• Title/Summary/Keyword: $A_2/O$ 공정

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Development of micro check valve with polymer MEMS process for medical cerebrospinal fluid (CSF) shunt system (Polymer MEMS 공정을 이용한 의료용 미세 부품 성형 기술 개발)

  • Chang, J.K.;Park, C.Y.;Chung, S.;Kim, J.K.;Park, H.J.;Na, K.H.;Cho, N.S.;Han, D.C.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2000.05a
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    • pp.1051-1054
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    • 2000
  • We developed the micro CSF (celebrospinal fluid) shunt valve with surface and bulk micromachining technology in polymer MEMS. This micro CSF shunt valve was formed with four micro check valves to have a membrane connected to the anchor with the four bridges. The up-down movement of the membrane made the CSF on & off and the valve characteristic such as open pressure was controlled by the thickness and shape of the bridge and the membrane. The membrane, anchor and bridge layer were made of the $O_2$ RIE (reactive ion etching) patterned Parylene thin film to be about 5~10 microns in thickness on the silicon wafer. The dimension of the rectangular nozzle is 0.2*0.2 $\textrm{mm}^2$ and the membrane 0.45 mm in diameter. The bridge width is designed variously from 0.04 mm to 0.12 mm to control the valve characteristics. To protect the membrane and bridge in the CSF flow, we developed the packaging system for the CSF micro shunt valve with the deep RIE of the silicon wafer. Using this package, we can control the gap size between the membrane and the nozzle, and protect the bridge not to be broken in the flow. The total dimension of the assembled system is 2.5*2.5 $\textrm{mm}^2$ in square, 0.8 mm in height. We could precisely control the burst pressure and low rate of the valve varing the design parameters, and develop the whole CSF shunt system using this polymer MEMS fabricated CSF shunt valve.

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Morphology of Poly(butyl acrylaye)/Poly(methyl methacrylate) Composite Latex Prepared by 2-stage Dispersion Polymerization (중합공정에 따른 PBA/PMMA Composite Latex 모폴로지의 연구)

  • Lee, Ki-Chang;Choe, Hyeon-Seong
    • Elastomers and Composites
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    • v.46 no.1
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    • pp.60-69
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    • 2011
  • The various types of PBA/PMMA composite latexes were prepared by $2.1\;{\mu}m$ PBA seeded batch and seeded semi-continuous dispersion polymerization. The morphology of the PBA/PMMA composite latexes by seeded batch process was found to be closely dependant on the weight ratios of methanol/water in polymerization medium and of PBA seed/MMA at the second stage. In general, egg, snowman, confetti, peanut-like nonspherical composite latex particles were formed with increasing amount of water and MMA as a result of the occurrence of the phase separation between PBA seed and PMMA. The morphology of the PBA/PMMA composite latexes by seeded semi-continuous process was controlled by the addition time of MMA, especially, spherical shaped core(PBA)/shell(PMMA) composite latex particles were prepared under the monomer-starved condition at the second stage.

Chemical Oxidation of Cu - and CN - contained Wastewater (Cu - CN 함유 폐수의 화학적 산화)

  • Yoo, Kun-Woo;Seo, Hyung-Joon
    • Clean Technology
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    • v.5 no.1
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    • pp.20-29
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    • 1999
  • In the treatment of Cu - and CN - contained wastewater by using Fenton oxidation-flocculation-precipitation, the optimal removal efficiencies of the cyanide and copper were investigated according to pH, reaction time, the molar ratio of cyanide and hydrogen peroxide and the mass ratio of ferrous sulfate and hydrogen peroxide for Fenton oxidation, and pH for hydroxide precipitation, respectively. As a result, the $CN^-$ removal efficiency in our experimental wastewater by the Fenton oxidation was 81.2%~99% at its optimal conditions of pH ranging from 3 to 5 and reaction time of 30 minutes. And the optimal dosage of hydrogen peroxide and ferrous sulfate was 214, $428mg/{\ell}$, 107, $161mg/{\ell}$, 214, $214mg/{\ell}$ and 520, $500mg/{\ell}$, respectively when the molar ratio of $Cu^{2+}$:CN is 2:1, 1:1, 1:2, 1:10, and was 900, $1050mg/{\ell}$ when the molar ratio of $Cu^+$: CN is 1:10. When the copper was precipitated by sodium hydroxide after Fenton oxidation, the copper removal efficiency in the wastewater at pH 7 was 98.92%, 98.52%, 92.46%, 90.6% and 95%, respectively.

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Assessment of 1,4-Dioxane Removal in Polyester Wastewater by Activated Sludge and Its Microbial Property by 16S rDNA (폴리에스테르 중합폐수의 활성슬러지 공정에서의 1,4-다이옥산 제거 및 16S rDNA에 의한 미생물 군집특성 평가)

  • Han, Ji-Sun;So, Myung-Ho;Kim, Chang-Gyun
    • Journal of Korean Society of Environmental Engineers
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    • v.30 no.4
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    • pp.393-400
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    • 2008
  • 1,4-Dioxane($C_4H_8O_2$), which is used as a solvent stabilizer, could make harmful effects on ecosystem because of its higher solubility, toxicity and carcinogenic by US EPA. From 2011, its discharge limit to waterbody will be regulated at 5 mg/L by Ministry of Environment Republic of Korea. It was thus to investigate that the currently operating activated sludge in polyester manufacturing processes in Gumi can properly treat it to meet with the regulation standard. For that purpose, the removal rate of 1,4-dioxane and its microbial properties were assessed for a few companies(i.e. K, H and T). Its removal efficiency was the most highly recorded in H as 98% and then 77% for K, which met with the regulation standard. However, concentration of 1,4-dioxane of T was 23 mg/L in the effluent, which is more than the regulation standard. Aside from, microbial degradation test was done for 100 ppm of 1,4-dioxane in BSM (Basal salt medium) inoculated with each of activated sludge. After 7 days, 1,4-dioxane was completely removed in the test bottle inoculated with H sludge, 67% in T and 52% in K, which could confirm that the given activated sludge might have different biodegradability against the amount of 1,4-dioxane. Therefore, microbial diversity in each company was investigated by 16s rDNA cloning methods where a species, e.g. Methylibium petroleiphilum PM1, was the greatest observed from H and in lesser from K, but it was not detected from T. Methylibium petroleiphilum PM1 is known to efficiently degrade ether like methyl tertiary-butyl ether(MTBE). It is concluded that the activated sludge in H can be most effectively adopted for a biodegradation of 1,4-dioxane in the concern of industrial sector.

Effect of H2O2 Injection and Temperature Changing on the Organic Carbon Fraction in Chromatogram Dissolved Organic Carbon (CDOC) from Thermal Pretreatment (H2O2 주입과 온도변화가 열적 전처리 후 발생 슬러리의 CDOC 유기탄소분율에 미치는 영향평가)

  • Kim, Hee-Joong;Kim, Tae-Kyoung;Kim, Youn-Kwon
    • Journal of Korean Society of Environmental Engineers
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    • v.38 no.3
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    • pp.110-116
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    • 2016
  • Biogas yields point of view, the possibility of reusing excess sludge treated by thermal pretreatment for the purpose of improving the efficiency of the anaerobic digestion process has been investigated in recent year. Thermal pretreatment technology was considered as a pretreatment technique to improve excess sludge properties because of the solubilization of particulate organics. As a view point of sludge reduction and recycle, however, many researchers focused on the ability of particulate hydrolysis and COD solubilization under a high temperature, and few reports have addressed on the physical/chemical characteristics changing. This research was performed to evaluate the effects of a various temperature and chemical additives on carbon formation and fractionation in treated slurry from thermal pretreatment. Based on the results, it was revealed that oxidants injection and temperature changing have significantly caused the change of carbon fractions in slurry from thermal pretreament. Especially, it was considered that the efficiencies of particle hydrolysis increased with the increase of the reaction temperature. Low molecular weight(Mw < 350 g/mol) organic carbon formation increased with the increase of oxidants injection. It was expected that results of this research will provide an overview of the characteristics of thermal pretreatement for excess sludge reduction and recycle.

Improvement of Hot Dip Galvanizing Process by Additive to Flux Solution (플럭스액의 첨가제에 의한 용융아연도금 공정개선)

  • Moon, Kyung-Man;Jeong, Jae-Hyun;Park, Jun-Mu;Lee, Myeong-Hoon;Baek, Tae-Sil
    • Journal of Surface Science and Engineering
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    • v.49 no.6
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    • pp.513-520
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    • 2016
  • Many surface protection methods have been developed to apply to constructional steels which have been used under severe corrosive environments. One of these methods, hot dip galvanizing is being widely used to the numerous constructional steels such as a guard rail of high way, various types of structural steel for manufacturing ship and for some other industrial fields etc.. Recently, the cost of zinc is getting higher and higher, thus, it is considered that improvement of hot dip galvanizing process to reduce the cost of production should be developed possibly. In this study, additives such as acid cleaning solution, $NH_4OH$, $Al(OH)_3$ and $H_2O_2$ were added to flux solution, and omission of water washing treatment after acid cleaning was investigated with some types of flux solutions added with some additives mentioned above. The decrement of pH by adding the acid cleaning solution could be controlled due to neutralization reaction with addition of $NH_4OH$. The flux solution added with both $NH_4OH$ and $Al(OH)_3$ exhibited nearly the same color and pH value as those of orignal flux solution with no added, and the sample dipped to the flux solution which was added with additives mentioned above indicated a relatively good corrosion resistance compared to other samples. However, the flux solution added with $NH_4OH$, $Al(OH)_3$ and $H_2O_2$ exhibited a different color, sediment and a bad corrosion resistance. Consequently, it is considered that omission of water washing treatment may be able to perform by adding optimum additives to the original flux solution.

Leaching of Copper and Other Metal Impurities from a Si-Sludge Using Waste Copper Nitrate Solution (실리콘 슬러지로부터 폐질산구리용액을 이용한 구리 및 금속불순물의 침출)

  • Jun, Minji;Srivastava, Rajiv Ranjan;Lee, Jae-chun;Jeong, Jinki
    • Resources Recycling
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    • v.25 no.3
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    • pp.11-19
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    • 2016
  • A fundamental study to recycle a Si-Sludge and waste copper nitrate solution acid solution generated by domestic electronic industries was carried out. The waste copper nitrate solution was used as the lixiviant to leach the metals like Cu, Ca, Fe, etc. from the sludge leaving Si in the residues. The effect of reaction temperature, time and pup density on the metals leaching from the sludge was investigated. To enhance the extractability of Fe, the effect of HCl, $HNO_3$ and $H_2O_2$ introduced additionally during the leaching was also examined. Considering the leaching efficiency of Fe along with Cu, the leaching conditions comprising of 200 ~ 225 g/L pulp density and $90^{\circ}C$ temperature for 30 min were optimized. Under this condition, 98.27 ~ 99.17% Cu could be dissolved in the leach liquor with the obtained purity of Si in the residues as 98.69 ~ 98.86 %. The study revealed that the leaching of Cu contained in the Si-Sludge with the waste copper nitrate solution is a plausible approach by which the obtained leach liquor can further be treated suitably to recover Cu as the high pure value-added products.

Synthesis of high capacity ionic oxidizer; HAN[Hydroxylammonium Nitrate] (고에너지 이온성 산화제 HAN [Hydroxylammonium nitrate] 합성공정 연구)

  • Kim, So-Hee;Park, Yeon-Soo;Kim, Wooram;Park, Mi-Jeong;Kwon, Yoon-Za;Jo, Young min
    • Journal of the Korean Applied Science and Technology
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    • v.36 no.1
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    • pp.165-173
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    • 2019
  • Hydrazine[$N_2H_4$] is a typical propellant for a rocket fuel in the field of aerospace. Since it is very toxic and harmful to the environment, various environmentally-friendly propellants have been developed. In this study, relatively a safe propellant, hydroxylammonium nitrate[$NH_3OHNO_3$], was prepared via a neutralization reaction of hydroxylamine[$NH_2OH$] and nitric acid[$HNO_3$]. FT-IR was used to analyze the chemical composition, chemical structure and functional groups of HAN. Thermogravimetric analysis showed the decomposition temperature of HAN. Ion chromatography was also used to evaluate the content of nitrate ions. It was proved that the peaks of FT-IR at $3161cm^{-1}$ and $1324cm^{-1}$ indicates the functionalities of N-H and N-O present in HAN. The decomposition temperature of HAN synthesized at pH 5 to 7 was $120-140^{\circ}C$, and pH 8 resulted in higher decomposition temperature than $140^{\circ}C$. Meanwhile, the sample obtained from pH 6-7 showed the concentration of nitric acid ion with 70%.

Removal of Geosmin by Combined Treatment of PAC and Intermediate Chlorination in the Conventional WTP (표준정수처리공정에서 분말활성탄과 중간염소를 이용한 지오스민 저감방안)

  • Kim, Tae Kyun;Choi, Jae Ho
    • Journal of Korean Society of Environmental Engineers
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    • v.37 no.1
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    • pp.7-13
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    • 2015
  • In this study, the effective treatment reducing geosmin and dosage of PAC was suggested when taste & odor compounds flow in. The removal efficiency of geosmin was evaluated with types of chlorination. In case of low geosmin concentration below 25 ng/L, removal efficiency of geosmin was estimated at 46% by combined treatment of pre and intermediate-chlorination. But, in the exclusive intermediate-chlorination treatment, removal efficiency of geosmin was increased to 57%. In the medium geosmin concentration (25~79 ng/L), removal efficiency of geosmin was estimated at 59% by combined treatment. But, in the exclusive intermediate-chlorination treatment, removal efficiency of geosmin was increased to 87%. When high geosmin concentration above 80 ng/L flows in, removal efficiency of geosmin was estimated at 69% by combined treatment. However, in the exclusive intermediate-chlorination treatment, removal efficiency of geosmin was increased to 95%. Then, the exclusive intermediate-chlorination has an important effect on removal of geosmin. After correlation of geosmin concentration and dosage of PAC was analyzed, the coefficient of determination was estimated at 0.96. And, the proper PAC dosage chart was proposed. Also, at a initial occurrence of geosmin, when the combined treatment by intermediate-chlorination and PAC was applied, particle-bound geosmin should be removed continuously. Finally, it is proved that the combined treatment was effective to remove the geosmin by threshold levels as well as to reduce the dosage of PAC.

The Film Property and Deposition Process of TSV Inside for 3D Interconnection (3D Interconnection을 위한 실리콘 관통 전극 내부의 절연막 증착 공정과 그 막의 특성에 관한 연구)

  • Seo, Sang-Woon;Kim, Gu-Sung
    • Journal of the Microelectronics and Packaging Society
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    • v.15 no.3
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    • pp.47-52
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    • 2008
  • This investigation was performed in order to study the properties of deposition and layers by Silicon Dioxide, SiO2, as dielectric onto Via and Trench which have high Aspect Ratio (AR). Thus, in order to confirm these properties, three types of CVD, which were PECVD, PETEOS, and ALD, were selected. On the experiment each of the property sections was estimated that step overage of PECVD: <30%, PETEOS: 45%, ALD: 75% and the RSM of PECVD: 27.8 nm, PETEOS: 2.1 nm, ALD: <2.0 nm. As a result of this experiment for the property of electric film, ALD was valuated to be the most favorable outcome. However, ALD was valuated to have the least quality for the deposition rate. ALD deposition rate, $10\;\AA/min$ by $1\;\AA$/1cycle, was prominently lower than PETEOS, which had the deposition rate of $5000\;\AA$/min. Since electric film requires at least $1000\;\AA$ thicknesses, ALD was not suitable for the deposition rate. which is the most important component in a practical use. Therefore, in this particular study, PETEOS was evaluated to be the most suitable recipe.

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