• Title/Summary/Keyword: $Ar^+$ laser

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Reverse design of photomask for optimum fiedelity in optical lithography (광리소그래피에서 최적 모양의 패턴 구현을 위한 포토마스크 역설계)

  • 이재철;오명호;임성우
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.34D no.12
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    • pp.62-67
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    • 1997
  • The optical lithography wit an ArF excimer laser as a light source is expected to be used in the mass production of giga-bit DRAMs which require less than 0.2.mu.m minimum feature size. In this case, the distortion of a patterned image becomes very severe, since the lithography porcess is performed at the resolution limit. Traditionally, the photomask pattern was designed and revised with trial-and-error methods, such as repeated execution of process simulators or actual process experiments which require time and effort. Ths paper describes a program which automatically finds an optimal mask pattern. The program divides the mask plane into cells with same sizes, chooses a cell randomly, changes the transparent/opaque property of the cell, and eventually genrates a mask pattern which produces required image pattern. The program was applied to real DRAM cell patterns to produce mask patterns which genertes image patterns closer to object images than original mask patterns.

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Jet Measurements with High-Vision 3D-PTV

  • Doh D. H.;Kim D. H.;Cho Y. B.;Saga T.;Kobayashi T.;Pyun Y. B.
    • 한국가시화정보학회:학술대회논문집
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    • 2001.12a
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    • pp.6-13
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    • 2001
  • A new GA-3D-PTV technique has been constructed to measure an impinging jet. The measurement system consists of three CCD cameras, Ar-ion laser, an image grabber and a host computer. GA (Genetic Algorithm) was used based on one-to-one correspondences in order to take advantage of the combinatorial optimization in tracking the pairs of the whole particles of the two images having a time interval. Two fitness functions were introduced in order to enhance the correspondences of the particles. One was based on a concept of the continuum theory and the other one was based on a minimum distance error. The constructed GA-3D-PTV system was applied in success to the measurement of flow characteristics of the impinging jet.

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Measurements of a Round Jet with High-Definition 3D-PTV

  • Hwang, Tae-Gyu;Doh, Deog-Hee;Saga Tetsuo;Kenneth D. Kihm
    • Journal of Advanced Marine Engineering and Technology
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    • v.28 no.8
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    • pp.1211-1224
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    • 2004
  • Two round jets. impinged and pulsed. were measured with high-resolution 3D-PTV technique. The measurement system consists of three CCD cameras, Ar-ion laser, an image grabber and a host computer. Two fitness functions were introduced in a genetic algorithm in order to enhance the correspondences of the particles. One was based on a concept of the continuum theory and the other one was based on a minimum distance error. The velocity profiles of the impinged jet obtained by the constructed 3D-PTV system were compared with those of LDV measurements made in this study. The head vortex of the jet was visualized by LIF and was reconstructed by the constructed high-resolution 3D-PTV system for comparisons.

Evaluation on the Influence and Measurement of Strain in Spot Welded Joint (점 용접부의 변형률 측정 및 영향 평가)

  • 차용훈
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.6 no.3
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    • pp.52-57
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    • 1997
  • Electronic Speckle Pattern Interferometry(ESPI) using the Model 95 Ar. laser, a video system and an image processor was applied to the in-plane displacement measurements. Unlike traditional strain gauges or Moire method, ESPI method requires no special surface preparation or attachments and can be measured in-plane displacement with no special surface preparation or attachments and can be measured in-plane displacement with no contact and real time. In this experiment specimen was loaded in parallel with a loadcell. The specimen was the cold rolled steel sheet of 2mm thickness, which was attached strain gauges. The study provides an example of how ESPI have been used to measure strain displacement in this specimen. The results measured by ESPI compare with the data which was measured by strain gauge method in tensile testing.

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Effect of nozzle geometry on the injection characteristics and spray behavior (고압 분사 디잴 인잭터의 노즐 형상이 분사 특성 및 분무 거동에 미치는 영향)

  • Lee, C.S.;Park, S.W.;Chon, M.S.
    • Journal of ILASS-Korea
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    • v.9 no.1
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    • pp.1-7
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    • 2004
  • This paper describes the characteristics of injection rate and macroscopic behavior of fuel spray injected from common-rail type diesel injectors with different nozzle geometries. The injection rates according to the nozzle geometries were measured at different energizing duration of the injector solenoid and injection pressure by using the Bosch's injection rate meter based on the pressure variation in the tube. The spray behaviors injected from the different nozzles were visualized using the spray visualization system composed of an Ar-ion laser, an ICCD camera, and a synchronization system at various injection and ambient pressures. It is revealed that VCO nozzle has higher spray tip velocity at the early stage of injection duration and wider spray cone angle than the mini-sac nozzles. Also the spray cone angle is increased with the increase of nozzle diameter.

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Antireflection Structures and Optical Recording Properties of Te-based Alloy Thin Films (Te계 합금 박막의 Antireflection 구조와 광기록 특성)

  • Lee, Hyun-Yong;Choi, Dae-Young;Lee, Young-Jong;Chung, Hong-Bae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1988.05a
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    • pp.74-77
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    • 1988
  • This paper reports the properties of antireflection structure and hole formation of Te-based systems. The optical-recording characteristics of metallic recording media are enhanced significantly by incorporating the metal(Al) layer into an antreflection trilayer structure. Due to the interface condition inherent in the design of the trilayer structure, reflectivity from holes is ranked low fraction (<10%). The hole formation is carried by $Ar^+$ Laser(488nm). For 20nsec pulse duration, hole opening power(threschold) of $(Te_{86}Se_{14})_{50}Bi_{50}$ trilayer is lower than that of monolayer that used in this experiment. Hole shapes of the whole sample were clean.

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Properties of YBCO Step-edge Junction Fabricated on Different Crystal Orientation of Sapphire Substrate (사파이어 기판의 다른 결정방향 위에 제작된 YBCO step-edge 접합의 특성)

  • H. R. Lim;I-S Kim;Y. K. Park;J. C. Park
    • Progress in Superconductivity
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    • v.3 no.1
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    • pp.60-64
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    • 2001
  • We have studied properties of step-edge Junction prepared with crystal orientation of sapphire substrate. The Step on sapphire substrates fabricated by conventional photolithography method and Ar ion milling method. $CeO_2$ buffer layer and in-situ YBCO thin film were deposited on the stepped sapphire substrates by a pulsed laser deposition method with the predetermined optimized condition. The step angle was centre fled low angle of about $25^{\circ}$. The YBCO film thickness was varied to obtain various thickness ratios of the film to the step height in a range from 0.7 to 1.2. I-V curves of junction were showed RSJ-behavior, double junction structure, and hysteresis due to the crystal orientation of substrate.

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Crystal Growth and Luminescence Properties of KCl Doped with Eu2+ Ions (KCl:Eu 단결정 성장과 형광특성)

  • Je, Jae-Yong;Jang, Kyoung-Hyuk;Park, Chul-Woo
    • Journal of Sensor Science and Technology
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    • v.20 no.1
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    • pp.30-34
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    • 2011
  • Single crystal of KCl doped with $Eu^{2+}$ ions was grown by the Czochralski method in the high pressure Ar gas(purity 99.999 %) atmosphere with chamber pressure from which the crystal with high quality was obtained. As grown $KCl:Eu^{2+}$ crystal was checked by X-ray diffraction. Luminescence properties of KCl:Eu are investigated by laser-excitation spectroscopy under 355 nm excitation at 14 and 295 K. The broad emission band due to the $Eu^{2+}$ 5d $\rightarrow$ 4f transition is peaked at 417 nm with full width at half maximum of about 20 and 30 nm.

Effect of grating structures and mirror postions on characteristics of 1.55$\mu\textrm{m}$ DFB lasers-II (1.55.$\mu\textrm{m}$ DFB 레이저의 특성에 미치는 Grating 구조와 Mirror 위치의 영향 -II)

  • Kwon, Kee-Young
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.32A no.2
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    • pp.48-56
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    • 1995
  • The operating characteristics, such as, the threshold gain, lasing frequency, and longitudinal intensity profile, etc., of 1.55$\mu$m DFB laser diode with index and/or gain grating structures and with one side AR-coated mirror have been analyzed. From this analysis, the optimum design parameters have been shown that ${\Delta}{\Omega}$ (the phase difference between index grating and gain grating) is 0 or ${\pi}$, (xL)$_{r}$=1~3 and (xL)$_{i}$=0.5~0.9. It has been also shown that the modal selectivity and intensity uniformity of the DFB lasers with .DELTA..OMEGA.=0 are ~1.2 times better thatn those of the DFB lasers with ${\Delta}{\Omega}$= ${\pi}$.

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Study on deposition condition of multi-layer oxide buffer by PLD for YBCO Coated Conductor (PLD법에 의한 YBCO Coated Conductor를 위한 다층 산화물 박막의 증착 조건 연구)

  • ;;;;;Donggqi Shi
    • Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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    • 2003.10a
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    • pp.153-156
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    • 2003
  • The multi-layer oxide buffer layer for the coated conductor was deposited on biaxially textured Ni substrates using pulsed laser deposition. Oxygen partial pressure, 4%$H_2$/Ar partial pressure, and deposition temperature were deposition variables investigated to find the optimum deposition conditions. $Y_2$O$_3$seed layer was deposited epitaxially on metal substrate. The full buffer architecture of $Y_2$O$_3$/YSZ/CeO$_2$was successfully prepared on metal substrate.

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