• 제목/요약/키워드: $B_2O_3$/$ZrO_2$

검색결과 182건 처리시간 0.036초

저온 공정 온도에서 $Al_2O_3$ 게이트 절연물질을 사용한 InGaZnO thin film transistors

  • 우창호;안철현;김영이;조형균
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.11-11
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    • 2010
  • Thin-film-transistors (TFTs) that can be deposited at low temperature have recently attracted lots of applications such as sensors, solar cell and displays, because of the great flexible electronics and transparent. Transparent and flexible transistors are being required that high mobility and large-area uniformity at low temperature [1]. But, unfortunately most of TFT structures are used to be $SiO_2$ as gate dielectric layer. The $SiO_2$ has disadvantaged that it is required to high driving voltage to achieve the same operating efficiency compared with other high-k materials and its thickness is thicker than high-k materials [2]. To solve this problem, we find lots of high-k materials as $HfO_2$, $ZrO_2$, $SiN_x$, $TiO_2$, $Al_2O_3$. Among the High-k materials, $Al_2O_3$ is one of the outstanding materials due to its properties are high dielectric constant ( ~9 ), relatively low leakage current, wide bandgap ( 8.7 eV ) and good device stability. For the realization of flexible displays, all processes should be performed at very low temperatures, but low temperature $Al_2O_3$ grown by sputtering showed deteriorated electrical performance. Further decrease in growth temperature induces a high density of charge traps in the gate oxide/channel. This study investigated the effect of growth temperatures of ALD grown $Al_2O_3$ layers on the TFT device performance. The ALD deposition showed high conformal and defect-free dielectric layers at low temperature compared with other deposition equipments [2]. After ITO was wet-chemically etched with HCl : $HNO_3$ = 3:1, $Al_2O_3$ layer was deposited by ALD at various growth temperatures or lift-off process. Amorphous InGaZnO channel layers were deposited by rf magnetron sputtering at a working pressure of 3 mTorr and $O_2$/Ar (1/29 sccm). The electrodes were formed with electron-beam evaporated Ti (30 nm) and Au (70 nm) bilayer. The TFT devices were heat-treated in a furnace at $300^{\circ}C$ and nitrogen atmosphere for 1 hour by rapid thermal treatment. The electrical properties of the oxide TFTs were measured using semiconductor parameter analyzer (4145B), and LCR meter.

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2-(Phenylamino)acetohydrazide로부터 유도된 Hydrzone 리간드와 그들의 착물의 합성, 특성 및 항균활성 (Synthesis, Characterization and Antimicrobial Activities of Hydrazone Ligands Derived from 2-(phenylamino)acetohydrazide and Their Metal Complexes)

  • EL-Saied, F.A.;Shakdofa, M.M.E.;Al-Hakimi, A.N.
    • 대한화학회지
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    • 제55권3호
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    • pp.444-453
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    • 2011
  • N'-(2-hydroxybenzyl)-2-(phenylamino)acetohydrazide ($H_2L^1$, 1) 및 N'-((3-hydroxy-naphthalen-2-yl)methylene)-2-(phenylamino)acetohydrazide ($H_2L^2$, 13)에 대한 VO(II), ZrO(II), Hf(IV), $UO_2$(II), Sn(II), V(V)$O_3$, Ru(III), Cd(II), Ho(III) 및 Yb(III) 착물을 합성하여 원소분석, $^1H$ NMR, IR, UV-Vis, 전기전도도 및 열분석 (DTA 및 TG)을 통해 특성을 조사하였다. 이들 리간드는 분광학적 결과에 의하면 중성 이배위, 일염기성 이배위, 일열기성 삼배위 또는 이염기성 삼배위 리간드로 행동한다. 그 결과 azomethine 질소원자, 양성자화 되어있거나 또는 탈양성자화 된 형태의 페놀 하이드록시 그룹 그리고 에놀 또는 케톤형 카드보닐 그룹을 통해 금속이온에 결합한다. 이들 리간드와 그 금속 착물들은 모체 리간드 및 금속이온 용액에 비해 높은 항균 및 항박테리아 저해효과를 보인다. 대부분의 금속 착물은 표준 항균성 시약 (amphotricene B) 보다 더 높은 항균 활동성을 보인다. 또한 이들 리간드와 착물은 항박테리아 활성도보다는 항균활성도에서 더 높은 수치를 보인다.

초전도 응용기기 안정성 진단을 위한 AE센서용 압전소자의 성능개선 연구 (Study on Improvement of the Piezoelectric Properties of Acoustic Emission Sensor to be Used for Superconducting Application Systems)

  • 김경준;김주형;송정빈;백종후;장재영;고태국;이해근
    • 한국초전도ㆍ저온공학회논문지
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    • 제12권3호
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    • pp.44-48
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    • 2010
  • Acoustic emission (AE) signal from an HTS tape has a low signal to noise ratio, due to the large amount of noise caused by the boiling of the liquid cryogen or mechanical vibration from the cryo-cooler. In an attempt to improve the sensitivity of the AE sensor, $Pb(Zr_{0.54}Ti_{0.46})O_3$ + 0.2 wt% $Cr_2O_3$ + 1.0 wt.% $Nb_2O_5$ ceramics sintered at $1200^{\circ}C$ was synthesized. In addition, the resonance ($f_r$) and anti-resonance frequencies ($f_a$) were measured using the specimens with various thicknesses (1.0, 1.5, 2.0, 2.5 and 3.0 mm). According to the test results, large AE signals with high frequencies were obtained from the AE sensor fabricated using a piezoelectric disc with a thinner thickness.

Dielectric and Electrical Characteristics of Lead-Free Complex Electronic Material: Ba0.8Ca0.2(Ti0.8Zr0.1Ce0.1)O3

  • Sahu, Manisha;Hajra, Sugato;Choudhary, Ram Naresh Prasad
    • 한국재료학회지
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    • 제29권8호
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    • pp.469-476
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    • 2019
  • A lead-free bulk ceramic having a chemical formula $Ba_{0.8}Ca_{0.2}(Ti_{0.8}Zr_{0.1}Ce_{0.1})O_3$ (further termed as BCTZCO) is synthesized using mixed oxide route. The structural, dielectric, impedance, and conductivity properties, as well as the modulus of the synthesized sample are discussed in the present work. Analysis of X-ray diffraction data obtained at room temperature reveals the existence of some impurity phases. The natural surface morphology shows close packing of grains with few voids. Attempts have been made to study the (a) effect of microstructures containing grains, grain boundaries, and electrodes on impedance and capacitive characteristics, (b) relationship between properties and crystal structure, and (c) nature of the relaxation mechanism of the prepared samples. The relationship between the structure and physical properties is established. The frequency and temperature dependence of the dielectric properties reveal that this complex system has a high dielectric constant and low tangent loss. An analysis of impedance and related parameters illuminates the contributions of grains. The activation energy is determined for only the high temperature region in the temperature dependent AC conductivity graph. Deviation from the Debye behavior is seen in the Nyquist plot at different temperatures. The relaxation mechanism and the electrical transport properties in the sample are investigated with the help of various spectroscopic (i.e., dielectric, modulus, and impedance) techniques. This lead free sample will serve as a base for device engineering.

An Efficient Method to Compute Partial Atomic Charges of Large Molecules Using Reassociation of Fragments

  • Lee, Jung-Goo;Jeong, Ho-Young;Lee, Ho-Sull
    • Bulletin of the Korean Chemical Society
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    • 제24권3호
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    • pp.369-376
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    • 2003
  • Coulson (ZINDO), Mulliken $(MP2/6-31G^*)$ and Natural $(MP2/6-31G^*)$ population analyses of several large molecules were performed by the Fragment Reassociation (FR) method. The agreement between the conventional ZINDO (or conventional MP2) and FR-ZINDO (or FR-MP2) charges of these molecules was excellent. The standard deviations of the FR-ZINDO net atomic charges from the conventional ZINDO net atomic charges were 0.0008 for $C_{10}H_{22}$ (32 atoms), 0.0012 for $NH_2-C_{16}O_2H_{28}-COOH$ (53 atoms), 0.0014 for $NH_3^+-C_{16}O_2H_{28}-COOH$ (54 atoms), 0.0017 for $NH_2-C_{16}O_2H_{28}-COO^-$ (52 atoms), 0.0019 for $NH_3^+-C_{16}O_2H_{28}-COO^-$ (53 atoms), 0.0024 for a conjugated model $(O=CH-(CH=CH)_{15}-C=O-(CH=CH)_{12}-CH=CH_2)$, 118 atoms), 0.0038 for aglycoristocetin $(C_{60}N_7O_{19}H_{52}^+$, 138 atoms), 0.0023 for a polypropylene model complexed with a zirconocene catalyst $(C_{68}H-{121}Zr^+$, 190 atoms) and 0.0013 for magainin $(C_{112}N_{29}O_{28}SH_{177}$, 347 atoms), respectively. The standard deviations of the FR-MP2 Mulliken (or Natural) partial atomic charges from the conventional ones were 0.0016 (or 0.0016) for $C_{10}H_{22}$, 0.0019 (or 0.0018) for $NH_2-C_{16}O_2H_{28}-COOH$ and 0.0033 (or 0.0023) for $NH_3^+-C_{16}O_2H_{28}-COO^-$, respectively. These errors were attributed to the shape of molecules, the choice of fragments and the degree of ionic characters of molecules as well as the choice of methods. The CPU time of aglycoristocetin, conjugated model, polypropylene model complexed with zirconocene and magainin computed by the FR-ZINDO method was respectively 2, 4, 6 and 21 times faster than that by the normal ZINDO method. The CPU time of $NH_2-C_{16}O_2H_{28}-COOH\;and\;NH_3^+-C_{16}O_2H_{28}-COO^-$ computed by the FR-MP2 method was, respectively, 6 and 20 times faster than that by the normal MP2 method. The largest molecule calculated by the FR-ZINDO method was B-DNA (766 atoms). These results will enable us to compute atomic charges of huge molecules near future.

계명산층내 알칼리 화강암 기원의 Nb-Y 광화작용에 수반되는 퍼구소나이트의 지구화학 및 산출특성 연구 (Geochemical and Petrographical Studies on the Fergusonite Associated with the Nb-Y Mineralization Related to the Alkaline Granite, Kyemyeongsan Formation, Korea)

  • 박맹언;김근수;최인식
    • 자원환경지질
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    • 제30권5호
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    • pp.395-406
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    • 1997
  • Some RE (Zr, Nb, REE) ore deposits are located in the middle part of the Korean peninsula. Geotectonically, the RE ore deposits situated on the Kyemyeongsan Formation of northern margin of the Okcheon geosynclinal belt and in the transitional zone between Kyeonggi massif and Okcheon belt. The rare metal deposits distributed in Kyemyeongsan Formation which consists of schist and alkaline granite. The alkali granite has suffered extensive post-magmatic metasomatism and hydrothermal processes. The ore contains mainly Ce-La, Ta-Nb, Y, Y-Nb, Ti-Nb-(U), Nd-Th group minerals. Fergusonite, one of Nb-Y rich REE minerals belonging to the A-B oxides, is most common mineral in the rare metal deposits. The fergusonite bearing rocks may be devided into four types by occurrence features and mineral association, that is, zircon type, allanite vein, feldspar type, and fluorite type. Fergusonites show wide variations in optical properties, due to part of differences in their chemical composition (depending on the types), but also the degree of crystalinity of the individual specimens. Fergusonite metamicts enclosed in biotite are generally surrounded by well developed pleochroic haloes. Usually, fergusonite is accompanied with zircon and other REE-bearing minerals. Petrographical and chemical data are presented for fergusonites which collected different types. $Nb_2O_3$ and $Y_2O_3$ contents range from 48.51 to 53.01 wt.% and 29.18 to 42.02 wt.% respectively. Also, $ThO_2$, (1.83~6.93), $UO_2$, (0.17~2.84), ${\sum}RE_2O_3$ (except to Y) (1.11~8.73), and $TiO_2$, (0.19~1.19 wt.%) contents show variational compositions according to fergusonite types. The ${\sum}RE_2O_3$ of fergusonites are positive relation with $Y_2O_3$ and negative relaton with $ThO_2$ and $({\sum}{RE_2O_3}-{Y_2O_3})$. The $Nb_2O_3$ is sightly negative relation with $Ta_2O_3$. Back-scattered electron microscope images (BEI) of fergusonite show the mineral composition and textural feature is very complicated. The variation of Nb, Th and REE content of fergusonite and the modes of occurrence of mineral, suggests that REE may have been mobilized during the circulation of hydrothermal fluids related to contact metamorphism (metasomatism). The chemical variation of the fergusonites with occurrences and mineral association can be related to metasomatism of alkaline fluid was probably the dominant ore-forming process in Chungju district.

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SHAPE EFFECT ON PERFORMANCE OF MULTILAYER CERAMIC ACTUATOR

  • Wee, S. B.;Jeong, S. J.;Song, J. S.
    • 한국반도체및디스플레이장비학회:학술대회논문집
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    • 한국반도체및디스플레이장비학회 2003년도 추계학술대회 발표 논문집
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    • pp.163-168
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    • 2003
  • In the present study, the piezoelectricity and polarization of multilayer ceramic actuator, being designed to stack PMN-PZ-PT ceramic layers and Ag-Pd electrode layers alternatively, were investigated under a consideration of geometric factor, the volume ratio of the ceramic to the electrode layers. The actuators were fabricated by tape casting of $0.2Pb(Mg_{1/3}Nb_{2/3)O_3-0.38PbZrO_3-0,42PbTiO_3$ followed by lamination and burnout & co-firing processes. The actuators of $10\times10\times0.6~2\textrm{mm}^3$ in size were formed in a way that $60 ~ 200\mu\textrm{m}$ thick were stacked alternatively with $5\mu\textrm{m}$ thick electrode layer. Increases in polarization and electric field-induced displacement with thickness of the ceramic layer were attributed to change of $90^{\circ}$/$180^{\circ}$ domain ratio, which was affected by interlayer internal stress. The piezoelectricity and actuation behaviors were found to depend upon the volume ratio (or thickness ratio) of ceramic to electrode layers.

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ICP를 이용한 Ar/$Cl_2/BCl_3$ 플라즈마에서 PZT 식각 특성 (The etching characteristics of PZT thin films in Ar/$Cl_2/BCl_3$ plasma using ICP)

  • 안태현;김경태;이영희;서용진;김창일;장의구
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 추계학술대회 논문집 학회본부 C
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    • pp.848-850
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    • 1999
  • In this study, PZT etching was performed using planar inductively coupled Ar(20)/$Cl_2/BCl_3$ plasma, The etch rate of PZT film was 2450 $\AA/min$ at Ar(20)/$BCl_3$(80) gas mixing ratio and substrate temperature of $80^{\circ}C$. X-ray photoelectron spectroscopy (XPS) analysis for film composition was utilized. The chemical bond of PbO is broken by ion bombardment, and the peak of metal Pb in a Pb 4f peak begins to appear upon etching, decreasing Pb content faster than Zr and Ti. As increase content of additive $BCl_3$, the relative content of oxygen decreases rapidly. We thought that abundant Band BCl radicals made volatile oxy-compound such as $B_{x}O_{y}$ and/or $BClO_x$ bond. To understand etching mechanism, Langmuir probe and optical emission spectroscopy (OES) analysis were utilized for plasma diagnostic.

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$\b{W}$형 3-Loop 발전소에 대한 일체형 가연성 흡수봉 경제성 평가

  • 박상원;장도익;정선교
    • 한국원자력학회:학술대회논문집
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    • 한국원자력학회 1996년도 춘계학술발표회논문집(1)
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    • pp.213-218
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    • 1996
  • 가압 경수로의 노심설계에 있어서 제한된 우라늄 자원의 효율적인 이용을 위한 다양한 방안으로 장주기 운전, 고 방출연소도 및 저누출 장전모형 등을 강구하고 있는 추세이다. 이러한 노심들은 원자로 운전주기 전반에 걸친 공간적 출력 분포 제어와 잉여반응도 제어를 위해 가연성 흡수봉을 사용하고 있으며 이와 관련 하여 가연성 흡수봉에 대한 전략등이 다 각도로 검토되고 있으며 다양한 노심에 대한 최적의 가연성 흡수봉 혹은 그 전략에 대해 많은 연구가 진행되고 있다. 본 연구에서는 웨스팅하우스형 3-Loop 발전소에 대해, 장주기 (18 개월-480 EFPD), 저누출 장전 모형 전략을 채용하여, Er$_2$O$_3$, Gd$_2$O$_3$, ZrB$_2$의 일체형 가연성 흡수봉에 대한 노심특성 및 경제성을 평형노심개념을 적용, KNFC가 노심설계에 사용하고 있는 APA(ALPHA/PHOENIX-P/ANC) 8.0.0 코드 체계를 이용하여 평가하였다. 노심특성에 대해서는 감속재 온도계수, 첨두출력인자, 잔존흡수봉효과 및 노심 연소거동에 대한 평가가 수행되었고, 동일한 주기길이(480 EFPD) 에 대한 우라늄 적재량에 대해 원광비, 변환비, 농축비, 가공비 그리고 이자율 등을 고려하여 핵주기 경제성 평가 코드인 POCO 코드를 이용하여 경제성을 평가하였다.

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수열법에 의한 저온 결정형 지르코니아 나노 분말의 제조 (Preparation of Zirconia Nanocrystalline Powder by the Hydrothemal Treatment at low Temperature)

  • 노희진;이종국;서동석;황규홍
    • 한국세라믹학회지
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    • 제39권3호
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    • pp.308-314
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    • 2002
  • $ZrOCl_2{\cdot}8H_2O$ 수용액과 $NH_4OH$ 수용액을 반응시켜 얻은 지르코니아 수화물을 반응조건으로 100∼250$^{\circ}$C, 1∼48시간과 1, 5 M NaOH 수용액에서 수열합성하여 결정형 나노크기의 지르코니아 분말을 제조하였다. 수열합성 온도가 낮을 경우 구형의 정방정상 나노입자가 합성되었으며, 합성온도가 증가하면서 입자크기의 증가 및 입자모양도 막대상으로 변하면서 결정상도 단사정상을 나타내었다. NaOH 용액의 몰 농도가 증가함에 따라 합성된 입자의 폭과 길가 크며 장단축비는 감소하였다. 반면에 NaOH 용액의 농도가 낮을 경우 입자 길이가 폭에 비해 상대적으로 크고, 이에 따라 장단축비가 큰 막대상 입자가 합성되었다.