• Journal of Conservation Science
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• v.27 no.3
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• pp.333-344
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• 2011

Cleaning of foreign matter and corrosion products on surface among conservation treatment of iron artifacts is an important part for looking up a original form. The sand blaster is the most popular equipment when it removes the foreign matter and corrosion products on iron artifacts surface. Current foreign matter and corrosion products equipment, which mostly uses, is sand blaster. Glass dust which sprayed from sand blaster is harmful and causing environmental pollution. In order to solve these problems, we investigated the $CO_2$ snow cleaning that use a eco-friendly equipment to apply for cleaning foreign matter and corrosion products on surface of iron artifacts. It examined by using sand blaster and $CO_2$ snow cleaning to aged steel coupon and iron artifacts. In case of aged steel coupon, the result showed that the sand blaster and $CO_2$ snow cleaning methods were similar to the degrees of cleaning foreign matter and corrosion products, through surface roughness, color measurement and SEM. $CO_2$ snow cleaning applied to aged steel coupons weren't worn out the surface in comparison with sand blaster by SEM. When applied to the iron artifacts, power nozzle of the $CO_2$ snow cleaning was an excellent cleaning effect that surface wern't worn out in comparison with sand blaster. And, it showed that internal structure change of metal was no found before and after cleaning by X-ray radiography. Consequently, we confirmed that cleaning of the sand blaster and power nozzle of $CO_2$ snow cleaning were similar to the effect. But, it's very careful to use this method because of high outlet pressure of power nozzle for applying to the iron artifacts. As a result of experiments, it could be found that the cleaning methods should be selected depending on internal state of the artifacts.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.66.1-66.1
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• 2011

반도체를 비롯하여 LCD, OLED와 같은 디스플레이 (FPD: Flat Panel Display) 분야는 국가 선도 사업으로써 발전을 거듭해오고 있다. 하지만 기술의 성숙도가 높아짐에 따라 최근 중국과 대만 업체와의 경쟁이 심화되고 있으며, 더불어 환경문제가 큰 이슈로 떠오르고 있어 신기술 개발을 통한 생산 수율 향상 및 친환경 공정 개발의 중요성이 커지고 있다. 반도체, 디스플레이 공정에서 생산 수율 저하의 주요 원인으로써 공정 중 발생하는 미세 오염 입자를 들수 있다. 반도체 및 디스플레이 공정에서 세정 기술은 전체 기술의 30% 이상을 차지하며 생산 수율 및 제품의 품질에도 큰 영향을 주는 공정이다. 세정 공정은 일반적으로 습식 세정 공정이 낮은 공정비용을 바탕으로 널리 적용되어 왔으나, 기판의 대형화와 패턴의 미세화에 따라 정밀한 세정 스펙이 요구되며 더불어 막대한 양의 초순수와 화학액의 사용으로 인한 공정비용 증가와 환경 규제 강화에 따른 폐수 처리의 문제에 직면하고 있다. 이에 따라 폐수의 양을 줄이며 건조공정을 필요로 하지 않아 공정비용을 줄일 수 있는 건식 세정 공정에 대한 연구가 활발히 진행 되고 있다. $CO_2$ snow jet 세정 기술은 건식 공정으로써 $CO_2$ 가스를 특수하게 제작된 분사 노즐에서 고압으로 가스를 분사하여 이 때 발생되는 순간적인 감압에 의한 단열 팽창으로 생성된 $CO_2$ snow 입자가 기판 표면의 오염물과 물리적 충돌을 하어 세정이 이루어지는 기술이다. 특히 $CO_2$ 세정은 환경과 인체에 무해하며 공정 후 바로 승화하기 때문에 추가적인 폐수처리 공정 등이 필요하지 않고, 건식 공정으로써 수세(Rinse) 공정을 필요로 하지 않기 때문에, 공정비용을 크게 줄일 수 있으며 물반점 발생을 방지 할 수 있는 친환경 건식 공정으로써의 장점을 가지고 있다. 본 연구에서는 자체적으로 개발한 $CO_2$ snow jet을 바탕으로 하여 다양한 공정조건을 변화시켜 세정효율을 측정하는 한편, 최적화 하기 위한 연구를 진행하였으며 더불어 $CO_2$ snow의 세정력을 정량적으로 평가하기 위한 연구를 진행하였다. 실험을 통해 가장 효과적으로 $CO_2$ snow 입자를 배출 할 수 있는 공정 조건으로써 5 bar의 캐리어 가스 압력을 사용하여, 세정력에 가장 큰 영향을 줄 수 있는 분사 노즐과 기판 사이의 거리 및 분사 노즐의 각도 등을 변화시켜 각 조건에 따른 세정효율을 평가하였다. 세정 오염물은 Silica, PSL 표준 입자(Duke scientific, USA)를 정량적으로 웨이퍼에 오염 시킨 후, 파티클 스캐너(Surfscan 6500, KLA-Tencor, USA)를 이용하여 세정 전 후의 오염입자 개수 변화를 통해 정량적으로 세정효율을 평가하였다. 본 연구를 통하여 $CO_2$ snow jet를 이용한 친환경 고효율 건식 세정 공정 메커니즘을 분석하였으며, 노즐과 기판 사이의 간격 및 분사 노즐의 각도 등을 최적화 한 세정 공정을 얻을 수 있었다.

• Journal of the Semiconductor & Display Technology
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• v.7 no.4
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• pp.29-33
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• 2008

Rapid increase of integrity for recent semiconductor industry highly demands the development of removal technology of contaminated particles in the scale of a few microns or even smaller. It is known that the surface cleaning technology using $CO_2$ snow has its own merits of high efficiency. However, the detailed removal mechanism of particles using this technology is not yet fully understood due to the lack of sophisticated research endeavors. The detachment mechanism of particles from the substrates is known to be belonged in four types; rebounding, sliding, rolling and lifting. In this study, a modeling effort is performed to explain the detachment mechanism of a contaminant particle due to the rebounding caused by the vertical collision of the $CO_2$ snow. The Hertz and Johnson-Kendall-Roberts(JKR) theories are employed to describe the contact, adhesion and deformation mechanisms of the particles on a substrate. Numerical simulations are followed for several representative cases, which provide the perspective views on the dynamic characteristics of the particles as functions of the material properties and the initial inter-particle collision velocity.

• Journal of the Korean institute of surface engineering
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• v.34 no.1
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• pp.62-67
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• 2001

Green technology is being developed up to a point that is feasible not only in an environmental sense, but also in an economical viewpoint. This paper introduces two case studies that applied $CO_2$ technology into nuclear industry. 1) Nuclear laundry : A laundry machine that uses liquid and supercritical $CO_2$ as a solvent for decontamination of contaminated working dresses in nuclear power plants was developed. The machine consists of a 16 liter reactor, a recovery system with compressors, and storage tanks. All $CO_2$ used in cleaning is fully recovered and reused in next cleaning, resulting in no production of secondary nuclear waste. Decontamination factor is still lower than that in the methods currently used in the plant. Nuclear laundry using $CO_2$ looks promising with technical improvements-surfactants and mechanical agitation. 2) $CO_2$ nozzle decontamination : An adjustable nozzle for controlling the size of dry ice snow was developed. Using the developed nozzle, a surface decontamination device was made. Human oils like fingerprints on glass were easy to remove. Decontamination ability was tested using a contaminated pump-housing surface. About 40 to 80% of radioactivity was removed. This device is effective in surface-decontamination of any electrical devices like detector, controllers which cannot be cleaned in aqueous solution.

• Analytical Science and Technology
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• v.25 no.6
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• pp.350-363
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• 2012

To determine ionic species in snowpit samples using ion chromatography system, we described the performance of ion chromatography(IC) system, cleaning method of bottle, and interference by filtering procedure. The limit of detection, reproducibilities, and accuracies determined with BCR$^{(R)}$-408 were 0.01-0.26 ${\mu}g$/L, 0.4-17.4%, 4.5-12.0% for cations and 0.02-0.26 ${\mu}g/L$, 0.1-27.6%, 1.3-5.6% for anions, respectively. Lab blank test for sample bottle indicated that $CH_3CO_2{^-}$, $HCO_2{^-}$, and $NH_4{^+}$ can be easily contaminated in the lab environment. The positive interferences of $NO_3{^-}$ were partly attributed to the cleaning method of bottle. The filtering of melted snow sample should be carefully applied because it can positively affect the concentration levels of some ionic species. Finally, this method was applied to measure ionic species in snowpit samples from the upward area near NEEM camp and the uncertainties of measurement data of $F^-$ were also estimated.