• 한국산업보건학회지
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• 제25권2호
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• pp.202-210
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• 2015

Objectives: The purpose of this study was to examine clean room(C/R) structure, air conditioning and contamination control systems and to provide basic information for identifying a correlation between the semiconductor work environment and workers' disease. Methods: This study was conducted at 200 mm and 300 mm semiconductor wafer fabrication facilities. The C/R structure and air conditioning method were investigated using basic engineering data from documentation for C/R construction. Furthermore, contamination parameters such as airborne particles, temperature, humidity, acids, ammonia, organic compounds, and vibration in the C/R were based on the International Technology Roadmap for Semiconductors(ITRS). The properties of contamination control systems and the current status of monitoring of various contaminants in the C/R were investigated. Results: 200 mm and 300 mm wafer fabrication facilities were divided into fab(C/R) and sub fab(Plenum), and fab, clean sub fab and facility sub fab, respectively. Fresh air(FA) is supplied in the plenum or clean sub fab by the outdoor air handling unit system which purifies outdoor air. FA supply or contaminated indoor air ventilation rates in the 200 mm and 300 mm wafer fabrication facilities are approximately 10-25%. Furthermore, semiconductor clean rooms strictly controlled airborne particles(${\leq}1,000{\sharp}/ft^3$), temperature($23{\pm}0.5^{\circ}C$), humidity($45{\pm}5%$), air velocity(0.4 m/s), air change(60-80 cycles/hr), vibration(${\leq}1cm/s^2$), and differential pressure(atmospheric pressure$+1.0-2.5mmH_2O$) through air handling and contamination control systems. In addition, acids, alkali and ozone are managed at less than internal criteria by chemical filters. Conclusions: Semiconductor clean rooms can be a pleasant environment for workers as well as semiconductor devices. However, based on the precautionary principle, it may be necessary to continuously improve semiconductor processes and the work environment.

• 한국컴퓨터정보학회논문지
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• 제27권7호
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• pp.83-92
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• 2022

본 연구에서 우리는 PHM 기반 공조설비의 연쇄 고장 패턴을 학습하여 미세먼지의 상태를 조절할 수 있는 알고리즘을 설계하였다. 공조설비의 고장으로 인한 공조설비 가동중단과 이로 인한 미세먼지의 확산은 불가피하다. 우리가 개발한 알고리즘은 PHM을 통한 미세먼지 관리 체계를 수립하는 것으로써 공조기 정지/가동 패턴학습을 통하여 일정하게 안정화 상태를 유지하고 이를 기반으로 미세먼지를 관리하는 알고리즘이다. 알고리즘의 성능을 평가하기 위해 지하철 역 내에서 시뮬레이션 한 결과, 미세먼지의 농도가 평균 30% 감소하는 것을 알 수 있었다. 지하철 이용 승객이 많은 역의 경우 미세먼지 농도가 환경부 기준(100㎍/m³)을 초과하였지만, 시뮬레이션을 실시한 모든 역에서 미세먼지 농도가 개선되었음을 알 수 있었다. 향후 연구로는 지하철 역사 내의 미세먼지 뿐만아니라 CO₂, CO, NO₂ 등 오염물질을 종합적으로 관리할 수 있도록 시스템을 확장하는 것이다.

• 설비공학논문집
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• 제21권1호
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• pp.49-54
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• 2009

Ventilation requirement of apartment was mandated according to building equipment standards in 2006. When ventilation unit was considering for indoor air quality maintenance, we needed energy saving and efficiency ventilation control methods. This study carried out experiment of ventilation rate 0.7 adequacy. When we lived in apartment, we assumed that sleeping time was long stayed time in unconsciousness. Experiments carried out ventilation rate 0, 0.1, 0.4 and 0.7 in environment chamber from 22 o'clock to 06 o'clock, the concentration of $CO_2$, temperature and humidity rate measured. Analyzing the results, conclusions are as follows. 1) When we sleep in bedroom, ventilation rate 0.4 meet the requirements of domestic legal standards. Conform fan of similarity law, ventilation rate 0.4 reduced power cost about 80% than 0.7. 2) In generally sleeping time 8 hours, peak point control reduced running time of ventilation unit about 43% than normal control.

• 설비공학논문집
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• 제29권3호
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• pp.134-141
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• 2017

The purpose of this study was to analyze physiological changes via a cold air reaction experiment to generate basic data that are useful for the development of an automobile active air conditioning system to prevent drowsiness. The $CO_2$ concentration causing drowsiness in vehicle operation was kept below a certain level. Air was blown to the driver's face by using an indoor air cooling apparatus. Sleepiness and the arousal state of the driver in cold wind were measured by physiological signals. It was evident in the EEG that alpha waves decreased and beta waves increased, caused by cold air stimulation. The ${\alpha}/{\beta}$ ratio was reduced by about 52.9% and an alert state confirmed. In the electrocardiogram analysis, the efficiency of cold air stimulation was confirmed by the mean heart rate interval change. The R-R interval had a delay time of about one minute compared to the EEG response. The findings confirmed an arousal effect from sleepiness due to cold air stimulation.

• 설비공학논문집
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• 제18권8호
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• pp.641-648
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• 2006

In this study, a two-stage phase-separate cycle was investigated analytically to improve the performance of the $CO_2$ system in the cooling mode. The simulation results were verified with the measured data. The predictions using the simulation model were consistent with the measured data within ${\pm}20%$ deviations. The performance of the modified $CO_2$ system with the two-stage phase-separated cycle was analyzed with the variations of outdoor temperature and EEV opening. The cooling COP decreased with the increase of compressor frequency. The highest COP was 2.7 at compressor frequencies of 30 Hz and 30 Hz for the first and second compressors, respectively. In addition, the cooling COP increased by 9.3% with an application of optimum control of the first and second-stage EEV openings.

• 설비공학논문집
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• 제20권5호
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• pp.304-313
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• 2008

This paper investigates the indoor-air-quality (IAQ) characteristics of the interior space equipped with system air-conditioner. The behaviors of individual variables such as temperature, humidity and concentration of carbon dioxide ($CO_2$) that influence on IAQ of the interior space were characterized under various cooling conditions by numerical and experimental studies. The numerical analysis predicting the temperature behavior of the interior space was conducted, and its results showed a good agreement with the experimental ones. The $CO_2$ concentration and humidity were measured and their time dependent behaviors were monitored and analyzed. From the results, it was found that there existed the differences of the time-dependent behaviors of IAQ variables according to the locations. In addition, it is demonstrated that the large discharge angle of $45^{\circ}$ made the temperature profile more irregular and the high discharge flow of 5.34 m/s produced similar temperature profiles at three different sensing locations. Finally, the humidity of interior space was less sensitive to the changes of the air cooling conditions than the case of temperature and the $CO_2$ concentration increase mainly depended on the number of individuals inside the space.

• 설비공학논문집
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• 제22권10호
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• pp.657-664
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• 2010

The theoretical analysis of performance characteristics in a $CO_2$ cycle with the heat exchanger type was carried out. The size and performance of the fin-tube and microchannel heat exchanger were compared with operating conditions. As a result, the performance of the fin-tube gascooler and evaporator were more sensitive to the variation of operating condition compared to that of the microchannel gascooler and evaporator. Beside, the sizes of microchannel gascooler and evaporator could be decreased by 73% and 76%, respectively, compared to those of the fin-tube type gascooler and evaporator with the similar capacity. The COP and reliability of the $CO_2$ system can be increased by using a microchannel heat exchanger.

• 설비공학논문집
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• 제18권10호
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• pp.835-841
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• 2006

A $CO_2$ system using the two-stage compression cycle was tested by varying $1^{st}-2^{nd}$ compressor frequencies in the cooling mode. To improve the cooling performance of the two-stage compression $CO_2$ cycle, the following cycle options were applied: a basic cycle, a cycle with an intercooler, a cycle with an IHX (internal heat exchanger), and a cycle with an intercooler and IHX. The cycle with the intercooler-IHX showed the highest cooling capacity improvement among the cycle options at all compressor frequencies. The cycle with the intercooler, the cycle with the IHX, and the cycle with the intercooler-IHX improved the cooling COP by 7, 12, and 15%, respectively, over the basic $CO_2$ cycle when the compressor frequencies for the first and second compressors were 50 Hz and 30 Hz, respectively. In addition, the applications of the selected cycle options enhanced system reliability.

• 설비공학논문집
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• 제28권2호
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• pp.49-54
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• 2016

The purpose of this study is to analyze the indoor temperature distribution of a room controlled by a personal and portable cooler. As an energy saving strategy, the personal air-conditioning or task conditioning system was developed and installed in office buildings in the 90 s. Many research results regarding the personal air-conditioning (PAC) system were focused on thermal comfort, localized ventilation efficiency and energy savings. However, the conventional PACs were only developed for application in office buildings. In this study, as a type of PAC, a portable cooler was analyzed in terms of indoor temperature distribution changes with the passage of time. The measurement was performed in a bedroom in an apartment house. The results showed that indoor temperature was controlled at about $24^{\circ}C$ around the human body. However, the ambient zone up to 1.5 m away from the the human body stayed at about $27.5^{\circ}C$.

• 동력기계공학회지
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• 제18권1호
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• pp.51-56
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• 2014

In this paper, the performance of the $CO_2-C_2H_6-N_2$ cascade liquefaction cycle with respect to temperature differences in the LNG heat exchangers is analyzed theoretically using HYSYS software and then compared the COP(coefficient of performance) of the cascade liquefaction cycles using $C_3H_8-C_2H_4-C_1H_4$ and $CO_2-N_2O-N_2$. In comparison of COP of three cycles, the cascade liquefaction cycles using $C_3H_8-C_2H_4-C_1H_4$ showed the highest COP. And the liquefaction cycle using $CO_2-C_2H_6-N_2$ and $CO_2-N_2O-N_2$ presented the second and third highest COP, respectively. In case of COP, the $C_3H_8-C_2H_4-C_1H_4$ cascade liquefaction cycle yields better COP. But, in terms of the environment and maintain, it is confirmed that the cascade liquefaction cycle using $CO_2-C_2H_6-N_2$ provides favorable characteristics.