Properties of Silicon Nitride Deposited by RF-PECVD for C-Si solar cell
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Park, Je-Jun
(Dept.of Electronic Engineering, Chungnam National University)
Kim, Jin-Kuk (Dept. of Semiconductor Engineering, Chungbuk National University) Song, Hee-Eun (Korea Institute of Energy Research) Kang, Min-Gu (Korea Institute of Energy Research) Kang, Gi-Hwan (Korea Institute of Energy Research) Lee, Hi-Deok (Dept.of Electronic Engineering, Chungnam National University) |
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