The Effect of Residual H2Pressure on Gallium-doped ZnO Films Deposited by Magnetron Sputtering |
Song, Pung-Keun
(Department of Chemistry, College of Science and Engineering, Aoyama Gakuin University)
Kwon, Young-Jun (Department of Inorganic Materials Engineering, Pusan National University) Cha, Jae-Min (Department of Inorganic Materials Engineering, Pusan National University) Lee, Byung-Chul (Department of Inorganic Materials Engineering, Pusan National University) Ryu, Bong-Ki (Department of Inorganic Materials Engineering, Pusan National University) Kim, Kwang-Ho (Department of Inorganic Materials Engineering, Pusan National University) |
1 | J.I. Lee and S.K. Choi, 'Relationship between Film Density and Electrical Properties on D.C. Magnetron Reactive Sputtered Sndoped Films,' J. Kor. Ceram. Soc., 37 [7] 686-92 (2000) |
2 | Z. C. Jin, I. Harmberg and C. G. Granqvist, 'Optical Properties of Sputter deposited ZnO:A1 Thin Films,' J. Appl. Phys., 64 5117-31 (1988) DOI |
3 | W. M. Duncan, J. W. Lee, R. J. Matyi and H. Y. Liu, 'Photoluminescence and X my Properties of Heteroepitaxial Gallium Arsenide on Silicon,' J. Appl. Phys., 64 2161-64 (1986) |
4 | T. Minami, T. Miyata and T. Yamamoto, 'Stability of Transparent Conducting Oxide Films for Use at High Temperatures,' J. Vac. Sci. Technol., A17 [4] 1822-26 (1999) |
5 | P. K. Song, Y. Shigesato, M. Kamei and I. Yasui, 'Structural and Electrical Properties of Gallium Doped Zinc Oxide Films,' J. Kor. Ceram. Soc., 5 [4] 404-08 (1999) |
6 | J. Cho, J. B. Nah, M. S. Oh, K. H. Yoon, H. J. Jung and W. K. Choi, 'Enhancement of Photoluminescence and Electrical Properties of Ga Doped ZnO Thin Films Grown on -(000l) Single Crystal Substrate by RF Magnetron Sputtering through Rapid Thermal Aimealing,' J. Kor Ceram. Soc., 10 [3] 335-40 (2001) |
7 | J. Hu and R. G. Gordon, 'Atmospheric Pressure Chemical Vapor Deposition of Gallium Doped Zinc Oxide Thin Films from Diethyl Zinc, Water and Tnethyl Gallium,' J. Appl. Phys., 72 [11] 5381-92 (1992) DOI |
8 | P. K. Song, Y. Shigesato, I. Yasui, C. W. Ow Yang and D. C. Paine, 'Study on Crystallinity of Tin doped Indium Oxide Films Deposited by DC Magnetron Sputtering,' Jpn. J. Appl. Phys., 37 [4A] 1870-76 (1998) DOI |
9 | P. K. Song, M. Watanabe, M. Kon, A. Mitsui and Y. Shige sato, 'Electrical and Optical Properties of Gallium Doped Zinc Oxide Films Deposited by DC Magnetron Sputtering,' Thin Solid Films, 411 82-6 (2002) DOI ScienceOn |
10 | I. Hamberg, 'Indium Tin Oxide Thin Films: Basic Optical Properties and Applications to Energy Effcient Windows,' Chap.8, pp. 170-93 in Ph. D. Thesis, Chalmers University of Technology, Goteborg, Sweden, 1984 |
11 | P. K. Song, Y. Shigesato, M. Kamei and I. Yasui, 'Electrical and Structural Properties of Tin doped Indium Oxide Films Deposited by DC Magnetron Sputtering at Room Temperature,' Jpn. J. Appl Phys., 38 [5A] 2921-27 (1999) DOI |
12 | R. Latz, K. Michael and M. Scherer, 'High Conducting Large Area Indium Tin Oxide Electrodes for Displays Prepared by DC Magnetron Sputtering,' Jpn. J. Appl. Phys., 30 [2A] L149-51 (1991) DOI |
13 | S. Takaki, Y. Shigesato, H. Harada, H. Kojima, T. Oyama and T. Haranou, 'Prepartion of Highly Conducting ITO Electrodes on Color Filters by Highly Dense Plasma- Assisted EB Evaporation,' SID 90 DIGEST, 76-9 (1990) |
14 | J. Ma, F. Ji, H. L. Ma and S. Y. Li, 'Prepartion and Prop- erties of Transparent Conducting Zinc Oxide and Alumium- doped Zinc Oxide Films Prepared by Evaporating Method,' Solar Energy Mwterials and Solar Cells, 60 [4] 341-48 (2000) DOI ScienceOn |
15 | R. Wendt, K. Ellmer and K. Wiesemaim, 'Thermal Power at a Substrate During Zn0:A1 Thin Film Deposition in a Planar Magnetron Sputtehng,' J. Appl. Phys., 82 2115-22 (1997) DOI ScienceOn |
16 | H. P. Klug and L. E. Alexander, 'X-ray Diffaction Procedures for Polycrystalline and Amorphous Material,' 2nd Ed. by Chap.9 (Wiley, New York, 1974) |