• Title/Summary/Keyword: $O_2$ partial pressure

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The Effect of Tail State on the Electrical and the Optical Properties in Amorphous IGZO (비정질 InGaZnO4 박막의 전기적, 광학적 특성간의 상관관계 연구)

  • Bae, Sung-Hwan;Yoo, Il-Hwan;Kang, Suk-Ill;Park, Chan
    • Journal of the Korean Ceramic Society
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    • v.47 no.4
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    • pp.329-332
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    • 2010
  • In order to investigate the effect of tail state on the electrical and the optical properties in amorphous IGZO(a-IGZO), a-IGZO films were deposited at room temperature on fused silica substrats using pulsed laser deposition method. The laser pulse energy was used as the processing parameter. In-situ post annealing was carried out at $150^{\circ}C$ right after the film deposition. The $O_2$ partial pressure during the deposition and the post annealing was fixed to 10mTorr. The carrier mobility of the a-IGZO films had a range from 2 to $18\;cm^2/Vs$ at carrier concentrations greater than $10^{18}\;cm^{-3}$. As the laser energy density increased, the Hall mobility increased. And post annealing improved the Hall mobility, as well. The optical property was examined using the ultraviolet-visible spectroscopy. The a-IGZO films that have low Hall mobility exhibited stronger and broader absorption tails in >3.0 eV region. Post annealing reduced the intensity of the tail-like absorption. The absorption tail in a-IGZO films is an important factor which affects the electrical and the optical properties.

A High-Resolution Transmission Electron Microscopy Study of the Grain Growth of the Crystalline Silicon in Amorphous Silicon Thin Films (비정질 실리콘 박막에서 결정상 실리콘의 입자성장에 관한 고분해능 투과전자현미경에 의한 연구)

  • 김진혁;이정용;남기수
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.31A no.7
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    • pp.85-94
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    • 1994
  • A high-resolution transmission electron microscopy study of the solid phase crystallization of the amorphous silicon thin films, deposited on SiOS12T at 52$0^{\circ}C$ by low pressure chemical vapor deposition and annealed at 55$0^{\circ}C$ in a dry N$_{2}$ ambient was carried out so that the arrangement of atoms in the crystalline silicon and at the amorphous/crystalline interface of the growing grains could be understood on an atomic level. Results show that circular crystalline silicon nuclei have formed and then the grains grow to an elliptical or dendritic shape. In the interior of all the grains many twins whose{111} coherent boundaries are parallel to the long axes of the grains are observed. From this result, it is concluded that the twins enhance the preferential grain growth in the <112> direction along {111} twin planes. In addition to the twins. many defect such as intrinsic stacking faults, extrinsic stacking faults, and Shockley partial dislocations, which can be formed by the errors in the stacking sequence or by the dissociation of the perfect dislocation are found in the silicon grain. But neither frank partial dislocations which can be formed by the condensation of excess silicon atoms or vacancies and can form stacking fault nor perfect dislocations which can be formed by the plastic deformation are observed. So it is concluded that most defects in the silicon grain are formed by the errors in the stacking sequence during the crystallization process of the amorphous silicon thin films.

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The Effect of Substrate Temperature on Superconducting Properties of YBCO Films Prepared by Spray Pyrolysis Method using Metal Nitrate Precursors (분사열분해 CVD 법으로 증착된 YBCO 박막의 특성에 미치는 기판 온도의 영향)

  • Kim, Jae-Geun;Hong, Suk-Kwan;Yu, Seok-Koo;Cho, Han-Woo;Kim, Byung-Joo;Ahn, Ji-Hyun;Hong, Gye-Won;Lee, Hee-Gyoun
    • Progress in Superconductivity
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    • v.9 no.1
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    • pp.102-106
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    • 2007
  • YBCO films have been synthesized using a spray pyrolysis method. We used nitrates of Y, Ba, Cu as precursors. Deposition was made on $LaAlO_3$ (100) single crystal substrate by spraying the mist of aqueous precursor solution generated by a concentric nozzle. The distance between concentric nozzle and substrate was 15 cm. C-axis oriented films were obtained at deposition temperature of $740{\sim}800^{\circ}C$ and working pressure of 20 Torr. Oxygen partial pressure was 3 Torr and substrate was transported with the speed ranging from 0.23 cm/min to 0.7 cm/min by reel to reel. Scanning electron microscope (SEM) and X-ray diffraction (XRD) observation revealed that films are smooth and highly textured with (001) planes parallel to substrate. Highest critical current density (Jc) was $1.38\;MA/cm^2$ at 77K and self-field for the film with a thickness of $0.5\;{\mu}m$ prepared at a substrate temperature of $780^{\circ}C$ and $PO_2\;=3\;Torr$. The effect of temperature on the microstructure and YBCO phase formation will be discussed.

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Effect of Inhaled Nitric Oxide on Hemodynamics, Gas Exchange and Pulmonary Inflammation in Newborn Piglets with Escherichia coli Induced Septic Lungs (패혈성 폐가 유도된 신생자돈에서 외인성 Nitric Oxide 흡입의 혈역학, 가스교환 및 폐 염증에 대한 효과)

  • Chang, Yun Sil;Ko, Sun Young;Park, Won Soon
    • Clinical and Experimental Pediatrics
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    • v.46 no.8
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    • pp.777-783
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    • 2003
  • Purpose : The aim of this study was to evaluate the effect of inhaled nitric oxide(iNO) on gas exchange, hemodynamics and pulmonary inflammation in newborn piglets with E. coli induced septic lung. Methods : Twenty three instrumented and ventilated piglets were randomized into three groups : CON(n=6), PCON(n=9), and PNO(n=8). In the piglets of the PCON and PNO groups, E. coli septic lung was induced by endotracheal instillation of E. coli. Ten ppm iNO was given continuously in the PNO group after endotracheal instillation of E. coli. All animals were mechanically ventilated for six hour with a peak inspiratory pressure of 30 $cmH_2O$, frequency of 25 breaths/min, $FiO_2$ 1.0 and a positive end-expiratory pressure of 4 $cmH_2O$. All measurements were made at one hour intervals during the experiment. At the end of the experiment, lung tissue was harvested for the analysis of myeloperoxidase activity, indicative of lung inflammation. Results : All piglets with pulmonary instillation of E. coli developed E. coli sepsis. Piglets in the PCON group developed progresseve pulmonry hypertension, hypoxemia and hypercarbia compared to the CON group due to increased pulmonary vascular resistance, intrapulmonary shunt fraction and physiologic dead space fraction. iNO did not reverse pulmonary hypertension in the PNO group. However iNO significantly improved oxygenation, which was attributed to marked improvement of venous admixture and partial attenuation of increase in dead space fraction. Increased myeloperoxidase activity in PCON compared to CON was significantly attenuated in PNO. Conclusion : iNO improves oxygenation and lung inflammation in newborn piglets with E. coli induced septic lung.

Near Infrared Diffuse Reflectance Spectroscopy to Measure Pulmonary Edema

  • Larry Leonardi;David H.Burns;Luis Openheimer;Rene P.Michel
    • Near Infrared Analysis
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    • v.2 no.1
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    • pp.43-53
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    • 2001
  • A non-invasive spectroscopic method is presented for the measurement of pulmonary edema. Both early diagnosis and quantitative edema estimates were investigated. The spectroscopic determination of pulmonary edema involved the acquisition of diffuse reflectance spectra in the near-infrared (NIR) region with change in water concentration - water is the main constituent of edema fluid. Pulmonary edema was induced into the excised perfused lungs of seven animals by elevating the hydrostatic pressure. Estimates of edema were ascertained from a partial least squares regression of the measured spectral response. Actual edema was determined from the change (increase) in total lung weight. Estimates in relative lung weight increases due to in vitro edema were made with the near infrared spectra. The results revealed that fluid accumulation produced spectral changes in the O-H and C-H absorptions as well as scattering changes in the spectra. Histology of the lung was used to verify the presence or absence of interstitial and alveolar edema. Results demonstrated that near infrared spectroscopy might provide a new tool for clinical assessment of pulmonary edema.

Characteristics of CrOx Thin-films for High Precision Resistors (고정밀저항용 크롬산화박막의 특성)

  • Seo, Jeong-Hwan;Noh, Sang-Soo;Lee, Eung-Ahn;Kim, Kwang-ho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.3
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    • pp.253-258
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    • 2005
  • This paper presents characteristics of CrOx thin-film, which were deposited on $Al_2$O$_3$ wafer by DC reactive magnetron sputtering in an argon-oxide atmosphere for high temperature applications. The present paper deals with a study of the technological characteristics of thin film resistors to provide a control in obtaining temperature coefficients of resistance of given value. The optimized condition of CrOx thin-film were thickness range of 2500 $\AA$ and annealing condition(350 $^{\circ}C$, 1 hr) in oxide partial pressure(3.5${\times}$10$^{-4}$ torr). Under optimum conditions, the CrOx thin-films is obtained a high resistivity, p=340 $\mu$Ωcm, a low temperature coefficient of resistance, TCR=-55 ppm/$^{\circ}C$. The CrOx thin films resistors which were fabricated in this paper had excellent characteristics as high precision resistors.

Quality Management of ITO Thin Film for OLED Based on Relationship of Fabrication and Characteristics (OLED용 ITO박막의 공정조건과 품질특성 추론에 근거한 품질관리)

  • Seo, Jeong-Min;Park, Keun-Young;Lee, Sang-Ryong;Lee, Choon-Young
    • Journal of Institute of Control, Robotics and Systems
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    • v.14 no.4
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    • pp.336-341
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    • 2008
  • Recently, research on a flat panel display(FPD) has focused on organic light-emitting display(OLED) which has wide angle of view, high contrast ratio and low power consumption. ITO(Indium-Tin-Oxide) films are the most widely used material as a transparent electrode of OLED and also in many other display devices like LCD or PDP. The performance and efficiency of OLED is related to the surface condition of ITO coated glass substrate. The typical surface defect of glass substrate is measured for electric characteristics and physical condition for transmittance and roughness. Since ITO coated glass substrate can be destroyed for inspection about surface roughness, sheet resistance, film thickness and transmittance, precise fabrication condition should be made based on the estimated relationship. In this paper, ITO films were prepared on the commercial glass substrate by the Ion-Plating method changing the partial pressure of gas(Ar, 02) and the chamber temperature between $200^{\circ}C$ and $300^{\circ}C$. The characteristics of films were examined by the 4-point probe, supersonic thickness measurement, transmittance measurement and AFM. We estimated the relationship between processing parameters(Ar gas, O2 gas, Temperature) and properties of ITO films (Sheet Resistance, Film Thickness, Transmittance, Surface Roughness).

The Effect of Emission Control Using Electrolytic Seawater Scrubber

  • An, Suk-Heon
    • Journal of Advanced Marine Engineering and Technology
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    • v.33 no.3
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    • pp.373-377
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    • 2009
  • It is well known that SOx and NOx concentration has a considerable influence on the $N_2O$ emission of the greenhouse gas properties. The quantity of SOx generated during combustion, on fuel specific basis, is directly related to the sulfur content of the fuel oil. However, restricting the fuel oil sulfur content is only a partial response to limiting the overall quantity of SOx emissions, as there remains no over control on the fuel oil consumption other than the commercial pressure which have always directed the attention. This study was carried out as a new basic experiment method of emission control, manly targeted to the vessel. In the experiment, where the scrubbing was achieved through spray tower with high alkaline water made from the electrolysis of seawater, the combined action was to neutralize the exhaust gases (SOx, PM, CO etc.), dilute it, and wash it out. The results showed that SOx reduction of around 95 percent or over could be achieved when using in the high alkaline water, and also leaded to a reduction in the stability of the each pollutant components including the PM (Particulate Matter). The results suggest that the seawater electrolysis method has a very effective reduction of emissions without heavy cost, or catalysts particularly on board.

The Property Change of ITO Prepared by Reactive R.F. Sputtering in POP manufacturing Process (반응성 스퍼트링으로 형성된 ITO의 유전채 소성에 따른 특성변화)

  • Nam, Sang-Ok;Chi, Sung-Won;Sohn, Je-Bong;Huh, Keun-Do;Cho, Jung-Soo;Park, Chung-Hoo
    • Proceedings of the KIEE Conference
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    • 1997.07d
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    • pp.1411-1413
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    • 1997
  • The thin film that is electrically conductive and optically transparent is called conductive transparent thin film. ITO(Indium-Tin Oxide) which is a kind of conductive transparent thin film has been widely used in solar cell, transparent electrical heater, selective optical filter, FDP(Flat Display Panel) such as LCD (Liquid Crystal Display), PDP(Plasma Display Panel) and so on. Especially in PDP, ITO films is used as a transparent electrode in order to maintain discharge and decrease consumption power through the improvement of cell structure. In this study, we prepared ITO by reactive r.f. sputtering with indium-tin(Sn wt 10%) alloy target instead of indium-tin oxide target. The ITO films deposited at low temperature $150^{\circ}C$ and 8% $O_2$ partial pressure showed about $3.6{\Omega}/{\square}$. At the end of firing, the resistance of ITO was decreased, the optical transparence was improved above 90%.

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Electrochemical stability of La0.6Sr0.4Co0.2Fe0.8O3-δ as a cathode for SOFC

  • Oh, Mi-Young;Jeong, Yong-Hoon;Oh, Se-Woong
    • Journal of the Korean institute of surface engineering
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    • v.49 no.6
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    • pp.498-506
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    • 2016
  • Electrochemical measurement using a LSCF6428 electrode was performed to estimate the oxygen potential gradient in the electrode layer and a long time stability test was performed by applied potential to learn the overpotential effect on the LSCF6428 electrode. By fitting the observed impedance spectra, it was obtained that the amount of faradic current decreased with distance from cathode/electrolyte interface. Oxygen potential gradient was estimated to occur within 1 um region from the cathode/electrolyte interface at an oxygen partial pressure of 10-1 bar. The segregation of cation rich phases in the LSCF6428 electrode suggests that kinetic decomposition took place. However, impedance response after applying the potential showed no changes in the electrode compared with before applying potential. The obtained results suggest that segregation of a secondary phase in a LSCF6428 cathode is not related to performance degradation for solid oxide fuel cells (SOFCs).