Microlens Micro V-groove Fabrication by the Modified LIGA Process |
이정아
(한국과학기술원 기계공학과)
이승섭 (한국과학기술원 기계공학) 전병희 (인덕대학 컴퓨터응용기계계열) |
1 | M. Katayama, 1999, "Thin Solid Films", P. 140,341. |
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DOI ScienceOn |
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Microlens Fabrication Method by the Modified LIGA Process
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과학기술학회마을 |
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Fabrication and Characterization on Microlenses Realized by a Modified LIGA process
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DOI ScienceOn |
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