Browse > Article

Nucleate Boiling Heat Transfer from Micro Finned Surfaces with Subcooled FC-72  

Lim, Tae-Woo (Korea Maritime University)
You, Sam-Sang (Korea Maritime University)
Kim, Hwan-Sung (Korea Maritime University)
Publication Information
Journal of Fisheries and Marine Sciences Education / v.20, no.3, 2008 , pp. 410-415 More about this Journal
Abstract
To evaluate the performance of nucleate boiling heat transfer between a plain and micro-fin surfaces, the experimental tests have been carried out under various conditions with fluorinert liquid FC-72, which is chemically and electrically stable. Two kinds of micro fins with the dimensions of $200{{\mu}m}{\times}20{{\mu}m}$ and $100{{\mu}m}{\times}10{{\mu}m}$ (width x height) were fabricated on the surface of a silicon chip. The experiments were performed on the liquid subcooling of 5, 10 and 20K under the atmospheric condition. The presented data showed a similar trend in the comparison with result of Rainey & You. Due to its expanded surface areas, the heat flux properties has been significantly enhanced on micro-fin surface comparing to the plain surface.
Keywords
micro fin; subcooling; silicon chip; nucleate boiling; heat flux;
Citations & Related Records
연도 인용수 순위
  • Reference
1 황호정(1999). 반도체 공정기술, 생능출판사
2 Mohamed Gad-el-Hak(2006). "MEMS Design and Fabrication" Taylor & Francis
3 Honda, H., Takamatsu, H., Wei, J.J.(2002). "Effect of the size of micro-pin-fin on boiling heat transfer from silicon chips immersed in FC-72", in: Proceedings of 12th International Heat Transfer Conference, Grenoble, France, Vol. 4, 75-80
4 Rainey, K. N., and You, S. M.(2001). "Effects of Heater Size and Orientation on Pool Boiling Heat Transfer from Microporous Coated Surfaces" Int. J. of Heat and Mass Transfer, Vol. 44, 2589-2599   DOI   ScienceOn
5 윤준보, 조일주, 최윤석(2004). 알기쉽고 재미있는 MEMS이야기, KAIST PRESS
6 최재성, 반도체 소자 공정기술(2006). 청문각
7 Honda, H., Takamatsu, H., Wei, J.J.(2002). "Boiling of FC-72 on Silicon Chips with Micro-Pin-Fins and Submicron-Scale Roughness", Trans. ASME J. Heat Transfer, Vol. 124, 383-390   DOI   ScienceOn
8 Nadim Maluf(2000). "An Introduction to Microelectromechanical System Engineering" Artech House, Inc.