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http://dx.doi.org/10.5228/KSTP.2011.20.1.23

A Study on the Fabrication of Nano Pattern using a Nickel Stamper Replicated from Anodic Aluminum Oxide  

Kim, S. (한국생산기술연구원)
Kim, J.S. (한국생산기술연구원)
Hong, S.K. (한국생산기술연구원)
Kim, H.J. (한국생산기술연구원)
Yoon, K.H. (단국대학교 기계공학과)
Kang, J.J. (한국생산기술연구원)
Publication Information
Transactions of Materials Processing / v.20, no.1, 2011 , pp. 23-28 More about this Journal
Abstract
For the fabrication of nano patterned products manufacturing a nano patterned mold is needed in advance. The nano patterned stamper was fabricated by electroforming the AAO master with nickel. The surface of nickel-plated stamper had nano-patterned holes with the diameter of 73 nm and the depth of 83 nm. Hot embossing was used for forming P3HT sheet and the process factors of hot embossing were closer as pressure, temperature and time. In the present paper hot embossing experiments were performed to find the main process conditions to affect the replication ratio of nano patterns on surface of P3HT sheet. As a result, main contributing factors for the replication ratio of hot embossed pattern could be sequentially enumerated as pressure, temperature and time.
Keywords
Nano-patterned Nickel Stamper; Anodic Aluminum Oxide(AAO); P3HT; Hot Embossing;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
연도 인용수 순위
1 S. Kurtz, 2009, Opportunities and challenges for development of a mature concentrating photovoltanic power industry, NREL technical report.
2 S. J. Baek, J. B. Park, W. J. Lee, S. H. Han, J. H. Lee, S. H. Lee, 2009, A facile method to prepare regioregular poly(3-hexylthiophene) nanorod arrays using anodic aluminum oxide template and capillary force, New J. Chem., Vol. 33, pp. 986-990.   DOI
3 S. H. Jeong, S. H. Jung, K. H. Lee, 2005, Preperation of Anodic Alumina Nanotemplate and its Applications, J. Kor. Ind. Eng. Chem, Vol. 16, pp 461-473.   과학기술학회마을
4 J. T. Kwon, H. G. Shin, Y. H. Seo, B. H. Kim, H. G. Lee, J. S. Lee, 2009, Simple fabrication method of hierarchical nano-pillars using aluminum anodizing processes, Curr. Appl. Phys., pp. 81-85.   과학기술학회마을   DOI
5 J. G. Oh, J. S. Kim, J. J. Kang, J. D. Kim, K. H. Yoon, C. J. Hwang, 2010, A Study on the Fabrication of Nano-Pattern Mold Using Anodic Aluminum Oxide Membrane, Trans. Mater. Process., Vol. 19, pp. 73-78.   과학기술학회마을   DOI
6 S. Y. Chou, P. R. Krauss, P. J. Renstrom, 1996, Imprint Lithography, J. Vac. Technol. B, pp, 4129- 4133.