• Title/Summary/Keyword: $C_3F_6$ gas

Search Result 136, Processing Time 0.031 seconds

Fabrication process of embedded passive components in MCM-D (MCM-D 기판 내장형 수동소자 제조공정)

  • 주철원;이영민;이상복;현석봉;박성수;송민규
    • Journal of the Microelectronics and Packaging Society
    • /
    • v.6 no.4
    • /
    • pp.1-7
    • /
    • 1999
  • We developed Fabrication process of embedded passive components in MCM-D substrate. The proposed MCM-D substrate is based on Cu/photosensitive BCB multilayer. The substrate used is Si wafer and Ti/cu metallization is used to form the interconnect layer. Interconnect layers are formed with 1000$\AA$ Ti/3000$\AA$ Cu by sputtering method and 3$\mu\textrm{m}$ Cu by electrical plating method. In order to form the vias in photosensitive BCB layer, the process of BCB and plasma etch using $C_2F_6$ gas were evaluated. The MCM-D substrate is composed of 5 dielectric layers and 4 interconnect layers. Embedded resistors are made with NiCr and implemented on the $2^{nd}$ dielectric layer. The sheet resistance of NiCr is controlled to be about 21 $\Omega$/sq at the thickness of 600$\AA$. The multi-turn sprial inductors are designed in coplanar fashion on the $4^{th}$ interconnect layer with an underpass from the center to outside using the lower $3^{rd}$ interconnect layer. Capacitors are designed and realized between $1^{st}$ interconnect layer and $2^{nd}$ interconnect layer. An important issue in capacitor is the accurate determination of the dielectric thickness. We use the 900$\AA$ thickness of PECVD silicon nitride film as dielectric. Capacitance per unit area is about 88nF/$\textrm {cm}^2$at the thickness of 900$\AA$. The advantage of this integration process is the compatibility with the conventional semiconductor process due to low temperature PECVD silicon nitride process and thermal evaporation NiCr process.

  • PDF

Effects of dietary energy and lipase levels on nutrient digestibility, digestive physiology and noxious gas emission in weaning pigs

  • Liu, J.B.;Cao, S.C.;Liu, J.;Pu, J.;Chen, L.;Zhang, H.F.
    • Asian-Australasian Journal of Animal Sciences
    • /
    • v.31 no.12
    • /
    • pp.1963-1973
    • /
    • 2018
  • Objective: This study was conducted to evaluate the effect of dietary energy and lipase supplementation on growth performance, nutrient digestibility, serum profiles, intestinal morphology, small intestinal digestive enzyme activities, biochemical index of intestinal development and noxious gas emission in weaning pigs. Methods: A total of 240 weaning pigs ([Yorkshire${\times}$Landrace]${\times}$Duroc) with an average body weight (BW) of $7.3{\pm}0.12kg$ were used in this 28-d experiment. Weaning pigs were randomly allocated to 4 dietary treatments in a $2{\times}2$ factorial arrangement with 2 levels of energy (net energy = 2,470 kcal/kg for low energy diet and 2,545 kcal/kg for basal diet) and 2 levels of lipase (0 and 1.5 U/g of lipase) according to BW and sex. There were 6 replications (pens) per treatment and 10 pigs per pen (5 barrows and 5 gilts). Results: Weaning pigs fed the low energy diet had lower (p<0.05) gain-to-feed ratio (G:F) throughout the experiment, apparent digestibility of dry matter, nitrogen, ether extract, and gross energy during d 0 to 14, average daily gain during d 15 to 28, lipase activity in duodenum and ileum and protein/DNA in jejunum (p<0.05), respectively. Lipase supplementation had no effect on growth performance but affected apparent nutrient digestibility (p<0.05) on d 14 and enhanced lipase activity in the duodenum and ileum and protease activity in duodenum and jejunum of pigs (p<0.05) fed the low energy diet. Lipase reduced serum low-density lipoprotein cholesterol (LDL-C) and triglyceride (TG), $NH_3$ production (p<0.05) from the feces. Conclusion: The low energy diet decreased G:F throughout the experiment and nutrient digestibility during d 0 to 14 as well as lipase activity in duodenum and ileum. Lipase supplementation increased nutrient digestibility during d 0 to 14 and exerted beneficial effects on lipase activity in duodenum and ileum as well as protease activity in duodenum and jejunum, while reduced serum LDL-C, TG and fecal $NH_3$.

Fabrication and Characteristics of a White Emission Electroluminicent Device (백색 전계발광소자의 제작과 그 특성)

  • Kim, Woo-Hyun;Choi, Sie-Young
    • Journal of Sensor Science and Technology
    • /
    • v.10 no.6
    • /
    • pp.295-303
    • /
    • 2001
  • White emission thin film electroluminecent device was fabricated with ZnS for phosphor layers and BST ferroelectric thin film for insulating layers. The ZnS:Mn and $ZnS:SmF_3$ layers were used for emission of red color. Also the $ZnS:TbF_3$ and $ZnS:AgF_3$ layers were used to emission of green and blue color, respectively. And the fabrication conditions of the BST insulating layers were followings, that is, the composition ratio of target, substrate temperature, working pressure and operating gas ratio were $Ba_{0.5}Sr_{0.5}Ti_{0.3}$, $400^{\circ}C$, 30 mTorr and 9:1, respectively. The thickness of phosphor were 150 nm for each layers and the insulating layers of upper and bottom were 400 nm and 200 nm, respectively. The luminesence threshold voltage was $75\;V_{rms}$ and the maximum brightness of the thin film electroluminecent device was $3200\;cd/m^2$ at $100\;V_{rms}$.

  • PDF

Sintering Effects on Fe/Mo Ordering and Magnetoresistance in Double Perovskite Sr2FeMoO6

  • Kim, J;Park, B.J;Lee, B.W
    • Journal of Magnetics
    • /
    • v.9 no.1
    • /
    • pp.9-12
    • /
    • 2004
  • We have investigated sintering effects on Fe/Mo ordering and magnetoresistance (MR) in double perovskite-reflection lines due to $Sr_2FeMoO_6$ (SFMO). Polycrystalline samples have been prepared by the conventional solid-state reaction by sintering in a stream of 5% $H_2/Ar$ gas. All samples are single phase and exhibit a series of superstructurecation ordering at Fe and Mo sites. As sintering temperature increases from 900 to $1300^{\circ}C$, the degree of Fe/Mo ordering increases from 82 to 92%, magnetization (15 K, 7 kOe) increases from 1.6 to 2.7 ${\mu}_B/f.u.,$ and Curie temperature increases at a rate of 4.3 K/% with the increase of Fe/Mo ordering ratio. The magnitude of MR measured at 5 K is 19% for sample prepared at $1000^{\circ}C$ with magnetic fields of 7 kOe. The observed MR is proportional to the square of magnetization indicating that the MR feature in SFMO is explained by the spin-polarized tunneling at grain boundaries.

Stability of $4-Chloro-{\alpha}-(4-chlorophenyl)-{\alpha}-(trichloromethyl)$ Benzyl Alcohol(Dicofol) in Various Organic Solvents ($4-Chloro-{\alpha}-(4-chlorophenyl)-{\alpha}-(trichloromethyl)$ Benzyl Alcohol(Dicofol)의 각종유기용매중(各種有機溶媒中)에서의 안정성(安定性))

  • Shin, Hyeon-Hwa;Hong, Jong-Uck
    • Applied Biological Chemistry
    • /
    • v.25 no.3
    • /
    • pp.177-181
    • /
    • 1982
  • This experiment was carried out to investigate the stability of Dicofol solutions which were prepared with various organic solvents such as xylene, toluene, methylisobutyl ketone (M.I.B.K.), cyclohexanone, N.N.-dimetyl formamide (N.N.-D.M.F.) and isophorone under different temperature and storage period. The decomposition rate of Dicofol was increased in the order of cyclohexanone> N.N.-D.M.F.>W.P.>toluene, xylene, M.I.B.K. and isophorone. However, it was shown that precipitation was found in Dicofol solutions such as xylene, toluene and M.I..B.K. except isophorone. Therefore, isophorone was recognized as the best of organic solvents tested for Dicofol in the case of emulsifiable concentrate formulation with it.

  • PDF

Electrodeposition of Zr on AISI 304 Stainless Steel in Molten Chlorides. (염화물계 혼합염욕중에서 AISI 304 Srainless Steel의 Zr 전해피복에 관한연구)

  • 반장호;백영현
    • Journal of the Korean institute of surface engineering
    • /
    • v.30 no.3
    • /
    • pp.159-166
    • /
    • 1997
  • The metalliding technique was adopted to obtain the diffusion coating of zirconium on AISI 304 Stainless Steel in molten mixed chlorides (32.9wt.%LICl-34.8wt.%NaCl-32.3wt.%). Experiments were carried out in argon gas atmosphere. The electrolytic cell was consisted of a AISI 304 Stainless steel cathode and a consumable zirconium anode. The quality of deposit was analysed by SEM, Optical Microscope, EDS, and also examined by the Micro-Vickers hardness and corrosion tests. Interface of deposit layer was identified as zirconium-iron alloy layer caused by diffusion process at elevated temperatures. The optimum condition for the metalliding was found to be the bath temperature of $550^{\circ}C$, the concentration of $K_2ZrF_6$ ,5wt.%, cathodic current derrent density of 7.0 to 10.0mA/$\textrm{cm}^2$ , and anodic current density of 2.0mA/$\textrm{cm}^2$.

  • PDF

Enhancement of PLED lifetime using thin film passivation with amorphous Mg-Zn-F

  • Kang, Byoung-Ho;Kim, Do-Eok;Kim, Jae-Hyun;Seo, Jun-Seon;Kim, Hak-Rin;Lee, Hyeong-Rag;Kwon, Dae-Hyuk;Kang, Shin-Won
    • Journal of Information Display
    • /
    • v.11 no.1
    • /
    • pp.8-11
    • /
    • 2010
  • In this study, a new thin films passivation technique using Zn with high electronegativity and $MgF_2$, a fluorine material with better optical transmittance than the sealing film materials that have thus far been reported was proposed. Targets with various ratios of $MgF_2$ to Zn (5:5, 4:6 and 3:7) were fabricated to control the amount of Zn in the passivation films. The Mg-Zn-F films were deposited onto the substrates and Zn was located in the gap between the lattices of $MgF_2$ without chemical metathesis in the Mg-Zn-F films. The thickness and optical transmittance of the deposited passivation films were approximately 200 nm and 80%, respectively. It was confirmed via electron dispersive spectroscopy (EDS) analysis that the Zn content of the film that was sputtered using a 4:6 ratio target was 9.84 wt%. The Zn contents of the films made from the 5:5 and 3:7 ratio targets were 2.07 and 5.01 wt%, respectively. The water vapor transmission rate (WVTR) was determined to be $38^{\circ}C$, RH 90-100%. The WVTR of the Mg-Zn-F film that was deposited with a 4:6 ratio target nearly reached the limit of the equipment, $1\times10^{-3}\;gm^2{\cdot}day$. As the Zn portion increased, the packing density also increased, and it was found that the passivation films effectively prevented the permeation by either oxygen or water vapor. To measure the characteristics of gas barrier, the film was applied to the emitting device to evaluate their lifetime. The lifetime of the applied device with passivation was increased to 25 times that of the PLED device, which was non-passivated.

A Study on Effects of Axial Gas Flow in the Gap and Fuel Cracking on Fission Gas Release under Power Ramping (출력 감발 조건하에서 핵분열 기체 생성물의 방출에 대한 축방향 기체 유동과 핵연료 파손의 영향에 관한 연구)

  • Han, Jin-Kyu;Yoon, Young-Ku
    • Nuclear Engineering and Technology
    • /
    • v.22 no.2
    • /
    • pp.116-127
    • /
    • 1990
  • The fission gas release model used In the SPEAR-BETA fuel performance code was modified by use of effective thermal conductivity for cracked fuel and by laking Into account axial fission-gas mixing between the fuel-clad gap and the plenum. With use of this modified model the fission gas release was analyzed under various power ramping conditions of P$_{max}$ and $\Delta$.fP. Effective fuel thermal conductivity that accounts for the effect of fuel tracking was used in calculation of the fuel temperature distribution and the Internal gas pressure under power ramping conditions. Mixing and dilution effects due to axial gas flow were also considered in computing the width and the thermal conductivity of the gap. The effect of axial gas flow w3s solved by the Crank-Nicholson method. The finite difference method was used to save running time in the calculation. The present modified fission-gas release model was validated by comparing its predicted results with experimental data from various lamping tests In the literature and calculated results with use of the models used In the SPEAR-BETA and FEMAXI-IV codes. Results obtained with use of the present modified model showed better agreement with experimental data reported in the literature than those results with use of the latter codes. The fuel centerline temperature calculated with introduction of effective thermal conductivity for centerline temperature calculated with Introduction of effective thermal conductivity for cracked fuel was 200 higher fission gas release predicted with use of the modified model was nearly 6% larger on the average than that calculated by use of the unmodified model used in the SPEAR-BETA code.e SPEAR-BETA code.e.

  • PDF

Crystal Structure of a Carbon Monoxide Sorption Complex of Fully $Ca^{2+}$-Exchanged Zeolite X (제올라이트 X 착물의 결정구조)

  • Lee, Seok-Hee;Kim, Yong-Gwon;Jeong, Gyoung-Hwa;Kim, Nam-Seok;Park, Keun-Ho
    • Journal of the Korean Applied Science and Technology
    • /
    • v.22 no.1
    • /
    • pp.28-34
    • /
    • 2005
  • The structure of a carbon monoxide sorption complex of dehydrated fully $Ca^{2+}$-exchanged zeolite X, $|Ca_{46}(CO)_{27}|[Si_{100}Al_{92}O_{384}]$-FAU, has been determined in the cubic space group $Fd\;{\overline{3}}$ at $21^{\circ}C$ (a = 24.970(4) ) by single-crystal X-ray diffraction techniques. The crystal was prepared by ion exchange in a flowing stream of 0.05 M aqueous ${Ca(NO_3)_2}$ for three days, followed by dehydration at $400^{\circ}C$ and $2{\times}10^{-6}$ Torr for two days, and exposure to 100 Torr of zeolitically dry carbon monoxide gas at $21^{\circ}C$. The structure was determined in this atmosphere and was refined, using the 356 reflections for which $F_o$ > $4{\sigma}(F_o)$, to the final error indices $R_1$ = 0.059 and $wR_2$ = 0.087. In this structure, $Ca^{2+}$ ions occupy three crystallographic sites. Sixteen $Ca^{2+}$ ions fill the octahedral site I at the centers of hexagonal prisms (Ca-O = 2.415(7) ${\AA}$). The remaining 30 $Ca^{2+}$ ions are found at two nonequivalent sites II (in the supercages) with occupancies of 3 and 27 ions. Each of these $Ca^{2+}$ ions coordinates to three framework oxygens, either at 2.276(10) or 2.298(8) ${\AA}$, respectively. Twenty-seven carbon monoxide molecules have been sorbed per unit cell, three per supercage. Each coordinates to one of the latter 16 site-II $Ca^{2+}$ ions: C-Ca = 2.72(8) ${\AA}$. The imprecisely determined N-C bond length, 1.26(14) ${\AA}$, differs insignificantly from that in carbon monoxide(g), 1.13 ${\AA}$.

Freshness of 'Fuji' Apples Packed MA Film Treated with Acid and Anti-fogging Agents (산 및 결로방지 처리한 기능성 MA포장으로 포장한 '후지' 사과의 신선도)

  • Park, Hyung-Woo;Ryu, Na-Hee
    • KOREAN JOURNAL OF PACKAGING SCIENCE & TECHNOLOGY
    • /
    • v.19 no.1
    • /
    • pp.43-50
    • /
    • 2013
  • This study investigated the effect of functional MA films (FMA) masterbatched by zeolite powder treated with 1 N HCl solution and anti-fogging agent (CA) on the freshness extension of 'Fuji' Apples. Preference, weight loss, total ascorbic acid, sugar content, acidity, change of gas composition in package were evaluated during storage at $15^{\circ}C$. After 150 days of storage, the weight loss of LLDPE film (control, L) apples was 0.4%, and that of apple in FMA film (CA) was 1.1%. Total ascorbic acid content of apples in control after 150 days was 2.09 mg%, and those of apple in FMA film was 2.94 mg%. The titratable acidity of apple in FMA film was higher than that in control, while soluble solids content of packages was lower than that in control after 150 days. Ethylene gas adsorbability in control package was 192.2 ppm and those in FMA film was 165.6 ppm. Overall, apples in FMA film was better than that of control. It was verified that apples packed with LLDPE film(control) lasted about 130 days, while those with FMA film lasted about 170 days. Also, FMA film treated with anti-fogging agent achieved no significant effect on freshness extension compared to non-treated film, but quality of 'Fuji' Apples was improved by anti-fogging agent when compared to that of non-treated anti-fogging agent.

  • PDF