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The characteristics of bismuth magnesium niobate multi layers deposited by sputtering at room temperature for appling to embedded capacitor (임베디드 커패시터로의 응용을 위해 상온에서 RF 스퍼터링법에 의한 증착된 bismuth magnesium niobate 다층 박막의 특성평가)

  • Ahn, Jun-Ku;Cho, Hyun-Jin;Ryu, Taek-Hee;Park, Kyung-Woo;Cuong, Nguyen Duy;Hur, Sung-Gi;Seong, Nak-Jin;Yoon, Soon-Gil
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.62-62
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    • 2008
  • As micro-system move toward higher speed and miniaturization, requirements for embedding the passive components into printed circuit boards (PCBs) grow consistently. They should be fabricated in smaller size with maintaining and even improving the overall performance. Miniaturization potential steps from the replacement of surface-mount components and the subsequent reduction of the required wiring-board real estate. Among the embedded passive components, capacitors are most widely studied because they are the major components in terms of size and number. Embedding of passive components such as capacitors into polymer-based PCB is becoming an important strategy for electronics miniaturization, device reliability, and manufacturing cost reduction Now days, the dielectric films deposited directly on the polymer substrate are also studied widely. The processing temperature below $200^{\circ}C$ is required for polymer substrates. For a low temperature deposition, bismuth-based pyrochlore materials are known as promising candidate for capacitor $B_2Mg_{2/3}Nb_{4/3}O_7$ ($B_2MN$) multi layers were deposited on Pt/$TiO_2/SiO_2$/Si substrates by radio frequency magnetron sputtering system at room temperature. The physical and structural properties of them are investigated by SEM, AFM, TEM, XPS. The dielectric properties of MIM structured capacitors were evaluated by impedance analyzer (Agilent HP4194A). The leakage current characteristics of MIM structured capacitor were measured by semiconductor parameter analysis (Agilent HP4145B). 200 nm-thick $B_2MN$ muti layer were deposited at room temperature had capacitance density about $1{\mu}F/cm^2$ at 100kHz, dissipation factor of < 1% and dielectric constant of > 100 at 100kHz.

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Performance Prediction of a Laser-guide Star Adaptive Optics System for a 1.6 m Telescope

  • Lee, Jun Ho;Lee, Sang Eun;Kong, Young Jun
    • Current Optics and Photonics
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    • v.2 no.3
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    • pp.269-279
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    • 2018
  • We are currently investigating the feasibility of a 1.6 m telescope with a laser-guide star adaptive optics (AO) system. The telescope, if successfully commissioned, would be the first dedicated adaptive optics observatory in South Korea. The 1.6 m telescope is an f/13.6 Cassegrain telescope with a focal length of 21.7 m. This paper first reviews atmospheric seeing conditions measured over a year in 2014~2015 at the Bohyun Observatory, South Korea, which corresponds to an area from 11.6 to 21.6 cm within 95% probability with regard to the Fried parameter of 880 nm at a telescope pupil plane. We then derive principal seeing conditions such as the Fried parameter and Greenwood frequency for eight astronomical spectral bands (V/R/I/J/H/K/L/M centered at 0.55, 0.64, 0.79, 1.22, 1.65, 2.20, 3.55, and $4.77{\mu}m$). Then we propose an AO system with a laser guide star for the 1.6 m telescope based on the seeing conditions. The proposed AO system consists of a fast tip/tilt secondary mirror, a $17{\times}17$ deformable mirror, a $16{\times}16$ Shack-Hartmann sensor, and a sodium laser guide star (589.2 nm). The high order AO system is close-looped with 2 KHz sampling frequency while the tip/tilt mirror is independently close-looped with 63 Hz sampling frequency. The AO system has three operational concepts: 1) bright target observation with its own wavefront sensing, 2) less bright star observation with wavefront sensing from another bright natural guide star (NGS), and 3) faint target observation with tip/tilt sensing from a bright natural guide star and wavefront sensing from a laser guide star. We name these three concepts 'None', 'NGS only', and 'LGS + NGS', respectively. Following a thorough investigation into the error sources of the AO system, we predict the root mean square (RMS) wavefront error of the system and its corresponding Strehl ratio over nine analysis cases over the worst ($2{\sigma}$) seeing conditions. From the analysis, we expect Strehl ratio >0.3 in most seeing conditions with guide stars.

RESPONSE OF OSTEOBLASI-LIKE CELLS ON TITANIUM SURFACE TREATMENT

  • Roh Hyun-Ki;Heo Seong-Joo;Chang Ik-Tae;Koak Jai-Young;Han Jong-Hyun;Kim Yong-Sik;Yim Soon-Ho
    • The Journal of Korean Academy of Prosthodontics
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    • v.41 no.6
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    • pp.699-713
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    • 2003
  • Statement of problem. Titanium is the most important material for biomedical and dental implants because of their high corrosion resistance and good biocompatibility. These beneficial properties are due to a protective passive oxide film that spontaneously forms on the surface. Purpose. The purpose of this study was to evaluate the responses of osteoblast-like cells on different surface treatments on Ti discs. Material and Methods. Group 1 represented the machined surface with no treatment. Group 2 surfaces were sandblasted with $50{\mu}m\;Al_2O_3$ under $5kgf/cm^2$ of pressure. Groups 3 and 4 were sandblasted under the same conditions. The samples were treated on a titanium oxide surface with reactive sputter depositioning and thermal oxidation at $600^{\circ}C$ (Group 3) and $800^{\circ}C$ (Group 4) for one hour in an oxygen environment. The chemical composition and microtopography were analyzed by XRD, XPS, SEM and optical interferometer. The stability of $TiO_2$ layer was studied by petentiodynamic curve. To evaluate cell response, osteoblast extracted from femoral bone marrow of young adult rat were cultured for cell attachment, proliferation and morphology on each titanium discs. Results and Conclusion. The results were as follows : 1. Surface roughness values were, from the lowest to the highest, machined group, $800^{\circ}C$ thermal oxidation group, $600^{\circ}C$ thermal oxidation group and blasted group. The Ra value of blasted group was significantly higher than that of $800^{\circ}C$ thermal oxidation group (P=0.003), which was not different from that of $600^{\circ}C$ thermal oxidation group (P<0.05). 2. The degree of cell attachment was highest in the $600^{\circ}C$ thermal oxidation group after four and eight hours (P<0.05), but after 24 hours, there was no difference among the groups (P>0.05). 3. The level of cell proliferation showed no difference among the groups after one day, three days, and seven days (P>0.05). 4. The morphology and arrangement of the cells varied with surface roughness of the discs.

Structural and Electrical Properties of Amorphous 2Ti4O12 Thin Films Grown on TiN Substrate (TiN 기판 위에 성장시킨 비정질 BaSm2Ti4O12 박막의 구조 및 전기적 특성 연구)

  • Park, Yong-Jun;Paik, Jong-Hoo;Lee, Young-Jin;Jeong, Young-Hun;Nahm, Sahn
    • Korean Journal of Materials Research
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    • v.18 no.4
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    • pp.169-174
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    • 2008
  • The structural and electrical properties of amorphous $BaSm_2Ti_4O_{12}$ (BSmT) films on a $TiN/SiO_2/Si$ substrate deposited using a RF magnetron sputtering method were investigated. The deposition of BSmT films was carried out at $300^{\circ}C$ in a mixed oxygen and argon ($O_2$ : Ar = 1 : 4) atmosphere with a total pressure of 8.0 mTorr. In particular, a 45 nm-thick amorphous BSmT film exhibited a high capacitance density and low dissipation factor of $7.60\;fF/{\mu}m2$ and 1.3%, respectively, with a dielectric constant of 38 at 100 kHz. Its capacitance showed very little change, even in GHz ranges from 1.0 GHz to 6.0 GHz. The quality factor of the BSmT film was as high as 67 at 6 GHz. The leakage current density of the BSmT film was also very low, at approximately $5.11\;nA/cm^2$ at 2 V; its conduction mechanism was explained by the the Poole-Frenkel emission. The quadratic voltage coefficient of capacitance of the BSmT film was approximately $698\;ppm/V^2$, which is higher than the required value (<$100\;ppm/V^2$) for RF application. This could be reduced by improving the process condition. The temperature coefficient of capacitance of the film was low at nearly $296\;ppm/^{\circ}C$ at 100 kHz. Therefore, amorphous BSmT grown on a TiN substrate is a viable candidate material for a metal-insulator-metal capacitor.

Platinum 유기착화합물을 이용한 금속박막의 증착에 관한 연구

  • Yoo, Dae-Hwan;Choi, Sung-Chang;Ko, Seok-Geun;Choi, Ji-Yoon;Shin, Gu
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.153-153
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    • 1999
  • platinum 유기착화합물을 사용하여 유리 기판 위에 Pt를 증착시켰다. Pt를 증착하기 위하여 Pt 착화합물을 용해 시킨 후, 유리 기판을 용액속에 담근 후 가열하여 Pt막을 증착하였다. 증착 후 Pt의 면저항은 200~75$\Omega$의 값을 나타내어 비교적 높은 저항값을 나타내었다. 높은 저항값을 낮추기 위해 진공 10-5Torr에서 50, 100, 150, 25$0^{\circ}C$로 열처리를 하였다. 이러한 저항값을 변화의 원인을 살펴보기 위하여 X-선 회절법을 이용하여 결정성의 변화를 살펴보았고, 화학적 조성의 변화는 X-ray 광전자 분광법을 이용하여 조사하였다. 열처리 전 Pt막은 비정질 상태를 나타내었으나, 6$0^{\circ}C$에서 30분간 열처리한 후에는 결정성이 증가하는 것으로 관찰되었다. 열처리 후 결정방향은 {111] 방향이 주 방향이였으며 [002] 방향의 피크도 관찰되었다. 따라서 성장된 막은 다결정 막임을 알 수 있었다. XPS를 이용하여 조성을 조사하여 본 결과 열처리하지 않은 시료의 경우 유기물과 반응하여 Pt의 피크가 넓게 나타나나 열처리 후에는 유기물이 분해되어 Pt의 고유한 피크를 관찰할 수 있었다. 따라서 전기전도도의 변화는 유기물의 분해를 통하여 순수한 Pt로 변해가면서 감소하는 것으로 생각되어 지며 결정성 또한 전기전도도 변화에 중요한 역할을 함을 알 수 있었다. 기존의 방법을 이용하여 Pt를 증착할 경우 기판과 쉽게 박리 되는 현상이 관찰되었으나 본 방법을 이용하여 증착된 Pt 박막의 경우 열처리 후에는 기판과의 접착력이 기존의 방법보다 뛰어나 박리되는 현상이 관찰되지 않았다.$ 이상에서 안정한 것을 볼 수 있었다. 텅스텐 박막은 $\alpha$$\beta$-W 구조를 가질 수 있으나 본 연구에서 성장된 텅스텐은 $\alpha$-W 구조를 가지는 것을 XRD 측정으로 확인하였다. 성장된 텅스텐 박막의 저항은 구조에 따라서 변화되는 것으로 알려져 있다. 증착조건에 따른 저항의 변화는 SiH4 대 WF6의 가스비, 증착온도에 따라서 변화하였다. 특히 온도가 40$0^{\circ}C$ 이상, SiH4/WF6의 비가 0.2일 경우 텅스텐을 증착시킨 후에 열처리를 거치지 않은 경우에도 기존에 발표된 저항률인 10$\mu$$\Omega$.cm 대의 값을 얻을 수 있었다. 본 연구를 통하여 산화막과의 접착성 문제를 해결하고 낮은 저항을 얻을 수 있었으나, 텅스텐 박막의 성장과정에 의한 게이트 산화막의 열화는 심각학 문제를 야기하였다. 즉, LPCVD 과정에서 발생한 불소 또는 불소 화합물이 게이트의 산화막에 결함을 발생시킴을 확인하였다. 향후, 불소에 의한 게이트 산화막의 열화를 최소화시킬 수 있는 공정 조건의 최저고하 또는 대체게이트 산화막이 적용될 경우, 개발된 연구 결과를 산업체로 이전할 수 있는 가능성이 높을 것을 기대된다.박막 형성 메카니즘에 큰 영향을 미침을 알 수 있었다. 또한 은의 전기화학적 다층박막 성장은 MSM (monolayer-simultaneous-multilayer) 메카니즘을 따름을 확인하였다. 마지막으로 구조 및 양이 규칙적으로 조절되는 전극의 응용가능성이 간단히 논의될 것이다.l 성장을 하였다는 것을 알 수 있었다. 결정성

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Studies on the Morphology and the Mycelial Cultivation of Poria cocos (Fr.) Wolf. (복령(茯笭)의 형태(形態) 및 균사배양(菌絲培養)에 관한 연구(硏究))

  • Hong, In-Pyo;Lee, Min-Woong;Kim, Kwang-Po;Lee, Sang-Sun
    • The Korean Journal of Mycology
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    • v.19 no.1
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    • pp.54-60
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    • 1991
  • In the traditional medicine, the basidiocarps of Poria cocos (Fr.) Wolf naturally collec­ted have been widely used as a traditional remedy for dropsy, diarrhea, gonorrhea and nervous disease more than 3500 years ago. It was recently found to be composed of the particular compounds having antitumor effects. Therefore, its demand has been gradually increased, whereas it is still dependent upon the natural harvest. The artificial cultivation of P. cocos was carried out to observe the morphological characteristics and to investigate the cultural characteristics of P. cocos isolates collected. The morphological characteristics of its basidiocarps was observed. The physiological aspects of its isolates were also investigated.

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Absorption of Copper(Cu) by Vegetation on Reservoir Sediment Exposed after Drawdown (저수위시 노출된 저수지 저니 상의 식생과 구리(Cu)의 흡수)

  • 이충우;차영일
    • Journal of Environmental Science International
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    • v.2 no.2
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    • pp.123-133
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    • 1993
  • Shingal reservoir is a relatively small (211ha) and shallow impoundment, and approximately 25 ha of its sediment is exposed after spring drawdown. At least 14 vascular p13n1 species germinate on the exposed sediment, but Persimria vulgaris Webb et Moq. quickly dominates the vegetation. In order to estimate the role of the vegetation in the dynamics of heavy metal pollutants in the reservoir, Cu concentration of water, fallout particles, exposed sediment, and tissues of p. vulgaris, Ivas analyzed. Cu content in reservoir water decreased from $13.10mg/m^2$ on May 15 (before dralvdown) to $3.08mg/m^2$ in June 1 (after drawdown), mainly due to the loiwering of water level. Average atmospheric deposition of Cu by fallout particles was $10.84 {\mu}g/m^2/day$. Cu content in the surface 15cm of exposed sediment decreased from $5.094g1m^2$ right after drawdown, to $0.530g/m^2$ in 41 days, which is a 89.6% decrease. Therefore up to 99.7% of Cu in the reservoir appears to exist in the sediment. only 0.3% in water If the rate of atmospheric Input by fallout particles is assumed to have been the same since 1958, when the reservoir was completed, cumulative input of Cu during the 38 years would have been $150.35mg/m^2$, which is only 3.0% of Cu content in sediment right after drawdown. Therefore, most of Cu in the Shingal reservoir must have been transported by the Shingal-chun flowing into the reservoir, Standing crop of vegetation on the exposed sediment 41 days after drawdown was $730.67g/m^2$, of which 630.91g/m2 was p. vulgaris alone, and Cu content in P vulgaris at this time was $6.612mg/m^2$. This was only 0.13% of Cu in the exposed sediment, but was 50.5% of Cu in water before drawdown, or 167% of the average annual input of Cu by atmospheric deposition. If other plants were assumed to absorb Cu to the same concentration as p. vulgaris, total amount of Cu absorbed in 41 days by vegetation on the exposed sediment is estimated to be 1913.3 g, which is a considerable contribution to the purification of the reservoir water.

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Physical and Chemical Properties of Waste Concrete Powders Originated from the Recycling Process of Waste Concrete (폐콘크리트의 재활용 공정에서 발생되는 폐콘크리트 미립분의 물리.화학적 특성)

  • Kim, Jin Man;Kang, Cheol;Kim, Ha Suk
    • Journal of the Korean Recycled Construction Resources Institute
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    • v.4 no.2
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    • pp.82-89
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    • 2009
  • According to the great city development and the rapid growth of redevelopment project, waste concrete emission has been increased. Waste concrete powder is one of the by-product originated from the recycling of the waste concrete. The more making high quality recycled aggregate to use aggregate for concrete, the more waste concrete powder is producted relatively. Therefore, to realize the total recycling of waste concrete, development of recycling technology for waste concrete powder need very much. This technical note present the discharged process and the various properties of waste concrete powder. As the results, on the average, the maximum particle-size of waste concrete powder is less than $600{\mu}m$, and oven-dry density is less than $2.5g/cm^3$. And waste concrete powder contains more than 50% of $SiO_2$, 30% of CaO and 10% of $Al_2O_3$. Thus qualities of waste concrete powder is lower than those of high quality raw material for concrete. However, if it is processed by grading to the purpose, it will be used as resource of raw materials for construction field.

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Absorption of Copper(Cu) by Vegetation on Reservoir Sediment Exposed after Drawdown (저수위시 노출된 저수지 저니 상의 식생과 구리(Cu)의 흡수)

  • Lee, Chung-U;Cha, Yeong-Il
    • Journal of Environmental Science International
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    • v.2 no.2
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    • pp.29-29
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    • 1993
  • Shingal reservoir is a relatively small (211ha) and shallow impoundment, and approximately 25 ha of its sediment is exposed after spring drawdown. At least 14 vascular p13n1 species germinate on the exposed sediment, but Persimria vulgaris Webb et Moq. quickly dominates the vegetation. In order to estimate the role of the vegetation in the dynamics of heavy metal pollutants in the reservoir, Cu concentration of water, fallout particles, exposed sediment, and tissues of p. vulgaris, Ivas analyzed. Cu content in reservoir water decreased from $13.10mg/m^2$ on May 15 (before dralvdown) to $3.08mg/m^2$ in June 1 (after drawdown), mainly due to the loiwering of water level. Average atmospheric deposition of Cu by fallout particles was $10.84 {\mu}g/m^2/day$. Cu content in the surface 15cm of exposed sediment decreased from $5.094g1m^2$ right after drawdown, to $0.530g/m^2$ in 41 days, which is a 89.6% decrease. Therefore up to 99.7% of Cu in the reservoir appears to exist in the sediment. only 0.3% in water If the rate of atmospheric Input by fallout particles is assumed to have been the same since 1958, when the reservoir was completed, cumulative input of Cu during the 38 years would have been $150.35mg/m^2$, which is only 3.0% of Cu content in sediment right after drawdown. Therefore, most of Cu in the Shingal reservoir must have been transported by the Shingal-chun flowing into the reservoir, Standing crop of vegetation on the exposed sediment 41 days after drawdown was $730.67g/m^2$, of which 630.91g/m2 was p. vulgaris alone, and Cu content in P vulgaris at this time was $6.612mg/m^2$. This was only 0.13% of Cu in the exposed sediment, but was 50.5% of Cu in water before drawdown, or 167% of the average annual input of Cu by atmospheric deposition. If other plants were assumed to absorb Cu to the same concentration as p. vulgaris, total amount of Cu absorbed in 41 days by vegetation on the exposed sediment is estimated to be 1913.3 g, which is a considerable contribution to the purification of the reservoir water.

Electrical Properties of BaTiO3-based 0603/0.1µF/0.3mm Ceramics Decoupling Capacitor for Embedding in the PCB of 10G RF Transceiver Module

  • Park, Hwa-sun;Na, Youngil;Choi, Ho Joon;Suh, Su-jeong;Baek, Dong-Hyun;Yoon, Jung-Rag
    • Journal of Electrical Engineering and Technology
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    • v.13 no.4
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    • pp.1638-1643
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    • 2018
  • Multi-layer ceramic capacitors as decoupling capacitor were fabricated by dielectric composition with a high dielectric constant. The fabricated decoupling capacitors were embedded in the PCB of the 10G RF transceiver module and evaluated for the characteristics of electrical noise by the level of AC input voltage. In order to further improve the electrical properties of the $BaTiO_3$ based composite, glass frit, MgO, $Y_2O_3$, $Mn_3O$, $V_2O_5$, $BaCO_3$, $SiO_2$, and $Al_2O_3$ were used as additives. The electrical properties of the composites were determined by various amounts of additives and optimum sintering temperature. As a result of the optimized composite, it was possible to obtain a density of $5.77g/cm^3$, a dielectric constant of 1994, and an insulation resistance of $2.91{\times}10^{12}{\Omega}$ at an additive content of 5wt% and a sintering temperature of $1250^{\circ}C$. After forming a $2.5{\mu}m$ green sheet using the doctor blade method, a total of 77 layers were laminated and sintered at $1180^{\circ}C$. A decoupling capacitor with a size of $0.6mm(W){\times}0.3mm(L){\times}0.3mm(T)$ (width, length and thickness, respectively) and a capacitance of 100 nF was embedded using a PCB process for the 10G RF Transceiver modules. In the range of AC input voltage 400mmV @ 500kHz to 2200mV @ 900kHz, the embedded 10G RF Transceiver modules evaluated that it has better electrical performance than the non-embedded modules.