• 한국전기전자재료학회논문지
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• 제11권10호
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• pp.804-808
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• 1998

The inductively coupled plasma(ICP) etching of platinum with BCl$_3$/Cl$_2$ gas chemistry has been studied. X-ray photoelectron spectroscopy (XPS) was used to investigate the chemical binding states of the etched surface. The plasma characteristics was extracted from optical emission spectroscopy (OES) and a single Langmuir probe. In this case of Pt etching using BCl$_3$/Cl$_2$ gas chemistries, the result of OES and Langmuir probe showed the increase of Cl radicals and ion current densities in the plasmas with increasing Cl$_2$ gas ratio. At the same time, XPS results indicated that the intensities of Pt 4f decreased with increasing Cl$_2$ gas ratio. The decrease of Pt 4f intensities implies the increase of residue layer thickness on the etched Pt surface.

• 한국식품영양학회지
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• 제29권4호
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• pp.499-505
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• 2016

To improve the shelf-life of mushrooms, Lentinula edodes GNA01 mushrooms were treated with gel packs containing slow-released chlorine dioxide ($ClO_2$) gas at 5~10 ppm for 5 days at $20^{\circ}C$ and the weight loss rate as well as the changes in pH, color and texture properties of the treated samples were investigated. The weight of the control and $ClO_2$ gas treated samples were decreased slightly, and there were no differences during the storage period. However, the weight of the control changed faster than those of the $ClO_2$ gas treated samples during storage period. The pH in the control and in the $ClO_2$ gas treated samples were decreased during storage period, but the samples treated with 5 and 7 ppm $ClO_2$ gas were the least changed. On the other hand, the samples treated with 10 ppm $ClO_2$ gas showed no difference from the other treatments during 4 days, but the pH was lower than that of the control on the fifth day. The lightness of inside and outside in mushroom were decreased whereas redness and yellowness were increased during storage period. However, color changes in the $ClO_2$ gas treated samples were lower than those of the control. Especially, the samples treated with 5 and 7 ppm $ClO_2$ gas were the least changed. The texture of the mushroom were decreased consistently during storage period. The texture of the control changed faster than those of the $ClO_2$ gas treatments during 5 days. Especially, the samples treated 5 ppm $ClO_2$ gas were the least changed.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 춘계학술대회 논문집 센서 박막재료 반도체재료 기술교육
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• pp.7-11
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• 2002

In this study, Au thin films were etched with a $Cl_2/Ar$ gas combination in an in an inductively coupled plasma. The etch properties were measured for different gas mixing ratios of $Cl_2/(Cl_2+Ar)$ while the other process conditions were fixed at rf power (700 W), dc bias voltage (150 V), and chamber pressure (15 mTorr). The highest etch rate of the Au thin film was 3500 $\AA/min$ and the selectivity of Au to $SiO_2$ was 4.38 at a $Cl_2/(Cl_2+Ar)$ gas mixing ratio of 0.2. The surface reaction of the etched Au thin films was investigated using x-ray photoelectron spectroscopy (XPS) analysis. There is Au-Cl bonding by chemical reaction between Cl and Au. During the etching of Au thin films in $Cl_2/Ar$ plasma, Au-Cl bond is formed, and these products can be removed by the physical bombardment of Ar ions. In addition, Optical emission spectroscopy (OES) were investigated to analyze radical density of Cl and Ar in plasma. The profile of etched Au investigated with scanning electron microscopy (SEM).

• 한국식품영양학회지
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• 제30권3호
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• pp.591-598
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• 2017

To prolong the shelf-life of strawberry, samples were treated with gel packs containing slow-released chlorine dioxide($ClO_2$) gas at 3~7 ppm for 6 days at room temperature. The weight loss and decay ratio as well as changes in pH, color and texture properties of the treated samples were investigated. The weight of the control and $ClO_2$ gas treated samples decreased slightly, but the weight of the control changed faster than those of the $ClO_2$ gas treated samples during the storage period. The decay ratio of control was higher than those of the $ClO_2$ gas treatments since 4 days of storage. The pH and acidity in the control and in the $ClO_2$ gas treated samples were no differences during storage period. The lightness of strawberry decreased during storage, but there was no difference in lightness among the treatments even when storage time was extended. The redness and yellowness of the control showed higher change than those of the $ClO_2$ gas treatments during 6 days. The firmness of the control changed more rapidly than those of the $ClO_2$ gas treatments during 6 days. Especially, the samples treated 3 and 5 ppm $ClO_2$ gas were the least changed. And the scores for appearance, firmness and overall acceptance control and 7 ppm $ClO_2$ gas treatment decreased more rapidly than those of 3 and 5 ppm treatment.

• 자원리싸이클링
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• 제29권3호
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• pp.3-10
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• 2020

일메나이트의 선택염화를 통해 제조한 합성루타일을 유동층에서 CO와 Cl₂ 혼합가스를 이용하여 염화시켜 TiO₂의 염화반응 속도에 미치는 반응 온도, 시간, CO가스와 Cl₂가스의 분압 비($p_{Cl_2}/p_{CO}$)의 영향에 대하여 조사하였다. $p_{Cl_2}/p_{CO}$가 높을 때 TiCl₄의 전환율은 감소하였으며, 화학양론 계산결과와 실험결과를 비교하였을 때 Cl₂가스 보다 CO가스의 분압이 더 큰 영향을 미친 것으로 판단되었다. 따라서 실험 결과를 입자의 기공을 고려한 모델에 대입하였을 때 합성 루타일의 염화반응은 화학반응율속으로 결정되었고, 활성화에너지는 53.77 kJ/mol로 계산되었다.

• 한국전기전자재료학회논문지
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• 제24권7호
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• pp.589-593
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• 2011

[ $SnO_2$ ]nano powders were prepared by solution reduction method using tin chloride($SnCl_2{\cdot}2H_2O$), hydrazine($N_2H_4$) and NaOH. The $SnO_2$ thick films for gas sensors were fabricated by screen printing method on alumina substrates and annealed at $300^{\circ}C$ in air, respectively. XRD patterns of the $SnO_2$ nano powders showed the tetragonal structure with (110) dominant orientation. The particle size of $SnO_2$ nano powders at the ratio of $SnCl_2:N_2H_4$+NaOH= 1:6 was about 60 nm. The sensing characteristics were investigated by measuring the electrical resistance of each sensor in a test box. Sensitivity of $SnO_2$ gas sensor to 5 ppm $CH_4$gas and 5 ppm $CH_3CH_2CH_3$ gas was investigated for various $SnCl_2:N_2H_4$+NaOH proportion. The highest sensitivity to $CH_4$ gas and $CH_3CH_2CH_3$ gas of $SnO_2$ sensors was observed at the $SnCl_2:N_2H_4$+NaOH= 1:8 and $SnCl_2:N_2H_4$+NaOH= 1:6, respectively. Response and recovery times of $SnO_2$ gas sensors prepared by $SnCl_2:N_2H_4$+NaOH= 1:6 was about 40 s and 30 s, respectively.

• 방사성폐기물학회지
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• 제7권4호
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• pp.207-212
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• 2009

본 연구에서는 산화조건하 LiCl-KCl 공융염내에서 란탄계 염화물의 하나인 $PrCl_3$의 열적거동을 살펴보았다. 먼저 산소를 주입하면서 $PrCl_3$의 열중량분석(TGA; thermogravimetric analysis)을 실시하였고, 이 때 얻어진 결과들을 바탕으로, 산소분산법을 이용하여 온도에 따른 LiCl-KCl 공융염내 $PrCl_3$의 산화실험을 수행하였다. $PrCl_3$의 열중량분석 결과에 따르면, 약 $380^{\circ}C$까지 $PrCl_3$에서 염소의 해 리가 급격하게 발생되었고 약 $600^{\circ}C$에서 $PrCl_3$가 PrOCl로 전환되는 반응이 종료되는 것으로 확인되었다. 산소분산법에 의한 LiCl-KCl 공융염내 $PrCl_3$의 열적거동은 산화조건에서 열중량분석시 나타난 $PrCl_3$의 열적거동과 유사하였고, 발생된 PrOCl은 공융염내에서 불용성 화합물로써 바닥으로 침전하였다. 산소분산법에 의한 공융염내 $PrCl_3$의 PrOCl로의 전환은 $650^{\circ}C$ 이상의 온도에서 활발하게 진행되었고, 이 때 발생되는 배기가스내 $Cl_2$의 농도분석을 통해 공융염내 $PrCl_3$의 전환상태를 예측할 수 있을 것으로 판단된다.

• 한국축산식품학회지
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• 제38권3호
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• pp.487-497
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• 2018

Controlling of microorganisms in the industrial process is important for production and distribution of hatching and table eggs. In the previous study, we reported that chlorine dioxide ($ClO_2$) gas of a proper concentration and humidity can significantly reduce the load of Salmonella spp. on eggshells. In this study, we compared microbial reduction efficacy on egg's surface using hatching eggs and table eggs, internal quality of table eggs, and hatchability after both the conventional method (washing and UV expose, fumigation with formalin) and $ClO_2$ gas disinfection. Application of 40 ppm $ClO_2$ gas to the table and hatching eggs, respectively, reduced the aerobic plate count (APC) with no statistical difference compared with the conventional methods. Additionally, we didn't observed that any significant difference in albumin height, Haugh unit (HU), and yolk color, this result confirms that 40 ppm $ClO_2$ had no effect on the internal quality of the table eggs, when comparing with the UV treatment method. The hatchability of hatching eggs was not statistical different between formaldehyde fumigation and 80 ppm $ClO_2$ gas treatment, though the value was decreased at high concentration of 160 ppm $ClO_2$ gas. From these results, we recommend that $ClO_2$ gas can be used as a safe disinfectant to effectively control egg surface microorganisms without affecting egg quality.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1990년도 추계학술대회 논문집 학회본부
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• pp.139-142
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• 1990

A gas sensor, comprised of both ZnO and $PdCl_2$ powders, has been developed to sense the CO gas of low concentration (100 ppm). When the weight ratio of ZnO/$PdCl_2$ element sintered at $600^{\circ}C$ was 99.5/0.5, the maximum sensitivity to CO gas was obtained at the operating temperature of $200^{\circ}C$. Also, the response characteristics of this element were examined, and then the response time was decreased from 90 to 45 sees, with operating temperature increase in the range of $100-400^{\circ}C$.

• Journal of Electrical Engineering and Technology
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• 제10권4호
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• pp.1734-1737
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• 2015

Insulating characteristics of Cl₂-He mixture gases in gas discharges were analysed to evaluate ability of these gases for using in medium voltage and many industries. These are electron transport coefficients, which are the electron drift velocity, density-normalized longitudinal diffusion coefficient, and density-normalized effective ionization coefficient, in Cl₂-He mixtures. A two-term approximation of the Boltzmann equation was used to calculate the electron transport coefficients for the first time over a wide range of E/N (ratio of the electric field E to the neutral number density N). The limiting field strength values of E/N, (E/N)_lim, for these binary gas mixtures were also derived and compared with those of the pure SF₆ gas.