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http://dx.doi.org/10.5228/KSTP.2011.20.1.17

A Study on the Micro Pattern Fabrication of Lab-on-a-chip Mold Master using Micro EDM  

Shin, B.C. (인하대학교 기계공학과)
Kim, K.B. (인하대학교 기계공학과)
Cho, M.W. (인하대학교 기계공학부)
Kim, B.H. (숭실대학교 기계공학부)
Jung, W.C. (한국생산기술연구원 정밀금형팀)
Heo, Y.M. (한국생산기술연구원 정밀금형팀)
Publication Information
Transactions of Materials Processing / v.20, no.1, 2011 , pp. 17-22 More about this Journal
Abstract
Recently, analyzing system is studying for applying to biomedical engineering field, actively. Micro fluidics control system has been manufactured using LIGA (Lithographie Galvanoformung und Abformung), Etching, Lithography and Laser etc. However, it is difficult that above-mentioned methods are applied to fabrication of precision mold master efficiently because of long processing time and rising cost of equipments. Therefore, in this study, micro EDM and micro WEDG system were developed to analyze machining characteristics with tool wear, surface roughness and process time. Then, optimal machining conditions could be obtained from the results of analysis. As the results, mold master of staggered herringbone mixer which has a high mixing efficiency, one of passive mixer of Lab-on-a-chip, could be fabricated from micro pattern(< 50um) using micro EDM successfully.
Keywords
Micro Molding Method; Lab-on-a-chip; Wire Electro Discharge Machining; Electro Discharge Machining;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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1 M. J. Madou, 2002, Fundamentals of Microfabrication, Seconded., CRC Rress, New York.
2 J. Chae, S. S. Park, T. Freiheit, 2006, Investigation of micro-cutting operations, Int. J. Machine Tool & Manufacture, Vol. 46, pp. 313-332.   DOI
3 Y. S. Lee, B. H. Kim, 2005, Fabrication of 3-D Micro Structure and Micro Tool Using MEDM, Trans. Mater. Process., VOL. 14, NO. 3, pp. 251- 256.   과학기술학회마을   DOI
4 Stroock, A. D, Dertinger S. K. W, Ajdari A, Mezic I, Stone, H. A. and Whiteside, G, M, 2002, Chaotic Mixer for Microchannels, Sci., Vol. 295, p. 64.   DOI
5 T. Masuzawa., M. Fujino and K. Kobayashi., 1985, Wire Elector-Dischage Grinding for Micro- Machining, Annals of the CIRP, Vol. 34, No.1, pp. 431-434.   DOI
6 B. H Kim, C. N. Chu, D. K. Chung, H. S. Shin, 2007, Micro Mold Machining Using EDM/ECM, Trans. Mater. Process., pp. 75-78.   과학기술학회마을
7 R. Tang, B. R. Lu, J. Wan, S. Q. Xie, Y. Chen, E, Huq, X. P. Qu, R. Liu, 2009, Fabrication of micro/nano fluidic channels by nanoimprint lithography and bonding using SU-8, Microelectronic, Vol. 86, pp.1379-1381   DOI
8 L. Alting, F. Kimura, H. N. Hansen, G. Bissacco, 2003, Micro Engineering, Annals of the CIRP, Vol. 52, pp. 635-657.   DOI
9 R. E. Octerbroek and A. Van den Gerg, 2004, Labon- a-chip : Miniaturized system for (bio)-chemical analysis and synthesis, Clin. Chim. Acta, Vol. 343, p. 245.   DOI
10 O. Geschke, H. Klank, P. Telleman, 2004, Microsystem engineering of Lab-on-a-chip devices, 2nd ed.