• Title/Summary/Keyword: $InP(2{\times}4)$ 기판

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GaAs기판의 orientation에 따른 InGaP/InAlGaP 이종접합 태양전지의 소자 특성에 대한 연구

  • Kim, Jeong-Hwan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.333-333
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    • 2016
  • 현재까지 가장 높은 광전류 변환 효율을 나타내는 III-V 화합물 반도체의 다중접합 태양전지 대신 이보다 단순한 에피구조를 가진 단일셀 이종접합구조의 태양전지를 제안하였다. 이를 한국나노 기술원에서 MOCVD(Metalorganic Vapour Phase Epitaxy) 장비를 이용하여 에피구조를 성장하고 태양 전지를 제작해 그 특성을 조사하였다. 태양 전지는 서로 다른 orientation의 두 GaAs 기판에 각각 동일한 에피 구조로 성장되었다. GaAs 기판은 Si 도핑된 n-type 기판으로 (100) 표면이 <111>A 방향으로 2도 off 된 웨이퍼와 10도 off 된 웨이퍼가 사용되었다. 연구에서 시뮬레이션에 사용된 태양전지의 에피 구조는 맨 위 p-GaAs (p-contact 층), p-InAlP, p-InGaP의 광흡수층과 N-InAlGaP 층과 아래의 n-InAlP와 n-GaAs의 n-contact층으로 이루어져있다.태양전지는 $5mm{\times}5mm$의 면적을 가지고 있다. 그림 1은 전류-전압의 측정된 결과를 나타낸 그래프이다. 태양전지는 1 sun 조건하에서 probe를 이용해 측정되었다. 2도 off GaAs 기판 위에 성장시킨 태양전지에서는 3.7mA의 단락전류값이, 10도$^{\circ}$ off 인 샘플에서는 4.7mA의 단락전류값이 측정되었다. 반면에 전류-전압곡선으로부터 얻은 10도 off 인 태양전지의 직렬 저항값은 2도 off 인 태양전지의 약4배 정도로 나타났다. 이는 기판의 결정방향에 따라 태양전지의 내부 전하 transport에 차이가 있음을 나타낸다. TLM (Transmission Line Model) 방법에 의한 p-contact의 ohmic저항 측정에서도 이와 일치하는 결과를 얻었다.

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Study on the Characteristics of GaInP/AlGaInP Heterojunction Photovoltaic Cells under Concentrated Illumination (집광 조건에서의 GaInP/AlGaInP 이종접합 구조 태양전지 특성 연구)

  • Kim, Junghwan
    • Applied Chemistry for Engineering
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    • v.30 no.4
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    • pp.504-508
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    • 2019
  • The feasibility of replacing the tope cell of pn GaInP homojunction with our GaInP/AlGaInP heterojunction structure in III-V semiconductor multijunction photovoltaic (MJPV) cells having the highest current conversion efficiency was investigated. The performance of photovoltaic (PV) cells grown on $2^{\circ}$ and $10^{\circ}$ off-oriented GaAs substrates were compared to each other. The PV cells on the $10^{\circ}$ off-cut substrate showed higher short-circuit current density ($J_{sc}$) and conversion efficiency values than that of using the $2^{\circ}$ one. For $2{\times}2mm^2$ area PV cell on $10^{\circ}$ off substrate, the $J_{sc}$ of $9.21mA/cm^2$ and the open-circuit voltage of 1.38 V were measured under 1 sun illumination. For $5{\times}5mm^2$ cell on $10^{\circ}$ off substrate, the conversion efficiency was decreased from 6.03% (1 sun) to 5.28% (20 sun) due to a decrease in fiill factor (FF).

Si(111) 기판에 높은 공간밀도를 갖는 InN 양자점 핵생성 연구

  • Lee, Hyeon-Jung;Jo, Byeong-Gu;Lee, Gwan-Jae;Choe, Il-Gyu;Kim, Jin-Su;Im, Jae-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.227-227
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    • 2013
  • 본 연구에서는 Si(111) 기판에 성장온도 및 InN 증착양 변화에 따른 InN 양자점(Quantum Dot) 핵성생(Nucleation) 특성에 대해 논의한다. InN 양자점은 Nitrogen-Plasma 소스를 장착한 분자선증착기(MBE)를 이용하여 $0.103{\AA}/s$의 성장속도로 성장하였다. 성장온도를 $700^{\circ}C$에서 $300^{\circ}C$로 변환하면서 형성한 시료에서 lnN 양자점의 공간밀도는 $9.4{\times}10^7/cm^2$부터 $1.1{\times}10^{11}/cm^2$를 나타냈다. 가장 높은 공간밀도인 $1.1{\times}10^{11}/cm^2$는 기존에 보고된 값 ($7.7{\times}10^{10}/cm^2$)보다 상대적으로 높은 값을 갖는다 [1,2]. InN 증착양을 93, 186, 및 $372{\AA}/s$으로 각각 변화시켜 형성하여 양자점의 초기 성장거동을 분석하였다. InN 증착양이 증가함에 따라 양자점의 공간밀도는 $4.4{\times}10^{10}/cm^2$$6.4{\times}10^{10}/cm^2$까지 증가하였다. 일반적으로 InP 및 GaAs 기판을 기반으로 한 In(Ga)As 양자점은 증착양이 증가함에 따라 밀도는 감소하고 크기는 증가하는 경향을 보이며, 이는 같은 상 (Phase)을 갖는 물질들끼리 결합하려는 경향이 있기 때문이다. 본 실험에서는 기존 결과와 다른 경향을 보이고 있는데, 이는 Si(111) 기판과 InN 사이의 격자부정합이 상대적으로 크기 때문에 InN 양자구조가 커지는 대신 추가로 새로운 핵생성 메커니즘에 의한 것으로 설명할 수 있다. 이러한 InN 증착양에 따른 InN 양자점 성장거동을 표면에너지를 포함한 이론적인 모델을 통해 논의하고자 한다.

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The Effect of Residual H2Pressure on Gallium-doped ZnO Films Deposited by Magnetron Sputtering (마그네트론 스퍼터링에 의해 제작한 Gallium-doped ZnO 박막에 있어서 잔류 H2O 분압의 영향)

  • Song, Pung-Keun;Kwon, Young-Jun;Cha, Jae-Min;Lee, Byung-Chul;Ryu, Bong-Ki;Kim, Kwang-Ho
    • Journal of the Korean Ceramic Society
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    • v.39 no.10
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    • pp.928-934
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    • 2002
  • Gallium doped Zinc Oxide(GZO) films were deposited by dc magnetron sputtering using a GZO ceramic target at various conditions such as substrate temperature (RT, 400), residual water pressure ($P_{H_2O}$; 1.61${\times}10^{-4}∼2.2{\times}10^{-3}$ Pa), introduction of $H_2$ gas (8.5%) and different magnetic field strengths(250, 1000G). GZO films deposited without substrate heating showed clear degradation in film crystallinity and electrical properties with increasing $P_{H_2O}$. The resistivity increased from 3.0${\times}10^{-3}$ to 3.1${\times}10^{-2}{\Omega}㎝$ and the grain size of the films decreased from 24 to 3 nm when PH2O was increased from 1.61${\times}10^{-4}$ to 2.2${\times}10^{-3}$ Pa. However, degradation in electrical properties with increasing $P_{H_2O}$ was not observed for the films deposited with introduction of 8.5% $H_2$. When magnetic field strength of the cathode increased from 250G to 1000G, crystallinity and electrical properties of GZO films improved remarkably about all the $P_{H_2O}$. This result could be attributed to the decrease in film damage caused by the decrease in plasma impedance.

Design of 24-GHz 1Tx 2Rx FMCW Transceiver (24 GHz 1Tx 2Rx FMCW 송수신기 설계)

  • Kim, Tae-Hyun;Kwon, Oh-Yun;Kim, Jun-Seong;Park, Jae-Hyun;Kim, Byung-Sung
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.29 no.10
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    • pp.758-765
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    • 2018
  • This paper presents a 24-GHz frequency-modulated continuous wave(FMCW) radar transceiver with two Rx and one Tx channels in 65-nm complementary metal-oxide-semiconductor(CMOS) process and implemented it on a radar system using the developed transceiver chip. The transceiver chip includes a $14{\times}$ frequency multiplier, low-noise amplifier, down-conversion mixer, and power amplifier(PA). The transmitter achieves >10 dBm output power from 23.8 to 24.36 GHz and the phase noise is -97.3 GHz/Hz at a 1-MHz offset. The receiver achieves 25.2 dB conversion gain and output $P_{1dB}$ of -31.7 dBm. The transceiver consumes 295 mW of power and occupies an area of $1.63{\times}1.6mm^2$. The radar system is fabricated on a low-loss Duroid printed circuit board(PCB) stacked on the low-cost FR4 PCBs. The chip and antenna are placed on the Duroid PCB with interconnects and bias, gain blocks and FMCW signal-generating circuitry are mounted on the FR4 PCB. The transmit antenna is a $4{\times}4$ patch array with 14.76 dBi gain and receiving antennas are two $4{\times}2$ patch antennas with a gain of 11.77 dBi. The operation of the radar is evaluated and confirmed by detecting the range and azimuthal angle of the corner reflectors.

The Effective $P_2O_5$ Doping into $B_2O_3-P_2O_5-SiO_2$ Silica Layer Fabrication by Flame Hydrolysis Deposition (FHD법에 의한 $B_2O_3-P_2O_5-SiO_2$ 실리카막의 효과적인 $P_2O_5$ 도핑)

  • 심재기;이윤학;성희경;최태구
    • Journal of the Korean Ceramic Society
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    • v.35 no.4
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    • pp.364-370
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    • 1998
  • Boron-phoshor-silicate glass was fabricated on Si substrates by FHD(Flame Hydrolysis Deposition) The microstructrue of silica soot deposited at various conditon such as composition and substrate temperature was analysed by SEM. After consolidation the refractive index and composition of the silica layer were in-vestigated. For refractive index control B, P and Ge were used as additive elements while B and Ge oxides are easily mixed into $SiO_2$, P oxide($B_2O_3$) doping is difficult because of the volatile property due to low melt-ing point. Boron-phosphorous-silicate glass (BPSG) layer were fabricated using bertical torch and optimized flame temperature substrate temperature and distance of torch and substrate. P concentration of BPSG lay-er measured 3.3 Wt% and the consolidation temperature was lower than $1180^{\circ}C$. The measured refractive index of BPSG silica layer in $1.55\;\mu\textrm{m}$ wavelength was $1.4480{\pm}1{\times}10^{-1}$ and the thickness was $22{\pm}1\;\mu\textrm{m}$.

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Thermoelectric properties of $(Bi,;Sb)_2;(Te,;Se)_3$-based thin films and their applicability to temperature sensors ($(Bi,;Sb)_2;(Te,;Se)_3$계 박막의 열전 특성 및 온도 센서로의 응용)

  • 한승욱;김일호;이동희
    • Journal of the Korean Vacuum Society
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    • v.6 no.1
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    • pp.69-76
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    • 1997
  • P-type ($Bi_{0.5}Sb_{1.5}Te_3$) and n-type ($Bi_2Te_{2.4} Se_{0.6}$) thermoelectric thin film were deposited on glass and Teflon substrates by the flash evaporation technique. The changes in thermoelectric properties, such as Seebeck coefficient, electrical conductivity, carrier concentration, carrier mobility, thermal conductivity, and figure of merit, were investigated as a function of film thickness and annealing condition. Figures of merit of the thin films annealed at 473 K for 1 hour were improved to be $1.3{\times}10^{-3}K^{-1}$ for p-type and $0.3{\times}10^{-3}K^{-1}$ for n-type, and they were almost independent of film thickness. Temperature sensors were fabricated from the thin films having the above mentioned properties. And thermo-emf, sensitivity, and time constant of the sensors were measured to evaluate their characteristics for temperature sensors. Thin film sensors deposited on Teflon substrates showed better performance than those on glass substrates, and their sensitivity and time constant were 2.91 V/W and 28.2 sec respectively for the sensor of leg width 1 mm$\times$length 16 mm.

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Photoluminescence Properties of GaN on $MgAl_{2}O_{4}$ Substrate with HVPE Growth Conditions ($MgAl_{2}O_{4}$ 기판위에 GaN의 HVPE 성장조건에 따른 광루미네센스 특성)

  • Kim, Seon-Tae;Lee, Yeong-Ju
    • Korean Journal of Materials Research
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    • v.8 no.8
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    • pp.667-671
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    • 1998
  • The photoluminescence (pL) characteristics of hydride vapor phase epiyaxy (HVPE) grown GaN films on $MgAl_{2}O_{4}$ substrate were investigated with several growth conditions. The GaN films on $MgAl_{2}O_{4}$ substrate is autodoped with Mg atoms which thermally out-diffused from substrate lead to a PL characteristics of impurity doped ones. The Mg-related emission band intensity decreased with growth temperature may due to the evaporation of Mg atoms at the GaN film surfaces. and it also decreased with GaN film thicknesses. We can estimate the diffusion coefficient of Mg atoms in GaN under the consideration of diffusion phenomena between two infinite solids lead to a value of D= 2$\times$$lO^{-10}\textrm{cm}^2/sec.

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Magnetic Properties of Monolayer-thiciness InP(001)(2×4) Reconstruction Surface (InP(001)(2×4)재구성된 표면 위에 원자층 단위로 증착된 Co 박막의 자성 특성)

  • Park, Yong-Sung;Jeong, Jong-Ryul;Lee, Jeong-Won;Shin, Sung-Chul
    • Journal of the Korean Magnetics Society
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    • v.14 no.3
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    • pp.89-94
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    • 2004
  • We have investigated magnetic properties of monolayer (ML)-thickness Co film deposited on InP(2${\times}$4) reconstruction surface using in situ Surface Magneto-Optical Kerr Effects (SMOKE) measurement system. InP(2${\times}$4) reconstruction surface, obtained by repeated sputtering and annealing, was confirmed by reflection hish energy electron diffraction (RHEED) and scanning tunneling microscope (STM) measurements. From both longitudinal and polar SMOKE measurements, we have observed three distinguishable regions showing different magnetic properties depending on the Co thickness. In the Co film thickness smaller than 7 $m\ell$, no SMOKE signal was detected. In the following thickness between 8 $m\ell$ and 15 $m\ell$, both longitudinal and polar Kerr hysteresis loops were observed, which implies a metastable phase coexisted of in-plane and perpendicular anisotropies. In the film thickness larger than 16 $m\ell$, only longitudinal MOKE signal without polar signal was detected, which implies existence of in-plane anisotropy in this thickness region.

Fabrication Process and Sensing Characteristics of the In-plane Thermoelectric Sensor Consisting of the Evaporated p-type Sb-Te and n-type Bi-Te Thin Films (n형 Bi-Te와 p형 Sb-Te 증착박막으로 구성된 in-plane 열전센서의 형성공정 및 감지특성)

  • Bae, Jae-Man;Kim, Min-Young;Oh, Tae-Sung
    • Journal of the Microelectronics and Packaging Society
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    • v.19 no.1
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    • pp.33-38
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    • 2012
  • An in-plane thermoelectric sensor was processed on a glass substrate by evaporation of the n-type Bi-Te and p-type Sb-Te thin films, and its sensing characteristics were evaluated. The n-type Bi-Te thins film used to fabricate the inplane sensor exhibited a Seebeck coefficient of -165 ${\mu}V$/K and a power factor of $80{\times}10^{-4}W/K^2-m$. The p-type Sb-Te thin film used to fabricate the in-plane sensor exhibited a Seebeck coefficient of 142 ${\mu}V$/K and a power factor of $51.7{\times}10^{-4}W/K^2-m$. The in-plane thermoelectric sensor consisting of 15 pairs of the n-type Bi-Te and the p-type Sb-Te evaporated thin films exhibited a sensitivity of 2.8 mV/K.