• Title/Summary/Keyword: $CeO_2$ layer

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A Study on the effect of TEOS film by Dispel8ion Time and Content of $CeO_2$ Abrasive (DSS에서 $CeO_2$ 연마제의 첨가량과 분산시간이 TEOS 막에 미치는 특성연구)

  • Seo, Yong-Jin;Han, Sang-Jun;Park, Sung-Woo;Lee, Young-Kyun;Lee, Sung-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.487-487
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    • 2009
  • One of the critical consumables in chemical mechanical polishing (CMP) is a specialized solution or slurry, which typically contains both abrasives and chemicals acting together to planarize films. In single abrasive slurry (SAS), the solid phase consists of only one type of abrasive particle. On the other hand, mixed abrasive slurry (MAS) consists of a mixture of at least two types of abrasive particles. In this paper, we have studied the CMP characteristics of mixed abrasive slurry (MAS) retreated by adding of $CeO_2$ abrasives within 1:10 diluted silica slurry (DSS). The slurry designed for optimal performance should produce reasonable removal rates, acceptable polishing selectivity with respect to the underlying layer, low surface defects after polishing, and good slurry stability. The modified abrasives in MAS are evaluated with respect to their particle size distribution, surface morphology, and CMP performances such as removal rate and non-uniformity. As an experimental result, we obtained the comparable slurry characteristics compared with original silica slurry in the viewpoint of high removal rate and low non-uniformity.

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Fabrication and characterization of $YBa_2Cu_3O_7$ step-edge Josephson junctions prepared on sapphire substrates

  • Lim, Hae-Ryong;Kim, In-Seon;Kim, Dong-Ho;Park, Yong-Ki;Park, Jong-Chul
    • Progress in Superconductivity
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    • v.1 no.2
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    • pp.146-150
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    • 2000
  • Step edge Josephson junctions in c-axis oriented $YBa_2Cu_3O_7$ films were fabricated on $CeO_2$ buffered sapphire substrates. The step angle was controlled in the wide range of $20^{\circ}\sim75^{\circ}$ by the Ar ion milling technique. I-V curves of junction fabricated on the thickness ratio of $\sim$0.8 and the step angle of $35^{\circ}$ were exhibited RSJ-like behavior with $I_CR_N$ product of $\sim250{\mu}A$ and critical current density of $\sim2\times10^4A/cm^2$ at 77 K. Critical current of step edge junction was increased linearly with decreasing temperature but the normal resistance was almost constant. Total samples of step edge Josephson junction was satisfied a scaling behavior of $I_CR_N{\propto}(J_C)^{0.5}$.

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Fabrication of YBCO films on metal tapes by the TFA-MOD process (TFA-MOD법에 의한 금속기판 위 YBCO 박막 제조)

  • Shin Geo-Myung;Song Kyu-Jung;Park Chan;Moon Seung-Hyun;Yoo Sang-Im
    • Progress in Superconductivity
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    • v.7 no.1
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    • pp.92-96
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    • 2005
  • YBCO thin films on metal substrates were prepared by the metal-organic deposition using trifluoroacetates (TFA-MOD). To compensate the loss of Ba element from the precursor films due to the reaction with $CeO_2$ cap layer, we have employed Ba-excessive precursor solutions of $YBa_{2+x}Cu_{3}O_{7-{\delta}}$ ($0{\le}x{\le}0.1$). The precursor solutions were dip-coated on the metal substrates with $CeO_2$ cap layer, initially heated up to $400^{\circ}C$, and finally fired at the various high temperatures for 2 h in a reduced oxygen atmosphere. With this approach, YBCO films possessing critical temperature over 85 K could be successfully prepared on the metal substrates. The highest $T_{c,zero}$ value of 86 K was obtained from the Ba-excessive YBCO film of x=0.005 in $YBa_{2+x}Cu_{3}O_{7-{\delta}}$ fired at $750^{\circ}C$ for 2 h. However, unexpected $T_c$ suppression even in Ba-excessive YBCO samples requires further identification.

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Cathode Microstructure Control and Performance Improvement for Low Temperature Solid Oxide Fuel Cells (저온 고체산화물 연료전지용 공기극 미세구조 제어 및 성능개선)

  • Kang, Jung-Koo;Kim, Jin-Soo;Yoon, Sung-Pil
    • Journal of the Korean Ceramic Society
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    • v.44 no.12
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    • pp.727-732
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    • 2007
  • In order to fabricate a highly performing cathode for low-temperature type solid oxide fuel cells working at below $700^{\circ}C$, electrode microstructure control and electrode polarization measurement were performed with an electronic conductor, $La_{0.8}Sr_{0.2}MnO_3$ (LSM) and a mixed conductor, $La_{0.6}Sr_{0.4}Co_{0.2}Fe_{0.8}O_3$(LSCF). For both cathode materials, when $Sm_{0.2}Ce_{0.8}O_2$ (SDC) buffer layer was formed between the cathode and yttria-stabilized zirconia (YSZ) electrolyte, interfacial reaction products were effectively prevented at the high temperature of cathode sintering and the electrode polarization was also reduced. Moreover, cathode polarization was greatly reduced by applying the SDC sol-gel coating on the cathode pore surface, which can increase triple phase boundary from the electrolyte interface to the electrode surface. For the LSCF cathode with the SDC buffer layer and modified by the SDC sol-gel coating on the cathode pore surface, the cathode resistance was as low as 0.11 ${\Omega}{\cdot}cm^2$ measured at $700^{\circ}C$ in air atmosphere.

A Study on the Rare-earth Boronizing Treatment of STD 61 Steel (열간금형용강의 희토류붕화처리에 관한 연구)

  • Kim, C.C.;Youn, J.H.;Jang, Y.S.
    • Journal of the Korean Society for Heat Treatment
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    • v.13 no.4
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    • pp.217-223
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    • 2000
  • The boronizing effects of STD 61 steel have been studied on the micro structure and hardness. The STD 61 Steel was soaked in molten salt, consisted of KCl, $BaCl_2$, NaF, $B_2O_3$, FeB, and Ce, at various temperatures and times. The boronizing conditions for the peak hardness were the temperature range of $900^{\circ}C$ to $950^{\circ}C$ for 5 hr and that of $1000^{\circ}C$ for 3 hr, respectively. Four boride layers such as FeB, $Fe_2B$, ${\alpha}$ and matrix layer surface were observed from the microscopic surface examination. The thickness of boride layer was increased by increasing the boronizing time and the temperature. The structure of boride layer was tooth shape.

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The Multi-layer Fabrication and Characteristic Performance for Dark Current Reduction of Amorphous Selenium (비정질 셀레늄의 누설전류 저감을 위한 다층구조 제작 및 특성 평가)

  • Park, J.K.;Kang, S.S.;Suk, D.W.;Lee, H.W.;Nam, S.H.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.849-852
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    • 2002
  • Recently, amorphous selenium is used as x-ray conversion material for flat-panel x-ray detector. In this paper, we investigated the effect of breakdown under high voltage and leakage current in PN-type multi-layer structure based on p-type a-Se and n-type conductive thin film. Experimental results show that the multi-layer based detector reduced leakage current because n-type CeO2 conductive layer prevent from hole injection into a-Se layer from collection electrode, Also, the breakdown voltage was improved by dielectric layer between a-Se and top electrode.

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Absence of Distinctively High Grain-Boundary Impedance in Polycrystalline Cubic Bismuth Oxide

  • Jung, Hyun Joon;Chung, Sung-Yoon
    • Journal of the Korean Ceramic Society
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    • v.54 no.5
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    • pp.413-421
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    • 2017
  • In this work, we studied a fluorite structure oxides: Yttria stabilized zirconia, (YSZ); Gd doped $CeO_2$ (GDC); erbia stabilized $Bi_2O_3$ (ESB); Zr doped erbia stabilized $Bi_2O_3$ (ZESB); Ca doped erbia stabilized $Bi_2O_3$ (CESB) in the temperature range of 250 to $600^{\circ}C$ using electrochemical impedance spectroscopy (EIS). As is well known, grain boundary blocking effect was observed in YSZ and GDC. However, there is no grain boundary effect on ESB, ZESB, and CESB. The Nyquist plots of these materials exhibit a single arc at low temperature. This means that there is no space charge effect on ${\delta}-Bi_2O_3$. In addition, impedance data were analyzed by using the brick layer model. We indirectly demonstrate that grain boundary ionic conductivity is similar to or even higher than bulk ionic conductivity on cubic bismuth oxide.