• 한국세라믹학회지
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• 제32권10호
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• pp.1212-1218
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• 1995

Al2O3-coated SiC composite powder and mechanically mixed Al2O3-SiC composite powder were synthesized using Al-isopropoxide and commercial SiC as the starting materials. Experiment results showed that the sinterability of Al2O3-coated SiC composite powder was more improved than the mechanically mixed Al2O3-SiC composite powder by the effect of homogeneous coating of alumina around SiC particles. Hence, the mechanical properties of the former was also much more improved than the latter.

• 한국세라믹학회지
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• 제31권7호
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• pp.759-766
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• 1994

The effect of additives on properties of unfired Al2O3-C bricks were investigated. The increase of carbon content and the addition of MgO or spinel improved the resistances against spalling and corrosion of unfired Al2O3-C bricks. Also, the oxidation resistance of unfired Al2O3-C brick was increased by adopting complex metals of Al and Si in spite of the increase of carbon content.

• 한국세라믹학회지
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• 제34권7호
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• pp.758-766
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• 1997

Non-brittle fracture behaviour of the two composite structures made of two different brittle materials was investigated using 3-point bending test. First, the layered and fibrous macro-composites were fabricated using the material easily formed, yet showing a brittle fracture behaviour similar to ceramics. The layered and fibrous Al2O3 /Al2O3 composites with weak interface were also fabricated using plate of 2 mm thickness and rod of 3 mm diameter respectively. Comparison of the mechanical properties between these two structures was performed in the lights of flexural strength and work of fracture for the composites consisting of Al2O3 and simulated materials respectively. The strength ratio of layered structure to the monolith of same volume was 0.6 and the ratio of fibrous one was about 0.2 for the composites made of simulated brittle material. The ratio of the work of fracture of the fibrous to the layered was 0.47. For Al2O3/Al2O3 composites, the strength ratio of layered and fibrous structures to the monolith with same volume were about 0.6 and 0.2 respectively. The ratio of work of fracture of the fibrous to the layered was 0.6. These confirmed that the layered structure was superior to the fibrous one in terms of flexural strength and work of fracture.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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• pp.628-631
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• 2002

$Al_2O_3$ capping layer and MgO protective layer were deposited by electron beam evaporation method using single crystal source. Thickness of the capping layer, $Al_2O_3$, was varied from 5 nm to 10 nm. Surface morphology was observed by SEM and AFM before and after hydration. And microstructure of deposited $Al_2O_3$ layer and chemical shift of electron binding energy were also observed by high resolution TEM and XPS, respectively, after hydration. From these results, it was found that Mg atoms diffused into $Al_2O_3$ layer, reacted with moisture and formed $Mg(OH)_2$ during hydration. As thickness of $Al_2O_3$ increased, extent of hydration increased. $Al_2O_3$ capped MgO thin films and uncapped MgO thin films were deposited on AC-PDP test panel to characterize discharge properties. Although $Al_2O_3$ has poor discharge properties rather than MgO, because of many hydrated species on the surface of MgO, similar discharge properties were observed.

• 열처리공학회지
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• 제14권5호
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• pp.292-296
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• 2001

In this work, an ultra-high vacuum activated reactive evaporation equipment was built. With reaction of Al and oxygen plasma, $Al_2O_3$ was deposited on the surface of etched Al foil. The chamber was evacuated down to $2{\times}10^{-7}$ torr initially. The Ar and $O_2$ gas introduced into the chamber to maintain $5{\times}10^{-5}$ torr during deposition. Ar gas prevents recombining of the ionized oxygen. Evaporation was maintained by electron beam evaporator continuously. Heating filament and electrode were used in order to generate plasma. The substrate bias of -300V was introduced to accelerate deposition of evaporated Al atoms. The composition and morphology of deposited $Al_2O_3$ films were analyzed by x-ray photoelectron spectroscopy(XPS) and atomic force microscopy (AFM), respectively. The Al oxide was formed on the surface of etched Al foil. According to AFM results, the surface morphology of $Al_2O_3$ film indicates uniform feature. Dielectric characteristic was measured as a function of frequency. Measured withstanding voltage and capacitance were 52V and $24{\mu}F/cm^2$, respectively. The obtained $Al_2O_3$ film shows clean condition without contaminants, which could be adapted to capacitor production.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제50권11호
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• pp.550-554
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• 2001

$(Ba_{0.6}Sr_{0.4}Ca_x)TiO_3 + yAl_2O_3$ wt% (x=0.10, 0.15, 0.20, y=0~3.0) ceramics were fabricated by the mixed-oxide method, and their structural and dielectric properties were investigated with variation of composition ratio and $Al_2O_3$ doping content. As results of the X-ray diffraction and microstructure analysis, all BSCT specimens showed dense and homogeneous structure without presence of the second phase. The sintered density was decreased with an increase of $Al_2O_3$ doping content. The Curie temperature and relative dielectric constant at room temperature were decreased with increasing $Al_2O_3$doping content. The dielectric loss is minimum at BSCT doped with 1.5wt% $Al_2O_3$content. The tunability was decreased with increasing an Ca content and the BSCT(50/40/10) specimen doped with 2.0wt% $Al_2O_3$content showed the maximum value of 4.2%.

• 한국결정성장학회지
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• 제11권6호
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• pp.239-245
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• 2001

뮬라이트 preform과 비정질 실리카를 알루미늄 용융체에서 $1100^{\circ}C$, 5시간 동안 반응시켜 $Al/Al_2O_3$복합체가 제조되었다. 뮬라이트 preform과 알루미늄 용융체 간의 화학적 반응은 상호 연결된 미세구조를 형성하였다. $Al/Al_2O_3$복합체의 금속의 양은 뮬라이트 preform의 소결 온도($1600^{\circ}C$, $1625^{\circ}C$, $1650^{\circ}C$, $1700^{\circ}C$)에 따른 겉보기 기공율의 변수로서 조절되었으며, 복합체의 기계적 특성들은 알루미늄 양에 따라 조사되었다. $1600^{\circ}C$ 이상의 온도에서 소결된 뮬라이트 preform은 침투된 알루미늄 용융체와 화학반응을 이루었으나, $1600^{\circ}C$에서 소결된 뮬라이트 소결체는 알루미늄 용융체에 대해 젖음이 이루어지지 않아 화학반응이 진행되지 않았다. 알루미늄 용융체의 침투 방향에 따른 복합체의 기계적 특성에 대한 영향은 알루미늄 용융체의 수직, 평행한 침투 방향 패턴의 두 가지 다른 모델들에 의해 고려되었다. $Al/Al_2O_3$복합체에서 알루미늄의 양의 증가에 따라 파괴강도는 감소하였으며, 파괴인성은 증가하는 경향을 나타냈다.$ Al/Al_2O_3$복합체의 미세구조는 금속의 침투 방향에 의해 결정되었지만, 복합체의 파괴강도와 파괴인성은 금속 침투 방향에 대한 의존성은 나타내지 않았다.

• 반도체디스플레이기술학회지
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• 제21권2호
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• pp.11-14
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• 2022

In this work, we evaluated the Al₂O₃ film, which was deposited by atomic layer deposition, degraded by exposure to harsh environments. The Al₂O₃ films deposited by atomic layer deposition have long been used as a gas diffusion barrier that satisfies barrier requirements for device reliability. To investigate the barrier and mechanical performance of the Al₂O₃ film with increasing temperature and relative humidity, the properties of the degraded Al₂O₃ film exposed to the harsh environment were evaluated using electrical calcium test and tensile test. As a result, the water vapor transmission rate of Al₂O₃ films stored in harsh environments has fallen to a level that is difficult to utilize as a barrier film. Through water vapor transmission rate measurements, it can be seen that the water vapor transmission rate changes can be significant, and the environment-induced degradation is fatal to the Al₂O₃ thin films. In addition, the surface roughness and porosity of the degraded Al₂O₃ are significantly increased as the environment becomes severer. the degradation of elongation is caused by the stress concentration at valleys of rough surface and pores generated by the harsh environment. Becaused the harsh envronment-induced degradation convert amorphous Al₂O₃ to crystalline structure, these encapsulation properties of the Al₂O₃ film was easily degraded.

• 한국재료학회지
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• 제17권8호
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• pp.447-451
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• 2007

We investigated the dependence of the various annealing conditions and thickness ($6\sim45nm$) of the Ti-doped $Al_2O_3$ coating on the electrochemical properties and the capacity fading of Ti-doped $Al_2O_3$ coated $LiCoO_2$ films. The Ti-doped-$Al_2O_3$-coating layer and the cathode films were deposited on $Al_2O_3$ plate substrates by RF-magnetron sputter. Microstructural and electrochemical properties of Ti-doped-$Al_2O_3$-coated $LiCoO_2$ films were investigated by transmission electron microscopy (TEM) and a dc four-point probe method, respectively. The cycling performance of Ti-doped $Al_2O_3$ coated $LiCoO_2$ film was improved at higher cut-off voltage. But it has different electrochemical properties with various annealing conditions. They were related on the microstructure, surface morphology and the interface condition. Suppression of Li-ion migration is dominant at the coating thickness >24.nm during charge/discharge processes. It is due to the electrochemically passive nature of the Ti-doped $Al_2O_3$ films. The sample be made up of Ti-doped $Al_2O_3$ coated on annealed $LiCoO_2$ film with additional annealing at $400^{\circ}C$ had good adhesion between coating layer and cathode films. This sample showed the best capacity retention of $\sim92%$ with a charge cut off of 4.5 V after 50 cycles. The Ti-doped $Al_2O_3$ film was an amorphous phase and it has a higher electrical conductivity than that of the $Al_2O_3$ film. Therefore, the Ti-doped $Al_2O_3$ coated improved the cycle performance and the capacity retention at high voltage (4.5 V) of $LiCoO_2$ films.

• 한국재료학회지
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• 제16권2호
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• pp.92-98
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• 2006

Molecular dynamics simulations were performed to study interface structures between an $Al_2O_3$ crystalline phase and a interface phase of $CaAl_2Si_2O_8$. We calculated atomic structures and excess interface energies in systems with different thicknesses of the interface film. It was found that excess interface energies at first readily decreased with increasing film thickness, but increased for larger thicknesses of more than 2 nm. The excess energies of $Al_2O_3/CaAl_2Si_2O_8$ interfaces exhibit a minimum at a thickness around 1 nm. In this range of film thicknesses, the atoms in the interface film show a short-range ordered structure and slow diffusion rather than the random structure and rapid diffusion expected to an observation of an equilibrium thickness for interface films in ceramics.