor based on tin oxide was fabricated and its characteristics were examined. Target gas was dimethylmethylphosphonate($C_3H_9O_3P$, DMMP) that is simulant gas of nerve gas. Sensing material was $SnO_2$ added ${\alpha}-Al_2O_3$ with $4{\sim}20wt.%$ and was physically mixed. And then it was deposited by screen printing method on alumina substrate. Sensor device was consisted of sensing electrode with interdigit(IDT) type in front and heater in back side. Total size of device was $7{\times}10{\times}0.6mm^3$. Crystallite size of fabricated $SnO_2$ were characterized by X-ray diffraction(XRD, Rigaku) and morphology of the $SnO_2$ powders was observed by a scanning electron microscope(SEM, Hitachi). Fabricated sensor was measured as flow type and sensor resistance change was monitored real time using LabVIEW program. The best conditions as added $Al_2O_3$ amounts and operating temperature changes were 4wt.% and $300^{\circ}C$ in DMMP 0.5ppm, respectively. The sensitivity was over 75%. Response and recovery times were about 1 and 3 min., respectively. Repetition measurement was very good with ${\pm}3%$ in full scale.

• 센서학회지
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• 제6권5호
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• pp.369-375
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• 1997

$SnO_{2}$에 $V_{2}O_{5}/ThO_{2}/Pd$를 도핑하여 제조된 센서는 약 $500^{\circ}C$의 높은 센서 온도에서 CO에 대해 우수한 선택도와 안전성 및 빠른 응답특성을 보였다. 특히, $V_{2}O_{5}$를 약 3.0 wt.% 첨가하여 선택도에 있어서 CO 감도에 대해 $NO_{x}$, $C_{3}H_{8}$, $CH_{4}$ 및 $SO_{2}$같은 많은 간섭가스들의 영향이 적음을 알았다. 센서 제조는 $V_{2}O_{5}$(3.0 wt.%), $ThO_{2}$(1.5wt.%), Pd(1.0 wt.%)의 촉매물질과 함께 기존에 잘 알려진 후막기술을 이용하였다. 일반적으로 연소배가스처럼 $NO_{x}$와 CO가 혼합되어 있는 복합가스의 경우, $SnO_{2}$계 반도체 센서로는 CO만의 검지는 $NO_{x}$ 간섭 때문에 대단히 어렵다. 본 센서는 공연비제어를 요하는 자동차나 보일러 시스템의 연소배가스의 측정과 감시에 사용할 수 있을 것이다.

• 전기전자학회논문지
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• 제13권4호
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• pp.37-42
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• 2009

본 연구에서는 졸겔법으로 ZnO, 수열합성법으로 $SnO_2$ 나노분말을 제조하고 이들 나노분말에 Pd, Ru 등의 촉매를 첨가하였다. MEMS 기술로 제작된 히터 및 전극 구조 위에 나노 감지 분말을 도포하여 CO and $NO_2$ 가스 센서를 제작하였다. 0.1 wt% Pd 도핑된 $SnO_2$ 가스센서와 Ru 도핑된 ZnO 가스 센서는 각각 CO 30 ppm, $NO_2$ 1 ppm의 낮은 농도에서도 높은 감지 특성을 보였다.

• 한국안전학회지
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• 제5권2호
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• pp.32-39
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• 1990

The ${\gamma}$-Fe$_2$O$_3$ compounds were oxidized in the furance after gas detecting sensor made molding as the Fe$_3$O$_4$ the synthesized Fe$_3$O$_4$, by ferrous sulfate and sodium hydroxide. Their sensities on carbon monoxide, ethyl alcohol and L. P. G. were measured at various temperatures, respectively. And then their electrical resistivities, thermal properties (D.T.A. ＆ T.G.A.), were examined about their having an effet on the gas-sensing in company with the effect of pure ${\gamma}$-Fe$_2$O$_3$ and the detecting sensor ${\gamma}$-Fe$_2$O$_3$, which reacts with $K_2$CO$_3$ in the hydrothermal coundition, and the electrical conductive mechanism was reflected simultaneously. It was observed that the electrical conductivities and response ratios showed highest value at the endothermic temperature part, 300~35$0^{\circ}C$ of D.T.A.―curve. Consequently, the response ratios and response times of the hydrothermal detecting sensor were higher than that of pure detecting sensor, the specific surface areas were the highest at the endothermic range of D.T.A.-curve. These response ratios of detecting sensor for $K_2$CO$_3$, process at hydrothermal condition on carbon monoxide appeared higher than that on ethyl alcohol and in case of L.P.G. last.

• 한국응용과학기술학회지
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• 제31권2호
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• pp.190-196
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• 2014

The sol-gel method was used to prepare binary metal oxide ($IrO_2-RuO_2$) pH sensor. The electrodes that mole percent compositions (mol%) of $IrO_2$ and RuO2 were 70:30 and 30:70 were selected. The characterizations of Nernstian response over pH range, response rate, interference on alkaline metals and reproducibility were investigated. Also the electroanalytical properties of these electrodes were evaluated in comparison with a commercial glass pH electrode. The composition of $IrO_2:RuO_2$ 70:30 mol% was chosen as better electrode formulation. The electrode was not susceptible to the action of interfering ions such as $Li^+$, $Na^+$ and $K^+$.

• 센서학회지
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• 제11권2호
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• pp.77-83
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• 2002

저비용과 휴대성을 고려한 알코올 경보기의 제작을 위해 동작온도가 낮고 감도가 높은 반도체 가스 센서를 제작하였다. $Fe_2O_3$에 금속 산화물인 $MoO_3$, $V_2O_5$, $TiO_2$, 그리고 CdO 등을 첨가하여 스크린 프린팅법을 이용하여 센서를 제작하였다. 센서의 전기적 안정성을 위하여 질소 분위기에서 $700^{\circ}C$, 2시간 동안 열처리를 하였다. 알코올, 탄화수소계 가스와 담배연기 등을 사용하여 센서의 가스 감도를 조사하였다. $V_2O_5$를 첨가한 센서가 알코올 가스 1,000 ppm에 대해서 약 $80{\sim}90%$의 감도를 보이며, 타 가스에 대한 선택성도 가짐을 알 수 있었다. 제작된 센서와 PIC-chip을 사용하여 휴대 가능한 경보기를 제작할 수 있었다.

• 센서학회지
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• 제17권1호
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• pp.61-68
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• 2008

The sensing characteristics of new oxide sensing materials, NiO, NiO-YSZ and CuO, were evaluated at the temperature of $700^{\circ}C$ in 10 % $O_2$containing atmosphere. Through simultaneous response to $NO_2$ and NO, the sensing mechanism of oxide electrode was studied and the relation of EMF and NO/$NO_2$ concentrations was elucidated. Moreover, for highly sensitive NOx sensor, modified mixed potential sensor which has at least two oxide electrodes was proposed.

• 한국재료학회지
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• 제33권5호
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• pp.195-204
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• 2023

Micro-electronic gas sensor devices were developed for the detection of carbon monoxide (CO), nitrogen oxides (NO_x), ammonia (NH₃), and formaldehyde (HCHO), as well as binary mixed-gas systems. Four gas sensing materials for different target gases, Pd-SnO₂ for CO, In₂O₃ for NO_x, Ru-WO₃ for NH₃, and SnO₂-ZnO for HCHO, were synthesized using a sol-gel method, and sensor devices were then fabricated using a micro sensor platform. The gas sensing behavior and sensor response to the gas mixture were examined for six mixed gas systems using the experimental data in MEMS gas sensor arrays in sole gases and their mixtures. The gas sensing behavior with the mixed gas system suggests that specific adsorption and selective activation of the adsorption sites might occur in gas mixtures, and allow selectivity for the adsorption of a particular gas. The careful pattern recognition of sensing data obtained by the sensor array made it possible to distinguish a gas species from a gas mixture and to measure its concentration.