Characteristics of the Mg and In co-doped ZnO Thin Films with Various Substrate Temperatures |
Jeon, Kiseok
(Solar Cell R&D Center, Applied Optics & Energy R&D Group, Korea Institute of Industrial Technology)
Jee, Hongsub (Solar Cell R&D Center, Applied Optics & Energy R&D Group, Korea Institute of Industrial Technology) Lim, Sangwoo (Department of Chemical and Biomolecular Engineering, Yonsei University) Jeong, Chaehwan (Solar Cell R&D Center, Applied Optics & Energy R&D Group, Korea Institute of Industrial Technology) |
1 | D.S. Ginley, C. Bright, "Transparent Conducting Oxides", MRS Bulletin, Vol.25, pp.15-18, 2000. |
2 | I. Hamberg, C. G. Granqvist, "Evaporated Sn-doped films: Basic optical properties and applications to energy- efficient windows", Appl. Phys. Vol.60, pp.R123-R159, 1986. DOI |
3 | Z.C. Jin, I. Hamberg, C. G. Granqvist, "Optical properties of sputter-deposited ZnO:Al thin films", J. Appl. Phys. Vol.64. pp.5117-5131, 1988. DOI |
4 | J. Steinhauser, S. Fay, N. Oliveira, E. Vallat-Sauvain, C. Ballif, "Transition between grain boundary and intragrain scattering transport mechanisms in boron-doped zinc oxide thin films" Appl. Phys. Lett., Vol.90, pp.142107-1421077-3, 2007. DOI |
5 | K. L. Chopra, S. Major and D. K. Pandya, "Transparent conductors - A status review", Thin Solid Films, Vol.102, pp.1 -46, 1983. DOI |
6 | K.T. Ramakrishna Reddy, P. Prathap, N. Revathi, A.S.N. Reddy, R. W. Miles, "Mg-composition induced effects on the physical behavior of sprayed MgxO films", Thin solid Films, Vol.518, pp.1275-1278, 2009. DOI |
7 | X. Zhang, H. Ma, Q. Wang, J. Ma, F. Zong, H. Xiao, F.Ji and S. Hou, "Structural and optical properties of thin films deposited by magnetron sputtering", Physica. B, Condensed matter., Vol.364, pp.157-161, 2005. DOI |
8 | F. Maldonado, A. Steshans, "Al-doped ZnO : Electronic, electridcal and structural properties", J. Phy. Chem. Solids, Vol.71,pp.784-787, 2010. DOI |
9 | J. Wienke, A.S. Booij, "ZnO:In deposition by spray pyrolysis - Influence of the growth conditions on the electrical and optical properties Original", Thin solid Films, Vol.516, pp.4508-4512, 2008. DOI |
10 | D. H. Kim, N. G. Cho, H. G. Kim, W. Y. Cho,,"Structural and Electrical Properties of Indium Doped ZnO Thin Films Fabricated by RF Magnetron Sputtering", J. Electrochem. Soc., Vol.154, pp.H939-H943, 2007. DOI |
11 | E. J. Luna-Arredondo, A. Maldonado, R. Asomoza, D.R. Acosta, M.A. Melendez-Lira, M. de la L. Olvera, "Indium-doped ZnO thin films deposited by the sol-gel technique", Thin solid Films, Vol.490, pp.132-136, 2005. DOI |
12 | G. Machado, D. N. Guerra, D. Leinen, J. R. Ramos-Barrado, R.E. Marotti, E.A. Dalchiele, "Indium doped zinc oxide thin films obtained by electrodeposition", Thin solid Films, Vol. 490, pp.124-131, 2005. DOI |
13 | P. Y. Kim, J. Y. Lee, H. Y. Lee,"Structure and Properties of IZO Transparent Conducting Thin Films Deposited by PLD Method", J. KOREAN PHYS. SOC., Vol.53, pp.207-211, 2008. DOI |
14 | I. Y. Kim, K. V. Gurav, S. W. Shin, K. S. Jeon, P. S. Patil, J. H. Moon, D. S. Lee, J. H. Kim, "Characteristics Of Quaternary Flexible Mg and Ga Co-Doped ZnO Thin Films Fabricated Using Rf Magnetron Sputtering", Sci. Adv. Mater. Vol.8, pp.610-617, 2016. DOI |
15 | K. S. Jeon, M. P. Surawanshi, I. Y. Kim, J. S. Jang, J. H. Yun, J. H. Moon, J. H. Kim, "Transparent Conductive and Wide Band Gap Characteristics of Quaternary Mg and Al Co-doped ZnO Thin Films Preapred by Radio Frequency Sputtering Method", Sci. Adv. Mater. Vol.8, pp.669-674, 2016. DOI |
16 | Y. K. Hyun, J. W. Choi, D. H. Lee, "Characteristics f ZnO films deposited onto Al/Si substrates by r.f. magnetron sputtering", Thin Solid Films, Vol.302, pp.116-121, 1997. DOI |
17 | Y. K. Moon, S. H. Kim, J. W. Park, "The influence of substrate temperature on the properties of aluminum-doped zinc oxide thin films deposited by DC magnetron sputtering", J Mater Sci: Mater Electron, Vol.17, pp.973-977, 2006. DOI |
18 | R. D. Shannon, "Revised effective ionic radii and systematic studies of interatomic distances in halides and chalcogenides", Acta. Crystallogr A., Vol.32, pp.751-767, 1976. DOI |
19 | D.Y. Ku, I.H. Kim, I. Lee, K.S. Lee, T.S. Lee, J.-h. Jeong, B. Cheong, Y.-J. Baik, W.M. Kim, "Structural and electrical properties of sputtered indium-zinc oxide thin films", Thin Solid Films, Vol.515, pp.1364-1369, 2006. DOI |
20 | X. Si, Y. Liu, X. Wu, W. Lei, J. lin, T. Gao, L. Zheng, "Al-Mg co-doping effect on optical and magnetic properties of ZnO nanopowders", Phys. Lett. A, Vol.379, pp.1445-1448, 2015. DOI |
21 | S. A. Vanalakar, S. S. Mail, M. P. Suranasshi, P. S. Patil, "QUANTUM SIZE EFFECT IN CHEMOSYNTHESIZED NANOSTRUCTURED CdS THIN FILMS.", Digest J. Nanomater. Biostruct., Vol.5, pp.805-810, 2010. |
22 | K. H. Ri, Y. Wang, W. L. Zhou, J. X. Gao, X. J. Wang, "The structural properties of Al doped ZnO films depending on the thickness and their effect on the electrical properties", J. Yu, Appl. Surf. Sci., Vol.258, pp.1283-1289, 2011. DOI |