• Journal of the Korean Vacuum Society
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• v.17 no.5
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• pp.448-454
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• 2008

The purpose of this paper is to discuss the fabrication of $\beta$-PVDF($\beta$-Polyvinylidene fluoride, ${\beta}-PVF_2$) organic thin films through the vapor deposition method and to investigate the piezoelectric properties of the organic thin films produced. Vapor deposition was performed under the following conditions : the temperature of evaporator, the applied electric field and the pressure of reaction chamber were $270^{\circ}C$, 142.4 kV/cm and $2.0{\times}10^{-5}Torr$, respectively. The results showed that the amount of $\beta$-form PVDF increased from 72 % to 95.5 % with an increase in the substrate temperature. In the case of a sensor response characteristic by varying the force moment from $1.372{\times}10^{-5}N{\cdot}m$ to $39.2{\times}10^{-5}N{\cdot}m$, the output voltage increased from 1.39V to 7.04V.

• Journal of the Korean Vacuum Society
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• v.18 no.3
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• pp.221-228
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• 2009

The purpose of this paper is to discuss the fabrication of $\beta$-PVDF($\beta$-Polyvinylidene fluoride, $\beta$-PVF2) organic thin films through the vapor deposition method and to investigate the ultrasonic response properties of the organic thin films produced. Vapor deposition was performed under the following conditions : the temperature of evaporator, the applied electric field and the pressure of reaction chamber were $270^{\circ}C$, 142.4 kV/cm and $2.0{\times}10^{-5}\;Torr$, respectively. The results showed that the degree of crystallinity increased from 47% to 67.8% with an increase in the substrate temperature. In the case of a sensor response characteristic by varying the distance from 1cm to 100cm, the output voltage decreased from 0.615V to 0.4V.