• 반도체디스플레이기술학회지
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• 제2권2호
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• pp.5-8
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• 2003

In this study, as Cu diffusion barrier, tantalum nitrides were successfully deposited on Si(100) substrate and $SiO_2$ by plasma assisted atomic layer deposition(PAALD) and thermal ALD, using pentakis (ethylmethlyamino) tantalum (PEMAT) and NH$_3$ as precursors. The TaN films were deposited at $250^{\circ}C$ by both method. The growth rates of TaN films were 0.8${\AA}$/cycle for PAALD and 0.75${\AA}$/cycle for thermal ALD. TaN films by PAALD showed good surface morphology and excellent step coverage for the trench with an aspect ratio of h/w -1.8:0.12 mm but TaN films by thermal ALD showed bad step coverage for the same trench. The density for PAALD TaN was 11g/cmand one for thermal ALD TaN was 8.3g/$cm^3$. TaN films had 3 atomic % carbon impurity and 4 atomic % oxygen impurity for PAALD and 12 atomic % carbon impurity and 9 atomic % oxygen impurity for thermal ALD. The barrier failure for Cu(200 nm)/TaN(10 nm)/$SiO_2$(85 nm)/ Si structure was shown at temperature above $700^{\circ}C$ by XRD, Cu etch pit analysis.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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• pp.14-19
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• 2002

In this study, as Cu diffusion barrier, tantalum nitrides were successfully deposited on Si(100) substrate and SiO2 by plasma assisted atomic layer deposition(PAALD) and thermal ALD, using pentakis (ethylmethlyamino) tantalum (PEMAT) and $NH_3$ as precursors. The TaN films were deposited on $250^{\circ}$C by both method. The growth rates of TaN films were $0.8{\AA}$/cycle for PAALD and $0.75{\AA}$/cycle for thermal ALD. TaN films by PAALD showed good surface morphology and excellent step coverage for the trench with an aspect ratio of h/w - $1.8 : 0.12 \mu\textrm{m}$ but TaN films by thermal ALD showed bad step coverage for the same trench. The density for PAALD TaN was $11g/\textrm{cm}^3$ and one for thermal ALD TaN was $8.3g/\textrm{cm}^3$. TaN films had 3 atomic % carbon impurity and 4 atomic % oxygen impurity for PAALD and 12 atomic % carbon impurity and 9 atomic % oxygen impurity for thermal ALD. The barrier failure for Cu(200nm)/TaN(l0nm)/$SiO_2(85nm)$/Si structure was shown at temperature above $700^{\circ}$C by XRD, Cu etch pit analysis.

• 공업화학
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• 제10권1호
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• pp.73-79
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• 1999

초격자 구조의 $Li_{4/3}Ti_{5/3}O_4$를 lithium acetate (LA)와 titanium n-butoxide (TNB)의 혼합 용액을 이용한 졸겔법으로 합성하였다. 이때 얻어진 겔상은 TNB/LA 몰비 5/4에 AA/TNB의 몰비 0.125를 혼합한 clear sol 용액에 $NH_4OH/TNB$ 몰비 0.35와 $H_2O/TNH$ 몰비 3.5를 첨가하여 얻었으며, $Li_{4/3}Ti_{5/3}O_4$는 xerogel을 $600^{\circ}C$에서 30시간 동안 열처리하여 제조하였다. 그리고 합성된 $Li_{4/3}Ti_{5/3}O_4$는 0.5~3.0 V의 전위 영역에서 $0.15mA/cm^2$의 전류밀도로 Li/1M $LiClO_4(in\;PC)/Li_{4/3}Ti_{5/3}O_4$를 구성하여 실험한 결과 174 mAh/g의 초기 용량을 나타냈으며, 25 cycle 동안 27.3%의 용량 감소를 나타냈다.

• 설비공학논문집
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• 제13권1호
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• pp.48-58
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• 2001

For the past few decades the vapor compression cycle with a solution circuit (VCCSC) has been known to provide high efficiency and variable capacity. In this study performance of a VCCSC cycle is examined through computer simulation. In the simulation heat exchangers were modelled by specifying UA or effectiveness values while the compressor performance was specified by an isentropic efficiency. Aqua/ammonia solution was chosen as the working fluid which can be used in the high temperature range. The results show that there exists an optimum operation condition which is dependent upon the temperatures of the external heat transfer fluids(HTFs). Besides the HTF\`s temperature, the maximum system pressure and the size of the solution heat exchanger are shown to have an influence on the optimum operation condition. Finally, as compared to a simple vapor compression heat pump with HFC134a, the COP of the VCCSC is shown to be 2∼22% higher.

• 설비공학논문집
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• 제15권12호
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• pp.1028-1034
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• 2003

The objectives of this paper are to study the effect of key parameters on the cycle performance and capacity and to estimate the cost of latent and sensible energy transportation systems. The overall conductance (UA) of each component, the ambient temperature and the absorber inlet temperature are considered the key parameters. It is concluded that COP of the solution transportation using an absorption system (STA) at ambient temperature is 10% higher than that of the conventional sensible system. It is also found that the cost of STA system can be reduced 7.5 times to that of sensible energy transportation for one year of operation with 10 km transportation distance.

• 대한환경공학회지
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• 제39권3호
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• pp.112-117
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• 2017

PAN 기반 아크릴계 섬유와 DETA 및 $AlCl_3{\cdot}6H_2O$를 반응시켜 아민기($-NH_2$)를 가진 이온교환섬유 PADD를 합성하였다. 개발된 섬유상 소재는 FT-IR과 SEM을 이용하여 그 특성을 확인해 보았다. 회분식 실험으로 수행된 PADD를 이용한 크롬제거 실험 결과는 Langmuir 등온흡착모델에 잘 적용되었으며, 이때 계산된 이론적 최대흡착능 ($Q_{max}$)은 6.93 mmol/g으로 나타났다. 한편 동적흡착실험은 Lagergren 유사이차속도모델에 잘 부합되었다. PADD의 크롬 흡착능은 pH 2에서 가장 높은 값인 4.11 mmol/g을 나타내었고 pH 변화에 많은 영향을 받는 것으로 확인되었다. 또한, 인산과 비소(V)에 대한 공존이온 실험을 통해 PADD가 크롬에 대한 높은 선택성을 갖고 있음을 확인할 수 있었다. 산-염기 역적정으로 구한 PADD의 총이온교환능 (4.70 mmol/g)을 통해 소재의 선택적 제거 가능성을 검증하였다.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2008년도 춘계학술대회 논문집
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• pp.638-641
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• 2008

Geothermal water at moderate temperature in a range between 30 to $50^{\circ}C$ exists sparse in surroundings. Mostly they are utilized as heat or water source at spar zones in Korea. However, a large portion of used water is discarded due to its poor recovery quality and inferior application technologies. In this research, an innovative heat pump system based on the hybrid concept that combinate compression cycle and absorption cycle was investigated mathematically. The hybrid heat pump aims to recycle various kind of the heat sources at moderate temperature including geothermal water effectively. The prime objective of the simulation is to design a compression/absorption hybrid heat pump system which can make high temperature above the level of $90^{\circ}C$ and low temperature of $20^{\circ}C$ as well at the same using $50^{\circ}C$ geothermal heat water. As a result, primitive data was provided as a basis to design a prototype 3 RT class hybrid heat pump.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1992년도 추계학술대회 논문집
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• pp.136-140
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• 1992

The purpose of this research is to develop the lithium secondary battery. This paper describes the preparation, electrochemical properties of nontstoichiometric(NS)-$V_6O_{13}$ and characteristics of Li/$V_6O_{13}$ secondary battery. NS-$V_6O_{13}$ was prepared by thermal decomposition of $NH_4VO_3$ under Ar stream of 140ml/min~180ml/min flow rate. And then, this NS-$V_6O_{13}$ was used for cathode active material. Cathode sheet was prepared by compressing the composite of NS-$V_6O_{13}$, acetylene black(A.B) and teflon emulsion (T.E). Characteristics of the test cell are summarised as follows. Oxidation capacity of NS-$V_6O_{13}$ was about 20% less than its reduction capacity. A part of NS-$V_6O_{13}$ cathode active material showed irreversible reaction in early charge-discharge cycle. This phenomena seems to be caused by irreversible incoporation/discoporation of lithium cation to/from NS-$V_6O_{13}$ host. Discharge characteristics curve of Li/$V_6O_{13}$ cell showed 4 potential plateaus. Charge-discharge capacity was declined in the beginning of cycling and slowly increased in company with increasing of coulombic efficiency. Energy density per weight of $V_6O_{13}$ cathode material was as high as 522Wh/kg~765Wh/kg.

• 한국분말재료학회지
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• 제23권4호
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• pp.287-296
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• 2016

$Ni_{1/3}Co_{1/3}Mn_{1/3}(OH)_2$ powders have been synthesized in a continuously stirred tank reactor via a co-precipitation reaction between aqueous metal sulfates and NaOH using $NH_4OH$ as a chelating agent. The co-precipitation temperature is varied in the range of $30-80^{\circ}C$. Calcination of the prepared precursors with $Li_2CO_3$ for 8 h at $1000^{\circ}C$ in air results in Li $Ni_{1/3}Co_{1/3}Mn_{1/3}O_2$ powders. Two kinds of obtained powders have been characterized by X-ray diffraction (XRD), scanning electron microscopy, particle size analyzer, and tap density measurements. The co-precipitation temperature does not differentiate the XRD patterns of precursors as well as their final powders. Precursor powders are spherical and dense, consisting of numerous acicular or flaky primary particles. The precursors obtained at 70 and $80^{\circ}C$ possess bigger primary particles having more irregular shapes than those at lower temperatures. This is related to the lower tap density measured for the former. The final powders show a similar tendency in terms of primary particle shape and tap density. Electrochemical characterization shows that the initial charge/discharge capacities and cycle life of final powders from the precursors obtained at 70 and $80^{\circ}C$ are inferior to those at $50^{\circ}C$. It is concluded that the optimum co-precipitation temperature is around $50^{\circ}C$.

• 대한화학회지
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• 제29권5호
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• pp.472-477
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• 1985

전도도법을 이용하여 $cis-[Co(en)(NH_3)_2Cl_2]^+$ 착이온의 아세톤-물 혼합용매에서 온도, 압력 및 용매의 조성변화에 따른 속도상수를 구하였다. 속도상수의 변화로 부터 열역학적 파라미터들을 구하여 이 반응의 메카니즘을 규명하고, 용매의 조성변화에 따른 반응속도상수의 변화를 조사하여 메카니즘을 재확인 하였다. 수화반응의 일차반응 속도상수는 1기압 25$^{\circ}$C의 순수물 용매에서는 3.47 ${\times}10^{-4}$/sec이고 압력이 증가할 수록 감소하였으며 온도가 10$^{\circ}$C 증가함에 따라 약 3배정도 증가하였다. 한편 아세톤의 함량이 증가할수록 반응속도 상수는 감소하였다. 이 반응의 활성화 부피는 2.82~$8.2cm^3$/mole이며 활성화압축률과 활성화엔트로피는 작은 값들을 나타내므로 이 반응의 메카니즘은 전이상태에서 리간드인 $Cl^-$이온이 중심금속에서 떨어지는 것이$H_2O$가 결합하는 것보다 우세한$I_d$메카니즘일 것으로 추정하였다. 또한 Grunwald-Winstein식에서 구한 m값이 0.25정도로써 이미 $I_d$메카니즘으로 알려진 다른 코발트 착물의 값들과 잘 일치하고 있다. 자유에너지순환도를 이용한 메카니즘의 재확인으로 이 반응착물의 수화는 $I_d$메카니즘으로 진행된다는 것을 확인하였다.