• 제목/요약/키워드: $N_2$ plasma treatment

검색결과 411건 처리시간 0.023초

수처리용 유전체 장벽 방전 플라즈마 반응기 개발 (Development of Plasma Reactor of Dielectric Barrier Discharge for Water Treatment)

  • 김동석;박영식
    • 한국환경과학회지
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    • 제21권5호
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    • pp.597-603
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    • 2012
  • Non-thermal plasma processing using a dielectric barrier discharge (DBD) has been investigated as an alternative method for the degradation of non-biodegradable organic compounds in wastewater. The active species such as OH radical, produced by the electrical discharge may play an important role in degrading organic compound in water. The degradation of N, N-Dimethyl-4-nitrosoaniline (RNO) was investigated as an indicator of the generation of OH radical. The DBD plasma reactor of this study consisted of a plasma reactor, recycling pump, power supply and reservoir. The effect of diameter of external reactor (15 ~ 40 mm), width of ground electrode (2.5 ~ 30 cm), shape (pipe, spring) and material (copper, stainless steel and titanium) of ground electrode, water circulation rate (3.1 ~ 54.8 cm/s), air flow rate (0.5 ~ 3.0 L/min) and ratio of packing material (0 ~ 100 %) were evaluated. The experimental results showed that shape and materials of ground were not influenced the RNO degradation. Optimum diameter of external reactor, water circulation rate and air flow rate for RNO degradation were 30 mm, 25.4 cm/s and 4 L/min, respectively. Ground electrode length to get the maximum RNO degradation was 30 cm, which was same as reactor length. Filling up of glass beads decreased the RNO degradation. Among the experimented parameters, air flow rate was most important parameters which are influenced the decomposition of RNO.

The Effects Nitrogen percentage and Processing Time on the AISI 420 martensitic stainless steel during Plasma nitriding

  • 이인섭
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2015년도 추계학술대회 논문집
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    • pp.289-290
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    • 2015
  • In this experiment, nitriding treatment has been performed at $400^{\circ}C$ with various $N_2$ content and with changing processing time on AISI 420 martensitic stainless steel to investigate the expanded martensite layer (${\alpha}^{\prime}_N$ layer) formation behavior. Nitriding was implemented with changing $N_2$ content from 10% to 25% for 15 hrs and processing time was changed from 4hr to 15hr at 25% $N_2$ content. After treatment, the behavior of the ${\alpha}^{\prime}_N$ layer was investigated by optical microscopy, X-ray diffraction, and micro-hardness testing. Potentiodynamic polarization test was also used to evaluate the corrosion resistance of the samples. It was found that the surface hardness and ${\alpha}^{\prime}_N$ layer thickness increases with increasing $N_2$ percentage and processing time. Although their corrosion behaviors are worse than the bare sample.

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회전형 저온 플라즈마 시스템을 이용한 분말식품의 균일한 살균 연구 (A Study of Homogeneous Sterilization of Micro-sized Food Powder by Rotatable Low-Temperature Plasma System)

  • 김명찬;박덕모;한진수;우인봉;김동후;장성은;윤찬석;김인
    • 한국식품영양학회지
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    • 제31권2호
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    • pp.301-307
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    • 2018
  • In this study, a relatively effective process is used to sterilize Escherichia coli on the surface of micro-sized calcium citrate powder using nitrogen and argon as process gases in a low-temperature vacuum plasma treatment. The purpose of this study is to confirm and to introduce the effectiveness of homogeneous surface treatment for the sterilization of fine inorganic powder by the rotatable low-temperature RF plasma system designed by ourselves. The results of the test using 3M petrifilm showed that there were no remarkable spots in the case of the surface of plasma treated powder, whereas the untreated powder showed many blue spots, which indicating that the E. coli was alive. After 5 days, in the same samples, the blue spots were seen to be larger and darker than before, while the plasma-treated powder showed no changes. The results from FE-SEM analysis showed that the E. coli was damaged and/or destroyed by reactive species generated in the plasma space, resulting in the E. coli being sterilized. Furthermore, the sterilization effects according to the selected parameters ($N_2$ and Ar; flow rate 30 and 50 sccm) adapted in this study were mutually similar, regardless of such different process parameters, and this indicates that homogeneous treatment of powder surfaces could be more effective than conventional methods. Therefore, the plasma apparatus used in this study may be a practical method to use in a powerful sterilization process in powder-type food.

Cu seed layer 표면의 플라즈마 전처리가 Cu 전기도금 공정에 미치는 효과에 관한 연구 (Effects of Plasma Pretreatment of the Cu Seed Layer on Cu Electroplating)

  • 오준환;이성욱;이종무
    • 한국재료학회지
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    • 제11권9호
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    • pp.802-809
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    • 2001
  • Electroplating is an attractive alternative deposition method for copper with the need for a conformal and conductive seed layer In addition, the Cu seed layer should be highly pure so as not to compromise the effective resistivity of the filled copper interconnect structure. This seed layer requires low electrical resistivity, low levels of impurities, smooth interface, good adhesion to the barrier metal and low thickness concurrent with coherence for ensuring void-free fill. The electrical conductivity of the surface plays an important role in formation of initial Cu nuclei, Cu nucleation is much easier on the substrate with higher electrical conductivities. It is also known that the nucleation processes of Cu are very sensitive to surface condition. In this study, copper seed layers deposited by magnetron sputtering onto a tantalum nitride barrier layer were used for electroplating copper in the forward pulsed mode. Prior to electroplating a copper film, the Cu seed layer was cleaned by plasma H$_2$ and $N_2$. In the plasma treatment exposure tome was varied from 1 to 20 min and plasma power from 20 to 140W. Effects of plasma pretreatment to Cu seed/Tantalum nitride (TaN)/borophosphosilicate glass (BPSG) samples on electroplating of copper (Cu) films were investigated.

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플라즈마 표면 처리를 이용한 TiO2 MOS 커패시터의 특성 개선 (Improvement in Capacitor Characteristics of Titanium Dioxide Film with Surface Plasma Treatment)

  • 신동혁;조혜림;박세란;오훈정;고대홍
    • 반도체디스플레이기술학회지
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    • 제18권1호
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    • pp.32-37
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    • 2019
  • Titanium dioxide ($TiO_2$) is a promising dielectric material in the semiconductor industry for its high dielectric constant. However, for utilization on Si substrate, $TiO_2$ film meets with a difficulty due to the large leakage currents caused by its small conduction band energy offset from Si substrate. In this study, we propose an in-situ plasma oxidation process in plasma-enhanced atomic layer deposition (PE-ALD) system to form an oxide barrier layer which can reduce the leakage currents from Si substrate to $TiO_2$ film. $TiO_2$ film depositions were followed by the plasma oxidation process using tetrakis(dimethylamino)titanium (TDMAT) as a Ti precursor. In our result, $SiO_2$ layer was successfully introduced by the plasma oxidation process and was used as a barrier layer between the Si substrate and $TiO_2$ film. Metal-oxide-semiconductor ($TiN/TiO_2/P-type$ Si substrate) capacitor with plasma oxidation barrier layer showed improved C-V and I-V characteristics compared to that without the plasma oxidation barrier layer.

Effect of non-thermal plasma on the shear bond strength of resin cements to Polyetherketoneketone (PEKK)

  • Labriaga, Wilmart;Song, So-Yeon;Park, Jin-Hong;Ryu, Jae-Jun;Lee, Jeong-Yol;Shin, Sang-Wan
    • The Journal of Advanced Prosthodontics
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    • 제10권6호
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    • pp.408-414
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    • 2018
  • PURPOSE. This study aimed to assess the effect of non-thermal plasma on the shear bond strength of resin cements to polyetherketoneketone (PEKK) in comparison to other surface treatment methods. MATERIALS AND METHODS. Eighty PEKK discs were subjected to different surface treatments: (1) Untreated (UT); (2) Non-thermal plasma (NTP); (3) Sandblasting with $50{\mu}m$ $Al_2O_3$ particles (SB); and (4) Sandblasting + Non-thermal plasma (SB+NTP). After each surface treatment, the contact angle was measured. Surface conditioning with Visio.Link was applied in all groups after pre-treatment. RelyX Unicem resin cement was bonded onto the PEKK specimens. After fabrication of the specimens, half of each group (n=10) was initially tested, while the other half was subjected to thermocycling ($5^{\circ}C$ to $55^{\circ}C$ at 10,000 cycles). Shear bond strength (SBS) testing was performed using a universal testing machine, and failure modes were assessed using stereomicroscopy. The SBS results were analyzed statistically using one-way ANOVA followed by Tukey's post hoc test. Independent t-test was used to examine the effect of thermocycling (P<.05). RESULTS. The highest SBS values with or without thermocycling were observed with PEKK specimens that were treated with SB+NTP followed by the SB group. The lowest SBS results were observed in the UT groups. CONCLUSION. The shear bond strength between PEKK and resin cements was improved using non-thermal plasma treatment in combination with sandblasting.

다공성 Ni 금속 지지체를 사용한 Pd-Ni 합금 수소 분리막 연구 (A Study on the Pd-Ni Alloy Hydrogen Membrane using the Porous Nickel Metal Support)

  • 김동원;엄기연;김상호;박종수
    • 한국표면공학회지
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    • 제37권5호
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    • pp.289-295
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    • 2004
  • A dense palladium-nikel (Pd-Ni) alloy composite membrane has been fabricated on microporous nickel support mixed with submicron/micron nickel powder instead of mesoporous stainless steel support. Plasma treatment process is introduced as pre-treatment process instead of HCI activation. Pd-Ni alloy composite membrane prepared by electro plating was fairly a uniform and dense surface morphology. The membrane was characterized by permeation experiments with hydrogen and nitrogen gases at temperature 773 K and pressure 2.2 psi. The results showed that hydrogen ($H_2$) permeance was 27 ml/$\textrm{cm}^2$ㆍatmㆍmin and hydrogen/ nitrogen ($_H2$$N_2$) selectivity was 8 at 773 K.

Mechanisms Controlling Feed Intake in Large-type Goats Fed on Dry Forage

  • Sunagawa, K.;Ooshiro, T.;Murase, Y.;Hazama, R.;Nagamine, I.
    • Asian-Australasian Journal of Animal Sciences
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    • 제20권8호
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    • pp.1182-1189
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    • 2007
  • An intracerebroventricular (ICV) infusion of somatostatin 1-28 (SRIF) was used as a thirst-controlling peptide antagonist to investigate whether or not thirst-controlling peptides are involved in the significant decrease in feed intake during the initial stages of feeding large-type goats on dry forage. A continuous ICV infusion of SRIF was conducted at a small dose of $4{\mu}g$ ml/h for 27 h from day 1 to day 2. Goats (n = 5) were fed roughly crushed alfalfa hay cubes for 2 h twice daily and water was given ad libitum. Feed intake was measured during ICV infusion of artificial cerebrospinal fluid (ACSF) and SRIF. The feed intake during SRIF infusion increased significantly compared to that during ACSF infusion. In comparison to the ACSF treatment, plasma osmolality during the SRIF treatment significantly decreased during the first half of the 2 h feeding period. The factor causing the decrease in plasma osmolality during the ICV infusion of SRIF was a decrease in plasma Na, K, Cl, and Mg concentrations. In comparison to the ACSF infusion treatment, parotid saliva secretion volumes during the 2 h feeding period in the SRIF infusion treatment were significantly larger. While there was no significant difference in cumulative water intake (thirst levels) between the SRIF and the ACSF treatments upon conclusion of the 2 h feeding period, based on the plasma osmolality results it is thought that thirst level increases brought about by alfalfa hay cube feeding in the first half of the feeding period were reduced. It is thought that the somatostatin-induced increases in feed intake during the 2 h feeding period in the present experiment were caused by decreases in plasma osmolality brought about by the somatostatin infusion. As a result, it is suggested that the significant decrease in feed intake during the initial stages of feeding in large-type goats given roughly crushed alfalfa hay cubes, was due to the actions of thirst-controlling peptides.

The effects of non-thermal plasma and conventional treatments on the bond strength of fiber posts to resin cement

  • do Prado, Maira;da Silva, Eduardo Moreira;Marques, Juliana das Neves;Gonzalez, Caroline Brum;Simao, Renata Antoun
    • Restorative Dentistry and Endodontics
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    • 제42권2호
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    • pp.125-133
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    • 2017
  • Objectives: This study compared the effect of hexamethyldisiloxane (HMDSO) and ammonia ($NH_3$) plasmas on the bond strength of resin cement to fiber posts with conventional treatments. Materials and Methods: Sixty-five fiber posts were divided into 5 groups: Control (no surface treatment); $H_2O_2$ (24% hydrogen peroxide for 1 min); Blasting (blasting with aluminum oxide for 30 sec); $NH_3$ ($NH_3$ plasma treatment for 3 min); HMDSO (HMDSO plasma treatment for 15 min). After the treatments, the Ambar adhesive (FGM Dental Products) was applied to the post surface (n = 10). The fiber post was inserted into a silicon matrix that was filled with the conventional resin cement Allcem Core (FGM). Afterwards, the post/cement specimens were cut into discs and subjected to a push-out bond strength (POBS) test. Additionally, 3 posts in each group were evaluated using scanning electron microscopy. The POBS data were analyzed by one-way analysis of variance and the Tukey's honest significant difference post hoc test (${\alpha}=0.05$). Results: The Blasting and $NH_3$ groups showed the highest POBS values. The HMDSO group showed intermediate POBS values, whereas the Control and $H_2O_2$ groups showed the lowest POBS values. Conclusion: Blasting and $NH_3$ plasma treatments were associated with stronger bonding of the conventional resin cement Allcem to fiber posts, in a procedure in which the Ambar adhesive was used.

플라즈마 질탄화 & 후산화처리로 S45C강에 형성된 산화막의 마찰거동 (Frictional behaviour of Oxide Films Produced on S45C Steel by Plasma Nitrocarburizing and Post Plasma Oxidation Treatment)

  • 정광호;이인섭
    • 한국재료학회지
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    • 제16권12호
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    • pp.766-770
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    • 2006
  • The frictional behavior of oxide films on top of the plasma nitrocarburized compound layers was investigated in terms of post-oxidation treatment temperatures. The post-oxidation treatment at both temperatures($400^{\circ}C,\;500^{\circ}C$) produced magnetite($Fe_3O_4$) films which led to a significant enhancement in corrosion resistance. However, this process did not result in any improvement in frictional behavior of the nitrocarburized surface. The wear mechanisms were governed predominantly by the abrasive action of the slider on the surface irrespective of the counterface material(SiC and Bearing steel). When the specimen was sliding against a SiC counterface, the oxide films were destroyed during the early stage of the sliding process and the wear debris of the oxide film at the sliding track had a great influence on the friction coefficient. On the other hand, when sliding against a bearing steel counterface, the slider was mainly worn out due to the much higher hardness of the surface hardened layer. The fluctuation of the friction coefficient of $400^{\circ}C$-oxidized/ nitrocarburized specimen is much severer than that of $500^{\circ}C$ specimen, due to the less amount of wear debris.