• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1083-1086
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• 2005

Light scattering measurement system that can evaluate light scattering characteristic from defects on silicon wafer surface has been developed. The system uses $Ar^+$ laser as an illumination source, and a highly sensitive photomultiplier tube (PMT) for detecting scattered light from defects. Unlike with conventional measurement system, our system has ability to measure scattered light pattern from wide range of scattering angles with changeable incidence condition. It is shown that our developed system is effective to discriminate the types and sizes of defects from basic experimental results using a microscatch and a PSL sphere.

• 한국진공학회지
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• 제2권3호
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• pp.294-298
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• 1993

CuGaSe2 단결정을 고순도(99.9999%)의 Cu, Se 원소를 화학조성비로 칭량한 후 Se을 3mole% 과잉으로 첨가하여 합성된 ingot를 사용하여 iodine(99.9999%)을 수송매체로 한 화학수송법으로 성장시켰다. 성장된 단결정은 검정색을 띠고 있었으며, 10K에서 optical energy gap이 1.755eV로 주어졌다. Ar-ion laser로 여기시켜 측정한 photoluminescence(PL) 스펙트럼으로부터 1.667eV, 1.085eV, 1.025eV에 위치한 세 개의 PL peak를 얻었다. Thermally stimulated current(TSC) 측정에서 0.660eV, 0.720eV의 deep donor level을 관측하였으며, PL peak intensity의 thermal quenching으로 구한 activation energy는 0.010eV이었다. CuGaSe2 단결정에서 PL mechanism은 edge emission 및 donor-acceptor pair recombination임을 규명했다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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• pp.150-150
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• 2003

wide bind gap과 wurtzite hexagonal structure를 가지고 있으며 청색 발광 및 청자색 레이저 특성을 보이는 III-V족 화합물반도체 GaN는 laser diodes (LD) 및 light emitting diodes (LED) 재료로 주목받고있는 주요 전자재료이다. 본 연구에서는 GaN를 chemical vapor deposition (CVD) 법을 이용하여 vapor-liquid-solid (VLS) mechanisum에 의하여 GaN나노와이어 형태로 성장시켰다. 기판은 (001)Si을 사용하였고 suputtering을 이용하여 GaN와 AlN의 double buffer layer (DBL)를 증착시켰으며 촉매로는 Ni을 사용하였다. 또한, 원료로는 고순도 Ga금속과 NH$_3$ gas를, carrier gas로는 Ar을 사용하여 GaN/AlN/(001)Si 위에 GaN 나노와이어를 성장시켰다. 성장된 GaN 나노와이어는 DBL의 두께, Ga source의 양, 튜브 안의 압력, 튜브 안의 위치 등의 제 공정변수에 따라 tangled, straight 등의 다양한 형상을 보였으며 지름은 약 30~100 nm, 길이는 수 $\mu\textrm{m}$로 관찰되었다. GaN나노와이어의 결정성, 형상 및 발광특성 등을 x-ray diffraction (XRD), photoluminesence (PL), scanning electron microscope (SEM), transmision electron microscope (TEM) 등을 이용하여 측정하였으며 제 공정변수와의 상관관계를 규명하였다.

• 한국전기전자재료학회논문지
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• 제14권1호
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• pp.6-11
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• 2001

We studied the feasibility of optical lithography for the critical layers of 0.12${\mu}{\textrm}{m}$ DRAM assuming ArF excimer laser as a light source. To enhance the fidelity of aerial image and process margin, Phase shift mask (PSM) patterns as well as binary mask patterns are corrected with in-house developed Optical Proximity Correction (OPC) software. As the result, w found that the aerial image of critical layers of DRAM cell with 0.12${\mu}{\textrm}{m}$ design rule could not be reproduced with binary masks. But if we use PSM or optical proximity corrected PSM, the fidelity of aerial image ,resolution and process margin are so much enhanced that they could be processed with optical lithography.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1989년도 추계학술대회 논문집 학회본부
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• pp.512-514
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• 1989

A time-correlated single photon counting system combined with a mode locked $Ar^+$ laser has been utilized to measure the fluorescence decay. A side-on type photomultiplier tube has been used as a photon detector. By restricting the sensitive area and the position of the photocathode, the transit time differencies of photoelectrons in PMT has been reduced. The fluorescence life time of rhodamin 6G in ethylene glycol measured 3.9$\pm$10 ns.

• 한국전기전자재료학회논문지
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• 제17권8호
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• pp.806-811
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• 2004

1-Hydroxy-4-(2-naphthalenesulfonyloxy) cyclohexane(1), 1,4-di-(2-naphthalenesulfonyloxy) cyclohexane(2), 1-hydroxy-4-(2-thiophenesulfonyloxy) cyclohexane(3), 1,4-di-(2-thiophenesulfonyloxy) cyclohexane(4) were synthesized and evaluated for their performance as novel acid amplifiers for 193 nm photoresists. These acid amplifiers(1-4) showed reasonable thermal stability at the usual resist-processing temperature, 9$0^{\circ}C$-12$0^{\circ}C$. And estimated by the sensitivity curve, (1)-(4) enhanced the sensitivity of poly(tert-butyl methacrylate) film by 1.2-1.4 times, compared to poly(tert-butyl methacrylate) film whithout acid amplifiers, in the presence of a photoacid generator.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.2054-2059
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• 2003

3D-PTV measurement was conducted on the wake of a goldfish in order to understand its swimming motions. The measurement system consisted of three CCD cameras, an image grabber, an Ar-Ion laser and a host computer. The flow properties of the wake of the goldfish were measured under three different velocities of the currents. Unsteady flow structures around the goldfish were quantitatively clarified using the time-consecutive instantaneous three-dimensional vectors obtained by the constructed 3D-PTV system.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1748-1753
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• 2003

3D-PTV measurement was conducted on the wake of a sphere. The Reynolds number is 1130 with the diameter(d=30mm). The measurement system consisted of three CCD cameras, an image grabber, an Ar-Ion laser and a host computer. An eigenvalue analysis was introduced for the analysis on the wake. Statistical turbulent properties were quantitatively clarified using the time-consecutive instantaneous three-dimensional vectors obtained by the 3D-PTV system. The spatial distributions of the sphere wake showed strong relations with spiral motions of the vortcies shedded from the surface of the sphere.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2002년도 학술대회지
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• pp.249-252
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• 2002

Turbulent properties of the wake of a circular cylinder were measured The diameter of the cylinder is l0mm and the Reynolds number is 420. A new 3D-PTY system was constructed and a genetic algorithm (GA) was introduced in order to increase the number of instantaneous three-dimensional velocity vectors. In the GA two fitness functions were introduced in order to enhance the correspondences of the particles. The measurement system consists of three CCD cameras, Ar-ion laser, an image grabber and a host computer. More than 3000 instantaneous three-dimensional velocity vectors were obtained by the system. The database of the turbulent properties of the circular cylinder was constructed by the constructed 3D-PTV system.

• 한국CDE학회논문집
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• 제4권1호
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• pp.60-68
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• 1999

In reverse engineering (RE) sustems, the quality of the data aquisition process is crucial to the accuracy of the reverse engineered three dimensional computer-aided design (CAD) model. However, these tasks are predominantly done manually, and little work has been done to improve the efficiency of scanning by determining the minimum number of scans and the optimal scanning directions. In this paper, new scanning and registration methods using tooling balls are developed to assist in determining the optimal parameter for these processes. When the object to scanned has no concavity, attaching path of the object and its bounding rectangle are used for optimal scanning and registration. Then minimum number of tooling balls and their positions are calculated automatically. In the case of concave parts, the scanning plan should include a complete scan of the concave area. With the surface normal vector and the scanning direction, the minimum degree of rotating the part can be calculated. But the maximum rotation should be restricted in order to prevent occlusion of the part. Finally tow sample part ar scanned based on the proposed methods and the results are discussed.