• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.11
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• pp.91-99
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• 1998

A 5Gbps LiNbO$_3$ optical phase modulator was designed, packaged and it's properties were characterized for optical communications. The APE(annealed proton exchange) method was employed for the optical waveguide and the electrode of ACPS (asymmetric coplanar strip) type was formed by electro-plating on LiNbO$_3$ for applying microwave signal with a dimension of width 18${\mu}{\textrm}{m}$, gap 9${\mu}{\textrm}{m}$ and length 50mm. The fabricated single-moded modulator operated at a 1550nm wavelength exhibits its modulation bandwidth, insertion loss and driving voltage of 7㎓, 3.0dB and 6V, respectively.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.138-138
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• 2003

광대역 LiNbO$_3$ 광변조기의 초고속 광 변조 구현을 위해서는 RF/ optical 속도 정합 및 임피던스 매칭 조건 하에서 낮은 구동전압을 얻을 수 있는 ridge 구조의 제작이 필수적이며 이런 구조 제작하기 위해서는 식각 속도와 식각면 거칠기 식각 profile 및 식각 과정에서의 반응물의 감소 등과 같은 개선을 위한 연구가 필요하다. 본 연구에서는 LiNbO$_3$ 기판 위에 메탈 마스크를 형성한 후 비등방성 (anisotropic) 건식 식각 방법인 NLD (Neutral Loop Discharge)로 플라즈마 식각을 하였다. NLD plasma 식각은 1Pa 이하의 압력에서 낮은 전자 온도를 갖는 고밀도 플라즈마를 생성하고 이온 플라즈마를 형성하여 LiNbO$_3$ 표면의 원자와 분자를 이온충돌효과를 이용하여 물리적인 식각과 discharge로 형성된 레디칼 (radical)과의 상호작용에 의한 화학적 식각 메커니즘에 의한 방법으로 plasma에 의한 시편의 손상이 적으며 식각 속도가 또한 높은 것이 특징이다. 본 논문에서는 안테나 파워와 가스의 유량에 따른 LiNbO$_3$ 식각 profile 특성에 관하여 연구 하고자 한다.

• Korean Journal of Optics and Photonics
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• v.15 no.4
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• pp.375-384
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• 2004

Switching phenomenon of a three-waveguide optical coupler was analyzed by using the coupled mode theory, and the coupling-length of the device was calculated by means of the FDM. CPW traveling-wave electrodes were designed by the CMM and SOR simulation techniques so as to satisfy the conditions of phase-velocity and impedance matching. Traveling-wave modulators were fabricated on a z-cut LiNbO$_3$ substrate. Ti was in-diffused in LiNbO$_3$ to make waveguides and Au electrodes were built on the waveguides by the electroplating technique. Insertion loss and switching voltage of the optical modulator were about 4 ㏈ and 15.6V. Network analyzer was used to obtain S parameters and corresponding RF response. From the measurement, parameters of the traveling-wave electrodes were extracted as such Z$_{c}$=39.2 $\Omega$, Neff=2.48, and a0=0.0665/cm((GHz) (1/2)). The measured optical response R(w) was compared with the theoretically estimated and both responses were shown to agree well. The measurement results revealed that the ㏈ bandwidth turned out to be about 13 GHz.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1998.06a
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• pp.101-104
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• 1998

We report some methods for measuring a LiNbO$_3$ optical phase modulator bandwidth. Since Mach-Zehnder waveguide type, one of methods for modulation bandwidth measurement, is comparatively simple and useful, it was adapted in this work. In order to confirm this method, the waveguide of single and Mach-Zehnder type were fabricated on the same wafer. The Mach-Zehnder interferometric waveguide and the single channel waveguide were used for the measurement of the phase modulator's driving voltage and bandwidth for device fabrications, respectively. Ti-860$\AA$ in-diffusion was achieved in a wet-bubbling oxygen environment at 105$0^{\circ}C$/8hours. LINbO$_3$ internal chips were pigtailed to PMF(polarization maintaining fiber)/SMF(single mode fiber) using an epoxy curing technique. Examined were optical properties such as an insertion loss, propagation loss and mode size, and the loss mechanism of optical coupling between an optical fiber and a waveguide was considered.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.32A no.7
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• pp.94-103
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• 1995

Thin film acoustooptic beam deflector in proton-exchanged Y-cut LiNbO$_{3}$ was fabricated and measured. The planar waveguide was fabricated by using the proton-exchanged and annealing method in Y0cut LiNbO$_{3}$. Interdigital transducer for SAW(surface acoustic wave) was made by the laser lithography. Using above method, the thin film acoustooptic beam deflector was constructed. Its SAW wavelength was 20.mu.m at 174MHz center frequency. The interaction length between guided optical wave and SAW was 2.16mm. The measured 3dB bandwidth was 17MHz using He-Ne laser. And 70% diffraction efficiency was obtained at 970mW RF driving power.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.05a
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• pp.282-285
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• 1999

Fabrication and pakaging method for low delve voltage and 10Gbps Ti diffused waveguide LiNbO$_3$ optical intensity modulator are described. Optical waveguides were prepared by conventionaly electron-beam evaporation and Ti-indiffusion into Z-cut plate LiNbO$_3$. Traveling-wave electrodes were used for obtaining the wideband frequency response and impedance matching. Microwave effective index and characteristic impedance measured by time domain reflectometry and compared with the calculated value by conformal mapping. The characteristics of 10Gbps modulator at the 1550nm wavelength are as follows : perfect modulation voltage Is about 5V, optical insertion loss Is about 5dB, 3-dB bandwidth is 10GHz, and characteristic impedance is about 50$\Omega$.

• Carbon letters
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• v.25
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• pp.84-88
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• 2018

At present, an important research area is the search for materials that are compatible with CMOS technology and achieve a satisfactory response rate and modulation efficiency. A strong local field of graphene surface plasmon polariton (SPP) can increase the interaction between light and graphene, reduce device size, and facilitate the integration of materials with CMOS. In this study, we design a new modulator of SPP-based cycle branch graphene waveguide. The structure comprises a primary waveguide of graphene-$LiNbO_3$-graphene, and a secondary cycle branch waveguide is etched on the surface of $LiNbO_3$. Part of the incident light in the primary waveguide enters the secondary waveguide, thus leading to a phase difference with the primary waveguide as reflected at the end of the branch and interaction coupling to enhance output light intensity. Through feature analysis, we discover that the area of the secondary waveguide shows significant localized fields and SPPs. Moreover, the cycle branch graphene waveguide can realize gain compensation, reduce transmission loss, and increase transmission distance. Numerical simulations show that the minimum effective mode field area is about $0.0130{\lambda}^2$, the gain coefficient is about $700cm^{-1}$, and the quality factor can reach 150. The structure can realize the mode field limits of deep subwavelength and achieve a good comprehensive performance.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.10
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• pp.924-930
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• 1998

In this study, we describe the properties of an electro-optical modulator with CPW(coplanar waveguide) electrode fabricated on $LiNvO_3$ optical waveguide, that is applicable to optical communications. These optical modulators have features that use a buffer layer to reduce velocity mismatch between microwaves and optical wave as well as employ CPW to improve impedance and propagation mode mismatch between the electrode and the external circuits. And an annealed proton exchange technique for obtaining low-loss optical waveguides and good reproducibility was employed. Taking into consideration the mentioned background, to achieve the lower driving voltage of optical modulator, we have re-disigned the longer interaction length. And their device properties are discussed also. As a result, fabricated optical modulators of good 10Gps operation and low voltage(5.6V of the halfwave lengfth voltage) at an $1.5{\mu}m$ wavelength are achived with good reproducibility.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.10 no.4
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• pp.297-301
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• 2000

Planar optical waveguides which have a higher refractive index than that of substrate were fabricated by proton exchange between $Li^+$ and $H^+$. Benzoic acid was used as proton source and process was carried out under the various reaction time and temperature. The depth of waveguide layer and the generated mode number were investigated by standard prism coupler. The cut-off depth for the fabrication of single mode optical waveguides was obtained by the function which was expressed on refractive index profile. Finally the experimental conditions for cut-of depth of single mode could be confirmed. Channel waveguides were manufactured from these confirmed conditions and the effective confinement of the induced light into waveguides was observed.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.19 no.9
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• pp.1782-1792
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• 1994

Ti : $LiNbO_3$ traveling-wave phase optical modulators at wavelength 1.3㎛ have been designed and fabricated, focusing on the optical waveguide and asymmetric coplanar electrode structure. To improve the phase-mismatch of traveling-wave ACPS electrode, the characteristic impedance, effective microwave index, and electrode loss have been presented as a function of geometric parameters including electrode and buffer layer thickness. Low-loss channel optical waveguides on $LiNbO_3$ were fabricated by the Ti diffusion method with $O_2$ water-vapor environment. $2.5{\mu}m$ thick electrode was successfully fabricated by double-spin image reversal process. Modulation bandwidth was limited by a resonance at 2.9 GHz and modulation bandwidth up to 2.5GHz was approxirnately measured.