• 전기전자학회논문지
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• 제22권2호
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• pp.356-361
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• 2018

고온에서 이용 가능한 수소 센서에 관해 연구하였다. 센서는 $Pd/Ta_2O_5/SiC$으로 구성된 MOS 구조로 제작되었으며, $Ta_2O_5$ 박막은 급속 열 산화법(RTO)법으로 형성하였다. 본 연구에서는 3가지 다른 패턴의 팔라듐(Pd) 전극으로 만든 센서를 제작하여, Pd 전극의 형태가 응답 특성에 미치는 영향을 고찰하였다. 그 결과, 센서는 Pd 전극의 채워진 면적이 클수록, 정전용량의 응답특성이 개선됨을 확인하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.549-550
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• 2010

• 센서학회지
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• 제25권4호
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• pp.271-274
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• 2016

The reliability and reproducibility of gas sensors are very important for real applications. The influence of nanofiber length and sensing film thickness on the reliability and response of gas sensing characteristics was investigated. For this, the length of $SnO_2$ nanofibers was controlled by tuning ultrasonic treatment and the different thicknesses of sensing films were prepared by manipulating the amount of slurry deposition. The sensor prepared from long nanofibers (length: ${\sim}3.6{\mu}m$) showed the significant fluctuation of gas sensing characteristics when the film becomes thinner than $18{\mu}m$, while that prepared from short nanofibers (length: ${\sim}0.9{\mu}m$) showed reproducible sensor response and resistance regardless of film thickness. Moreover, the shortening of nanofibers enhanced the gas response ~2 times, which can be explained by the increase of chemiresistive fiber-to-fiber contacts. The reproducibility, gas response, and selectivity of $SnO_2$ nanofiber gas sensor could be controlled by tuning nanofiber length, film thickness, and catalyst loading.

• 한국표면공학회지
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• 제56권6호
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• pp.393-400
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• 2023

Acetone, a metabolite detected from the exhaled breath of people doing a diet, can be used for non-invasive monitoring of diet efficiency. Thus, gas sensors with rapid response and recovery characteristics to acetone need to be developed. Herein, we report ultrafast acetone sensors using Ce-doped In₂O₃ nanoparticles prepared by the one-pot microwave-assisted hydrothermal method. The pure In₂O₃ sensor shows a high response and fast response time (τ_res = 6 s) upon exposure to 2 ppm acetone at 300 ℃, while exhibiting a relatively sluggish recovery speed (τ_recov = 1129 s). When 20 wt% Ce is doped, the τ_recov of the sensor significantly decreased to 45 s withholding the fast-responding characteristic (τ_res = 6 s). In addition, the acetone response (resistance ratio, S) of the sensor is as high as 5.8, sufficiently high to detect breath acetone. Moreover, the sensor shows similar acetone sensing characteristics even under a highly humid condition (relative humidity of 60%) in terms of τ_res (6 s), τ_recov (47 s), and S (4.7), demonstrating its high potential in real applications. The excellent acetone sensing characteristics of Ce-doped In₂O₃ nanoparticles are discussed in terms of their size, composition, phase, and oxygen adsorption on the sensing surface.

• 센서학회지
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• 제19권2호
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• pp.87-91
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• 2010

Hydrogen gas sensors were fabricated using $PdO_x$ loaded with SWNTs. The nanoparticle powders of $SWNT_s-PdO_x$ composite were deposited on Si wafer substrates by a vacuum filtering deposition method. The fabricated sensors were tested against hydrogen gas. The composition ratio that exhibited the highest response to hydrogen gases was SWNTs : $PdO_x$ = 98 : 2 in wt% ratio at operating temperature of about $150^{\circ}C$. The response and recovery times were shorter than 1.0 min. in presence of 1000 ppm hydrogen.

• 센서학회지
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• 제21권6호
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• pp.451-455
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• 2012

Dense Cr-precursor nano-hexaprisms were prepared by heating the Cr-nitrate aqueous solution containing Hexamethylenetetramine and polyvinylpyrrolidone, which were converted into porous $Cr_2O_3$ nano-hexaprisms containing nanoparticles by heat treatment of Cr-precursors at $600^{\circ}C$ for 2 h in air atmosphere. At the sensor temperature of $300^{\circ}C$, porous $Cr_2O_3$ nano-hexaprism showed the high response ($R_g/R_a$, $R_g$: resistance in gas, $R_a$: resistance in air) to 100 ppm $C_2H_5OH$ ($R_g/R_a=69.8$) with negligible cross-responses to 100 ppm CO and 5 ppm $C_6H_6$. The sensitive and selective detection of $C_2H_5OH$ in porous $Cr_2O_3$ nano-hexaprism were discussed in relation to the morphology of nanostructures.

• 한국재료학회지
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• 제20권11호
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• pp.623-627
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• 2010

Semiconducting metal oxides have been frequently used as gas sensing materials. While zinc oxide is a popular material for such applications, structures such as nanowires, nanorods and nanotubes, due to their large surface area, are natural candidates for use as gas sensors of higher sensitivity. The compound ZnO has been studied, due to its chemical and thermal stability, for use as an n-type semiconducting gas sensor. ZnO has a large exciton binding energy and a large bandgap energy at room temperature. Also, ZnO is sensitive to toxic and combustible gases. The NO gas properties of zinc oxide-single wall carbon nanotube (ZnO-SWCNT) composites were investigated. Fabrication includes the deposition of porous SWCNTs on thermally oxidized $SiO_2$ substrates followed by sputter deposition of Zn and thermal oxidation at $400^{\circ}C$ in oxygen. The Zn films were controlled to 50 nm thicknesses. The effects of microstructure and gas sensing properties were studied for process optimization through comparison of ZnO-SWCNT composites with ZnO film. The basic sensor response behavior to 10 ppm NO gas were checked at different operation temperatures in the range of $150-300^{\circ}C$. The highest sensor responses were observed at $300^{\circ}C$ in ZnO film and $250^{\circ}C$ in ZnO-SWCNT composites. The ZnO-SWCNT composite sensor showed a sensor response (~1300%) five times higher than that of pure ZnO thin film sensors at an operation temperature of $250^{\circ}C$.

• Transactions on Electrical and Electronic Materials
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• 제14권5호
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• pp.273-277
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• 2013

A unified potentiostat circuit for both $O_2$- and $H_2O_2$- based electrochemical glucose sensors was proposed and its function was verified by circuit simulations and measurement results of a fabricated chip. This circuit consisted of an operational amplifier, a comparator and current mirrors. The proposed circuit was fabricated with a $0.13{\mu}m$ thick oxide CMOS process and an active area of $360{\mu}m{\times}100{\mu}m$. The measurements revealed an input operation range from 0.5 V to 1.6 V in the $H_2O_2$- based bio-sensor and from 1.7 V to 2.6 V in the $O_2$- based bio-sensor with a supply voltage of 3.3 V. The evaluation results showed that the proposed potentiostat circuit is suitable for measuring the electrochemical cell currents of both $O_2$- and $H_2O_2$- based glucose sensors.

• 센서학회지
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• 제22권4호
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• pp.302-307
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• 2013

The Sb-doped $SnO_2$ nanowire network sensors were prepared by thermal evaporation of the mixtures between tin and antimony powders. Pure $SnO_2$ nanowire networks showed high sensor resistance in air ($99M{\Omega}$), similar gas responses to 4 diffferent gases (5 ppm $C_2H_5OH$, CO, $H_2$, and trimethylamine), and very sluggish recovery speed (90% recovery time > 800 s). In contrast, 2 wt% Sb-doped $SnO_2$ showed the selective detection toward $C_2H_5OH$ and trimethylamine, relatively low resistance ($176k{\Omega}$) for facile measurement, and ultrafast recovery speed (90% recovery times: 6 - 18 s). The change of gas sensing charactersitics by Sb doping was discussed in relation to gas sensing mechanism.

• 센서학회지
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• 제28권5호
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• pp.271-276
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• 2019

Pure and 0.5, 1, 2, 5, and 10 at% of Mo-doped $Co_3O_4$ yolk-shell spheres were synthesized by ultrasonic spray pyrolysis of droplets containing Co nitrate, ammonium molybdate, and sucrose and their gas sensing characteristics to 5 ppm trimethylamine (TMA), ethanol, p-xylene, toluene, ammonia, carbon monoxide, and benzene were measured at $225-325^{\circ}C$. The sensor using pure $Co_3O_4$ yolk-shell spheres showed the highest response to p-xylene and very low response to TMA at $250^{\circ}C$, while the doping of Mo into $Co_3O_4$ tended to increase the overall responses of gas sensors. In particular, the sensor using 5 at% Mo-doped $Co_3O_4$ yolk-shell spheres exhibited the high response to TMA with low cross-responses to other interfering gases. The high response and selectivity of Mo-doped $Co_3O_4$ yolk-shell spheres to TMA are attributed to the electronic sensitization by higher valent Mo doping and acid-base interaction between TMA and Mo components.