• 전력전자학회:학술대회논문집
• /
• 전력전자학회 2004년도 전력전자학술대회 논문집(2)
• /
• pp.501-505
• /
• 2004

The study on the hybrid power source for the IMT2000 application has been presented. The hybrid power source is composed of solar cell, super-capacitor and battery. To compensate for the pulse loader of the IMT2000 application, the super-capacitor is connected through the Lithium-ion battery to absorb the pulse current. The solar cell provides the additional current to compensate for the depleted current. The controller design for the hybrid source has been presented and verified through experiment.

• 한국대기환경학회지
• /
• 제31권6호
• /
• pp.520-529
• /
• 2015

The ambient $PM_{2.5}$ samples were collected by $PM_{2.5}$ sampler from September 2010 to December 2012 at Daegu University, Gyeongsan. A total of 260 samples were collected and 27 species were analyzed by inductively coupled plasma, ion chromatography, and thermal optical reflectance methods. Factor analysis identified four sources such as biomass burning source/secondary aerosol source, soil source, industry source, and incinerator source/mobile source. Also, backward trajectories were calculated using HYSPLIT 4 (Hybrid single-particle lagrangian integrated trajectory) model and PSCF (Potential source contribution function) model was applied to identify the possible source locations of carbonaceous species and water soluble ions species. PSCF results showed that the possible source locations of most chemical constituents measured in Gyeongsan were the industrial areas in the eastern coast of China, northeast regions of China, the Gobi Desert, and east sea of Korea.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1998년도 하계학술대회 논문집 E
• /
• pp.1797-1799
• /
• 1998

Plasma source ion implantation(PSII) is a non-line-of-sight technique for surface modification of materials which is effective for non-planar targets. A apparatus of 30kV PSII is established and plasma characteristics are diagnosed by using a Langmuir probe. A spherical target is immersed in argon plasma and biased negatively by a series of high voltage pulses. Sheath evolution is measured by using a Langmuir probe and compared with the result of computer simulations.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2009년도 하계학술대회 논문집
• /
• pp.126-126
• /
• 2009

Noninvasive plasma diagnostic technique is introduced to analyze and characterize HICP (Helmholtz Inductively Coupled Plasma) source during the plasma etching process. The HICP reactor generates plasma mainly through RF source power at 13.56MHz RF power and RF bias power of 12.56MHz is applied to the cathode to independently control ion density and ion energy. For noninvasive sensors, the RF sensor and the OES (Optical emission spectroscopy) were employed since it is possible to obtain both physical and chemical properties of the reactor with plasma etching. The plasma impedance and optical spectra were observed while altering process parameters such as pressure, gas flow, source and bias power during the poly silicon etching process. In this experiment, we have found that data measured from these noninvasive sensors can be correlated to etch results. In this paper, we discuss the relationship between process parameters and the measurement data from RF sensor and OES such as plasma impedance and optical spectra and using these relationships to analyze and characterize H-ICP source.

• 공업화학
• /
• 제29권1호
• /
• pp.43-48
• /
• 2018

본 연구에서는 PCC (precipitated calcium carbonate) 제조에 있어 칼슘이온 추출 최적화를 위하여 추출 용제, 용제의 농도, 추출원의 투입량, 전처리 공정 등 다양한 추출 조건에 따른 실험을 수행하였다. 칼슘추출원으로 CaO를 사용하였으며, 칼슘이온의 추출량과 CaO의 입자크기를 확인하기 위하여 ICP와 SEM 분석을 수행하였다. 그 결과 2 M의 hydrochloric acid를 용제로 사용한 경우 100%의 칼슘이온이 추출되었으며, 추출원의 최적 투입량은 6 g으로 확인하였다. 반면 반응시간, 반응온도, 입자 분쇄 및 열처리 공정은 칼슘이온 추출량에 큰 영향이 없음을 확인하였다.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
• /
• pp.177-179
• /
• 2011

The purpose of this study is to enhance an adhesion between substrate and Diamond-like Carbon (DLC) film. DLC has many outstanding properties such as low friction, high wear resistance and corrosion resistance. However, it is difficult to achieve enough adhesion because of weak bonding between DLC film and the substrate. For improvement adhesion, a layer between DLC film and the substrate was prepared by dual post plasma. DLC film was deposited on nitrided layer by linear ion source. The composed compound layer between substrate and DLC film was investigated by Glow Discharge Spectrometer (GDS) and Scanning Electron Microscope (SEM). The synthesized bonding structure of DLC film was analyzed using a micro raman spectrometer. Mechanical properties were measured by nano-indentation. In order to clarify the mechanism for improvement in adhesive strength, it was observed by scratch test.

• 한국추진공학회:학술대회논문집
• /
• 한국추진공학회 2004년도 제22회 춘계학술대회논문집
• /
• pp.306-313
• /
• 2004

The microwave discharge ion engine generates plasmas of both the main ion source and the neutralizer using 4㎓ microwave without discharge electrodes and hollow cathodes, so that long life and durability against oxygen and air are expected. The MUSES-C “HAYABUSA” asteroid explorer installing four microwave discharge ion engines “$\mu$10s” was launched into deep space by M-V rocket No.5 on May 9, 2003. After vacuum exposure and several runs of baking for reduction of residual gas the ion engine system established the continuous acceleration of the spacecraft toward the asteroid “ITOKAWA”. The Doppler shift measurement of the communication microwave revealed the performance of ion engines, which is 8mN thrust force for a single unit with 3,200sec specific impulse at 23mN/㎾ thrust power ratio. At the end of 2003 the accumulated operational time exceeded 8,000 hour and unit. HAYABUSA will execute the Earth swing-by on June 2004 and arrive at the asteroid in 2005 and return to Earth in 2007.

• 한국정보디스플레이학회:학술대회논문집
• /
• 한국정보디스플레이학회 2003년도 International Meeting on Information Display
• /
• pp.149-152
• /
• 2003

Soruce/drain (or, LDD) formation technology is critical to device reliability especially in the case of short channel LTPS-TFT devices. Ion shower doping with a main ion source of $P_2H_x$ was conducted on ELA Poly-Si. We report the effects of annealing methods on dopant activation and damage recovery in ion-shower doped poly-Si.

• 한국원자력학회:학술대회논문집
• /
• 한국원자력학회 2001년도 추계학술발표회요약집
• /
• pp.369.2-369
• /
• 2001

• Transactions on Electrical and Electronic Materials
• /
• 제7권6호
• /
• pp.293-296
• /
• 2006

We studied homeotropic alignment effect for a nematic liquid crystal (NLC) on the $SiO_{x}$ thin film irradiated by the new ion beam method. $SiO_{x}$ thin films were deposited by plasma enhanced chemical vapor deposition (PECVD) and were treated by the DuoPIGatron ion source. A uniform liquid crystal alignment effect was achieved over 2100 eV ion beam energy. Tilt angle were about $90^{\circ}$ and were not affected by various ion beam energy.