• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.04b
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• pp.38-41
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• 2004

The oxidizer plays an important role in the metal chemical mechanical polishing(CMP) slurry. Currently, the oxidizer used in CMP slurry is nearly divided into several kinds such as $Fe(NO_3)_3$, $H_2O_2$, $KIO_3$, and $H_5IO_6$. It is generally known that oxidizer character of $H_2O_2$ is more effective than other oxidizers. In this work, we have been studied the characteristics for the $H_2O_2$ concentration of copper slurry, which can applicable in the recent semiconductor manufacturing process. Also, it plays an important role in the planarization of copper films using copper slurries during micro-electronic device fabrication. In this work, we confirmed that removal rate of Cu/TaN changed by $H_2O_2$ concentration on copper slurry. And we used $KMnO_4$ in the measurement method of $H_2O_2$. In analysis results, we confirmed that the difference of results is large. We thought that the difference was due to organic component existence. So in titration method of $H_2O_2$ concentration, we used $Na_2S_2O_3$ instead of $KMnO_4$ as solution. Consequently, using the titration method, we could calculate correct data reduced error. And $H_2O_2$ concentration has been adjusted to the target concentration of 0.1 wt%.

• Journal of the Semiconductor & Display Technology
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• v.16 no.4
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• pp.86-90
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• 2017

$Tb^{3+}$ or $Eu^{3+}$ or $Ce^{3+}$-doped $CaYAlO_4$ phosphor were synthesized by solid-state method. $CaYAlO_4:Tb^{3+}$ is shown that the $Tb^{3+}$-doping concentration has a significant effect on the $^5D_4/^5D_3{\rightarrow}7F_J$ (J=6,...,0) emission intensity of $Tb^{3+}$. The $CaYAlO_4:Tb^{3+}$ phosphors show tunable photoluminescence from blue to yellow with the change of doping concentration of $Tb^{3+}$ ions. The $CaYAlO_4:Eu^{3+}$ phosphors exhibit a red-orange emission of $Eu^{3+}$ corresponding to $^5D_0$, $_{1,2}{\rightarrow}^7F_J$ (J=4,...,0) transitions. The $CaYAlO_4:Ce^{3+}$ phosphors show a blue emission due to $Ce^{3+}$ ions transitions from the 5d excited state to the $^2F_{5/2}$ and $^2F_{7/2}$ ground states. The decay time of $CaYAlO_4:Tb^{3+}$ phosphors decrease from 1.33 ms to 0.97 ms as $Tb^{3+}$ concentration increases from 0.1 mol% to 7 mol%. The decay time of $CaYAlO_4:Eu^{3+}$ phosphors increase from 0.94 ms to 1.17 ms as $Eu^{3+}$ concentration increases from 1 mol% to 9 mol%.

• Journal of odor and indoor environment
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• v.16 no.3
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• pp.277-286
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• 2017

The objectives of this study were to investigate the effects of $PM_{10}$ and $O_3$ concentration on the symptoms of allergic diseases. The questionnaire was used to determine whether or not symptoms of allergic diseases were present from September to October 2012. The air pollution concentration data used was the corresponding point CEM (continuous emission monitoring) data. The average concentration of $PM_{10}$ was $56.09{\mu}g/m^3$ in the control area, and the concentration in the exposed area was $40.44{\mu}g/m^3$. In the two areas, concentration of $O_3$ was 28.73 ppb and 28.74 ppb, respectively. The total average concentrations of $PM_{10}$ and $O_3$ were $45.66{\mu}g/m^3$ and 28.73 ppb in the Gwangyang area. The rate of asthma diagnosis was higher in the control area (9.6%) than in the exposed area (4.1%), but the rate of allergy eye disease was higher in the exposed area (23.9%) than in the control area (16.5%). There was a significant difference in the symptoms of some allergic diseases when the relative concentration of $PM_{10}$ and $O_3$ were high and low.

• Journal of the Optical Society of Korea
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• v.16 no.4
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• pp.414-417
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• 2012

The effect of cerium concentration and the addition of $Sb_2O_3$ on the light emission of cerium-contained glass were investigated. The glass matrix composition was $20Y_2O_3-25Al_2O_3-55SiO_2$, the $CeO_2$ concentration ranged from 0.05 to 0.5 mol%, and $Sb_2O_3$ was added at concentrations of 0.02 to 0.1 mol%. The $Ce^{3+}$ and $Ce^{4+}$ absorption bands were observed at approximately 330 nm and 240 nm, respectively. A broad emission band at 400 nm, due to the 4f-5d transition of the $Ce^{3+}$ ion, was observed under illumination by a UV light at 330 nm. The photoluminescence intensity of $Ce^{3+}$ had a maximum value at a $CeO_2$ concentration of 0.1 mol%. Adding $Sb_2O_3$ decreased the $Ce^{4+}$ absorption intensity and enhanced the light emission intensity of $Ce^{3+}$ by about 45%.

• 연구논문집
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• s.33
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• pp.99-109
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• 2003

Recently the utilization of the ozone dissolved de-ionized water(DIW-$O_3$) in semiconductor wet cleaning process and photoresist stripping process to replace the conventional sulfuric acid and hydro peroxide mixture(SPM) method has been studied. In this paper, we propose the water-electrode type ozone generator which has the characteristics of the high concentration and purity to produce the high concentration DIW-$O_3$ for the photoresist strip process in the semiconductor fabrication. The proposed ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. Through this study, we obtained the results of the 10.3 wt% of ozone gas concentration at the oxygen gas of 0.5 [liter/min.] and the DIW-$O_3$ concentration of 79.5 ppm.. Through the photoresist stripping test using the produced DIW-$O_3$, we confirmed that the photoresist coated on the silicon wafer was removed effectively in the 12 minutes.

• Journal of Environmental Science International
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• v.3 no.4
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• pp.357-365
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• 1994

Air pollution characteristics and the influence of sea breeze on air pollution concentration were studied using the data measured at 7 air quality continuous monitoring stations in Pusan, 1993. Maximum air pollution concentration in Pusan was Gamjeondong for $SO_2$, Sinpyeongdong for TSP, Daeyeondong for $O_3, Kwangbokdong for $NO_2$, Beomcheondong for CO and all substances were under annual ambient air quality standards. Increased rate of concentration for sea breeze was 24.4% for 502, 31.5% for TSP, 8.0% fort $O_3, 26.7% for $NO_2$, 15.7% for CO. Frequencies distribution of $SO_2$, TSP, $O_3$, $NO_2$, and CO concentration for sea breeze moved toward high concentration class.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09a
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• pp.424-425
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• 2006

The effects of reaction temperature and precursor concentration on the microstructure and magnetic properties of ${\gamma}-Fe_2O_3$ nanoparticles synthesized as final products of iron acetylacetonate in chemical vapor condensation (CVC) were investigated. Pure ${\gamma}-Fe_2O_3$ phase was obtained at temperature above $900^{\circ}C$ and crystallite size of ${\gamma}-Fe_2O_3$ nanoparticles decreased with lowering precursor concentration. Also, the coercivity decreases with decreasing crystallite size of nanopowder. The lowest coercivity was 7.8 Oe, which was obtained from the ${\gamma}-Fe_2O_3$ nanopowder sample synthesized at precursor concentration of 0.3M. Then, the crystallite size of ${\gamma}-Fe_2O_3$ nanoparticles was 8.8 nm.

• Journal of the Korean Ceramic Society
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• v.48 no.1
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• pp.99-105
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• 2011

Lead titanate ($PbTiO_3$) powder was prepared from lead nitrate ($Pb(NO_3)_2$) and titania ($TiO_2$) by hydrothermal route. Phase formation process was investigated by observing the phases formed in various experimental conditions like different KOH concentration, reaction temperature and time. $PbTiO_3$ powder was fabricated when the KOH concentration was 0.8M or higher. An intermediate compound, $PbTi_{0.8}O_{2.6}$, was formed at first by a reaction between PbO and $TiO_2$ and changed into $PbTiO_3$ powder with a perovskite crystal structure. A $PbTiO_3$ phase was formed in a shorter time when a KOH concentration was increased from 0.8M to 8M because a driving force for a $PbTiO_3$ formation was increased due to an increase in a degree of supersaturation. And $TiO_2$ (rutile) and $3PbO{\cdot}H_2O$ were observed at room temperature in a 0.8M KOH solution and $TiO_2$(rutile) and PbO (litharge) in a 8M KOH. A $PbTiO_3$phase was also formed in a shorter time at a higher reaction temperature as a reaction temperature influenced the rates for a dissolution and a precipitation.

• Journal of Environmental Science International
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• v.32 no.7
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• pp.503-520
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• 2023

In this study, numerical simulations using community multiscale air quality (CMAQ) were conducted to analyze the change in ozone (O₃) concentration due to the reduction in nitrogen oxides (NO_x)andvolatile organic compounds (VOCs) emissions in Busan. When the NO_x and, VOCs emissions were reduced by 40% and, 31%, respectively, the average O₃ concentration increased by 4.24 ppb, with the highest O₃ change observed in the central region (4.59 ppb). This was attributed to the decrease in O₃ titration by nitric oxide (NO) due to the reduction of NO_x emissions in Busan, which is classified as a VOCs-limited area. The distribution of O₃ concentration changes was closely related to NO_x emissions per area, and inland emissions were highly correlated with daily maximum concentrations and 8-h average O₃ concentrations. Contrastingly, the effect of emission reduction depended on the wind direction. This suggests that the emission reduction effects may vary depending on the environmental conditions. Further research is needed to comprehensively analyze the emission reduction effects in Busan.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.14 no.3
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• pp.123-128
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• 2004

Both photoluminescence and the long-phosphorescent properties for $SrAl_2O_4$ : Eu$^{+2}$, $Dy^{+3}$ phosphor powder synthesized by the solid phase reaction were investigated as a function of $B_2O_3$ composition (0-10 wt%). The highest emission wavelength (520nm) of photoluminescence spectra was not affected by $B_2O_3$concentration. The highest emission intensity was obtained by the concentration of 3 wt% $B_2O_3$.After the removal of the Xenon lamp excitation (360nm), also, the excellent long-phosphorescent property of the phosphors was obtained by the concentration of 3 wt% $B_2O_3$ although the decay times for all phosphors decreased exponentially.