Effect of annealing temperature on the Structural, Electrical, Optical Properties of ATO Thin Films by RF Magnetron Sputtering (RF Magnetron Sputtering법에 의해 증착된 ATO박막의 열처리에 따른 구조적, 전기적, 광학적 특성 변화)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2007.11a
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- pp.335-335
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- 2007