• 제목/요약/키워드: $({Al_2}{O_3}-SiC)$- SiC

검색결과 1,194건 처리시간 0.028초

Ba-페라이트/α-Al2O3/SiO2 자성박막에서 버퍼층의 역할 (Role of Buffer Layer in Ba-Ferrite/α-Al2O3/SiO2 Magnetic Thin Films)

  • 조태식
    • 한국자기학회지
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    • 제16권6호
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    • pp.283-286
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    • 2006
  • 고밀도 자기기록용 Ba-페라이트/$SiO_{2}$ 자성박막에서 계면확산 장벽으로써 ${\alpha}-Al_{2}O_{3}$ 버퍼층의 역할을 연구하였다. 열처리동안 $1900{\AA}$의 두께를 가진 비정질 Ba-페라이트/$SiO_{2}$ 박막에서 계면확산은 약 $700^{\circ}C$에서 일어나기 시작하였다. 열처리온도를 $800^{\circ}C$까지 증가시켰을 때, 계면확산은 자기특성을 저하시킬 정도로 급격히 진행되었다. 고온에서의 계면확산을 억제하기 위하여, $110{\AA}$ 두께의 ${\alpha}-Al_{2}O_{3}$ 버퍼층을 Ba-페라이트/$SiO_{2}$ 박막의 계면에 증착하여 사용하였다. Ba-페라이트/${\alpha}-Al_{2}O_{3}/SiO_{2}$ 박막에서는 $800^{\circ}C$의 고온까지 열처리하여도 계면확산이 심각하게 일어나지는 않았다. ${\alpha}-Al_{2}O_{3}$ 버퍼층에 의하여 계면확산이 억제되기 때문에 Ba-페라이트 자성박막의 포화자속밀도와 보자력이 향상되었다. 따라서 Ba-페라이트/$SiO_{2}$ 박막의 계면에서 ${\alpha}-Al_{2}O_{3}$ 버퍼층은 $SiO_{2}$ 기판 성분의 계면확산 장벽으로 사용될 수 있다.

AlN 버퍼층위에 성장된 M/NEMS용 다결정 3C-SiC 박막의 특성 (Characteristics of polycrystalline 3C-SiC thin films grown on AlN buffer layer for M/NEMS applications)

  • 정귀상;김강산;이종화
    • 센서학회지
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    • 제16권6호
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    • pp.457-461
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    • 2007
  • This paper describes the characteristics of poly (polycrystalline) 3C-SiC grown on $SiO_{2}$ and AlN substrates, respectively. The crystallinity and the bonding structure of poly 3C-SiC grown on each substrate were investigated according to various growth temperatures. The crystalline quality of poly 3C-SiC was improved from resulting in decrease of FWHM (full width half maximum) of XRD and FT-IR by increasing the growth temperature. The minimum growth temperature of poly 3C-SiC was $1100^{\circ}C$. The surface chemical composition and the electron mobility of poly 3C-SiC grown on each substrate were investigated by XPS and Hall Effect, respectively. The chemical compositions of surface of poly 3C-SiC films grown on $SiO_{2}$ and AlN were not different. However, their electron mobilities were $7.65{\;}cm^{2}/V.s$ and $14.8{\;}cm^{2}/V.s$, respectively. Therefore, since the electron mobility of poly 3C-SiC films grown on AlN buffer layer was two times higher than that of 3C-SiC/$SiO_{2}$, a AlN film is a suitable material, as buffer layer, for the growth of poly 3C-SiC thin films with excellent properties for M/NEMS applications.

상압소결한 Al2O3-SiC계 소결체의 기계적 성질(2) : SiC Whisker의 분산효과 (Mechanical Properties of the Pressureless Sintered Al2O3-SiC Composites(2) : Dispersion Effects of SiC Whisker)

  • 김경수;이홍림
    • 한국세라믹학회지
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    • 제25권6호
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    • pp.704-712
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    • 1988
  • In order to investigate the effect of the second phase on Al2O3 matrix, SiC whisker was dispersed in Al2O3 matrix as a second phase over the content range of 5vol% to 20vol%. To this mixture, Y2O3 or TiO2 powder was added as a sintering additive before isostatically pressing and pressureless sintering at 1800-190$0^{\circ}C$ for 90min in N2 atmosphere. With increasing SiC whisker content, relative densities of composites were decreased and the grain growth of Al2O3 was restricted. When Y2O3 was added as a sintering aid the sintering temperature was 180$0^{\circ}C$, the maximum values of flexural strength, hardness and fracture toughness were 537MPa, 12.1GPa, 3.7MPa.m1/2, respectively. However, when the sintering temperature was elevated to 190$0^{\circ}C$, maximum values of flexural strength, hardness and fracture toughness were 453MPa, 17.5GPa, 4.9MPa.m1/2, respectively. Improved mechanical properties are assumed to be attributed to the crack deflection by the second phase SiC whisker and whisker pullout mechanism.

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Oxidation Resistance and Electrical Conductivity of $Ti_3SiC_2$ with Thin Oxide Layer

  • Hwang, Sung-Ik;Han, Kyoung-Ran;Kim, Chang-Sam
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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    • pp.1110-1111
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    • 2006
  • [ $Ti_3SiC_2$ ] was coated with $Al_2O_3$, MgO and $SiO_2$ respectively by sol-gel method and cured at 900 and $1200^{\circ}C$. The coated oxides did not react with $Ti_3SiC_2$ at $900^{\circ}C$ but reacted with it to form $TiC_x$ at $1200^{\circ}C$. The specimen coated with $SiO_2$ at $900^{\circ}C$ formed a dense protecting layer and showed the best oxidation resistance at $800^{\circ}C$ in air. However, the dense protecting layers did not form in $Al_2O_3$ and MgO coated specimens cured even at $900^{\circ}C$. MgO coated specimen showed the worst improvement in the oxidation resistance because the reactivity of MgO with $Ti_3SiC_2$ was highest. On the other hand, the electrical conductivities were measured in MgO and $Al_2O_3$ coated specimens to have TiCx but could not be measured in the $SiO_2$ coated ones because of the nonconductive dense protected layers.

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SHS법에 의한 $Al_2O_3-SiC$ 복합분말의 합성 (Preparation of $Al_2O_3-SiC$ Composite Powder by SHS Method)

  • 이형민;이홍림;이형직
    • 한국세라믹학회지
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    • 제32권1호
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    • pp.11-16
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    • 1995
  • High reaction heat evolved from the oxidation of Al was used to synthesize SiC, which might be difficult to be formed by SHS. Al2O3-SiC composite powder was easily manufactured using KNO3 as an ignition and reaction catalyst. Unreacted Si and C were observed after reaction dependent upon the composition of starting powders, reaction atmosphere and relative densities of compacted bodies. The unreacted carbon could be removed by calcining at $600^{\circ}C$ and the remaining Si could be removed by dissolving in NaOH solution. The final powder particles were smaller than 1${\mu}{\textrm}{m}$ in size.

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AlN-SiO2-Al2O3계로부터 AlN-Polytypes의 제조 (Synthesis of AlN-SiO2-Al2O3 System)

  • 박용갑;장병국
    • 한국세라믹학회지
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    • 제26권1호
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    • pp.31-36
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    • 1989
  • In order to synthesize AlN-polytypes from AlN-SiO2-Al2O3 system, composition A (AlN/SiO2/Al2O3=1/0.3/0.05, mole ratio) and composition B(AlN-SiO2-Al2O3=1/0.2/0.05, mole ratio) were used. AlN-polytypes were produced by nitriding the mixture at 175$0^{\circ}C$~190$0^{\circ}C$ under N2 atmosphere. For lower reaction temperature, 15R phase was produced and in the case of higher reaction temperature, AlN phase was only produced. As each composition was heated at 185$0^{\circ}C$ in N2 atmosphere, produced main phases were 15R phase for composition A and 21R phase for composition B respectively. The fracture surfaces of produced reactants showed porous skeleton structure.

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YAG와 기공에 의한 $SiC-TiB_2$ 전도성세라믹 복합체의 특성 평가 (Estimation of the Properties for the $SiC-TiB_2$ Electroconductive Ceramic Composites by YAG and Porosity)

  • 신용덕;이동윤
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제50권11호
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    • pp.544-549
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    • 2001
  • The mechanical and electrical properties of the hot-pressed and pressureless annealed SiC-39vo1.%TiB$_2$electroconductive ceramic composites were investigated as functions of the liquid additives of $Al_2O_3+Y_2O_3$ and the sintering temperature. The result of phase analysis for the SiC-39vo1.%TiB$_2$ composites by XRD revealed $\alpha -SiC(6H),\; TiB_2,\; and YAG(Al_5Y_3O_{12})$ crystal phase. The relative density of SiC-39vo1.% $TiB_2$ composites was increased with increased $Al_2O_3+Y_2O_3$ contents. The fracture toughness showed the highest value of $7.8 MPa.m_{1/2}$ for composites added with 12 wt% $Al_2O_3+Y_2O_3$additives at $1750^{\circk}C$. The electrical resistivity of the SiC-39vo1.%$TiB_2$composites was all positive temperature coefficient resistance(PTCR) in the temperature range of $25S^{\circ}C \;to\; 700^{\circ}C$.

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상압소결 탄화규소 소결체의 마찰마모특성 (Tribological Properties of Pressureless-sinteed Silicon Carbide)

  • 백용혁;최웅;서영현;박용갑
    • 한국세라믹학회지
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    • 제35권7호
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    • pp.721-725
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    • 1998
  • 본 연구에서는 Boron과 Carbon black이 소결조재로 첨가된 탄화규소 분말을 $1950^{\circ}C$에서 상압소결 방법으로 시편을 제조하고 꺽임강도, 파괴인성, 비마모량을 측정하고 파단면 및 마찰마모면의 미세구조를 SEM으로 관찰하여 마찰마모특성과 미세구조와의 관계를 규명하였다. 또한 마모상대재료로서 SiC pin과 $Al_{2}O_{3}$ pin을 사용하였을때 마찰마모특성과 미세구조와의 관계도 비교 검토하였으며 다음과 같은 결론을 얻었다. 1. SiC pin을 사용한 경우 소결시편의 비마모량은 $Al_{2}O_{3}$ pin을 사용한 경우보다 많았으나, 가압하중이 증가하면 $Al_{2}O_{3}$ pin을 사용한 경우가 SiC pin을 사용한 경우보다 비마모량의 증가율이 6.5배로 되었다. 2. Pin의 비마모량은 SiC pin의 경우가 $Al_{2}O_{3}$의 경우보다 많았으나 가압하중이 증가하면 $Al_{2}O_{3}$ pin의 경우가 SiC pin의 경우보다 비마모향의 증가율이 약4배로 되었다. 3. 마모상대재료의 마찰계수가 작은 경우에는 마모면의 미세구조가 평활하면서 crack이 나타나지 않았으나, 마찰계수가 큰 경우에는 마모면이 평활치 못하고 crack의 전파현상이 크게 나타났다. 4. 사용된 Pin의 마찰계수가 큰 경우에는 고상소결한 SiC 시편도 액상소결한 시편과 마찰마모 특성이 유사하였다.

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무가압소결(無加壓燒結)한 ${\beta}-SiC-ZrB_2$ 복합체(複合體)의 파괴인성(破壞忍性)과 전기전도성(電氣傳導性)에 미치는 기공(氣孔)의 영향 (Effect of Porosity on the Fracture Toughness and Electrical Conductivity of Pressureless Sintered ${\beta}-SiC-ZrB_2$ Composites)

  • 신용덕;권주성
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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    • pp.847-849
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    • 1998
  • The effect of $Al_{2}O_{3}$ additives on the microstructure, mechanical and electrical properties of ${\beta}$-SiC+39vol.%$ZrB_2$ electroconductive ceramic composites by pressureless sintering were investigated. The ${\beta}$-SiC+39vol.%$ZrB_2$ ceramic composites were pressureless sintered by adding 4, 8, 12wt.% $Al_{2}O_{3}$ powder as a liquid forming additives at $1950^{\circ}C$ for 1h. Phase analysis of composites by XRD revealed mostly of $\alpha$-SiC(6H), $ZrB_2$ and weakly $\alpha$-SiC(4H), $\beta$-SiC(15R) phase. The relative density of composites was lowered by gaseous products of the result of reaction between $\beta$-SiC and $Al_{2}O_{3}$ therefore, porosity was increased with increased $Al_{2}O_{3}$ contents. The fracture toughness of composites was decreased with increased $Al_{2}O_{3}$ contents, and showed the maximum value of $1.4197MPa{\cdot}m^{1/2}$ for composite added with 4wt.% $Al_{2}O_{3}$ additives. The electrical resistivity of ${\beta}$-SiC+39vol.%$ZrB_2$ electroconductive ceramic composite was increased with increased $Al_{2}O_{3}$ contents, and showed positive temperature coefficient resistance (PTCR) in the temperature from $25^{\circ}C$ to $700^{\circ}C$.

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