• 제목/요약/키워드: $AlO_2$

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Al2O3/ZrO2-Spinel계 복합체의 미세구조 및 물성제어: I. Al2O3-ZrO2 복합분체의 제조 및 소결특성 (Control of Microstructures and Properties of Composites of the Al2O3/ZrO2-ZrO2-Spinel System: I. Preparation and Sintering Behavior of Al2O3-ZrO2 Composite Powders)

  • 현상훈;송원선
    • 한국세라믹학회지
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    • 제29권10호
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    • pp.797-805
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    • 1992
  • Al2O3-20 wt% ZrO2 composite powders to be used as the starting materials of the Al2O3/ZrO2-Spinel composite system were prepared by the use of the emulsion-hot kerosene drying method. The crystalline phase of ZrO2 in the synthesized Al2O3-ZrO2 composite powders was 100% tetragonal but the small amount of t-ZrO2 was transformed into m-ZrO2 after crushing. The hardness, fracture toughness, and flexural strength of the composite, which was sintered at 1650$^{\circ}C$ for 4 hrs after calcining at 1100$^{\circ}C$ for 2 hrs and had the relative density of 99%, were 15.7 GPa, 4.97 MN/m3/2, and 390 MPa, respectively. The fracture form in the sintered composites was found to be the intergranular fracture.

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SiC와 TiC 입자를 함유하는 Al2O3 입자복합체의 균열저항거동과 기계적 성질 (R-Curve Behavior and Mechanical Properties of Al2O3 Composites Containing SiC and TiC Particles)

  • 나상웅;이재형
    • 한국세라믹학회지
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    • 제39권4호
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    • pp.413-419
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    • 2002
  • $Al_2O_3$/TiC/SiC, $Al_2O_3$/SiC 및 $Al_2O_3$/TiC 복합체들을 고온가압소결로 제조하여 이들의 균열저항거동과 기계적 성질을 비교해 보았다. $Al_2O_3$$0.8{\mu}m$의 TiC가 30vol% 첨가된 $Al_2O_3$/TiC는 단일체 $Al_2O_3$와 비슷한 균열저항거동을 보이며 파괴인성은 전반적으로 10% 이내의 증가를 보이는데 그쳤지만 강도는 약 30% 증가하였다. $Al_2O_3$$3{\mu}m$ SiC가 30vol% 첨가된 $Al_2O_3$/SiC는 SiC 입자의 균열 접속으로 인해 증가하는 균열저항거동을 뚜렷이 보이면서 파괴인성이 긴 균열에서 약 75% 증가하였으나 강도는 다소 감소했다. $Al_2O_3$/TiC에 SiC 입자가 30 vol% 첨가된 $Al_2O_3$/TiC/SiC 복합체의 경우 단일체 $Al_2O_3$에 비해 긴 균열 거리에서 파괴인성이 50% 이상 증가된 6.6 MP${\cdot}\sqrt{m}$에 이르렀으며 강도 값도 약 20% 상승하였다. 그러나 큰 SiC 입자의 첨가로 인해 TiC 입자만 첨가된 $Al_2O_3$/TiC 복합체보다는 강도가 다소 낮았다. 또한 SiC 입자만 첨가된 $Al_2O_3$/SiC 복합체보다는 파괴인성이 다소 낮았는데, 이는 작은 TiC 입자들이 SiC 입계를 거칠게 만들어 균열접속을 일으키는 SiC 입자의 뽑힘 현상을 방해하였기 때문이다.

Sol-Gel법으로 제조한 $B_2O_3$-$SiO_2$$Al_2O_3$-$SiO_2$ 박막의 특성에 관한 연구 (Study on the Properties of $B_2O_3$-$SiO_2$and $Al_2O_3$-$SiO_2$Coating Films by the Sol-Gel Method)

  • 황규석;김병훈;최석진
    • 한국세라믹학회지
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    • 제27권5호
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    • pp.583-588
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    • 1990
  • Glass films in the binary system B2O3-SiO2 and Al2O3-SiO2 were prepared on soda-lime-silica slide glass by the dip-coating technique from TEOS and boric acid or aluminum nitrate. Thickness of the films varying with viscosity and withdrawal speed were measured and effect of composition and firing temperature on the properties such as transmittance and refractive index were investigated. nM2O3.(100-n)SiO2(M=B or Al) films containing up to 20mol% B2O3 and 40mol% Al2O3 were transparent. Maximum transmittance at visible range were obtained for the sample containing 15mol% Ba2O3 and 32.5mol% Al2O3 and heat-treated at 50$0^{\circ}C$, respectively. Refractive index of the film containing 15mol% B2O3 was mininum in the B2O3-SiO2 binary system and minimal refractive index was appeared at the film containing 32.5mol% Al2O3. In IP spectra, addition of B2O3 were increased absorption peak intensity of B-O and Si-O-B bond and addition of Al2O3 were decreased absorption peak intensity of Si-O bond, respectively.

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$SrTiO_3$:Pr,Al 적색 형광체에서 TEM을 이용한 2차상의 관찰 (Observation of the Second Phases in a Red Phosphor $SrTiO_3$:Pr,Al by using Transmission Electron Microscopy)

  • 이정용;이호성;정연철;전덕영
    • 한국세라믹학회지
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    • 제38권3호
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    • pp.225-230
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    • 2001
  • 저전압용 형광체로 주목받고 있는 SrTiO$_3$:Pr,Al 형광체를 고상반응법으로 제조하였다. 부활성체 Al이 23 mol% 첨가되었을 때 SrTiO$_3$:Pr 형광체는 최대 발광 강도를 보여주었다. 최대 발광 강도를 보인 형광체에 대해 제한시야회절상과 투과전자현미경을 이용하여 SrTiO$_3$:Pr,Al 적색 형광체내 2차상 형성에 대한 연구를 행하였고 또한 에너지 분산 분광 분석을 행하여 SrTiO$_3$:Pr,Al 형광체내 주입된 부활성제 Al의 함량을 결정하였다. 제한시야회절상의 결과에 의하면 SrTiO$_3$:Pr,Al 적색 형광체내에 단사정 SrAl$_2$O$_4$, 삼사정 Ti$_4$O$_{7}$, 육방정 SrAl$_{12}$O$_{19}$가 2차상으로 존재함을 보여 주었다. 에너지 분산 분광 분석 결과 부활성제 Al의 함량 중 일부는 SrTiO$_3$:Pr,Al 적색 형광체 격자에 고용되고 일부 Al은 SrAl$_{12}$O$_{19}$와 SrAl$_2$O$_4$의 2차상을 형성하는데 소모됨을 보여주었다.주었다.

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$Al_2O_3/Cr_2O_3-ZrO_2/HfO_2$ 계의 기계적 거동 (Mechanical Behavior of $Al_2O_3/Cr_2O_3-ZrO_2/HfO_2$ System)

  • 신동우;오근호;이종근
    • 한국세라믹학회지
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    • 제22권6호
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    • pp.42-52
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    • 1985
  • Several $Al_2O_3$-based polycrystalline which had different dopant ratio in the range of 0.5mol% were prepared by doping pure $Cr_2O_3$ $HfO_2$. Single crystalline which had same composition with above polycrystalline were made by means of floating zone method. This study examined the role of each dopant for enhancing the mechanical properties of $Al_2O_3$-based Ceramics. Optical micrographs $({ imes}200)$ of $Al_2O_3-Cr_2O_3$ single crystal showing not only radial crack (rc) on the specimen surface but median crack(mc) and lateral crack(lc) under surface at the edge of indentation mark. Fracture toughness of Al2O3-based Ceramics was increased with $ZrO_2$ content. Alloying effect of $Cr_2O_3$ contributed to the hardness of $Al_2O_3$ based ceramics.

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반응결합에 의해 제조된 ZTA복합체의 기계적 특성 (Mechanical Properties of ZTA Composites Fabricated by Reaction Bonding)

  • 장복기;백용혁;문종하;이종호
    • 한국세라믹학회지
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    • 제34권6호
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    • pp.577-582
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    • 1997
  • The mechanical properties of Al2O3-ZrO2 composites fabricated by RBAO(reaction bonded aluminium oxide) process were investigated. As the amount of ZrO2 increased the sinstered density of Al2O3-ZrO2 composites decreased slightly, but wear resistance was enhanced. Bending strength of Al2O3-ZrO2 composites increased in proportion to the amount of al in case of a fixed ZrO2 content. When the amount of Al was fixed bending strength reached its maximum value at 25 wt% ZrO2. The fracture toughness(K1c) increased with increasing content of ZrO2, but decreased with increasing Al amount. On the other hand, the fracture mode of Al2O3-ZrO2 composites was the mixed mode of inter-and transgranular fracture.

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K2O-MgO-Al2O3 3성분계에서 K+-β/β"-Al2O3의 합성 및 상관계 (Synthesis and Phase Relations of Potassium-Beta-Aluminas in the Ternary System K2O-MgO-Al2O3)

  • 함철환;임성기;이충기;유승을
    • 공업화학
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    • 제10권7호
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    • pp.1086-1091
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    • 1999
  • $K_2O-MgO-Al_2O_3$의 3성분계로부터 $K^+-{\beta}/{\beta}"-Al_2O_3$를 직접 고상반응법에 의하여 합성하였다. 합성시 초기조성, 합성온도, 합성시간 및 분쇄매체가 ${\beta}/{\beta}"-Al_2O_3$ 상형성 및 상관계에 미치는 영향에 대하여 분석하였으며 최대 분율의 ${\beta}"-Al_2O_3$ 상형성을 위한 최적 합성조건을 연구하였다. 조성범위로서 $K_2O$$Al_2O_3$상형성의 몰비를 1:5에서 1:6.2로, 안정화제로 사용된 MgO는 4.2 wt % 에서 6.3 wt % 사이에서 변화시켰으며 합성온도는 $1000^{\circ}C$에서 $1500^{\circ}C$까지 취하였다. ${\beta}/{\beta}"-Al_2O_3$상은 ${\alpha}-Al_2O_3$$KAlO_2$가 결합하는 $1000^{\circ}C$ 부근에서 형성되기 시작하여 점차 증가하다가 $1200^{\circ}C$ 부근에서 ${\alpha}-Al_2O_3$가 모두 사라지면서 균일화되었다. ${\beta}"-Al_2O_3$ 상분율은 $K_{1.67}Mg_{0.67}Al_{10.33}O_{17}$의 조성과 함께 $1300^{\circ}C$ 부근에서 최대값을 보였다. $1300^{\circ}C$ 이상의 합성 온도에서는 높은 potassium의 증기압에 따른 $K_2O$의 손실에 의하여 ${\beta}"-Al_2O_3$ 상분율이 감소하였으며 합성시간은 5시간 정도가 적당하였다. 분쇄 및 혼합을 위한 분산매체로는 증류수보다는 아세톤의 효과가 뛰어났다.

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$Al/SiC/Al_{2}O_{3}$복합재료의 기계적 성질 및 마멸특성 (Mechanical Properties and Wear Behaviour of $Al/SiC/Al_{2}O_{3}$ Composite Materials)

  • 임흥준;김영한;한경섭
    • 대한기계학회논문집
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    • 제17권10호
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    • pp.2498-2508
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    • 1993
  • $Al/SiC/Al_{2}O_{3}$ hybrid composites are fabricated by squeeze infiltration method. From the misconstructive of $Al/SiC/Al_{2}O_{3}$ hybrid composites fabricated by squeeze infiltration method, uniform distribution of reinforcements and good bondings are found. Hardness value of $Al/SiC/Al_{2}O_{3}$ hybrid composites increases linearly with the volume fraction of reinforcement because SiC whisker and $Al_{2}$O$_{3}$ fiber have an outstanding hardness. Optimal aging conditions are obtained by examining the hardness of $Al/SiC/Al_{2}O_{3}$ hybrid composites with different aging time. Tensile properties such as Young's modulus and ultimate tensile strength are improved up to 30% and 40% by the addition of reinforcements, respectively. Failure mode of $Al/SiC/Al_{2}O_{3}$ hybrid composites is ductile on microstructural level. Through the abrasive wear test and wear surface analysis, wear behaviour and mechanism of 6061 aluminum and $Al/SiC/Al_{2}O_{3}$ hybrid composites are characterized under various testing conditions. The addition of SiC whisker to $Al/SiC/Al_{2}O_{3}$ composites gives rise to improvement of the wear resistance. The wear resistance of $Al/SiC/Al_{2}O_{3}$ hybrid composites is superior to that of Al/SiC composites. The wear mechanism of aluminum alloy is mainly abrasive wear at low speed range and adhesive and melt wear at high speed range. In contrast, that of $Al/SiC/Al_{2}O_{3}$ hybrid composites is abrasive wear at all speed range, but severe wear when counter material is stainless steel. As the testing temperature increases, wear loss of aluminum alloy decreases because the matrix is getting more ductile, but that of $Al/SiC/Al_{2}O_{3}$ hybrid composites is hardly varied. Oil lubricant is more effective to reduce the wear loss of aluminum alloy and $Al/SiC/Al_{2}O_{3}$ hybrid composites at high speed range.

SHS법을 이용한 복합분말(Al2O3-SiC) 제조시 TiO2첨가의 영향 (The effect of the addition of TiO2 in the preparation of (Al2O3-SiC)- SiC composite powder by SHS Process)

  • 윤기석;양범석;이종현;원창환
    • 한국재료학회지
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    • 제12권1호
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    • pp.48-53
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    • 2002
  • $Al_2O_3-SiC$ and $Al_2O_3-SiC$-TiC composite powders were prepared by SHS process using $SiO_2,\;TiO_2$, Al and C as raw materials. Aluminum powder was used as reducing agent of $SiO_2,\;TiO_2$ and activated charcoal was used as carbon source. In the preparations of $Al_2O_3-SiC$, the effect of the molar ratio in raw materials, compaction pressure, preheating temperature and atmosphere were investigated. The most important variable affecting the synthesis of $Al_2O_3-SiC$ was the molar ratio of carbon. Unreactants remained in the product among all conditions without compaction. The optimum condition in this reaction was $SiO_2$: Al: C=3: 5: 5.5, 80MPa compaction pressure under Preheating of $400^{\circ}C$ with Ar atmosphere. However there remains cabon in the optimum condition. The effect of $TiO_2$ as additive was investigated in the preparations of $Al_2O_3-SiC$. As a result of $TiO_2$ addition, $Al_2O_3-SiC$-TiC composite powder was prepared. The $Al_2O_3$ powder showed an angular type with 8 to $15{\mu}m$, and the particle size of SiC powder were 5~$10{\mu}m$ and TiC powder were 2 to $5{\mu}m$.

DRAM에서 $Al_2O_3$를 식각 정지막으로 이용한 레지스터 형성에 관한 연구 (Study on the Resistor Formation using an $Al_2O_3$ Etch-Stop Layer in DRAM)

  • 박종표;김길호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.153-156
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    • 2005
  • 원자층 증착 (atomic layer deposit : ALD) 방식으로 증착한 $Al_2O_3$의 건식식각 특성을 연구하였다. 전자 싸이클로트론 공진 (electron cyclotron resonance : ECR) 방식의 건식식각장치에서 source power, bias power, 압력 그리고 $Cl_2$ 가스를 변수로 하여 $Al_2O_3$의 식각속도와 Poly-Si 의 $Al_2O_3$에 대한 선택비를 측정하였다. bias power가 감소할수록 그리고 압력이 증가할수록 $Al_2O_3$의 식각속도는 감소하였고 Poly-Si 의 $Al_2O_3$에 대한 선택비는 증가하였다. 이 특성을 이용하여 TiN/$Al_2O_3$/Poly-Si 구조의 캐패시터와 Periphery 회로영역의 레지스터를 $Al_2O_3$를 식각 정지막으로 이용하여 구현하였다.

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