• 한국전기전자재료학회논문지
• /
• 제11권2호
• /
• pp.101-105
• /
• 1998

This paper describes anisotropic etching technology of highly doped polysilicon. The main etching gases are $Cl_2$ and $SiCl_4$ for reactive ion etching of polysilicon. The mixed $CHCl_3$ to main etching gas makes polymer on etching side wall, so it prevents side etching of polysilicon. The etch rate of polysilicon is increased with increasing RF power. But the etching rate is decreased as the flow rate of $CHCl_3$ is increased with fixed RF power. The etch selectivity of polysilicon and $SiO_2$ is about 12:1. And that of polysilicon and $Si_3N_4$ is about 19:1. In the main etching gas condition, the slope of polysilicon is same as that of photoresist. But in the mixed $CHCl_3$ condition, the slope of polysilicon is larger than that of photoresist. This represents that the polymer made on side wall by added $CHCl_3$ prevents side etching, so anisotropic etching can be possible by polymer.

• 대한화학회지
• /
• 제15권3호
• /
• pp.133-145
• /
• 1971

액체구조의 천이상태이론을 이성분용액의 액체-증기 계면에 적용하여, $C_6H_{12}-C_6H_6$ $CCI_4-C_6H_6$, $CHCl_3-C_6H_6$, $CHCl_3-CCl_4$, $CCl_4-CS_2$계의 표면장력, 표면흡착량, 표면에서의 활동도 계수들을 계산하였다.

• 한국환경보건학회지
• /
• 제25권3호
• /
• pp.1-6
• /
• 1999

This study was conducted to survey trihalomethane(THMs) levels in finished water of J water treatment plant and examine its reduction by powder activated carbon(PAC) treatment. Samples were collected weekly based and head-space technique was employed to determine THMs levels by G.C-ECD. THMs levels in finished waters were highest in August and showed close relationship with water temperature. All the samples satisfied the drinking water limit(100 ${\mu}$g/l) for THMs. The individual formation rates of THMs were 64.8% for CHCl$_3$, 28.4% for CHCl$_2$BR, 6.5% for CHClBr$_2$ and 0.3% for CHBr$_3$, respectively and showed little monthly difference. The reduction efficiency of THMs formation by PAC treatment was 67% during July and August. Bromine substituents were more efficiently reduced than CHCl$_3$ by PAC.

• 한국환경보건학회지
• /
• 제26권4호
• /
• pp.122-128
• /
• 2000

This study was carried out to survey trihalomethane formation potential(THMFP) levels in drinking underground water and to examine its characteristics in Kunsan area. In drinking underground water, THMFP increased with the lapse of reaction time and 96hr-THMFP was the highest of THMFPs examined. In many cases, 24hr-THMFP, 48hr-THMFP and 96hr-THMFP reflected 2hr-THMFP level due to the largest composition ratio of CHCl$_3$ decreased with the lapse of reaction of CHCl$_3$ among THM individuals. CHCl$_3$ was mostly formed within early 2hour of reaction time, but CHClBr$_2$ and CHBr$_3$ continued their formation until 48 hour. Accordingly, the composition ratio of CHCl$_3$ decreased with the lapse of reaction time while that of total Br derivatives increased. 96hr-THMFPs of drinking underground water in Kunsan area ranged from N.D.(not detected)~98.80 $\mu\textrm{g}$/$\ell$ and, in general, those of western section of Kunsan area, closer to the coast, showed the higher tendency. But, from their large range of variance, it could be considered that THMFPs differ individually even in the same section depending on such factors as the difference of water stream, circumstances of management and so on. All the parameters for water quality examined(pH, KMnO$_4$ consumption;UV$_{254}$ , TOC. Cl$^{[-10]}$ ) showed very week corelation with 96h-THMFP.

• 청정기술
• /
• 제16권3호
• /
• pp.198-205
• /
• 2010

염화탄화수소 열분해와 생성물분포 특성을 고찰하기 위해 등온 관형 반응기를 이용해 두 가지 실험을 수행하였다. 첫 번째는 반응분위기에 따른 열분해 특성을 파악하기 위해 $H_2$ 또는 Ar 반응분위기에서 dichloromethane ($CH_2Cl_2$) 분해율과 생성물분포 특성을 고찰하였다. Ar 반응분위기($CH_2Cl_2$/Ar 반응계)에서 보다 $H_2$ 반응분위기($CH_2Cl_2/H_2$ 반응계)에서 $CH_2Cl_2$ 분해율이 더 높았다. 이는 반응성 기체인 $H_2$ 분위기에서 $CH_2Cl_2$ 분해를 촉진시키며 수소 첨가 탈염소반응을 통해 탈염소화된 탄화수소화합물을 생성시키며, 다환방향족탄화수소 (polycyclic aromatic hydrocarbon: PAH)와 soot 생성을 억제하기 때문이다. $CH_2Cl_2/H_2$ 반응계에서 주요생성물로 탈염소화합물인 $CH_3Cl,\;CH_4,\;C_2H_6,\;C_2H_4,\;HCl$ 등이 생성되었으며, 미량 생성물로 chloroethylene이 검출되었다. $CH_2Cl_2$/Ar 반응계에서는 탄소물질수지가 낮았으며 특히 반응온도 $750^{\circ}C$ 이상에서 탄소물질 수지가 더 낮게 나타났다. 주요 생성물로는 chloroethylene과 HCl이 검출되었으며, 미량 생성물로는 $CH_3Cl$과 $C_2H_2$이 검출되었다. 고온 Ar 반응분위기에서 $CH_4$ 주입에 따른 chloroform($CHCl_3$) 분해와 생성물분포 특성을 비교 고찰하였다. $CHCl_3$ 분해율을 비교해 보면 $CH_4$을 주입할 경우($CHCl_3/CH_4/Ar$ 반응계)가 $CH_4$을 주입하지 않았을 경우($CHCl_3$/Ar 반응계)보다 분해율이 낮았다. 이는 $CHCl_3$가 분해되면서 생성되는 활성도가 큰 이중라디칼(diradical)인 :$CCl_2$가 첨가물로 주입된 $CH_4$와 반응하여 소모됨으로써 $CHCl_3$ 분해율이 상대적으로 감소되기 때문이다. Ar 반응분위기에서 $CH_4$ 첨가 여부에 따라 $CHCl_3$이 분해되면서 생성되는 생성물 분포는 큰 차이를 나타내고 있었다. 앞에서 고찰된 각 반응계에서 분해율 비교와 생성물 분포특성을 고려하고 열화학이론 및 반응속도론을 기초로 주요 반응경로를 제시하였다.

• Archives of Pharmacal Research
• /
• 제14권2호
• /
• pp.188-192
• /
• 1991

Single non-lethal doses of chloroform $(CHCL_3)$ dichlorobromomethane $(CHCL_2Br)$, dibromochloromethane $(CHCIBr_2)$, or bromoform $(CHBr_3)$ were administered to male rats. Routes of exposure including single intraperitional (ip) and subcutaneous (sc) injection were used in order to permit comparison of severity of THM effects and renal toxicity was assessed at varied times following treatment. On an equimolar basis, sc administration of $CHBr_3$ (either 12 or 3 mmoles/kg) is more effective at increasing KW/BW than ip $CHCI_3$ treatment. Plasma urea nitrogen (BUN) following ip THM injections are markedly increased with all four THM at 24 hours post treatment. BUN response to $CHCL_2Br$ and $CHCIBr_3$-effected BUN levels have essentially returned to those of vehicle control. THM sc treatment results in a BUN response similar to that seen following ip treatment, with only the time course being different. With the exception of $CHCL_3$, sc and ip-treatments appear to be equally effective in evoking absolute BUN elevations. These results suggest that THM administration induce renal toxicity dependent upon the route or exposure.

• 공업화학
• /
• 제17권6호
• /
• pp.638-643
• /
• 2006

과잉수소 반응조건하에서 dichloromethane ($CH_{2}Cl_{2}$)의 열분해 생성물질의 반응경로를 규명하기 위해서 등온 관형반응기를 이용하여 무산소, 1 atm, 반응온도 $525{\sim}900^{\circ}C$, 반응시간 0.3~2.0 sec에서 반응을 수행하였다. $CH_{2}Cl_{2}$ : $H_{2}$ mole 비는 전 실험에서 4 : 96으로 유지하였으며 반응물 $CH_{2}Cl_{2}$ 분해 및 생성물의 농도는 on-line GC를 이용하여 정량 분석하였으며, 미량의 미지 화합물은 batch 시료로써 GC/MS로 정성 분석하였다. 반응시간 1 sec를 기준으로 반응물 $CH_{2}Cl_{2}$는 $600^{\circ}C$ 부근에서 분해가 시작되어 $780^{\circ}C$에서 99% 이상 분해되었다. 반응 주요생성물은 $CH_{3}Cl$, $CH_{4}$, $C_{2}H_{4}$, $C_{2}H_{6}$, HCl이 생성되었으며, 미량 생성물로는 $CHClCCl_{2}$, CHClCHCl, $CH_{2}CHCl$, $C_{2}H_{2}$가 생성되었다. 본 연구에서는 반응물질 분해 및 중간생성물 분포 특성과 열역학 및 반응속도 원리를 근거로 주요 생성물질 반응경로를 제시하였으며, 그 결과는 $CH_{2}Cl_{2}$ 및 유사한 염화탄화수소 화합물 열분해시 일어날 수 있는 열분해공정 이해를 위한 자료로 이용된다.

• 한국환경과학회지
• /
• 제6권3호
• /
• pp.277-283
• /
• 1997

SPME deuce was applied to determine the THM in an aqueous solution. The 6 kinds of THM was quantitatively detenuned by using GC-ECD which has the sample eutracted on the SPME fiber from an aqueous solution for 10 min. The THM components were well separated from $CHCl_3$ to the last $CHBr_3$ UHh 13 mons at the condition. 6 kinds of the volatile halogenated organic compounds: $CHCl_3$, $CHBrCl_2$, $CHBrtCl_2$, $CHCl_3$, $C_2Cl$. and $CHBr_3$, showed well defirled calibration graph with good llnearlty from a few ppb level up to several tens of pub concentration. $CHBr_2Cl$ and $C_2C1_4$ were detected from a few samples among the 10 of river samples. CHCl3, however, was detected In 4 sea water samples with the highest of 10 ppd among the pouuted 6 positions. Trace level of $CHBr_2Cl$ and few pub level of $CHBr_3$ were also detected at the other two sample stations. Most of the 13 rain water samples collected from 6 sampling stations were contained ppd level of $CHCl_3$, and also $CHBr_2Cl$, and C_2Cl_4$ were only detected at trace level at a few rain samples among them. We could recognize the fact that our Ut and water enoronment has already been contaminated by certain volatile halogenated organic compounds through this study.

• Natural Product Sciences
• /
• 제29권2호
• /
• pp.113-119
• /
• 2023

Descurainia sophia seeds methanol extract showed significant anti-influenza activity and we tried to isolate anti-influenza compounds from the D. sophia extract. D. sophia seeds were extracted with 80% methanol and fractionated with n-hexane, ethyl acetate, CHCl₃ and n-butanol. The anti-influenza activity of each fraction was assessed using sulforhodamine B (SRB) method in A549 cells, human-derived lung cancer cells. The ethyl acetate and CHCl₃ fractions showed the most potent anti-influenza activity. Seven compounds were isolated from CHCl₃ fraction and identified 1-decanol (1), 2-(3,4-dihydroxy-2-methylenebutoxy)-6-(hydroxymethyl)tetrahydro-2H-pyran-3,4,5-triol (2), daucosterol (3), isorhamnetin (4), quercetin (5), sinapic acid (6), and helveticoside (7) by spectroscopic data such as UV, IR, ¹H-NMR, ¹³C-NMR and mass spectroscopy. Anti-influenza activities of isolated compounds were evaluated using SRB method in A549 cells. Compounds 3, 4 and 7 had significant anti-influenza activity in a dose-dependent manner.

• Journal of Nutrition and Health
• /
• 제34권6호
• /
• pp.619-625
• /
• 2001

Diabetes mellitus was induced in male Sprague-Dawley rats weighing 200-245g by injection of streptozotocin(STZ) into the tail vein at a dose of 45mg/kg and were divided into seven groups ; normal, diabetic control, and five experimental groups(fractions of hexane, chloroform(CHCl$_3$), ethylacetate(EtOAc), butanol(BuOH) and water($H_2O$)). The rats of all groups were fed on AIN-93 diet and the five experimental groups were orally administered each fraction for 14 days. The body weight and diet intake were monitored daily. The plasma levels of glucose, insulin, cholesterol, triglyceride, HDL-cholesterol, free fatty acid and aspartate and alanine aminotransferase activities were analyzed. Diabetic rats showed the lower weight gain compared to the normal rats. The plasma glucose levels of the CHCl$_3$, and $H_2O$ fraction groups were significantly lower than the other experimental groups. The plasma insulin level of the CHCl$_3$ fraction group was much higher than that of diabetic control group. The plasma cholesterol levels were increased in all the experimental groups. The groups of hexane, BuOH and H2() fractions showed the lower plasma triglyceride levels compared to diabetic control group. The plasma free fatty acid levels were not significantly different in all groups. HDL-cholesterol levels were definitely higher in hexane, CHCl$_3$ and EtOAc fraction groups than that of diabetic control group. In conclusion, administration of CHCl$_3$ and $H_2O$ fractions of methanol extract of Alisma canaliculatum exhibited hypoglycemic effects in STZ induced diabetic rats, showing the possibility of therapeutic use of Alisma canaliculatum to the diabetes mellitus.