• Title/Summary/Keyword: ${Ta_2}{O_5}/{Al_2}{O_3}$

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A promising new piezoelectric material -Langasite and its related compounds-

  • Kawanaka, Hiroyuki;Takeda, Hiroaki;Shimamura, Kiyoshi;Onozato, Norio;Fukuda, Tsuguo
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1997.06a
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    • pp.145-145
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    • 1997
  • Recent progress of electric technology requires new piezoelectric crystals having superior properties such as zero temperature coefficients and large electromechanical coupling factors. We have developed a series of new leading chandidates, La$_3$Ga5SiO14(langasite, LGS), La3Nb0.5Ga5.5O14(LNG), La3Ta0.5O14(LTG), to satisfy those requirements. High quality LGS, LNG and LTG single crystals, with dimensions of 2 inches in diameter, were successfully grown by the Czochralski method at a pulling rate of 1mm/h. Since no variation of chemical composition was observed when whole melt in a crucible was crystallized, congruency of these compositions was confirmed. Physical constants such as elastic constants, dielectric constants and piezoelectric constants were measured. Filters and oscillators made of grown LGS, LNG and LTG single crystals showed superior properties such as three times wider passband than that of quartz, low insertion loss and easy processing, Langasite family crystals were shown to be superior materials to other known materials such as quartz, LiTaO$_3$, $\alpha$-AlPO$_4$ and Li$_2$B$_4$O7.

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High-k 적층 감지막(OA, OH, OHA)을 이용한 SOI 기판에서의 고성능 Ion-sensitive Field Effect Transistor의 구현

  • Jang, Hyeon-Jun;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.152-153
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    • 2012
  • Ion sensitive field effect transistor (ISFET)는 전해질 속 각종 이온농도를 측정하는 반도체 이온 센서이다. 이 소자의 기본 구조는 metal oxide semiconductor field effect transistor (MOSFET)에서 고안되었으며 게이트 컨택 부분이 기준전극과 전해질로 대체되어진 구조를 가지고 있다 [1]. ISFET는 기존의 반도체 CMOS 공정과 호환이 가능하고 제작이 용이할 뿐만 아니라, pH용액에 대한 빠른 반응 속도, 비표지 방식의 생체물질 감지능력, 낮은 단가 및 소자의 집적이 용이하다는 장점을 가지고 있다. ISFET pH센서의 감지특성에 결정하는 요소 중 가장 중요한 것은 소자의 감지막이라고 할 수 있다. 감지막은 감지 대상 물질과 물리적으로 직접 접촉되는 부분으로서 일반적으로 기계적/화학적 강도가 우수한 실리콘 산화막(SiO2)이 많이 사용되어져 왔다. 최근에는 기존의 SiO2 보다 성능이 향상된 감지막을 개발하기 위하여 Al2O3, HfO2, ZrO2, 그리고 Ta2O5와 같은 고유전 상수(high-k)를 가지는 물질들을 EIS 센서의 감지막으로 이용하는 연구가 활발하게 진행되고 있다. 하지만 지속적인 high-k 물질들에 대한 연구에도 불구하고 각각의 물질이 갖는 한계점이 드러났다. 본 연구에서는 SOI기판에서 SiO2 /HfO2 (OH), SiO2/Al2O3 (OA) 이단 적층 그리고 SiO2/HfO2/Al2O3 (OHA) 삼단적층 감지막을 갖는 ISFET을 제작하고 각 감지막의 특성을 평가하였다. 평가된 특성의 결과가 아래의 표1에 요약되었다. 그 결과, 각 high-k 물질이 갖는 한계점을 극복하기 위하여 제안된 OHA감지막은 기존에 OH, OA가 갖는 장점을 취하면서 단점을 최소화 시키는 최적화된 감지막의 감지특성을 보였다.

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Mineralogy and Mineral-chemistry of REE Minerals Occurring at Mountain Eorae, Chungju (충주 어래산 일대에서 산출하는 희토류 광물의 광물학적 및 광물화학적 특성)

  • You, Byoung-Woon;Lee, Gill Jae;Koh, Sang Mo
    • Economic and Environmental Geology
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    • v.45 no.6
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    • pp.643-659
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    • 2012
  • The Chungju Fe-REE deposit is located in the Kyemyeongsan Formation of the Ogcheon Group. The Kyemyeongsan Formation includes meta-volcanic rocks and pegmatite hosted REE deposit which show different kind of REE-containing minerals. The meta-volcanic rocks hosted REE deposits' main REE minerals are allanite, zircon, apatite, and sphene, whereas the pegmatite hosted REE deposits is mainly composed of fergusonite, and karnasurtite, zircon, thorite. The meta-volcanic rock hosted major REE mineral is allanite as the form of aggregation and contains 23.89-29.19 wt% TREO (Total Rare Earth Oxide), 4.71-9.92 wt% $La_2O_3$, 11.30-14.33 wt% $Ce_2O_3$, 0.11-0.29 wt% $Y_2O_3$, 0.15-0.94 wt% $ThO_2$, as a formula of (Ca, Y, REE, Th)$_{2.095}$(Mg, Al, Ti, Mn, $Fe^{3+})_{2.770}(SiO_4)_{2.975}(OH)$. Accompanying REE in a coupled substitution for $Ca^{2+}$ (M1 site) and $Al^{3+}-Fe^{2+}$ (M2 site) leads to a large chemical variety. Due to the allanite's high contents of Fe, it belongs to Ferrialanite. The pegmatite hosted deposit's domi-nant REE mineral is fergusonite as prismatic or subhedral grains associated with zircon, fluorite and karnasurtite. Geochemical composition of the fergusonite($YNbO_4$) suggests substitution of Y-REE and Y-Th in A-site, and Nb-Ta-Ti in B-site, furthermore the proportion of $Y_2O_3$ and $Nb_2O_5$ is oddly 1:1.5 comparing to the ideal ratio 1:1 and Nb is higher than Y, also A-site Y actively substitutes with REE. Karnasurtite in pegmatite variously ranges 9.16-22.88 wt% $Ce_2O_3$, 2.15-9.16 wt% and $La_2O_3$, 0.44-10.8 wt% $ThO_2$, as a calculated formula (Y, REE, Th, K, Na, Ca)$_{1.478}(Ti, Nb)_{1.304}$(Mg, Al, Mn, $Fe^{3+})_{0.988}$(Si, P)$_{1.431}O_7(OH)_4{\cdot}3H_2O$. Firstly the 870-860 Ma is the initial age of the supercontinent Rhodinia dispersal and subsequent A-1 type volcanism, which contains Fe, REE, and HFS(High Field Strength elements; Nb, Zr, Y etc.) elements in Fe-rich meta-volcanic rocks dominant Kyemyeongsan Formation, might mineralized allanite. Another synthesis is that regional metamorphism at late Paleozoic 300-280 Ma(Cho et al., 2002) might cause allanite mineralization. Also pegmatite REE mineralization highly related to the granite intrusion over the Chungju area in Jurassic(190 Ma; Koh et al., 2012). Otherwise above all, A-1 type volcanism at the same time of the Kyemyeongsan Formation development, regional metamorphism and pegmatite, might have caused REE mineralization. Although REE ore bodies display a close spatial association, each ore bodies display temporal distinction, different mineral assemblage and environment of ore formation.

Junction Area Dependence of Tunneling Magnetoresistance in Spin-dependent Tunneling Junction with Natural $Al_2O_3$Barrier (자연산화 $Al_2O_3$장벽층을 갖는 스핀의존 터널링 접합에서 자기저항특성의 접합면적 의존성)

  • 이긍원;이상석
    • Journal of the Korean Magnetics Society
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    • v.11 no.5
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    • pp.202-210
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    • 2001
  • Spin dependent tunneling (SDT) junction devices of Ta/NiFe/Ta/NiFe/FeMn/NiFe/AlOx/CoFe/NiFe/Al with in-situ naturally oxidized Al barrier were fabricated using ion beam deposition and dc sputtering in UHV chamber of 10$^{-9}$ Torr. The maximum tunneling magnetoresistance (TMR) and the product resistance by junction (R$_{j}$ A) are 16-17% and 50-60 $\Omega$${\mu}{\textrm}{m}$$^2$, respectively. The values of TMR and (R$_{j}$ A) with field annealing were slightly increased. The TMR and (R$_{j}$ A) dependence versus the junction area size was observed. These results were explained by using sheet resistance effect of bottom electrode and spin channel effects.

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Mechanical Aalloying Behavior of $Al_3$Hf 및 $Al_3$Ta Intermetallic Compounds by SPEX Mill and the Effect of Ternary Additions on the Formation of $Ll_2$ Phase (SPEX mill을 이용한 $Al_3$Hf 및 $Al_3$Ta 금속간화합물의 기계적합금화 거동과 $Ll_2$상형성에 미치는 제 3 원소 첨가의 영향)

  • Lee, Seong-Hun;Choe, Jong-Hyeon;Kim, Jun-Gi;Kim, Seon-Jin
    • Korean Journal of Materials Research
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    • v.10 no.8
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    • pp.569-574
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    • 2000
  • To improve the ductility of $Al_3Hf$ and $Al_3Ta$ intermetallic compounds, which are the potential temperature structural materials, the mechanical alloying behaviour and the effect of ternary additions on the $Ll_2$ phase formation were investigated. During the mechanical alloying by the SPEX mill, the $Ll_2$ $Al_3Hf$ intermetallic compound was formed after 6 hours of milling in AL-25%Hf system. In AL-25%Ta system, however, only the $D0_{22}$ $Al_3Ta$ intermetallic compound was formed until 30 hours of milling and the $Ll_2$ phase was not observed. In AL-12.5%M-25%Ta(M=Cu, Zn, Mn, Fe, Ni) systems, the additions of Cu and Zn had no effect on the $D0_{22}$ structure of the binary $Al_3Hf$ and the additions of Mn, Fe and Ni produced the amorphous phase. Therefore it was considered that these ternary additions could not overcome the energy difference between $Ll_2$ and $D0_{22}$ structures in the $Al_3Hf$ intermetallic compound. In AL-12.5%M-25%Hf(M=Cu, Zn, Mn, Fe, Ni)systems, the additions of Cu and Zn did not affect the $Ll_2$ structure of the binary $Al_3Hf$ but the additions of oMn, Fe and Ni produced the amorphous phase as they did in AL-12.5%M-25%Ta systems. Therefore, it was considered that the Ni, Mn and Fe additions promote the formation of amorphous phase in $Al_3X$ intermetallic compounds.

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Petrology of the Taeheung-ri Lava in Southeastern Jeju Island (제주도 남동부 태흥리 용암에 대한 암석학적 연구)

  • 윤성효;고정선;박정미
    • The Journal of the Petrological Society of Korea
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    • v.11 no.1
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    • pp.17-28
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    • 2002
  • This study has been designed to elucidate the petrography and geochemical characteristics of the Taeheung-ri lava in southeastern Jeju Island. The lava is divided into the alkaline basalt and tholeiitic basalt. More than 4 layers of tholeiitic basalt are overlain by layers of alkaline basalt. Compared with alkaline basalt, tholeiitic basalt has lower contents of $K_2O$, $P_2O_5$, Ba and Ta, but slight higher contents of $SiO_2$ and CaO. The contents of Ba and Rb of all basalts are enriched, but those of Ni and Cr are depleted compared with primitive mantle compositions. All basalts show inclined chondrite-normalized REE patterns with LREE enriched more than HREE and alkaline basalt has relatively higher. The basalts of this study area are plotted in the field of within plate basalt on the tectonomagmatic discrimination diagram. Tholeiitic basalt has higher ratios of Zr/Nb, Y/Nb, and $Al_2O_3/P_2O_5$ than alkaline basalt. Both tholeiitic and alkaline basalt are similar in their K/Ba ratios. The geochemical data suggest that the parental magma of both basalts might be produced by different degrees of partial melting of similar source mantle. The tholeiitic basalt formed by higher degree of partial melting than the alkaline basalt.

Electric Characteristics of Tantalum Pentoxide Thin Film Formed by Thermal Oxidation (열산화법으로 형성한 탄탈륨 산화막의 전기적 특성)

  • 홍영호;박효덕;전춘배;이덕동;김봉렬
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.29A no.3
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    • pp.87-95
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    • 1992
  • The electrical characteristics of Al/TaS12TOS15T/SiOS12T/Si metal insulator-semiconductor (MIS) capacitors were studied. Tantalum pentoxide thin films on SiOS12T/p-Si substrate have been prepared by thermal oxidation at 450-$600^{\circ}C$ of sputter deposited tantalum films. Composition and structures of the tantalum oxide films were examined by AES and XRD. From the C-V analysis, dielectric constant of TaS12TOS15T which were oxidized at 55$0^{\circ}C$ for 1h in OS12T were 18-23, the value depending on the oxidation and annealing temperature. The leakage current density was found to be about 10S0-10T-10S0-9T A/cmS02T at an applied electric field of 1 MV/cm. The dielectric breakdown strength of the tantalum oxide films annealed at 100$0^{\circ}C$ were in the range from 2.5MV/cm to 2.8 MV/cm.

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Implementation of Ladder Type SAW Filters for Mobile Communication (이동통신 시스템을 위한 사다리형 표면탄성파 필터의 구현)

  • 이택주;정덕진
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.40 no.3
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    • pp.1-9
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    • 2003
  • In this paper, we designed a highly suppressed sidelobe ladder type RF SAW bandpass filter based on 1-port resonator, for 800 MHz mobile communication system. In order to get the highest device characteristics, we optimized some important parameters such as the electrode thickness, electrode lambda weghting of the reflectors, and static capacitance ratio. Furthermore, we fabricated the Tx and Rx. filter using optimized parameters. Implemented filters can be used in 800 MHz mobile communication system and external impedance matching circuits are not needed. RF filter was fabricated on 36$^{\circ}$LiTaO$_3$ substrates with Al-Cu (W 3 %)and mounted 3.8mm$\times$3.8mm$\times$1.5mm SMD package. Developed filters has 2.3 dB insertion loss in the 25 MHz pass-band, 33MHz with 3-dB insertion loss, stop-band rejection of 30 dB, passband ripple is less than 0.5 The power durability of the filters measured about 3.5W and the maximum temperature variation within -2$0^{\circ}C$~8$0^{\circ}C$ was 0.09 dB/$^{\circ}C$ of 3-dB insertion loss.

Diamond Film Deposition on Ceramic Substrates by Hot-Filament CVD and Evaluation of the Adhesion (HF-CVD법에 의한 세라믹스 기판에의 다이아몬드박막 합성과 그 밀착성 평가)

  • Sin, Sun-Gi;Matsubara, Hideaki
    • Korean Journal of Materials Research
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    • v.10 no.8
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    • pp.575-580
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    • 2000
  • Diamond thin films were deposited on $Si_3N_4$, SiC, TiC and $Al_2O_3$, substrates by the CVD method using Ta(TaC)Filament, and the appearance of the diamond films and their adhesion properties were examined by SEM, optical microscopy, indentation test and compression topple test. Diamond films were deposited at lower $CH_4$ concentration than 5%$CH_4$ for all kinds of the substrate material, but graphitic(amorphous)carbon was observed at 10%$CH_4$. The diamond film of about $12\mu\textrm{m}$ thickness on WC substrate partly peeled off, but the film on $Si_3N_4$ substrate held good adhesion. The indentation test showed that roughly ground surface was very effective for adhesion of diamond films to substrate. The topple test revealed that film thickness was an important factor governing the adhesion of the diamond film.

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Geochemical and Nd-Sr Isotope Studies for Foliated Granitoids and Mylonitized Gneisses from the Myeongho Area in Northeast Yecheon Shear Zone (예천전단대 북동부 명호지역 엽리상 화강암류와 압쇄 편마암류에 대한 지구화학 및 Nd-Sr 동위원소 연구)

  • Kim, Sung-Won;Lee, Chang-Yun;Ryu, In-Chang
    • Economic and Environmental Geology
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    • v.41 no.3
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    • pp.299-314
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    • 2008
  • The NE-trending Honam shear zone is a broad, dextral strike-slip fault zone between the southern margin of the Okcheon Belt and the Precambrian Yeongnam Massif in South Korea and is parallel to the trend of Sinian deformation that is conspicuous in Far East Asia. In this paper, we report geochemical and isotopic(Sr and Nd) data of mylonitic quartz-muscovite Precambrian gneisses and surrounding foliated hornblende-biotite granitoids near the Myeongho area in the Yecheon Shear Zone, a representative segment of the Honam Shear Zone. Foliated hornblende-biotite granitoids commonly plot in the granodiorite field($SiO_2=61.9-67.1\;wt%$ and $Na_2O+K_2O=5.21-6.99\;wt%$) on $SiO_2$ vs. $Na_2O+K_2O$ discrimination diagram, whereas quartz-muscovite Precambrian orthogneisses plot in the granite field. The foliated hornblende-biotite granitoids are mostly calcic and calc-alkalic and are dominantly magnesian in a modified alkali-lime index(MALI) and Fe# [$=FeO_{total}(FeO_{total}+MgO)$] versus $SiO_2$ diagrams, which correspond with geochemical characteristics of Cordilleran Mesozoic batholiths. The foliated hornblende-biotite granitoids have molar ratios of $Al_2O_3/(CaO+Na_2O+K_2O)$ ranging from 0.89 to 1.10 and are metaluminous to weakly peraluminous, indicating I type. In contrast, Paleoproterozoic orthogneisses have peraluminous compositions, with molar ratios of $Al_2O_3/(CaO+Na_2O+K_2O)$ ranging from 1.11 to 1.22. On trace element spider diagrams normalized to the primitive mantle, the large ion lithophile element(LILE) enrichments(Rb, Ba, Th and U) and negative Ta-Nb-P-Ti anomalies of foliated hornblende-biotite granitoids and mylonitized quartz-muscovite gneisses in the Yecheon Shear Zone are features common to subduction-related granitoids and are also found in granitoids from a crustal source derived from the arc crust of active continental margin. ${\varepsilon}_{Nd}(T)$ and initial Sr-ratio ratios of foliated hornblende-biotite granitoids with suggest the involvement of upper crust-derived melts in granitoid petrogenesis. Foliated hornblende-biotite granitoids in the study area, together with the Yeongju Batholith, show not changing contents of specific elements(Ti, P, Zr, V and Y) from shear zone to the area near the shear zone. These results suggest that no volume changes and geochemical alterations in fluid-rich foliated hornblende-biotite granitoids may occur during deformation, which mass transfer by fluid flow into the shear zone is equal to the mass transfer out of the shear zone.