Characteristics Evaluation of Al2O3 ALD Thin Film Exposed to Constant Temperature and Humidity Environment
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Kim, Hyeun Woo
(Dept. of Display and Semiconductor Engineering, Sunmoon University)
Song, Tae Min (Dept. of Display and Semiconductor Engineering, Sunmoon University) Lee, Hyeong Jun (Dept. of Display and Semiconductor Engineering, Sunmoon University) Jeon, Yongmin (Dept. of Biomedical Engineering, Gachon University) Kwon, Jeong Hyun (Dept. of Display and Semiconductor Engineering, Sunmoon University) |
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