• 제목/요약/키워드: $C_3F_6$

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$CHF_3/C_2F_6$ 플라즈마에 의한 실리콘 표면 잔류막의 특성 (The Characteristics of Residual Films on Silicon Surface $CHF_3/C_2F_6$ Reactive Ion Etching)

  • 권광호;박형호;이수민;강성준;권오준;김보우;성영권
    • 한국진공학회지
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    • 제1권1호
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    • pp.145-152
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    • 1992
  • Si surfaces exposed to CHF3/C2F6 gas plasmas ih reactive ion etching (RIE) have been characterized by X-ray photoelectron spectroscopy (XPS). CHF3/C2F6 gas plasma exposure of Si surface leads to the deposition of residual film containing carbon and fluorine. The narrow scan spectra of C 1s show various bonding states of carbon as C-Si, C-F/H, C-CFx(x $\leq$ 3), C-F, C-F2, and C-F3. The chemical bonding states of fluorine are described with F-Si, F-C and F-O. And the oxygen and silicon are also detected. The effects of parameters for reactive ion etching as CHF3/C2F6 gas ratio, RF power, and pressure are investigated.

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Theoretical study on the dissociation reactions of C4F6 molecules

  • 최희철;박영춘;이윤섭
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.36-36
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    • 2010
  • Low-pressure fluorocarbon plasmas are widely used in microelectronics fabrication for a variety of surface modification purposes. In particular, fluorocarbon plasmas are used for the etching of dielectrics such as silicon dioxide and silicon nitride. Among the various fluorocarbons, this study focuses on C4F6 molecules (C4F6s) which are composed of hexafluorocyclobutene (c-C4F6), hexafluoro-1, 3-butadiene (1, 3-C4F6), and hexafluoro-2-butyne (2-C4F6). We have investigated the dissociation reactions of C4F6s, resulting in CF2, CF3, C2F3, and C3F3 fragments, by using the wB97X-D functional with various basis sets. In this presentation, the geometrical properties, energetics, and dissociation mechanisms of C4F6s will be suggested.

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Tetrakis(pentafluorophenyl)indium(Ⅲ) 음이온 착물의 합성과 특성 (Synthesis and Properties of Anionic Tetrakis(pentafluorophenyl)indium(Ⅲ) Complexes)

  • 최철호
    • 대한화학회지
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    • 제43권1호
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    • pp.52-57
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    • 1999
  • In($C_6F_5)_3{\cdot}D(D=CH_3CN$, O($C_2H_5)_2$)와 ($CH_3)_3SiC_6F_5$/CsF, $C_6F_5$MgBr 또는 Cd($C_6F_5)_2$을 반응시켜 [In($C_6F_5)_4$]- 음이온 화합물을 합성하였으나, 이들 indium(III) 음이온 화합물들은 온도에 민감하고 습기에 대해 불안정하다. 안정한 indium(III) 음이온 착물은 PNPCl(PNP=bis(triphenylphosphino)ammonium)과의 양이온 치환반응시켜 얻었으며, 관 크로마토 그래피를 이용하여 분리 정제하였다. 합성된 화합물의 특성은 핵자기 공명 분석법, 적외선 분광분석법, 분자량 측정, DTA/TG 그리고 원소분석법을 이용하여 조사하였다.

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글로우방전을 이용한 폴리에스테르 직물의 투습방수성 개질 (Water Repellent Finish of Polyester Fabric Using Glow Discharge Treatment)

  • 김태년
    • 한국의류학회지
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    • 제25권1호
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    • pp.154-161
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    • 2001
  • We have treated polyester fabric with $CF_4,\;C_2F_6,\;SF_6\;and\;C_3F_6$ glow discharge plasmas to develop functional fabrics which preserve moisture transportation and water proofing nature. Modified properties were evaluated by water vapor permeation rate and breakthrough water pressure. The change of surface morphology was observed by SEM. Fiber interstice of the plasma treated fabric was calculated as $0.32{\mu}{\textrm}{m}$, and this value was sufficiently ideal as water repellent material. The moisture transportation of ${CF_4}-treated$ fabric was good as much as untreated fabric, and those of $C_2$F(sub)6-treated, SF(sub)6-treated fabrics were reduced by 1~3%, and that of ${C_3F_6}-treated$ fabric was reduced by 15%. The best treatment condition were 0.06 torr 120 seconds in $CF_4$, 0.05 torr 30 seconds in $SF_6$, 0.08~0.15 torr 90 seconds in $SF_6$ and 0.1 torr 45 seconds in $C_3F_6$ respectively. The grade of moisture transportation effect was $CF_4>C_2F_6>SF_6>>C_3F_6$, and water proofing effect was $C_2F_6{\approx}CF_4>C_3F_6>SF_6$. It was observed by SEM that the thin film was formed on the surface of the treated substrate by the fluorocarbon plasma treatment.

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Reaction Properties of Dinuclear Metallocenes

  • Noh Seok-Kyun;Jeong Eung-Yeong;Qei Duang Huang Dan;Lyoo Won-Seok
    • 한국고분자학회:학술대회논문집
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    • 한국고분자학회 2006년도 IUPAC International Symposium on Advanced Polymers for Emerging Technologies
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    • pp.224-225
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    • 2006
  • The Ethylene polymerization behavior of a series of polymethylene bridged dinuclear CGC $[Zr({\eta}^{5}:{\eta}^{1}-C_{9}H_{5}SiMe_{2}NCMe_{3})Me_{2}]_{2}[(CH_{2})_{n}]\;[_{n}=6(1),\;9(2),\;12(3)]$ in the cocatalytic activation with $Ph_{3}C^{+}B^{-}(C_{6}F_{5})_{4}\;(B_{1})\;or\;Ph_{3}C^{+}(C_{6}F_{5})_{3}B^{-}C_{6}F_{4}B^{-}(C_{6}F_{5})_{3}Ph_{3}C^{+}\;(B_{2})\;or\;B(C_{6}F_{5})_{3}\;(B_{3})$ were investigated to study the nuclearity effects as well as the counteranion effects. The ethylene polymerization and ethylene/1-hexene copolymerization were conducted at $30^{\circ}C$ It was found that both in ethylene polymerization and ethylene/1-hexene copolymerization, activities increased in the order of 1 < 2 < 3, which indicates the presence of longer bridge between two active sites contributes more efficiently to facilitate the polymerization activity.

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Immune Effect of Newcastle Disease Virus DNA Vaccine with C3d as a Molecular Adjuvant

  • Zhao, Kai;Duan, Xutong;Hao, Lianwei;Wang, Xiaohua;Wang, Yunfeng
    • Journal of Microbiology and Biotechnology
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    • 제27권11호
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    • pp.2060-2069
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    • 2017
  • Newcastle disease is a serious infectious disease in the poultry industry. The commercial vaccines can only offer limited protection and some of them are expensive and need adjuvants. At present, DNA vaccines are widely used. However, the immune responses induced by DNA vaccines are too slow and low. Here, we constructed the transfer vectors with a different number of C3d as molecular adjuvants (n = 1, 2, 4, or 6), and the vectors were cloned into the optimal eukaryotic expression plasmid (pVAXI-optiF) that expressed the F gene of Newcastle disease virus (NDV), and named pVAXI-F(o)-C3d1, pVAXI -F(o)-C3d2, pVAXI-F(o)-C3d4, and pVAXI-F(o)-C3d6, respectively. Cell transfection test indicated that pVAXI-F(o)-C3d6 showed the highest expression. In vivo immunization showed that the chickens immunized with pVAXI-F(o)-C3d6 intramuscularly induced better immune responses than the chickens immunized with the other plasmids. The protective efficacy of pVAXI-F(o)-C3d6 was 80% after challenge with the highly virulent NDV strain F48E9. The results in this study showed that C3d6 could be used as a molecular adjuvant to quickly induce an effective immune response to control NDV.

HDDM, a formula consisting of seven herbs, had anti-diabetic but no immunomodulatory activities in multiple low doses of streptozotocin-treated female of B6C3F1 mice

  • Zheng, Jian Feng;Guo, Tai L
    • Advances in Traditional Medicine
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    • 제9권1호
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    • pp.20-38
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    • 2009
  • The objectives of this study were to determine the effect of herb formula HDDM, a modification of Huangdan decoction that has been shown to be effective in the treatment of glomerulonephritis and chronic renal failure, on the blood glucose levels in multiple low doses (MLD; 50 mg/kg for five consecutive days) of streptozotocin (STZ)-treated female B6C3F1 mice. Initial studies were performed to compare diabetes induction in five strains (e.g., B6C3F1, NOD, CD-1, C3H/HeN and C57BL/6) of mice by MLD-STZ, and immune changes following the treatment. The results suggested that the order of susceptibility to diabetes induction was NOD $\approx$ CD-1 > B6C3F1 $\approx$ C3H > C57BL/6. Furthermore, STZ modulation of T cell development, differentiation and activation might play a role in diabetes induction by MLD-STZ treatment. MLD-STZ-induced diabetes in female B6C3F1 mice was moderate, which allowed the evaluation of drug-induced protection or exacerbation of diabetes to be performed. As such, modulation of blood glucose by HDDM, which consisted of Da Huang (Radix Et Rhizoma Rhei), Huang Qi (Radix Astragali Seu Hedysari), Dan Shen (Radix Salviae Miltiorrhizae), Yin Yang Huo (Herba Epimedii), Yi Yi Ren (Semen Coicis or Coix lacryma-jobi), Mai Dong (Radix Ophiopogonis) and Shan Zhu Yu (Fructus Corni), was evaluated in MLD-STZ-treated female B6C3F1 mice. The results suggested that HDDM could lower the blood glucose levels, but it had no immunomodulatory activities. Additionally, HDDM-treated mice exhibited improved glucose tolerance. In conclusion, these studies have suggested that MLD-STZ-induced diabetes in female B6C3F1 mice is a useful model to evaluate drug modulation of diabetes, and that the herb formula HDDM possesses anti-diabetic effects.

폴리메틸렌 다리로 연결된 양이온 이핵 CGC를 이용한 에틸렌과 1-헥센의 공중합 (Copolymerization of Ethylene and 1-Hexene via Polymethylene Bridged Cationic Dinuclear Constrained Geometry Catalysts)

  • 비안팽링;당황단웨이;류원석;이동호;노석균;김용만
    • 폴리머
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    • 제31권6호
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    • pp.497-504
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    • 2007
  • 길이가 다른 폴리메틸렌 다리로 연결된 이핵 CGC(Constrained geometry catalyst) $[Zr({\eta}^5\;:\;{\eta}^1-C_9H_5-SiMe_2NCMe_3)Me_2]_2\;[(CH_2)_n]$ [n=6(4), 9(5), 12(6)]를 2 당량의 MeLi과 대응되는 염소화합물을 반응시켜 합성하고 이들의 구조를 확인하였다. 합성된 이핵메탈로센의 중합 특성을 에틸렌과 1-hexene의 공중합을 통해 조사하였다. 이때에 사용된 조촉매로는 일반 조촉매 $Ph_3C^+[B(C_6F_5)_4]^-\;(B_1)$$(B(C_6F_5)_5)_3\;(B_3)$ 그리고 이핵조촉매 $Ph_3C^+[(C_6F_5)_3B-C_6F_4-B(C_6F_5)_3]^{2-}\;(B_2)$을 이용하였다. 중합 결과 촉매의 활성은 이핵메탈로센에서는 다리길이가 길수록 크게 나타났으며, 조촉매에서는 이핵조촉매가 가장 낮은 활성을 보였다. 조촉매의 특성은 공중합체에 존재하는 가지의 함량에서 잘 나타났다. 이핵조촉매($B_2$)를 사용하면 가장 가지수가 작은 고분자가 생성되었고, 조촉매 $B_3$에서 가장 많은 가지를 가진 공중합체가 생성되었다.

PFOS 대체물질의 환경유해성에 관한 연구 (Study on Environmental Hazards of Alternatives for PFOS)

  • 최봉인;정선용;나숙현;신동수;유병택
    • 대한환경공학회지
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    • 제38권6호
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    • pp.317-322
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    • 2016
  • PFOS sodium salt ($C_8F_{17}SO_3Na$)는 28일 동안 미생물에 의한 분해가 이루어지지 않은 반면 4종의 대체물질($C_{25}F_{17}H_{32}S_3O_{13}Na_3$, $C_{15}F_9H_{21}S_2O_8Na_2$, $C_{23}F_{18}H_{28}S_2O_8Na_2$, $C_{17}F_9H_{25}S_2O_8Na_2$)은 각각 21.6%, 20.5%, 15.8% 그리고 6.4% 분해가 이루어졌다. Daphnia magna를 이용하여 48시간 동안 수행한 물벼룩급성독성시험에서 sodium salt ($C_8F_{17}SO_3Na$)의 반수영향농도($EC_{50}$)는 54.5 mg/L 인 것으로 확인된 반면 4종의 대체물질은 500.0 mg/L에서 아무런 영향이 나타나지 않았다. 500.0 mg/L에서 PFOS sodium salt($C_8F_{17}SO_3Na$)의 표면장력은 46.2 mN/m이었으며 대체물질 4종의 표면장력은 모두 PFOS sodium salt 보다 우수한 것으로 확인되었다. $C_{23}F_{18}H_{28}S_2O_8Na_2$ (20.9 mN/m)는 가장 낮은 표면장력을 갖고 있었다. 그 다음은 $C_{15}F_9H_{21}S_2O_8Na_2$ (23.4 mN/m), $C_{17}F_9H_{25}S_2O_8Na_2$ (27.3 mN/m) 그리고 $C_{25}F_{17}H_{32}S_3O_{13}Na_3$ (28.2 mN/m) 순인 것으로 확인되었다. 미생물분해시험, 물벼룩급성독성시험 그리고 표면장력측정 결과를 종합해 보면 4종의 PFOS 대체물질($C_{25}F_{17}H_{32}S_3O_{13}Na_3$, $C_{15}F_9H_{21}S_2O_8Na_2$, $C_{23}F_{18}H_{28}S_2O_8Na_2$, $C_{17}F_9H_{25}S_2O_8Na_2$)은 모두 PFOS sodium salt ($C_8F_{17}SO_3Na$) 보다 우수한 것으로 확인되었으며 특히 3종의 대체물질($C_{15}F_9H_{21}S_2O_8Na_2$, $C_{23}F_{18}H_{28}S_2O_8Na_2$, $C_{25}F_{17}H_{32}S_3O_{13}Na_3$)은 미생물분해율이 15.8~21.6%로 상대적으로 높고, 물벼룩급성독성과 표면장력측정이 PFOS sodium salt 보다 상당히 우수하다. 그러므로 이들 4종의 대체물질은 PFOS 대체물질로 활용이 가능할 것으로 판단된다.

의복 디자인 선에 따른 시각적 효과에 관한 연구 (A Study on the Visual Effects According to the Lines in Cloth Designing)

  • 이경희
    • 대한가정학회지
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    • 제28권4호
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    • pp.1.1-13
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    • 1990
  • Authors have performed the sensory evaluation tests according to each given items after selecting various lines in order to assess the visual effects by the lines in cloth designing. The evaluations were done by means of ranking tests followed by paired comparison tests. The results obtained were as follows : 1. In the item in than "Shoulder width looks wide", the design C3 showed the best visual effect, and then B1, F8, and A5 comes in order. In "Shoulder width looks narrow", they were A2, F5, F7, and B2 in order. 2. In "Bust looks big", the effect was best in F9, and then B1, F5, C3, and A5 and order. "Bust looks small" item showed A3, C1, and F1 in order. 3. In "Waist looks thick", they were B2, D1, and F7 while in "Waist looks thin", they were B3, F8, and D6 in order. 4. In the item in that "Hip looks big", the best effect was in F9, and then E3, C2, and B4 in order. In "Hip looks small", the best one was C1, and then comes. E1, F6, and F8. 5. In "Upper body looks thick", they were D2, D4, F8, C3 and A5 in order whild in "Upper body looks thin", they were A1, F5, and D7 in order. 6. In the item "Lower body lookds thick", they were F9, C2, E3, B3, and D3 in order. In "Lower body looks thin", the best one was C1, and then D1, E2, F6, and F8 comes in order. 7. In "whole body looks thick", they were F9, F3, D3, and A5, and in "Whole body looks thin", they were F5, A1, C1, and D6 in order. 8. In "Height looks tall", the effects were in order of A4, D6, E1, and F7 while in "Height looks short", they were E3, F9, B4, D2, and D1. 8. In "Height looks tall", the effects were in order of A4, D6, E1, and F7 while in "Height looks short", they were E3, F9, B4, D2, and D1. F9, B4, D2, and D1.

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