Maskless Fabrication of the Silicon Stamper for PDMS Nano/Micro Channel
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윤성원
(부산대학교 대학원 정밀기계공학과)
강충길 (부산대학교 기계공학부) |
1 |
Atomic force microscope tip-induced local oxidation of silicon: kinetics, mechanism, and nanofabrication
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2 |
AFM fabrication and characterization of InAs/AIGa Sb nanostructures
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DOI ScienceOn |
3 |
Nanoscale tribophysics and tribomechanics
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DOI ScienceOn |
4 |
Fabrication of nanostructures using an atomic force microscopebased lithography
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DOI ScienceOn |
5 |
Proximal probe-based fabrication of nanometer-scale devices
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6 |
New Maskless micro-fabrication technique of singlecrystal silicon using the combination of nanometerscale machining and wet Etching
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7 |
Fabrication of silicon utilizing mechanochemical local oxidation by diamond tip sliding
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DOI ScienceOn |
8 |
Study on namo-machining process using mechanism of a friction force microscope
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DOI ScienceOn |
9 |
Micro-fabrication technique of single crystal silicon by using combination of nanoscale machining and alkaline etching
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10 |
Increase and decrease of etching rate of silicon due to diamond tip sliding by changing scanning density
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DOI ScienceOn |
11 |
Nanoprobe 응용기술 동향
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12 |
Micro/nano-tribological characteristics of self-assembled monolayer and its application in nano-structure fabrication
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DOI ScienceOn |
13 |
Nanometer-scale lithography on H-passivated Si(100) by atomic force microscope in air
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14 |
Crystal orientaion dependence of machining damage - A Stress Model
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DOI |
15 |
Ductile-regime Turning Mechanism of Single-crystal Silicon
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16 |
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17 |
Maskless pattern fabrication on Si(100) surface by using nanoindenter with KOH wet etching
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DOI ScienceOn |
18 |
Nanoscratching of silver(100) with a diamond tip
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DOI ScienceOn |
19 |
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20 |
Trend of soft lithography technology
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