1 |
T. Kimerling, W. Liu, B. Kim, D. Yao, 2006, Rapid hot embossing of polymer microfeatures, Microsyst Technol, Vol. 12, pp. 730-735
DOI
|
2 |
D. Yao. B. Kim, 2003, Developing rapid heating and cooling systems using pyrolytic graphite, Applied Thermal Engineering, Vol. 23, pp. 341-352
DOI
ScienceOn
|
3 |
V. Rudnev, D. Loveless, R. Cook, M. Black, 2003, Handbook of Induction Heating, Marcel Dekker, New York, pp. 99-183
|
4 |
W. Liu, T. Kimerling, D. Yao, B. Kim, 2004, Rapid thermal response (RTR) hot embossing of microstructures, ANTEC, pp.933-935
|
5 |
J. H. Chang, S. Y. Yang, 2005, Development of fluid-based heating and pressing systems for micro hot embossing, Microsystem Technologies, Vol. 11, pp. 396-403
DOI
|
6 |
H. Becker, U. Heim, 2000, Hot embossing as a method for the fabrication polymer high aspect ratio structures, Sensors and Actuators, 83, pp. 130-135
DOI
ScienceOn
|
7 |
S. Y. Chou, P. R. Krauss, P. J. Renstrom, 1996, Imprint Lithography, J. Vac. Technol. B, Vol. 14, No. 6, pp. 4129-4133
DOI
ScienceOn
|
8 |
R. W. Jaszewski, H. Schift, J. Gobrecht, P. Smith, 1998, Hot embossing in polymers as a direct way to pattern resist, Microelectronic Engineering, 41/42, pp. 575-578
DOI
ScienceOn
|