Browse > Article
http://dx.doi.org/10.12989/amr.2012.1.1.083

Effect of under-bump-metallization structure on electromigration of Sn-Ag solder joints  

Chen, Hsiao-Yun (Department of Materials Science and Engineering, National Chiao Tung University)
Ku, Min-Feng (Department of Materials Science and Engineering, National Chiao Tung University)
Chen, Chih (Department of Materials Science and Engineering, National Chiao Tung University)
Publication Information
Advances in materials Research / v.1, no.1, 2012 , pp. 83-92 More about this Journal
Abstract
The effect of under-bump-metallization (UBM) on electromigration was investigated at temperatures ranging from $135^{\circ}C$ to $165^{\circ}C$. The UBM structures were examined: 5-${\mu}m$-Cu/3-${\mu}m$-Ni and $5{\mu}m$ Cu. Experimental results show that the solder joint with the Cu/Ni UBM has a longer electromigration lifetime than the solder joint with the Cu UBM. Three important parameters were analyzed to explain the difference in failure time, including maximum current density, hot-spot temperature, and electromigration activation energy. The simulation and experimental results illustrate that the addition 3-${\mu}m$-Ni layer is able to reduce the maximum current density and hot-spot temperature in solder, resulting in a longer electromigration lifetime. In addition, the Ni layer changes the electromigration failure mode. With the $5{\mu}m$ Cu UBM, dissolution of Cu layer and formation of $Cu_6Sn_5$ intermetallic compounds are responsible for the electromigration failure in the joint. Yet, the failure mode changes to void formation in the interface of $Ni_3Sn_4$ and the solder for the joint with the Cu/Ni UBM. The measured activation energy is 0.85 eV and 1.06 eV for the joint with the Cu/Ni and the Cu UBM, respectively.
Keywords
electromigration; solder joints;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Tu, K.N. (2007), Solder Joint Technology, Springer, NewYork, USA, 245-287.
2 Tu, P.L., Chan, Y.C., Hung, K.C. and Lai, J.K.L. (2001), "Study of micro-BGA solder joint reliability", Microelectron. Reliab., 41(2), 287-293.   DOI   ScienceOn
3 Xu, L.H., Han, J.K., Liang, J.J., Tu, K.N. and Lai, Y.S. (2008), "Electromigration induced high fraction of compound formation in SnAgCu flip chip solder joints with copper column", Appl. Phys. Lett., 92(26), 262104.   DOI   ScienceOn
4 Xu, L.H., Pang, J.H.L. and Tu, K.N. (2006), "Effect of electromigration-induced back stress gradient on nanoindentation marker movement in SnAgCu solder joints", Appl. Phys. Lett., 89(22), 221909.   DOI   ScienceOn
5 Yeh, E.C.C., Choi, W.J., Tu, K.N., Elenius, P. and Balkan, H. (2002), "Current-crowding-induced electromigration failure in flip chip solder joints", Appl. Phys. Lett., 80(4), 580-582.   DOI   ScienceOn
6 Zang, L., Ou, S.Q., Huang, J., Tu, K.N., Gee, S. and Nguyen, L. (2006), "Effect of current crowding on void propagation at the interface between intermetallic compound and solder in flip chip solder joints", Appl. Phys. Lett., 88(1), 012106.   DOI   ScienceOn
7 Zeng, K. and Tu, K.N. (2002), "Six cases of reliability study of Pb-free solder joints in electronic packaging technology", Mater. Sci. Eng., R. 38(2), 55-105.   DOI   ScienceOn
8 Chen, H.Y. and Chen, C. (2010), "Measurement of electromigration activation energy in eutectic SnPb and SnAg flip-chip solder joints with Cu and Ni under-bump metallization", J. Mater. Res., 25(9), 1847-1853.   DOI
9 Choi, W.J., Yeh, E.C.C. and Tu, K.N. (2003), "Mean-time-to-failure study of ip chip solder joints on Cu/Ni(V)/Al thin-lm under-bump-metallization", J. Appl. Phys., 94(9), 5665-5671.   DOI   ScienceOn
10 Dvson, B.F., Anthony, T.R. and Turnbull, D. (1967), "Interstitial diffusion of copper in Tin", J. Appl. Phys., 38(8), 3408-3409.
11 Lai, Y.S. and Kao, C.L. (2006) "Calibration of electromigration reliability of flip-chip packages by electrothermal coupling analysis", J. Electron. Mater., 35(5), 972-935.   DOI   ScienceOn
12 Lee, T.Y., Choi, W.J., Tu, K.N., Jang, J.W., Kuo, S.M., Lin, J.K., Frear, D.R., Zeng, K. and Kivilahti, J.K. (2002), "Morphology, kinetics, and thermodynamics of solid-state aging of eutectic PbSn and Pb-free solders (Sn-3.5Ag, Sn-3.8Ag-0.7Cu and Sn-0.7Cu) on Cu", J. Mater. Res., 17(2), 291-301.   DOI   ScienceOn
13 Lin, Y.H., Lai, Y.S., Lin, Y.W. and Kao, C.R. (2008), "Effect of UBM thickness on the mean time to failure of flip-chip solder joints under electromigration", J. Electron. Mater., 37(1), 96-101.   DOI   ScienceOn
14 Liang, S.W., Chang, Y.W. and Chen, C. (2006a) "Relieving hot-spot temperature and current crowding effects during electromigration in solder bumps by using Cu columns", J. Electron. Mater., 36(10), 1348-1354.
15 Liang, S.W., Shao, T.L., Chen, C., Yeh, E.C.C. and Tu, K.N. (2006b), "Relieving the current crowding effect in flip-chip solder joints during current stressing", J. Mater. Res., 21(1), 137-146.   DOI
16 Lin, Y.H., Hu, Y.C., Tsai, C.M., Kao, C.R. and Tu, K.N. (2005), "In-situ observation of the void formation-and propagation mechanism in solder joints under current-stressing", ActaMater., 53(7), 2029-2035.
17 Lin, Y.L., Chang, C.W., Tsai, C.M., Lee, C.W. and Kao, C.R. (2006), "Electromigration-induced UBM consumption and the resulting failure mechanisms in flip chip solder joints", J. Electron. Mater., 35(5), 1010-1016.   DOI   ScienceOn
18 Liu, A.A., Kim, H.K., Tu, K.N. and Totta, P.A. (1996), "Spalling of Cu6Sn5 spheroids in the soldering reaction of eutectic SnPb on Cr/Cu/Au thin lms", J. Appl. Phys., 80(5), 2774-2780.   DOI   ScienceOn
19 Nah, J.W., Paik, K.W., Suh, J.O. and Tu, K.N. (2003), "Mechanism of electromigration-induced failure in the 97Pb-3Sn and 37Pb-63Sn composite solder joints", J. Appl. Phys., 94(12), 7560-7566.   DOI   ScienceOn
20 Nah, J.W., Suh, J.O., Tu, K.N., Yoon, S.W., Rao, V.S., Kripesh, V. and Hua, F. (2006), "Electromigration in flip chip solder joints having a thick Cu column bump and a shallow solder interconnect", J. Appl. Phys., 100(12), 123513.   DOI   ScienceOn
21 Shao, T.L., Chen, Y.H., Chiu, S.H. and Chen, C. (2004), "Electromigration failure mechanisms for SnAg3.5 solder bumps on Ti/Cr-Cu/Cu and Ni(P)/Au metallization pads", J. Appl. Phys., 96(8), 4518-4524.   DOI   ScienceOn
22 Chen, C., Tong, H.M. and Tu, K.N. (2010), "Electromigration and thermomigration in Pb-Free flip-chip solder joints", Annu. Rev. Mater. Res., 40, 531-555.   DOI   ScienceOn
23 Tu, K.N. (2003) "Recent advances on electromigration in very-large-scale-integration of interconnects", J. Appl. Phys., 94(9), 5451-5473.   DOI   ScienceOn
24 Chang, Y.W., Liang, S.W. and Chen, C. (2006) "Study of void formation due to electromigration in flip-chip solder joints using Kelvin bump probes", Appl. Phys. Lett., 89(3), 032103.   DOI   ScienceOn