Pull-in instability of electrically actuated poly-SiGe graded micro-beams |
Jia, Xiao L.
(College of Mechanical and Transportation Engineering, China University of Petroleum-Beijing)
Zhang, Shi M. (College of Mechanical and Transportation Engineering, China University of Petroleum-Beijing) Yang, Jie (School of Aerospace, Mechanical and Manufacturing Engineering, RMIT University) Kitipornchai, Sritawat (School of Civil Engineering, The University of Queensland) |
1 | Yang, J., Liew, K.M. and Kitipornchai, S. (2005), "Second-order statistics of the elastic buckling of functionally graded rectangular plates", Compos. Sci. Technol., 65(7-8), 1165-1175. DOI ScienceOn |
2 | Tilmans, H.A.C. and Legtenberg, R. (1994), "Electrostatically driven vacuum-encapsulated polysilicon resonators, Part II: Theory and performance", Sensor Actuat. A-Phys., 45(1), 67-84. DOI ScienceOn |
3 | Gupta, R.K. (1997), Electrostatic Pull-in Test Structure Design for In-situ Mechanical Property Measurements of Microelectromechanical Systems, Ph.D. dissertation, MIT, Cambridge, UK. |
4 | Hasanyan, D.J., Batra, R.C. and Harutyunyan, S. (2008), "Pull-in instabilities in functionally graded microthermoelectromechanical systems", J. Therm. Stresses, 31(10), 1006-1021. DOI ScienceOn |
5 | Huang, J.M., Liew, K.M., Wong, C.H., Rajendran, S., Tan, M.J. and Liu, A.Q. (2001), "Mechanical design and optimization of capacitive micro machined switch", Sens. Actuators A., 93(3), 273-285. DOI ScienceOn |
6 | Jia, X.L., Yang, J. and Kitipornchai, S. (2011), "Pull-in instability of geometrically nonlinear micro-switches under electrostatic and Casmir forces", Acta Mech., 218(1-2), 161-174. DOI |
7 | Lamoreaux, S.K. (2005), "The Casimir force: background, experiments, and applications", Rep. Prog. Phys., 68(1), 201-236. DOI ScienceOn |
8 | Legtenberg, R. and Tilmans, H.A.C. (1994), "Electrostatically driven vacuum-encapsulated polysilicon resonators, Part I: Design and Fabrication", Sens. Actuators A., 45(1), 57-66. DOI ScienceOn |
9 | Mobki, H., Rezazadeh, G., Sadeghi, M. and Vakili-Tahami, F. (2013), "A comprehensive study of stability in an electro-statically actuated micro-beam", Int. J. Nonlinear Mech., 48, 78-85. DOI ScienceOn |
10 | Nabian, A., Rezazadeh, G., Almassi, M. and Borgheei, A.M. (2013), "On the stability of a functionally graded rectangular micro-plate subjected to hydrostatic and nonlinear electrostatic pressures", Acta Mech. Solida Sin., 26(2), 205-220. DOI ScienceOn |
11 | Fu, Y.Q., Du, H.J. and Zhang, S. (2003), "Functionally graded TiN/TiNi shape memory alloy films", Mater. Lett., 57(20), 2995-2999. DOI ScienceOn |
12 | Erdogan, F. and Wu, B.H. (1997), "The surface crack problem for a plate with functionally graded properties", J. Appl. Mech.-T. ASME, 64(3), 449-456. DOI ScienceOn |
13 | Mohammadi-Alasti, B., Rezazadeh, G., Borgheei, A.M., Minaei, S. and Habibifar, R. (2011), "On the mechanical behavior of a functionally graded micro-beam subjected to a thermal moment and nonlinear electrostatic pressure", Compos. Struct., 93(6), 1516-1525. DOI ScienceOn |
14 | Abdel-Rahman, E.M., Younis, M.I. and Nayfeh, A.H. (2002), "Characterization of the mechanical behavior of an electrically actuated microbeam", J. Micromech. Microeng., 12(6), 759-766. DOI ScienceOn |
15 | Batra, R.C., Porfiri, M. and Spinello, D. (2006), "Electromechanical model of electrically actuated narrow microbeams", J. Microelectromech. S., 15(5), 1175-1189. DOI ScienceOn |
16 | Batra, R.C., Porfiri, M. and Spinello, D. (2008a), "Vibrations of narrow microbeams predeformed by an electric field", J. Sound Vib., 309(3-5), 600-612. DOI ScienceOn |
17 | Batra, R.C., Porfiri, M. and Spinello, D. (2008b), "Reduced-order models for microelectromechanical rectangular and circular plates incorporating the Casimir force", Int. J. Solids Struct., 45(11-15), 3558-3583. DOI ScienceOn |
18 | Birman, V. and Byrd, L.W. (2007), "Modeling and analysis of functionally graded materials and structures", Appl. Mech. Rev., 60(5), 195-216. DOI ScienceOn |
19 | Carbonari, R.C., Silva, E.C.N. and Paulino, G.H. (2009), "Multi-actuated functionally graded piezoelectric micro-tools design: A multiphysics topology optimization approach", Int. J. Numer. Meth. Eng., 77(3), 301-336. DOI ScienceOn |
20 | Craciunescu, C.M. and Wuttig, M. (2003), "New ferromagnetic and functionally graded shape memory alloys", J. Optoelectron. Adv. M., 5(1), 139-146. |
21 | Ganguly, P. and Desiraju, G.R. (2008), "Van der Waals and polar intermolecular contact distances: Quantifying supramolecular synthons", Chem.-Asian J., 3(5), 868-880. DOI ScienceOn |
22 | Gromova, M., Mehta, A., Baert, K. and Witvrouw, A. (2006), "Characterization and strain gradient optimization of PECVD poly-SiGe layers for MEMS applications", Sens. Actuators A., 130, 403-410. 2006. |
23 | Yang, J., Liew, K.M., Wu, Y.F. and Kitipornchai, S. (2006), "Thermo-mechanical post-bulkling of FGM cylindrical panels with temperature-dependent properties", Int. J. Solids Struct., 43(2), 307-324. DOI ScienceOn |
24 | Sharafkhani, N., Rezazadeh, G. and Shabani, R. (2012), "Study of mechanical behavior of circular FGM micro-plates under nonlinear electrostatic and mechanical shock loadings", Acta Mech., 223(3), 579-591. DOI |
25 | Shu, C. (2000), Differential quadrature and its application in engineering: engineering applications, Springer, Verlag, London. |
26 | Witvrouw, A. and Mehta, A. (2005), "The use of functionally graded poly-SiGe layers for MEMS applications", Mater. Sci. Forum., 492, 255-260. |
27 | Yang, J. and Xiang, H.J. (2007), "Thermo-electro-mechanical characteristics of functionally graded piezoelectric actuators", Smart Mater. Struct., 16(3),784-797. DOI ScienceOn |
28 | Jia, X.L., Yang, J. and Kitipornchai, S. (2010), "Characterization of FGM micro-switches under electrostatic and Casimir forces", IOP Conf. Ser. Mater. Sci. Eng., 10, 012018. |