• Journal of the Korean Crystal Growth and Crystal Technology
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• v.34 no.4
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• pp.131-138
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• 2024

In this study, the microstructure and plasma resistance characteristics of 35Bi₂O₃-15Al₂O₃-50SiO₂ (BiAl SiO) and 35Bi₂O₃-7.5Al₂O₃-50SiO₂-7.5AlF₃ (BiAlSiOF) glass layers coated on sintered alumina substrates were investigated according to the sintering conditions. The coated layers were formed using the bar coating method and then sintered at a temperature in the range of 700~900℃, which corresponds to the temperature before and after the hemisphere forming temperature, after a debinding process. The plasma resistance of the two coated glasses was approximately 2~3 times higher than that of the quartz glass, and in particular, the BiAlSiOF glass film with F added showed higher plasma resistance than BiAlSiO. It is thought to be due to the effect of suppressing the reaction with fluorine gas by adding fluorine to the glass. When the sintering time was increased at 700℃ and 800℃, the plasma resistance of both glasses improved, but when the sintering temperature was increased to 900℃, the plasma resistance decreased again (i.e., the etching rate increased). This phenomenon is thought to be related to the crystallization behavior of both glasses. The change in plasma resistance depending on the sintering conditions is thought to be related to the appearance of Al and Bi-rich phases.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.418.1-418.1
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• 2016

Atomic layer deposition (ALD)를 이용하여 증착된 aluminum oxide ($Al_2O_3$)는 우수한 패시베이션 특성을 가지고 있다. $Al_2O_3$ 박막은 많은 수소를 가지고 있기 때문에 화학적 패시베이션에 의한 실리콘 표면을 패시베이션 할 수 있다. 또한 $Al_2O_3$는 강한 고정전하를 가져 전계 효과 패시베이션을 할 수 있다. 따라서 $Al_2O_3$ 박막을 태양전지에 적용할 경우 높은 효율을 기대할 수 있다. 실리콘 태양전지를 제작하기 위해 소성공정(> $800^{\circ}C$)은 필수이다. $Al_2O_3$ 박막은 많은 수소를 가지고 있기 때문에 소성공정시 수소가스를 방출하여 $Al_2O_3$ 박막에 블리스터를 형성시킨다. 이 블리스터는 $Al_2O_3/Si$ 계면에서 발생하여 패시베이션 특성을 감소시킨다. 블리스터를 억제하기 위해 수소의 양을 조절할 필요가 있다. 이 실험에서는 plasma-assisted atomic layer deposition (PAALD)으로 $Al_2O_3$를 증착하였다. PAALD의 RF power를 200 W부터 800 W까지 조절하여 $Al_2O_3$ 막에 포함되는 OH의 농도를 조절하였다. $Al_2O_3$ 박막에 포함되는 OH 농도는 X-ray Photoelectron Spectroscopy (XPS)를 이용하여 분석하였다. 열처리공정 후, 화학적 패시베이션에 의한 유효 반송자 수명 (${\tau}_{eff}$) 향상이 나타났다 소성공정 후 블리스터가 형성되지 않는 조건에서 화학적 패시베이션과 전계 효과 패시베이션에 의해 ${\tau}_{eff}$가 증가하였다. 블리스터가 형성되었을 때 기존 논문들과 같이 패시베이션 특성이 감소하였다. 패시베이션 특성의 감소는 블리스터에 의한 화학적 패시베이션의 감소 때문이며 전계 효과 패시베이션은 오히려 증가하였다. 이를 통해 고온에서 열안정성을 갖는 $Al_2O_3$ 박막을 만들었으며 블리스터가 형성되지 않았고 패시베이션 특성이 증가하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.177-177
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• 2009

이동통신 시스템의 소형화 경량화 다기능화 추세에 따라 세라믹 모듈의 정밀도 및 집적도가 중요한 요소로 부각되고 있다. 이러한 모듈의 고집적화 추세에 대응하기 위하여 세라믹 소성시 수축율 제어가 필수적인 요소로 부각되고 있으며, 이에 따라 X, Y축의 소성 수축율을 0에 근접하게 제어하는 무수축 소성 기술이 요구되고 있다. 선행연구를 통하여 $Al_2O_3$/Glass/$Al_2O_3$ 구조의 glass infiltration법에 의한 무수축 소성 기술 구현 가능성을 확인하였으나, 아직 해결해야 할 문제점들이 있다. glass가 $Al_2O_3$층으로 infiltration되는 과정에서 glass층이 de-lamination 되는 결함이 발견되었으며 이는 유전체 기판의 Q값을 낮추고 기판의 신뢰성에 악영향을 줄 수 있어 이에 대한 개선이 필요한 실정이다. 본 연구에서는 $Al_2O_3$/Glass/$Al_2O_3$ 구조의 glass infiltration법에 의한 선행 실험에서 관찰된 기판 내부의 de-lamination 현상에 대한 원인을 규명하고 해결책을 제시하고자 하였다. glass 유동과 바인더 burn-out이 동시에 진행됨에 따라 기공이 생성되며 glass가 점성유동함에 따라 이 기공이 glass층으로 모이게 되어 de-lamination 현상이 발생하는 것으로 사료된다. 이를 해결하기 위하여 de-lamination층에 $Al_2O_3$의 tamping을 시도하여 glass층의 기공이 빠져 나갈 수 있는 channel 을 형성하고, 남아있는 기공을 $Al_2O_3$로 채우는 효과를 얻을 수 있었다. 이에 따라 기판의 밀도와 Quality factor 값이 향상되었으며 미세구조가 치밀한 무수축 기판을 제작할 수 있었다.

• Applied Chemistry for Engineering
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• v.17 no.4
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• pp.369-374
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• 2006

$Rh-Pt/Al_{2}O_{3}$ catalysts were used for the first time to study its reaction characteristics in the asymmetric hydrogenation of ethyl pyruvate. The catalysts were prepared either by impregnation of Rh on a commercial $Pt/Al_{2}O_{3}$ or by sequential impregnation of Rh followed by impregnation of Pt on $Al_{2}O_{3}$. Reaction rate and enantiomeric excess (ee%) were compared according to the preparation method, Rh contents, and the reduction temperature of the catalyst. The physical characteristics of the catalysts were analyzed using XRD and TEM. Bimetallic $Rh-Pt/Al_{2}O_{3}$ catalysts showed an improved reaction rate and optical purity (63.6 ee%) with increasing the reduction temperature. The variation of the Rh contents as well as the preparation method elicited a big difference on the reaction rate, while enantiomeric excess (ee%) was lower (56~60%) with all bimetallic catalysts than with monometallic $Pt/Al_{2}O_{3}$ catalyst.

• Journal of the Korean Ceramic Society
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• v.32 no.12
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• pp.1392-1400
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• 1995

WC-10wt%Co-Al2O3 ceramic composites, using both the SHS (Self-propagating High Temperature Synthesis) synthesized WC powder method and commercial WC powder, were prepared by varing WC-Co/Al2O3 vol% ratio and sintering temperature (1350℃∼1650℃) for 1 hr in Ar atmosphere. Mechanical characterization has been investigated by Instron meterial testing system and Vicker's hardness test. Compositional and structural chracterizations were carried out by energy-dispersive analysis of X-ray (EDAX) data and scanning electron microscope (SEM). Electrical characterization was carried out by the electrical resistivity measurement using 4-point probe method. As sintering period increased and Al2O3 contents decreased in WC-10wt%Co-Al2O3 ceramic composite, shrinkage and relative density increased, resulting in maximum values at 1600℃. Also the major matrix phase changed with increasing Al2O3 content from 0 to 100 vol%. It was also identified by SEM, EDAX, and electrical resistivity measurement. Based on the results of analysis of flexural strength, toughness and hardness, the mechanical properties of WC-10wt%Co-Al2O3 ceramic composites using the SHS synthesized WC powder were better than those WC-10wt%Co-Al2O3 ceramic composites using commercial WC powder because WC-10wt%Co-Al2O3 ceramic composites using the SHS synthesized WC powder were sintered very well due to small initial particle size. By the addition of 40 vol% Al2O3 [60(WC=10wt%Co)-40Al2O3], it was possible to obtain a proper candidate as a superalloy.

• Journal of Electrochemical Science and Technology
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• v.14 no.4
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• pp.377-387
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• 2023

Ni-W/Al₂O₃ nano-composites were electrodeposited on mild steel substrate for mechanical and corrosion resistance applications. This study focused on the preparation of Ni-W/Al₂O₃ nano-composite coating with various quantity of Al₂O₃ incorporations. The addition of Al₂O₃ in the electrolytes were varied from 1-10 g/L in electrolytes and the Al₂O₃ incorporation in Ni-W/Al₂O₃ nano-composite coatings were obtained from 1.82 to 13.86 wt.%. The incorporation of Al₂O₃ in Ni-W alloy matrix influenced the grain size, surface morphology and structural properties were observed. The distributions of Al₂O₃ particle in alloy matrix were confirmed using electron microscopy (FESEM and TEM) and EDAX mapping analysis. The crystal structure informations were studied using X-ray diffraction method and it confirms that the deposits having cubic crystal structure. The better corrosion rate (0.87 mpy) and microhardness (965 HV) properties were obtained for the Ni-W/Al₂O₃ nano-composite coating with 13.86 wt.% of Al₂O₃ incorporations.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.7
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• pp.394-399
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• 2000

The mechanical and electrical properties of pressed and annealed $\beta-SiC-TiB_2$ electroconductive ceramic composites were investigated as a function of the liquid forming additives of $Al_2O_3+Y_2O_3$. Phase analysis of composites by XRD revealed $\alpha$-SiC(6H), TiB2, and (Al5Y3O12). Reaction between Al2O3 and $Y_2O_3$ formed YAG but the relative density decreased with increasing $Al_2O_3+Y_2O_3$ contents. The Flexural strength showed the value of 458.9 MPa for composites added with 4 wt% $Al_2O_3+Y_2O_3$ additives at room temperatures. Owing to crack deflection and crack bridging, the fracture toughness showed 6.2, 6.0 and 6.6 MPa.m1/2 for composites added with 4, 8 and 12 wt% Al2O3+Y2O3 additives respectively at room temperature. The resistance temperature coefficient showed the value of $3.6\times10^{-3},\; 2.9\times10^{-3}\; and\; 3.0\times10^{-3} /^{\circ}C$$^{\circ}C$ for composite added with 4, 8 and 12 wt% $Al_2O_3+Y_2O_3$additives respectively at room temperature. The electrical resistivity of the composites was all positive temperature coefficient resistance(PTCR) in the temperature range of $25^{\circ}C\; to\; 700^{\circ}$.

• Korean Journal of Materials Research
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• v.9 no.1
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• pp.73-80
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• 1999

The effect of alloy compositions of the bond coating on the plasma sprayed-thermal barrier coatings was investigated. The performance of the coating composed of Rene80/NiCrAl/ZrO$_2$-CeO$_2$-Y$_2$O$_3$ and Rene80/CoNiCrAlY/ZrO$_2$-CeO$_2$-Y$_2$O$_3$was evaluated by isothermal and thermal cyclic test in an ambient atmosphere at 115$0^{\circ}C$. The failure of Rene80/NiCrAl/ZrO$_2$-CeO$_2$-Y$_2$O$_3$ coatings was occurred at the bond coating/ceramic coating interface while Rene80/CoNiCrAlY/ZrO$_2$-CeO$_2$-Y$_2$O$_3$ coating was failed at the substrate/bond coating interface after thermal cyclic test. The lifetime of Rene80/NiCrAl/ZrO$_2$-CeO$_2$-Y$_2$O$_3$coatings was longer than Rene80/CoNiCrAlY/ZrO$_2$-CeO$_2$-Y$_2$O$_3$coating. The oxidation rate of the NiCrAl bond coating examined by TGA was lower than CoNiCrAlY bond coatings. In summary, these results suggest that Rene80/CoNiCrAlY/ZrO$_2$-CeO$_2$-Y$_2$O$_3$system as thermal barrier coating be not suitable considering the durability of the coating layer for high temperature oxidation and thermal stress.

• Journal of the Korean Ceramic Society
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• v.41 no.4
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• pp.284-288
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• 2004

To improve mechanical properties of $Al_2$O$_3$/ZrO$_2$composites have been controlled dispersion of ultra low size ZrO$_2$ particles in $Al_2$O$_3$ ceramics by polymeric precursor method (Pechini process). In case of coprecipitation or mechanical mixing of ZrO$_2$ powders with $Al_2$O$_3$, homogeneous dispersion and controlling the ZrO$_2$ size were relatively difficult due to high sintering temperature. So the polyesterization process of Zr/Y(NO$_3$)$_3$-citric acid solution in ethylene glycol with the commercial sub-micron sized o(-alumina powder (Sumitomo AES-11(0.4 ${\mu}{\textrm}{m}$)) was adopted in order to obtain homogeneous dispersion of ZrO$_2$ in A1203. By this partial polyesterization process, the homogeneous dispersion of relatively low sized ZrO$_2$in $Al_2$O$_3$/ZrO$_2$composites was achieved at 1450∼1$600^{\circ}C$ of sintering temperature range and their mechanical properties were measured.

• Journal of the Korean Ceramic Society
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• v.34 no.4
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• pp.406-412
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• 1997

Al2O3/SiC hybrid-composite has been fabricated by the conventional powder process. The addition of $\alpha$-Al2O3 as seed particles in the transformation of ${\gamma}$-Al2O3 to $\alpha$-Al2O3 provided a homogeneity of the microstructure. The grain growth of Al2O3 are significantly surpressed by the addition of nano-size SiC particles. Dislocation were produced due to the difference of thermal expansion coefficient between Al2O3 and SiC and piled up on SiC particles in Al2O3 matrix, resulting in transgranular fracture. The high fracture strength of the composite was contributed to the grain refinement and the transgranular fracture mode. The addition of SiC platelets to Al2O3/SiC nano-composite decreased the fracture strength, but increased the fracture toughness. Coated SiC platelets with nitrides such as BN and Si3N4 enhanced fracture toughness much more than non-coated SiC platelets by enhancing crack deflection.