• 멤브레인
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• 제21권1호
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• pp.55-61
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• 2011

고상반응법을 이용하여 $BaCo_{0.7}Fe_{0.22}Nb_{0.08}O_{3-{\delta}}$ (BCFN) 조성의 산화물을 합성하였으며, 합성된 분말은 압축 성형 후 $1,200^{\circ}C$에서 소결하여 치밀한 세라믹 분리막을 제조하였다. 제조된 $BaCo_{0.7}Fe_{0.22}Nb_{0.08}O_{3-{\delta}}$ 분리막의 XRD 분석결과 단일상의 페롭스카이트 구조를 보였다. 밀봉재료로 glass ring을 사용하여 가스누출 실험 및 산소투과 분석을 하였으며, 산소투과 분석 결과 온도와 산소분압($Po_2$)이 증가할수록 산소투과량은 증가하였고, $Po_2$ = 0.63 atm의 경우 $950^{\circ}C$에서 $2.3mL/min{\cdot}cm^2$의 값을 나타내었다. 또한, 이산화탄소 300 ppm이 포함된 혼합공기를 사용할 경우 모사공기($Po_2$ = 0.21 atm)를 사용한 경우에 비해 산소투과량이 최대 2.9%만 감소하였다. 이는 $BaCo_{0.7}Fe_{0.22}Nb_{0.08}O_{3-{\delta}}$ 분리막이 다른 분리막에 비해 이산화탄소에 대해 안정하다는 것을 의미한다.

• Journal of Chest Surgery
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• 제34권9호
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• pp.704-710
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• 2001

심장수술을 위한 심정지 기간 중에 우리 몸의 혈액순환을 대신하는 인공심폐기에 의한 체외순환은 생명유지를 위하여 필수적인 과정이다. 그러나 혈액이 정상적인 혈관 이외의 부위에 노출됨으로서 발생하는 전신성 염증반응과 활성화된 백혈구는 치명적인 심폐부종을 초래하기도 한다. 저자는 이러한 위험을 줄이는 방법을 모색하고자, 인공심폐기를 구성하고 있는 산화기 및 회로르 채우는 충진액을 백혈구를 제거한 혈액성 충진액과 백혈구를 제거하지 않은 혈액성 충진액 및 비혈액성 충진액으로 구분하여 각각 체외순환을 시행한 후에 충진액내의 동종혈액의 백혈구가 심폐부종에 미치는 영향을 비교 관찰하였다. 대상 및 방법: 실험군은 15마리의 한국산 잡견을 충진액의 성분에 다라 비혈액성 정질용액, 백혈구를 제거하지 않은 동종혈액성 충진액, 백혈구를 제거한 동종혈액성 충진액을 사용한 군으로 각각 다섯 마리씩 세 군으로 나누었다. 세 군 모두에서 2시간의 체외순환 및 연속된 4시간의 마취유지 경과후에 폐조직 일부와 심근조직 일부를 적출하여 습건중량비를 비교하고, 동맥혈 가스분압과 동맥혈 이산화탄소분압 및 동맥혈 이산화탄소분압과 호기말 이산화탄소분압의 차이를 관찰하여 각 군간의 폐 환기능을 비교하였다. 결과: 1. 각 군간의 동맥혈 산소분압 및 이산화탄소분압의 유의한 차이는 없었다. 2. Pa$CO_2$-Et$CO_2$값으로 판단한 폐 환기능의 정도는 비혈액성 충진액을 사용한 군과 혈액성 충진액을 사용한 군 사이의 유의한 차이가 없었으나, 백혈구 제거군이 백혈구를 제거하지 않은 군보다 좋은 결과를 보였다(P<0.05). 3. 심근 및 폐조직의 습건중량비(Wet/Dry weight ratio)는 비혈액성 충진액을 사용한 군과 백혈구를 제거하지 않은 동종혈액성 충진액을 사용한 군간의 차이는 없었으나, 백혈구 제거군이 다른 두 군보다 유의하게 적게 나타났다. 결론: 위와 같은 실험 결과를 통하여 백혈구를 제거한 동종혈액을 사용한 충진액이 체외순환 후 나타나는 폐 환기능의 변화 및 심폐부종의 발생을 경감시키는데 효과가 있음을 관찰할 수 있었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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• pp.801-803
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• 1998

We investigated Pt and $RuO_2$ as a bottom electrode and PZT thin film for ferroelectric applications. XRD examination shows that a mixed phase of (111) and (200) Pt peak for the temperature ranged from RT to $200^{\circ}C$, and a preferred (111) orientation for the substrate temperature of $300^{\circ}C$. From the XRD and AFM results, we recommend the substrate temperature of $300^{\circ}C$, 80 W for the Pt bottom electrode growth. From the study of an oxygen partial pressure from 0 to 50%, we learned that only Ru metal was grown with $0{\sim}5%$, a mixed phase of Ru and $RuO_2$ for $10{\sim}40%$, pure $RuO_2$ at 50%. Having optimized the bottom electrode growth conditions, we employed two step process in PZT film capacitor: PZT film growth at the low substrate temperature of $300^{\circ}C$ and then post RTA anneal treatments. PZT films were randomly oriented on $RuO_2$ and (110) preferentially oriented on Pt electrode. Leakage current density of PZT film demonstrated two to three orders higher for $RuO_2$ bottom electrode. From C-V results we observed a dielectric constant of PZT film higher than 1200. This paper presents the optimized process conditions of the bottom electrodes and properties of PZT thin films on these electrodes.

• 한국재료학회지
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• 제5권6호
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• pp.706-714
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• 1995

원거리 플라즈마 화학증착법을 이용하여 저온에서 이산화규소박막을 제조하였다. 본 연구 에서는 공정변수인 기판의 온도, 반응기체의 조성 및 분압과 플라즈마 전력에 따른 산화막의 재료적인 물성을 평가하였다. XPS결과에서 산화막은 양론비(O/Si=2)보다 약간 적어 실리콘이 많이 함유된 막으로 나타났다. 이 경우 굴절율과 ESR분석에 의해 미결합된 실리콘의 양이 증가함을 알 수 있었다. SIMS분석에 의해 미량의 질소성분이 계면에 존재하는 것과 실리콘 미결함을 관찰하였다. FT-IR로부터 막내 수소량을 정량화하였으며 결합각 분포는 20$0^{\circ}C$이상에서 열산화막과 비슷한 값을 얻었다. 하지만 열산화막에 비해 높은 식각율을 보여 계면 스트레스에 의해 막내의 결합력이 약해진 것으로 생각된다.

• 한국표면공학회지
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• 제51권4호
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• pp.231-236
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• 2018

We report p-type electrical characteristics of the amorphous $La_2NiO_{4+{\delta}}$ thin films which were sputtered on the glass substrates using an RF sputtering system. As-deposited thin films at room temperature and $300^{\circ}C$ were amorphous in nature. Post-annealing of the thin film samples over $400^{\circ}C$ resulted in the nano-crystallization of the $La_2NiO_{4+{\delta}}$. The electrical properties of the films were much dependent on the oxygen partial pressure, temperature of the post-annealing and sputtering ambient. The as-deposited samples at room temperature show a hole concentration of $7.82{\times}10^{13}cm^{-3}$, and it could be increased as high as $3.51{\times}10^{22}cm^{-3}$ when the films were post-annealed in an oxygen atmosphere at $500^{\circ}C$. Such p-type conductivity behavior of the $La_2NiO_{4+{\delta}}$ films suggests that the amorphous and nano-crystallized $La_2NiO_{4+{\delta}}$ films have potential for the application as p-type semiconductive or conductive materials at low temperatures where material diffusion is limited.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 D
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• pp.1549-1551
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• 1998

We have designed and developed narrow bandpass multipole filters for satellite communication using $YBa_2Cu_3O_{7-x}$(YBCO) thin films on MgO substrates. The superconducting film used in this study was prepared by laser ablation on one side polished MgO (100) substrates. A Nd:YAG laser was used to fabricate YBCO thin films. The wave length of the laser was 355 nm. The laser beam was focused onto a YBCO target rotating linearly to avoid deep craters that may eject macroscopic YBCO particles. The YBCO films were grown at $750^{\circ}C$ in the oxygen partial pressure of 200 mTorr. The deposited YBCO thin films were patterned by conventional wet-etching method. The transition temperatures of YBCO thin films were 85 - 88 K and the film thicknesses were about 5,000 $\AA$. By comparing the performances of normal-metal filters and YBCO filters, we observed that superconducting YBCO multipole filters have been showed superior performances at 77 K.

• 한국방사성폐기물학회:학술대회논문집
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• 한국방사성폐기물학회 2004년도 학술논문집
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• pp.105-114
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• 2004

This study investigated the thermal behavior of the nuclear graphite waste generated from the decommissioning of the Korean nuclear research reactor, The first part study investigated the decomposition rate of the nuclear graphite waste up to $1000^{\circ}C$ under various oxygen partial pressures using a thermo-gravimetric analyzer (TGA). Tested graphite waste sample not easily destroyed in the oxygen-deficient condition. However, the gas-solid oxidation reaction was found to be very effective in the presence of oxygen. No significant amount of the product of incomplete combustion was formed even in the limited oxygen concentration of 4% $O_2$. The influence of temperature and oxygen partial pressure was evaluated by the theoretical model analysis of the thermo-gravimetric data. The activation energy and the reaction order of graphite oxidation were evaluated as 128 kJ/mole and 1.1, respectively. The second part of this study investigated the behavior of radioactive elements under graphite oxidation atmosphere using thermodynamic equilibrium model. $^{22}Na$, $^{134}Cs$ and $^{137}Cs$ were found be the semi-volatile elements. Since volatile uranium species can be formulated at high temperatures above $1050^{\circ}C$, the temperature of incinerator furnace should be minimized. Other corrosion/activation products, fission products and uranium were found to be the non-volatile species.

• 한국자기학회지
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• 제15권2호
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• pp.130-132
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• 2005

Tungsten carbon nitride (W-C-N) thin films were produced by reactive radio frequency (RF) magnetron sputter-ing of tungsten in $Ar-N_2$ gas mixture. The effects of the variation of nitrogen partial pressure on the composition, and structural properties of these films as well as the influence of post-deposition annealing have been studied. When $La_{0.67}Sr_{0.33}MnO_3$ was coated on the W-C-N/Si substrate, coercivity ($H_c$) and magnetization at room temperature shows 58.73 Oe, and 29.4 emu/cc, respectively. In order to improve the diffusion barrier characteristics, we have studied the impurity behaviors to control the ratios of nitrogen and carbon concentrations.

• 한국세라믹학회지
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• 제43권12호
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• pp.852-858
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• 2006

It is well known that $BaMgAl_{10}O_{17}:Eu^{2+}$ (BAM) and $CaMgSi_2O_6:Eu^{2+}$ (CMS) are a highly efficient blue phosphor. However, these phosphors in the form of thin films have not yet been realized clue to technical difficulties. We prepared thin film type BAM and CMS phosphors on quartz glass substrate using a pulsed laser deposition technique. The luminescent and structural properties of thin film phosphors were monitored as a function of key processing parameters such as oxygen partial pressure inside the deposition chamber, deposition time, laser energy density and the type of post-deposition treatments used. Even though we could not obtain single homogenous phases, thin films with large homogenous areas and a high photoluminescence could be produced by optimizing these processing parameters.

• The Korean Journal of Ceramics
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• 제6권4호
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• pp.401-404
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• 2000

Mimicking the bacterial synthesis of magnetosomes, in which the functionalized surface of a cytoplasmic (lipid) membrane is considered to be stimulating the crystal growth of magnetite, we have successfully grown magnetite films at $30^{\circ}C$ using an arachic acid monomolecular layer as a functionalized surface. The lipid monomolecular layer was spread on an aqueous solution of FeCl$_2$ which was oxidized by flowing a mixed gas, with ratio $O_2$/$N_2$=1/2000, on the surface of the lipid layer. Mossbauer and X-ray diffraction analyses revealed that the Fe$_3$O$_4$ films contain small amounts of ferric hydroxyl impurity phases of ${\alpha}$-FeOOH and ${\tau}$-FeOOH. This is because the oxygen partial pressure at the ferrite/aqueous interface changed as the film (through which the gas penetrated) increased in thickness. Methods to obtain single phase magnetite films are proposed.