• 제목/요약/키워드: $C_5$-precursor

검색결과 567건 처리시간 0.034초

50 nm 이상의 CMOS 기술에 이용되는 Spin-on Dielectric 박막 형성과 그 특성에 미치는 전구체의 영향 (The Effects of Precursor on the Formation and Their Properties of Spin-on Dielectric Films Used for Sub-50 nm Technology and Beyond)

  • 이완규
    • 한국진공학회지
    • /
    • 제20권3호
    • /
    • pp.182-188
    • /
    • 2011
  • 탄소가 없는 폴리실라잔 계와 탄소가 함유된 폴리메틸 실라잔 계 전구체를 실리콘 기판에 스핀코팅하고 $150^{\circ}C$, $400^{\circ}C$, $850^{\circ}C$에서 열처리하여 형성된 박막의 물리적 화학적 특성을 평가하였다. 프리에 변환 적외선 분광, 수축 율, 갭-충진, 식각속도 등을 평가하여 박막형성과 형성된 박막의 물리화학적 특성에 미치는 탄소의 영향을 고찰하였다. 탄소함유 전구체는 (탄소가 없는 전구체보다) $400^{\circ}C$에서 질소, 수소, 탄소의 휘발량이 더 적고 산소 흡수량이 더 적어서 (15.6%)보다 낮은 14.5% 두께 수축을 나타내었으나, $800^{\circ}C$에서는 휘발 량이 더 많고 산소 흡수량도 더 많아져 (19.4%)보다 높은 37.4% 두께 수축을 나타냈다. 프리에 변환 적외선 분광분석결과, 전구체내의 탄소는 Spin-on dielectric (SOD) 박막으로 하여금 Si-O 결합형성을 적게, 박막특성을 불균일하게, 그리고 화학 용액에 더 빨리 식각되도록 만들었다.

Co-evaporator를 이용하여 제작한 CIGS Precursor Stack 구조 및 RTP 조건에 따른 Selenization 효과에 관한 연구

  • 김찬;김대환;성시준;강진규;이일수;도진영;박완우
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
    • /
    • pp.404-405
    • /
    • 2011
  • Cu(InGa)$Se_2$ (CIGS) 박막 태양전지의 저가 및 대면적화를 위한 양산화 공정인 two-step process (sputter/selenization) 공정에서는 sputtering으로 형성한 metal precursor stack을 $H_2$ Se gas를 이용하여 selenization하는 공정을 주로 이용한다. 하지만 이러한 selenization 공정은 유독한 $H_2$ Se gas를 이용해야 한다는 점과 긴 시간 동안 열처리를 해야 하는 단점을 가지고 있다. 이에 metal precursor stack 위에 Se 막을 우선 증착하고, Rapid Thermal Process (RTP)를 이용하여 selenization하는 방법이 현재 많은 관심을 끌고 있다. 본 논문에서는 sputtering 이후 RTP를 이용한 CIGS 흡수층 제작에 대한 선행연구의 일환으로 co-evaporator 장비를 이용하여 다양한 구조의 precursor를 제작하고 RTP 조건에 따른 selenization 효과를 연구하였다. Co-evaporator를 이용하여 CIGS, CIG/Se, CuGa/In/Se, In/CuGa/Se 4가지 구조의 precursor stack을 Mo coated soda lime glass 위에 제작하였다. 이때 amorphous 상태의 precursor stack을 만들기 위하여 기판에 열은 가하여 주지 않았으며, 각각의 stack 구조에서 가지고 있는 Cu, In, Ga, Se의 총량을 동일하게 유지하기 위하여 각 stack의 증착 시간을 동일하게 유지하였다. Selenization을 위한 RTP 조건은 550, $600^{\circ}C$ 각각에 대하여 1, 5, 10분으로 split을 진행하였다. Precursor stack의 증착 후 관찰한 XRD 결과는 비정질 상태를 잘 나타내었으며, SEM 결과 CIGS precursor stack을 제외한 나머지 구조의 stack에서는 In 박막의 surface roughness로 인하여 박막의 평탄화가 좋지 않음을 확인하였다. CIGS precursor stack의 경우, RTP 온도와 시간 split와 상관없이 결정화가 잘 이루어졌으나 grain의 성장이 부족하였다. 이에 비하여 CIG/Se, CuGa/In/Se, In/CuGa/Se 구조의 precursor stack의 경우, $550^{\circ}C$ 열처리에서는 InSe의 결정상이 관찰 되었으며 $600^{\circ}C$, 5분 이상 열처리에서 CIGS 결정상이 관찰되었다. 이러한 결과는 Se이 metal 원소들과 함께 있는 CIGS 구조에 비하여 metal precursor stack 위에 Se을 증착한 stack 구조들의 경우는 CIGS 결정을 형성하기 위해 Se이 metal 층들로 확산되어 반응을 하여야 하므로 상대적으로 많은 열에너지가 필요한 것으로 이해할 수 있으며, RTP를 이용한 selenization 공정으로 CIGS 박막 태양전지의 흡수층 형성이 가능함을 확인하였다.

  • PDF

REBCO 초전도 박막제조를 위한 Fluorine-free MOD 전구체 용액 개발 (Development of Fluorine-free MOD Precursor Solution for fabricating REBCO Superconducting Films)

  • 김병주;임선원;김호진;홍계원;이희균
    • Progress in Superconductivity
    • /
    • 제7권2호
    • /
    • pp.152-157
    • /
    • 2006
  • New precursor solution with dichloroacetic acid (DCA) was developed for fabricating high $J_c$ REBCO film. DCA based-precursor solution was coated on $LaAlO_3$(001) substrate by dip coating method. Processing parameters such as oxygen partial pressure, water vapor, ramping rate and pyrolysis temperature were controlled in order to obtain a good epitaxial film. The film with thickness of 0.5 micrometer was obtained by single coating and no crack was observed at calcined films. Oxygen partial pressure was controlled in the range of $100{\sim}1,000$ ppm and conversion heat treatment was carried out at the temperature range of $705-765^{\circ}C$. A critical transition temperature ($T_c$) of 90 K and a critical transport current density ($J_c$) of $>0.5\;MA/cm^2$ (77 K and self-field) were obtained for the GdBCO film. It is thought that fluorine-free MOD solution using DCA is promising precursor solution for fabricating high quality REBCO films.

  • PDF

완두콩(Pisum sativum)에서 Ribulose-1,5-Bisphosphate Carboxylase Small Subunit 유전자의 cDNA 클로닝과 광유도성 발현에 관한 연구 (Cloning of cDNA Encoding the Precursor to the Small Subunit of Ribulose-1,5-Bisphosphate Carboxylase in Pea 9Pisum sativum))

  • 김한집
    • Journal of Plant Biology
    • /
    • 제32권1호
    • /
    • pp.33-40
    • /
    • 1989
  • Polysomal polyadenylated mRNAs which were purified from pea leaves were fractionated by sucrose grandient sedimentation. Fractions corresponding to the peak at 11.5S were found to contain mostly mRNA encoding the precursor polypeptide to the small subunit of ribulose bisphosphate carboxylase (rbcS) by in vitro translation in wheat germ extract. Double-stranded cDNA which was synthesized from the 11.5S mRNA was cloned into Hind III site of plasmid pBR 325. A cDNA clone, H24, was identified to code for rbcS. In vitro translation product of the hybridization-selected mRNA was molecular weight 20,000, presumably the precursor of rbcS. The nucleotide sequences of the H24 showed almost complete homology with the sequences encoding the transit peptide of the rbcS-3A gene which was reported by Fluhr et al.(1986).

  • PDF

화학양론 조성의 뮬라이트 합성거동과 입자형상에 미치는 전구체 pH의 영향 (Effects of Precursor pH on Synthesizing Behavior and Morphology of Mullite in Stoichiometric Composition)

  • 이재언;김재원;정연길;장중철;조창용
    • 한국재료학회지
    • /
    • 제12권7호
    • /
    • pp.573-579
    • /
    • 2002
  • Stoichiometric mullite ($3Al_2$$O_3$. $2SiO_2$) precursor sol has been prepared by sol-gel method. The effects of the precursor pH and sintering temperature on the synthesizing behavior and morphology of mullite have been studied. Mullite precursor sol was prepared by dissolution of aluminum nitrate enneahydrate (Al($NO_3$)$_3$.9H$_2O) into the mixture of silica sol. Precursor pH of the sols was controlled to acidic condition ($PH\leq$ 1~1.5) and to basic condition ($pH\geq$8.5~9). The synthesized aluminosilicate sols were formed under 20 MPa pressure after drying at $150^{\circ}C$ for 24 hours, and then sintered for 3hours in the temperature range of $1100~1600^{\circ}C$. From TGA/DTA analysis, total weight loss in the aluminosilicate gel of the acidic sample was (equation omitted) 56% and that of the basic sample was (equation omitted) 85%, indicating that the synthesizing temperature of mullite phase for acidic and basic samples was above $1200^{\circ}C$ and $1300^{\circ}C$, respectively. The morphologies of the synthesized mullite were fine and needle-like (or rod-like) for acidic sample, and granular for basic sample that has been sintered above $1300^{\circ}C$. It was found that the morphology of mullite particle was predominantly governed by precursor pH and sintering temperature.

질산납으로부터 제조된 PbO-전구체의 산변태 (PhaseTransformation of PbO-Precursor Prepared from Lead Nitrate)

  • 최병철;이문호
    • 한국재료학회지
    • /
    • 제4권4호
    • /
    • pp.472-476
    • /
    • 1994
  • 질산납으로부터 침전법으로 제조된 PbO-전구체의 상변태를 열분석, X-선 회절, 적외선 흡수 및 Raman분광 분석 등을 통하여 조사하였다. 질산납 수용액으로부터 $45^{\circ}C$, pH 9.0의 반응조건에서 PhO-전구체를 제조하였다. 침전물은 hydrous lead oxynitrate와 lead hydroxynitrate의 혼합체이었다. $560^{\circ}C$까지 열처리온도가 증가함에 따라 전구체는 $3Pb(NO_{3})_{2}$ㆍ7PbO를 거쳐 $Pb(NO_{3})_{2}$ㆍ5PbO로 된 후에 PbO(litharge)로 변화되었으며, $560^{\circ}C$이상에서 최종적으로 massicot형의 PbO로 변태되었다.

  • PDF

분무 열분해방법에 의한 미세 BSCCO-2223 전구분말의 제조 (Fabrication of fine BSCCO-2223 precursor powder by spray pyrolysis process)

  • 김성환;유재무;고재웅;김영국;박기호
    • Progress in Superconductivity
    • /
    • 제5권1호
    • /
    • pp.65-69
    • /
    • 2003
  • Many researches on fabrication process for BSCCO precursor powders have been developed for high J$_{c}$ BSCCO-2223 tape. Spray pyrolysis method for fabrication of precursor powder has many advantages, such as high purity, fine particle size and low carbon content of BSCCO precursor powder. Fine, spherical powders were prepared by ultrasonic spray pyrolysis from the aqueous solution of metal nitrates. BSCCO precursor powders were synthesized with various solutes concentration and heat treatment conditions. Average particle size for spray pyrolysis powders was $1.5∼3\mu\textrm{m}$. Bi-2223/Ag tape was prepared by PIT method and followed by various sintering conditions. BSCCO precursor powders were characterized by XRD, SEM, EDS, Carbon content and particle size analysis.s.

  • PDF

Bulgecinine 선구물질인 (4S,5R)-1-Acetyl-2-formyl-5-benzyloxymethyl-4-pyrrolidinol의 합성 (Synthesis of a Precursor of Bulgecinine, (4S,5R)-1-Acetyl-2-formyl-5-benzyloxymethyl-4-pyrrolidinol)

  • 전학림;윤신숙;신영숙;남정이
    • 대한화학회지
    • /
    • 제41권3호
    • /
    • pp.150-156
    • /
    • 1997
  • Bulgecinine의 선구물질인 (4S,5R)-1-acetyl-2-formyl-5-benzyloxymethyl-4-pyrrolidinol (15)을 diacetone-D-glucose로부터 합성하였다. Barton 탈산소화 반응, C-5에서의 반전, $-N_3$ 도입과 환원 및 C-2에서의 고리 형성을 통해 bulgecinine의 핵심 중간체인 두 고리 화합물 (6R)-6-Ο-benzyloxymethyl-(3R)-3-methoxy-2-oxa-5-azabicyclo-[2,2,1]heptane (13)을 합성하였다. 화합물 13을 N-아세틸화 후 산가수분해하여 얻은 bulgecinine 선구물질은 토토머화가 수반되어 (2S,4S,5R)-pyrrolidinol 유도체 15와 함께 (2S,4S,5R)-부분 입체 이성질체도 얻어졌다.

  • PDF

Synthesis of Renewable Jet Fuel Precursors from C-C Bond Condensation of Furfural and Ethyl Levulinate in Water

  • Cai, Chiliu;Liu, Qiying;Tan, Jin;Wang, Tiejun;Zhang, Qi;Ma, Longlong
    • Korean Chemical Engineering Research
    • /
    • 제54권4호
    • /
    • pp.519-526
    • /
    • 2016
  • Biomass derived jet fuel is proven as a potential alternative for the currently used fossil oriented energy. The efficient production of jet fuel precursor with special molecular structure is prerequisite in producing biomass derived jet fuel. We synthesized a new jet fuel precursor containing branched $C_{15}$ framework by aldol condensation of furfural (FA) and ethyl levulinate (EL), where the latter of two could be easily produced from lignocellulose by acid catalyzed processes. The highest yield of 56% for target jet fuel precursor could be obtained at the optimal reaction condition (molar ratio of FA/EL of 2, 323 K, 50 min) by using KOH as catalyst. The chemical structure of $C_{15}$ precursor was specified as (3E, 5E)-6-(furan-2-yl)-3-(furan-2-ylmethylene)-4-oxohex-5-enoic acid ($F_2E$). For stabilization, this yellowish solid precursor was hydrogenated at low temperature to obtain C=C bonds saturated product, and the chemical structure was proposed as 4-oxo-6-(tetrahydrofuran-2-yl)-3-(tetrahydrofuran-2-yl)-methyl hexanoic acid ($H-F_2E$). The successful synthesis of the new jet fuel precursors showed the significance that branched jet fuel could be potentially produced from biomass derived FA and EL via fewer steps.

수용성 매체에서 뮬라이트의 합성거동 및 입자형상에 미치는 염 및 전구체 pH의 영향 (Effects of Salt and Precursor pH on Synthesizing Behavior and Grain Morphology of Mullite in Aqueous System)

  • 정연길;이재언;신영일;김재원;조창용
    • 한국재료학회지
    • /
    • 제13권4호
    • /
    • pp.251-258
    • /
    • 2003
  • The effects of the salt and the precursor pH on the synthesizing behavior and the morphology of mullite have been studied. Two kinds of mullite precursor sols were prepared by the dissolution of two kinds of salt (aluminum nitrate enneahydrate, Al($NO_3$)$_3$$9H_2$O; type I and aluminum sulfate 14∼18 water, (SO$Al_4$)$_3$$\cdot$$14∼18H_2$O; type II) into the mixture of colloidal silica sol, respectively. Precursor pH of the sols was controlled to the acidic (pH= 1.5∼2) and basic (pH= 8.5∼9) conditions. The co-products with nitrate and sulfate were completely eliminated at $500^{\circ}C$ and $850^{\circ}C$, respectively, which was confirmed by TG/DTA results. The synthesizing temperature of mullite phase was found to be above $1200^{\circ}C$ for pH= 1.5∼2 and above $1300^{\circ}C$ for pH= 8.5∼9 in type I. However, in type II, the synthesizing temperature of mullite was decreased to $850^{\circ}C$ for pH= 1.5∼2 and $1100^{\circ}C$ for pH= 8.5∼9. The grain size of the mullite synthesized at pH= 8.5∼9 was larger than that at pH= 1.5∼2 in overall heat-treated temperatures, showing smaller grain size in type II. Aspect ratio of the mullite grains was more increased at pH= 1.5∼2 than pH= 8.5∼9 in type I, showing similar aspect ratio at both pH conditions in type II. It was found that the synthesizing temperature and grain size were predominantly governed by the initial precursor pH and decomposition of the salt, with minor effect on the grain morphology.