• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1455-1456
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• 2006

반도체 에칭분야에 많이 이용되고 있는 $CF_4$, $C_{2}F_6$, $C_{3}F_8$가스들의 전자수송계수들을 볼츠만 방정식을 이용하여 해석하고자 한다. 특히 혼합가스를 이용하여 확산방전스위치에서 요구되어지는 특성을 파악하고자 할 때 시뮬레이션에 의한 적절한 혼합비 구현을 위하여 이들 순수가스들이 가지고 있는 전자충돌단면적을 해석하고, 전자이동속도와 부착계수 값을 2항과 다항근사 볼츠만 해석을 통해 $0.1{\sim}300$ Td에 걸친 광범위 표에서 해석하고자 한다.

• Membrane Journal
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• v.14 no.2
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• pp.99-107
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• 2004

Carbon molecular sieve (CMS) membranes were prepared by pyrolysis of polyimides having carboxylic acid groups and applied to the hydrogen separation. The polymeric membranes having carboxylic acid groups showed different steric properties as compared with polymeric membranes having other side groups ($-CH_3$ and $-CF_3$) because of the hydrogen bond between the carboxylic acid groups. However, the microporous CMS membranes were significantly affected by the decomposable side groups evidenced from the wide angle X-rat diffraction, nitrogen adsorption isotherms, and single gas permeation measurement. Furthermore, the gas separation properties of the CMS membranes were essentially affected by the pyrolysis temperature. As a result, the CMS membranes Prepared by Pyrolysis of polyimide containing carboxylic acid froups at $700^{\circ}C$ showed the $H_2$ permeability of 3,809 Baller [$1{\times}10^{-10}$ H $\textrm{cm}^$(STP)cm/$\textrm{cm}^2$.s.cmHg], $H_2$/$N_2$, selectivity of 46 and $H_2$/$CH_4$ selectivity of 130 while the CMS membranes derived from polyimide showed the H$_2$ permeability of 3,272 Barrer, $H_2$/$N_2$ selectivity of 136 and $H_2$/$CH_4$ selectivity of 177.