• The Journal of the Petrological Society of Korea
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• 제5권1호
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• pp.52-65
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• 1996

Precambrian metamorphic rocks of the Cheongpyeong-Yangpyeong area, central Gyeonggi massif, comprise gneiss, schist, quartzite and amphibolite. Mineral, assemblages of pelitic gneisses are characterized by biotite + cordierite + garnet + sillimanite + K-feldspar + plagioclase + quartz together with minor muscovite, spinel and corundum, and represent the granulite facies metamorphism. In particular, kyanite occurs as fine-grained relict phase inside plagioclase of three gneiss samples. Metamorphic conditions are estimated from garnet-biotite and garnet-cordierite geothermometers in conjunction with garnet-$Al_2SiO_5$-quartz-plagioclase (GASP) and garnet-rutile-$Al_2SiO_5$-ilmenite (GRAIL) geobarometers. They are 700-$850^{\circ}C$ and 3.2-8.3 kbar, and 580-$690^{\circ}C$ and 2.1-3.2 kbar, respectively, when the core and rim compositions of garnet are use. Garnet of the GASP assemblage increases rimward in the Fe and Mn contents but decreases in the Mg content, whereas its Ca content does not vary significantly. Together with the occurrence of relict kyanite and the result of P-T estimates, compositional zoning patterns of garnet indicate a clockwise P-T history. Moreover, the preservation of high-pressure minerals such as kyanite in plagiocalse, even after the medium-pressure granulite facies metamorphis, suggests a rapid change in P-T conditions.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.117-118
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• 2012

• Proceedings of the Korean Vacuum Society Conference
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.250-250
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• 2010

Flexible display의 발전에 따라 점차 고온 공정에서 plastic 기판에 영향을 주지 않는 저온 공정으로 변화해 가고 있다. 이러한 발전에 따라 공정온도에 따른 SiNx의 특성 분석을 위해 우선 150C~300C에서 SiNx의 박막을 증착하였다. gas ratio (SiH4:NH3=4:60)와 Power (50W), 공정시간(25min)을 고정하고 온도만을 가변하여 박막의 특성을 분석하였다. 이후에 150C로 온도를 고정 후 gas ratio를 가변하고 Power (40W)와 온도(150C)는 고정 후 실험을 진행하여, 150C에서 최적화된 gas ratio를 알아내도록 하였다. 위의 실험은 p-type 실리콘 웨이퍼 위에 SiNx 박막 증착 후 굴절률과 증착률을 측정하였고, Al 전극을 증착하여 MIS구조를 구현하여, gate voltage에 따른 capacitance를 측정하였다. 이번 논문에서는 SiNx의 Substrate temperature와 gas ratio의 변화에 따른 다양한 특성을 확인하고 이를 체계적으로 분석하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.149.1-149.1
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• 2013

Noble metal silicides are widely used in silicon based microelectronic and optoelectronic devices. Among them, as compared to other silicides, structural and electronic properties of platinum silicide (PtSi) are found to be less sensitive to change in its dimensions. PtSi is known to overcome the junction spiking problems of Al-Si contacts. Present study is regarding the spatial evolution of platinum silicide in Pt/SiOx/Si. Scanning photoelectron emission microscopy (SPEM) was used for this purpose. SPEM images were obtained for pristine samples and after an annealing at $500^{\circ}C$ for 1 hr. Core-level spectra were recorded at different points in SPEM images contrasted by the intensity of Pt 4f7/2. Both Pt 4f and Si 2p spectra reveal the formation of PtSi after annealing. However, in contrast to earlier reports, PtSi formation is found to be non-uniform confirmed by the SPEM images and from the core level spectra taken at different intensity points.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.408-409
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• 2007

Al-doped p-type ZnO films were fabricated on n-Si (100) and homo-buffer layers in pure oxygen at $450^{\circ}C$ by RF magnetron sputtering. Target was ZnO ceramic mixed with 2wt% $Al_2O_3$. XRD spectra show that the Al-doped ZnO thin films have ZnO crystal structure and homo-buffer layers are beneficial to Al-doped ZnO films to grow along c-axis. Hall Effect experiments with Van der Pauw configuration show that p-type carrier concentrations are ranged from $1.66{\times}10^{16}\;to\;4.04{\times}10^{18}cm^{-3}$, mobilities from 0.194 to $2.3cm^2V^{-1}s^{-1}$ and resistivities from 7.97 to $18.4{\Omega}cm$. P-type sample has density of $5.40cm^{-3}$ which is smaller than theoretically calculated value of $5.67cm^{-3}$. XPS spectra show that O1s has O-O and Zn-O structures and A12p has only Al-O structure. P-ZnO:Al/n-ZnO:Al junctions were fabricated by magnetron sputtering. V-I curves show that the p-n junctions have rectifying characteristics.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.442-443
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• 2007

Al-N co-doped ZnO films were fabricated on n-Si (100) and homo-buffer layers in the mixture of oxygen and nitrogen at $450^{\circ}C$ by magnetron sputtering. Target was ZnO ceramic mixed with $2wt%Al_2O_3$. XRD spectra show that as-grown and $600^{\circ}C$ annealed films are prolonged along crystal c-axis. However they are not prolonged in (001) plane vertical to c-axix. The films annealed at $800^{\circ}C$ are not prolonged in any directions. Codoping makes ZnO films unidirectional variation. XPS show that Al content hardly varies and N escapes with increasing annealing temperature from $600^{\circ}C\;to\;800^{\circ}C$. The electric properties of as-grown films were tested by Hall Effect with Van der Pauw configuration show some of them to be p-type conduction.

• Proceedings of the KIEE Conference
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• 대한전기학회 2004년도 추계학술대회 논문집 전기물성,응용부문
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• pp.92-94
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• 2004

In this investigation, 3C-SiC film deposited $1000{\AA}$ on the p-type silicon wafer which is resistance $0{\sim}30[{\Omega}{\cdot}cm]$ by PECVD (Plasma-enhanced Chemical Vapor Deposition). We deposited Cr, Ta, Pt in front of wafer to utilize DC-sputter for $500{\AA}$, the SiC Schottky diode made from Al ohmic contact about $4000{\AA}$, and to each different temperature which annealing in Ar atmosphere, we had forward characteristic analysis along to annealing temperature.

• Economic and Environmental Geology
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• 제29권4호
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• pp.421-428
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• 1996

The occurrence, optical property, chemical composition, crystal structure and formation environments of the phillipsite within deep-sea manganese nodules were systematically investigated in this study. Phillipsite in manganese nodules occurs in nucleus of nodules along with consolidated bottom sediments, weathered volcanic debris, and interstitial grains in the each layer of manganese encrusts. Phillipsite is predominantly pseudomorphs of volcanic shards, and occurs as white to pale yellow in color lath-shaped and equant crystals. These show aggregations of prismatic, blocky, and bladed of 2 to $20{\mu}m$ long, and 2 to $5{\mu}m$ thick. The simplified average chemical formula of phillipsite is $({Ca_{0.1}Mg_{0.3}Na_{1.1}K_{1.5}})_3{(Fe_{0.3}Al_{4.2}Si_{11.8})O_{32}{\cdot}10H_2O}$ with a very siliceous and alkalic. The $Si/(Al+Fe^{+3})$ ratio is 2.37 to 2.78 and alkalis greatly exceed the divalent exchangeable cations, and Na/K ratio is 0.59 to 0.81. The phillipsite is monoclinic ($P2_l/m$) with the unit-cell parameters, $a=10.005{\AA}$, $b=14.129{\AA}$, $c=8.686{\AA}$, ${\beta}=124.35^{\circ}$, and $V=1013.6{\AA}^3$. Phillipsites in manganese nodules formed apparently authigenically at a temperature less than $10^{\circ}C$, and they crystallized at a pressure of less than 0.7 kb, and pH of about 8 in deep-sea environments.

• Journal of the Korean Ceramic Society
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• 제29권10호
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• pp.785-790
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• 1992

A study of the pack cemcented SiC coating on graphite was performed and the process conditions were evaluated by means of experimental design. The content of Si, P2O5, B and Al2O3 reaction temperature, reaction time and acid treatment wast tested as the experimental variables. The results were analyzed and compared by the characteristic value of 10% weight loss by oxidation. The acid treatment exhibited the most effective anti-oxidation property and the optimum conditions were the powder composition of 20% Si, 3% B and 77% SiC, the reaction temperature of 1550$^{\circ}C$ for 7 hours with phosphoric acid treatment. The pack coating performed under this condition improved the 10% weight loss oxidation temperature by 514$^{\circ}C$ compared to the bare graphite.

• Composites Research
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• 제22권5호
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• pp.15-23
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• 2009

The lubricant tribological characteristics of $Al_2O_3$ fiber and SiC particle hybrid metal matrix composites (MMCs) fabricated by squeeze casting method was investigated using a pin-on-disk wear tester. The wear tests of the MMCs were performed according to fiber/particle hybrid ratio in the planar-random (PR) and normal (N) orientations sliding against a counter steel disk at a fixed speed and $25\;kg_f$ loading under different sliding distances and temperatures. The test results showed that the wear behavior of MMCs varied with fiber orientation and hybrid ratio. At room temperature, the lubricant wear behavior of F20P0 unhybrid PR-MMCs was superior to that of N-MMCs while the hybrid composites exhibited the reverse lubricant wear behavior. It was also revealed that the wear resistance of PR-MMCs was superior to that of the N-MMCs due to the joint action of reinforcements and lubricant film between the friction surfaces at an elevated temperature of $100^{\circ}C$ for both fiber only and hybrid cases. In case of $150^{\circ}C$, although the trend of weight loss was similar to that of others, the wear resistance of PR-MMCs was better than that of N-MMCs for hybrid MMCs.