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http://dx.doi.org/10.5228/KSPP.2006.15.1.034

Modeling and Replication of Microlens Arrays Fabricated by a Modified LIGA Process  

Kim D. S. (포항공과대학교 기계공학과)
Lee H. S. (포항공과대학교 기계공학과)
Lee B. K. (포항공과대학교 기계공학과)
Yang S. S. (포항공과대학교 기계공학과)
Lee S. S. (한국과학기술원 기계공학과)
Kwon T. H. (포항공과대학교 기계공학과)
Publication Information
Transactions of Materials Processing / v.15, no.1, 2006 , pp. 34-41 More about this Journal
Abstract
Microlens arrays were fabricated by a modified LIGA process composed of the exposure of a PMMA (Polymethylmethacrylate) sheet to deep x-rays and subsequent thermal treatment. A successful modeling and analyses for microlens formation were presented according to the experimental procedure. A nickel mold insert was fabricated by the nickel electroforming process on the PMMA microlens arrays fabricated by the modified LIGA process. For the replication of microlens arrays having various diameters with different foci on the same substrate, both hot embossing and microinjection molding processes have been successfully utilized with the fabricated mold insert. Replicated microlenses showed very good surface roughness with the order of 1 nm. The focal lengths of the injection molded microlenses were successfully estimated theoretically and also measured experimentally.
Keywords
Microlens Array; Modified LIGA Process; Glass Transition Temperature; Free Volume Theory; Mold Insert; Hot Embossing; Microinjection Molding;
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