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http://dx.doi.org/10.21218/CPR.2016.4.4.150

Characteristics of the Mg and In co-doped ZnO Thin Films with Various Substrate Temperatures  

Jeon, Kiseok (Solar Cell R&D Center, Applied Optics & Energy R&D Group, Korea Institute of Industrial Technology)
Jee, Hongsub (Solar Cell R&D Center, Applied Optics & Energy R&D Group, Korea Institute of Industrial Technology)
Lim, Sangwoo (Department of Chemical and Biomolecular Engineering, Yonsei University)
Jeong, Chaehwan (Solar Cell R&D Center, Applied Optics & Energy R&D Group, Korea Institute of Industrial Technology)
Publication Information
Current Photovoltaic Research / v.4, no.4, 2016 , pp. 150-154 More about this Journal
Abstract
Mg and In co-doped ZnO (MIZO) thin films with transparent conducting characteristics were successfully prepared on glass substrates by RF magnetron sputtering technique. The Influence of different substrate temperature (from RT to $400^{\circ}C$) on the structural, morphological, electrical, and optical properties of MIZO thin films were investigated. The MIZO thin film prepared at the substrate temperature of $350^{\circ}C$ showed the best electrical characteristics in terms of the carrier concentration ($4.24{\times}10^{20}cm^{-3}$), charge carrier mobility ($5.01cm^2V^{-1}S^{-1}$), and a minimum resistivity ($1.24{\times}10^{-4}{\Omega}{\cdot}cm$). The average transmission of MIZO thin films in the visible range was over 80% and the absorption edges of MIZO thin films were very sharp. The bandgap energy of MIZO thin films becomes wider from 3.44 eV to 3.6 eV as the substrate temperature increased from RT to $350^{\circ}C$. However, Band gap energy of MIZO thin film was narrow at substrate temperature of $400^{\circ}C$.
Keywords
ZnO-based thin films; transparent conducting oxide (TCO); RF magnetron sputtering technique; Mg and In co-doping;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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