• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1997년도 춘계학술대회 논문집
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• pp.150-153
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• 1997

Langmuir-Blodgett(LB) technique is one of the ways of fabricating organic ultra-thin films. It is well known that It has the advantage to control the alignment and orientation of the molecules in the films. Metallo-phthalocyanines(MPcs) are sensitive to electron affinitive toxic gaseous molecules, such as NO$_2$, NO, SO$_2$. MPcs are thermal, optical, mechanical, chemical stable. Therefore, it is interesting to prepare phthalocyanine LB films containing copper as a chemical sensor for NO$_2$ and SO$_2$ gas and test their sensitivity to these toxic gases. In this study, thin films of Octa-dodecylosy copper-phthalocyanine were prepared by LB technique. $\pi$-A isotherm, transfer ratio, UV-VIS. spectroscopy of these films were investigated. Also current-voltage(I-V) characteristics of these was auto investigated.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1997년도 춘계학술대회 논문집
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• pp.146-149
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• 1997

It is well known that the metallo-phthalocyanines(MPcs) are sensitive to toxic gaseous molecules, such as NO$_2$, NO, SO$_2$. MPcs are thermally, optica1ly, mechanically and chemically stable. Therefore, it is interesting to prepare phthalocyanine LB films containing tin as a chemical sensor for NO$_2$ and SO$_2$ gas and test their sensitivity to these toxic gases. Frist, in this study, ultra thin films of Octa-dodecyloxy tin-phthalocyanine were prepared on various substrates by LB technique. Langmuir-Blodgett(LB) technique is one of the ways of fabricating organic thin films. It has the advantage to control the alignment and orientation of the molecules in the films. $\pi$-A isotherm and transfer ratio of tin-phthalocyanine derivative. UV-VIS. spectroscopy were investigated. Also intrinsic current-voltage(1-V) characteristics of these films was investigated.

• JSTS:Journal of Semiconductor Technology and Science
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• 제13권4호
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• pp.395-401
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• 2013

In-situ optical emission spectroscopy (OES) is employed for leak detection in plasma etching system. A misprocessing is reported for significantly reduced silicon etch rate with chlorine gas, and OES is used as a supplementary sensor to analyze the gas phase species that reside in the process chamber. Potential cause of misprocessing reaches to chamber O-ring wear out, MFC leaks, and/or leak at gas delivery line, and experiments are performed to funnel down the potential of the cause. While monitoring the plasma chemistry of the process chamber using OES, the emission trace for nitrogen species is observed at the chlorine gas supply. No trace of nitrogen species is found in other than chlorine gas supply, and we found that the amount of chlorine gas is slightly fluctuating. We successfully found the root cause of the reported misprocessing which may jeopardize the quality of thin film processing. Based on a quantitative analysis of the amount of nitrogen observed in the chamber, we conclude that the source of the leak is the fitting of the chlorine mass flow controller with the amount of around 2-5 sccm.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 심포지엄 논문집 정보 및 제어부문
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• pp.45-46
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• 2008

There are various polluting emissions related to the air quality such as $NO_x$, $CO_2$, CO, VOCs, $O_3$, $SO_2$, $CH_4$, $H_2S$, $NH_3$, etc. We need the system that reduces emission of these environment gases and detects risk factors in modern society. Therefore, if we use the USN(Ubiquitous Sensor Network) technology and a MAV(Micro Air Vehicle) Quad Rotor which can be hovering and moving free for setting up the environment gas sensing system, the realtime measurement on environment gases is facilitated and by extension, in application of traffic watchdog, forest fire surveillance and counter-terrorism efforts, we anticipate making better use of a Quad Rotor.

• 대한임베디드공학회논문지
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• 제17권1호
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• pp.19-24
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• 2022

Through the development and dissemination of embedded devices, studies that may help patients are rapidly emerging. Recently, as wearable devices have become one of the ways to diagnose diseases in daily life, they are being studied as a way to assist severely ill patients to lead their daily lives. Among them, a method of detecting and giving signals to detect and solve symptoms using acceleration sensors to diagnose Parkinson's disease is being studied, and there is no study to measure and analyze various factors that can affect Parkinson's disease. To solve them, we designed and developed a wearable device, P-Band, with various sensors capable of diagnosing related symptoms, including acceleration sensors capable of diagnosing Parkinson's disease. In this paper, the overall structure of the P-Band and the description and operation method of the measurable sensors are presented. In addition, it was confirmed that the symptoms of Parkinson's patients could be determined complexly through the results measured in actual patients.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2018년도 춘계학술대회 논문집
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• pp.142.2-142.2
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• 2018

One-dimensional metal oxide nanostructures have attracted considerable research activities owing to their strong application potential as components for nanosize electronic or optoelectronic devices utilizing superior optical and electrical properties. In which, semiconducting $SnO_2$ material with wide-bandgap Eg = 3.6 eV at room temperature, is one of the attractive candidates for optoelectronic devices operating at room temperature [1, 2], gas sensor [3, 4], and transparent conducting electrodes [5]. The synthesis and gas sensing properties of semiconducting $SnO_2$ nanomaterials have become one of important research issues since the first synthesis of SnO2 nanowires. In this study, $SnO_2$ nanowire networks were synthesized on a basis of a two-step process. In step 1, Sn spheres (30-800 nm in diameter) embedded in $SiO_2$ on a Si substrate was synthesized by a chemical vapor deposition method at $700^{\circ}C$. In step 2, using the source of these Sn spheres, $SnO_2$ nanowire (20-40 nm in diameter; $1-10{\mu}m$ in length) networks on a spherical Sn surface were synthesized by a thermal oxidation method at $800^{\circ}C$. The Au layers were pre-deposited on the surface of Sn spherical and subsequently oxidized Sn surface of Sn spherical formed SnO2 nanowires networks. Field emission scanning electron microscopy and high-resolution transmission electron microscopy images indicated that $SnO_2$ nanowires are single crystalline. In addition, the $SnO_2$ nanowire is also a tetragonal rutile, with the preferred growth directions along [100] and a lattice spacing of 0.237 nm. Subsequently, the $NO_2$ sensing properties of the $SnO_2$ network nanowires sensor at an operating temperature of $50-250^{\circ}C$ were examined, and showed a reversible response to $NO_2$ at various $NO_2$ concentrations. Finally, details of the growth mechanism and formation of Sn spheres and $SnO_2$ nanowire networks are also discussed.

• 한국재료학회지
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• 제21권8호
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• pp.468-475
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• 2011

[ $LaMeO_3$ ](Me = Cr, Co) powders were prepared using the polymeric precursor method. The effects of the chelating agent and the polymeric additive on the synthesis of the $LaMeO_3$ perovskite were studied. The samples were synthesized using ethylene glycol (EG) as the solvent, acetyl acetone (AcAc) as the chelating agent, and polyvinylpyrrolidone (PVP) as the polymer additive. The thermal decomposition behavior of the precursor powder was characterized using a thermal analysis (TG-DTA). The crystallization and particle sizes of the $LaMeO_3$ powders were investigated via powder X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), and particle size analyzer, respectively. The as-prepared precursor primarily has $LaMeO_3$ at the optimum condition, i.e. for a molar ratio of both metal-source (a : a) : EG (80a : 80a) : AcAc (8a) inclusive of 1 wt% PVP. When the as-prepared precursor was calcined at $700^{\circ}C$, only a single phase was observed to correspond with the orthorhombic structure of $LaCrO_3$ and the rhombohedral structure of $LaCoO_3$. A solid-electrolyte impedance-metric sensor device composed of $Li_{1.5}Al_{0.5}Ti_{1.5}(PO_4)_3$ as a transducer and $LaMeO_3$ as a receptor has been systematically investigated for the detection of NOx in the range of 20 to 250 ppm at $400^{\circ}C$. The sensor responses were able to divide the component between resistance and capacitance. The impedance-metric sensor for the NO showed higher sensitivity compared with $NO_2$. The responses of the impedance-metric sensor device showed dependence on each value of the NOx concentration.

• 한국세라믹학회지
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• 제55권1호
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• pp.90-93
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• 2018

In this study, n-type $Bi_2Te_3$ in thermoelectric scrap is recovered through a wet reduction process. The recovered powder (tellurium) is grafted onto gas sensor in a new application that is not a thermoelectric device. Bismuth-rich powder is prepared by adding hydrazine when pH of the solution is brought to 13 using NaOH. The pH of the filtered solution was reduced using $HNO_3$, and then hydrazine was added to perform the re-reduction reaction. The tellurium-rich powder can be obtained through this reaction. The elemental analysis for these powders is confirmed by energy dispersive X-ray spectroscopy (EDS) analysis ; the successful separation of bismuth and tellurium is confirmed. Separated tellurium powder is mixed with DMF solvent and ethyl cellulose binder to confirm gas sensing properties. The tellurium paste was exposed in $NO_x$ atmosphere and exhibited a rapid reaction rate and recovery rate of less than 3 minutes for the gas.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.160-161
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• 2008

$SnO_2$는 n형 반도체로써 3.6 eV의 큰 밴드갭을 가지는 물질로 CO와 NOx 가스에 좋은 감도를 나타내는 것으로 보고되고 있다. 문헌에 따른 일반적인 $SnO_2$ 가스센서는 후막이나 벌크형태로 제작되었다. 근래에는 가스감응체가 $SnO_2$ 나노선 형태인 가스센서가 활발한 연구 중에 있다. 본 논문에서는 기판 위에 서로 분리된 전극 패턴에 Au를 촉매로 하여 네트워크 구조로 된 $SnO_2$ 나노선이 합성되었다. 제작된 가스센서에 Pd 도핑에 따른 영향을 알아보기 위하여 1.8 mM의 Pd 용액 ($PdCl_2{\cdot}xH_2O$ 3 mg + $H_2O$ 10 ml)을 이용하여 센서에 도핑하였다. 측정 시스템에서 $NO_2$ 가스에 대한 센서의 특성을 분석한 결과 도핑하지 않은 $SnO_2$ 센서보다 20%정도의 감도가 개선되었다.

• 센서학회지
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• 제23권4호
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• pp.266-271
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• 2014

Chemical sensors are used in various industrial facilities such high-risk and prevent the leakage of substances, important in life and environmental protection and the safe use of industry, used for management. In particular, high-temperature environments such as power generation equipment of the rotating part due to leakage generated by the various oil, power plants Shut Down, fire, work environment (exposure to various chemical solution and gas leak) and various water, air and soil pollution causes. Thus, over the long term through various channels such as crops and groundwater contamination caused by the slow, serious adverse effect on the ecosystem. In this paper, synthetic lube oil and high pressure hydraulic fluid leakage and immediately detect a new Printed Electronic implementation of technology-based film-type sensors, and its performance test. Thus, industrial accidents and environmental pollution and for early detection of problems, large accidents can be prevented. Experimental results of the synthetic lube oil and high pressure hydraulic fluid solution after the contact time depending on the experiment and the oil solution of the sensor material of the conductive porous PE resistance value by a chemical reaction could be confirmed that rapid increase. Also implemented in the film-type oil sensor electrical resistance change over time of the reaction rate and the synthetic lube oil is about 2 minutes or less, the high pressure hydraulic fluid is less than about 1 minute was. Therefore, more high-pressure hydraulic fluid such as a low volatility synthetic lube oils are the resistance change and the reaction rate was confirmed to be the slowest.